Claims
- 1. A chemical mechanical polishing apparatus, comprising:
a rotatable platen; a feed roller secured to the platen; a take-up roller secured to the platen; a generally linear polishing sheet extending between the feed roller and the take-up roller, the polishing sheet having an exposed portion extending over a top surface of the platen for polishing a substrate and having a width greater than a diameter of the substrate; a drive mechanism to advance the polishing sheet in a linear direction across the top surface of the platen; and a chucking mechanism to intermittently secure the exposed portion of the polishing sheet to the platen.
- 2. The apparatus of claim 1, wherein the drive mechanism is configured to incrementally advance the polishing sheet.
- 3. The apparatus of claim 2, wherein the drive mechanism is configured to incrementally advance the polishing sheet between polishing operations.
- 4. The apparatus of claim 1, wherein the feed roller and take-up roller are rotatably connected to the platen.
- 5. The apparatus of claim 1, wherein the first and second rollers are positioned below the top surface of the platen.
- 6. The apparatus of claim 1, wherein the chucking mechanism includes a vacuum source and at least one passage extending through the platen to apply vacuum to an underside of the polishing sheet.
- 7. The apparatus of claim 6, further comprising a channel formed in a top surface of the platen, the channel connected to the passage.
- 8. The apparatus of claim 7, wherein the channel extends along the edges of the platen.
- 9. The apparatus of claim 1, wherein the top surface of the platen has a generally rectangular shape.
- 10. The apparatus of claim 1, further comprising a carrier head to hold a substrate.
- 11. An assembly, comprising:
at least one circular platen top; at least one rectangular platen top; a rotatable platen base, the platen base being adaptable to receive either of the circular platen top and the rectangular platen top.
- 12. The assembly of claim 11, further comprising a generally linear polishing sheet secured to the rectangular platen top.
- 13. The assembly of claim 12, wherein the linear polishing sheet extends between a feed roller and a take-up roller connected to the rectangular platen top.
- 14. The assembly of claim 12, further comprising a drive mechanism to advance the polishing sheet in a linear direction across a top surface of the rectangular platen top.
- 15. The assembly of claim 11, wherein the linear polishing sheet is a fixed-abrasive material.
- 16. The assembly of claim 11, further comprising a generally circular polishing sheet secured to the circular platen top.
- 17. The assembly of claim 16, wherein the circular polishing sheet is a non-fixed-abrasive material.
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] The present application is a continuation of U.S. patent application Ser. No. 09/302,570, filed Apr. 30, 1999, which is a continuation-in-part of U.S. patent application Ser. No. 09/244,456, filed Feb. 4, 1999.
Continuations (1)
|
Number |
Date |
Country |
Parent |
09302570 |
Apr 1999 |
US |
Child |
10174476 |
Jun 2002 |
US |
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
09244456 |
Feb 1999 |
US |
Child |
09302570 |
Apr 1999 |
US |