DUAL WIRED INTEGRATED CIRCUIT CHIPS

Abstract

A semiconductor device having wiring levels on opposite sides, a method of fabricating a semiconductor structure having contacts to devices and wiring levels on opposite sides, and a design structure of a semiconductor device having wiring levels on opposite sides. The method including fabricating a device on a silicon-on-insulator substrate with first contacts to the devices and wiring levels on a first side to the first contacts, removing a lower silicon layer to expose the buried oxide layer, forming second contacts to the devices through the buried oxide layer and forming wiring levels over the buried oxide layer to the second contacts.

Description

FIELD OF THE INVENTION

The present invention relates to the field of integrated circuits; more specifically, it relates to dual wired integrated circuit chips methods of fabricating dual wired integrated circuit chips and design structures for dual wired integrated circuit chips.

BACKGROUND OF THE INVENTION

As the density of integrated circuits increases the number of circuits increase. The increased circuit density results in smaller chip while the increased circuit count results in increased contact pads counts for connecting the integrated circuit to the next level of packaging. Therefore, there is an ongoing need for greater wiring density and increased contact pad count for connection of integrated circuit chips to the next level of packaging.

SUMMARY OF THE INVENTION

An aspect of the present invention is a design structure embodied in a machine readable medium used in a design process, the design structure comprising: one or more devices in a silicon-on-insulator substrate, the substrate comprising a buried oxide layer between an upper silicon layer and a lower silicon layer and a pre-metal dielectric layer on a top surface of the upper silicon layer; a first set of wiring levels over the pre-metal dielectric layer, each wiring level of the first set of wiring levels comprising electrically conductive wires in a corresponding dielectric layer, a lowermost wiring level in physical contact with a top surface of the pre-metal dielectric layer; electrically conductive first contacts to the devices, one or more of the first contacts extending from the top surface of the pre-metal dielectric layer to the devices, one or more wires of the lowermost wiring level of first set of wiring levels in electrical contact with the first contacts; electrically conductive second contacts to the devices, one or more of the second contacts extending from the bottom surface of the buried oxide layer to the devices; and a second set of wiring levels over the buried oxide layer, each wiring level of the second set of wiring levels comprising electrically conductive wires in a corresponding dielectric layer, a lowermost wiring level of the second set of wiring levels in physical contact with a top surface of the buried oxide layer, one or more wires of the lowermost wiring level of the second set of wiring levels in electrical contact with the second contacts.

BRIEF DESCRIPTION OF DRAWINGS

The features of the invention are set forth in the appended claims. The invention itself, however, will be best understood by reference to the following detailed description of an illustrative embodiment when read in conjunction with the accompanying drawings, wherein:

FIGS. 1A through 1E are cross-sectional drawings illustrating fabrication of an integrated circuit chip according to a first embodiment of the present invention;

FIGS. 2A and 2B are cross-sectional drawings illustrating fabrication of an integrated circuit chip according to a second embodiment of the present invention;

FIGS. 3A and 3B are cross-sectional drawings illustrating fabrication of an integrated circuit chip according to a third embodiment of the present invention;

FIGS. 4A through 4E are cross-sectional drawings illustrating fabrication of an integrated circuit chip according to a fourth embodiment of the present invention; and

FIG. 5 is a flow diagram of a design process used in semiconductor design, manufacturing, and/or test.

DETAILED DESCRIPTION OF THE INVENTION

It should be understood that the integrated circuit chips of the embodiments of the present invention are advantageously formed on integrated circuit substrates called wafers and that multiple integrated circuits may be fabricated simultaneously on the same wafer and may be separated by a dicing process after fabrication is complete.

FIGS. 1A through 1E are cross-sectional drawings illustrating fabrication of an integrated circuit chip according to a first embodiment of the present invention. In FIG. 1A, a wafer 100A is fabricated through pad level. Wafer 100A includes a silicon-on-insulator (SOI) substrate 105 which includes a silicon substrate 110A, a buried oxide layer (BOX) 115 formed on the silicon substrate and a single-crystal silicon layer 120 formed on the BOX. Formed in silicon layer 120 are trench isolation 125 and source/drains 135 and channel regions 140 of field effect transistors (FETs) 130. Also formed in silicon layer 120 are optional silicon regions 150. Formed over channel regions 140 are a gate dielectric (not shown) and, in one example, polysilicon gates 145 of FETs 130 as well as a dummy gate 146. In one example, silicon regions 150 are highly doped N or P-type (between about 1E19 atm/cm³ and about 1E21 atm/cm³) in order to reduce the resistance of the contact to less than about 0.5 micro-ohms. An electrically conductive metal silicide layer 152 is formed on exposed silicon surfaces of source/drains 135, gates 145 and diffusion contacts 150 prior to formation of a pre-metal dielectric (PMD) layer 155 to further reduce the “contact” resistance of a metal structures to silicon structures as described infra. Metal silicides are formed by deposition of a metal layer on a silicon surface, heating the silicon surface high enough to cause the metal layer to react with the silicon, and then dissolving away any unreacted metal. Examples of metal silicides include, but are not limited to, platinum, titanium cobalt and nickel silicides.

Formed on top of silicon layer 120 is PMD layer 155. Formed in PMD layer 155 are contacts 160A and 160B. Contacts 160A and 160B are electrically conductive. Contacts 160A electrically contact silicide layer 152 on source/drains 135 and on silicon contact 150. Some of contacts 160A are dummy contacts extending to trench isolation 125. Contacts 160B contact silicide layer 152 on gates 145 and dummy gates 146. PMD layer 155 and contacts 160A and 160B may be considered a wiring level.

Contacts 160A and 160B may be fabricated independently in separate operations or simultaneously. When fabricated simultaneously, first and second type contacts may be formed by etching the respective trenches in situ using a single mask or fabricated using various combinations of photolithographic and hard masks and etches to define the trenches separately, followed by a single metal fill and a chemical mechanical polish (CMP) operation.

Formed on PMD layer 155 is a first inter-level dielectric layer (ILD) 165 including electrically conductive dual-damascene wires 170 in electrical contact with contacts 160. Formed on ILD 165 is a second ILD 180 including electrically conductive dual-damascene wires 180 in electrical contact with wires 170. Formed on ILD 175 is a third ILD 190 including electrically conductive dual-damascene I/O pads 190 in electrical contact with wires 180. Alternatively, wires 170, 180 and pads 190 may be single damascene wires or pads in combination with single damascene vias.

A damascene process is one in which wire trenches or via openings are formed in a dielectric layer, an electrical conductor of sufficient thickness to fill the trenches is deposited on a top surface of the dielectric, and a CMP process is performed to remove excess conductor and make the surface of the conductor co-planar with the surface of the dielectric layer to form damascene wires (or damascene vias). When only a trench and a wire (or a via opening and a via) is formed the process is called single-damascene.

A dual-damascene process is one in which via openings are formed through the entire thickness of a dielectric layer followed by formation of trenches part of the way through the dielectric layer in any given cross-sectional view. All via openings are intersected by integral wire trenches above and by a wire trench below, but not all trenches need intersect a via opening. An electrical conductor of sufficient thickness to fill the trenches and via opening is deposited on a top surface of the dielectric and a CMP process is performed to make the surface of the conductor in the trench co-planar with the surface the dielectric layer to form dual-damascene wires and dual-damascene wires having integral dual-damascene vias.

The etches used in single-damascene and dual damascene processes to form trenches may advantageously be reactive ion etches (RIEs).

In one example, PMD layer 155 comprises boro-phosphorus silicate glass (BPSG) or phosphorus -silicate glass (BSG). In one example, contacts 160A and 160B comprise a titanium/titanium nitride liner and a tungsten core. In one example, ILD 165, 175 and 185 comprise silicon dioxide or a layer of silicon dioxide over a layer of silicon nitride. In one example, wires 170 and 180 and I/O pads 190 comprise a tantalum/tantalum nitride liner and a copper core.

In one example, ILD layers 165, 175 and 185 independently comprise silicon dioxide (SiO₂), silicon nitride (Si₃N₄), silicon carbide (SiC), silicon oxy nitride (SiON), silicon oxy carbide (SiOC), organosilicate glass (SiCOH), plasma-enhanced silicon nitride (PSiN_x) or NBLok (SiC(N,H)).

In one example, ILD layers 165, 175 and 185 independently comprise a low K (dielectric constant) material, examples of which include but are not limited to hydrogen silsesquioxane polymer (HSQ), methyl silsesquioxane polymer (MSQ), SiLK™ (polyphenylene oligomer) manufactured by Dow Chemical, Midland, Tex., Black Diamond™ (methyl doped silica or SiO_x(CH₃)_y or SiC_xO_yH_y or SiOCH) manufactured by Applied Materials, Santa Clara, Calif., organosilicate glass (SiCOH), and porous SiCOH. In one example, a low K dielectric material has a relative permittivity of about 2.4 or less.

In FIG. 1B, a passivation layer 195 is formed on third ILD 185 and I/O pads 190 and a handle wafer 200 attached to passivation layer 195 using an adhesive (not shown) or by other methods known in the art.

In FIG. 1C, bulk substrate 110 (see FIG. 1B) is removed to expose BOX 115. In one example, bulk substrate 110 is removed by a grinding operation to substantially thin of the bulk substrate operation followed by (1) a chemical etch in a strong base such as aqueous potassium hydroxide or (2) a chemical etch in a mixture of hydrofluoric, nitric and acetic acids or (3) any chemical etch which is selective to etch silicon over silicon dioxide to remove the remaining bulk substrate.

In FIG. 1D, electrically conductive first backside contacts 205 are formed through BOX 115 and silicon layer 120. Contacts 205 extend from the top surface of BOX 115 to silicide layer 152 on source/drains 135 and silicon contact 150. In one example, contacts 205 are formed by a single damascene process. In one example, contacts 205 comprise a titanium/titanium nitride liner and a tungsten core.

Electrically conductive second backside contacts 210 are formed through BOX 115 and trench isolation 125. Contacts 210 extend from the top surface of BOX 115 to silicide layer 152 on dummy gate 146 and to selected contacts 160A. In the case of dummy gate 146, contact 210 extends through the gate dielectric layer (not shown) as well.

Contacts 205 and 210 may be fabricated independently in separate operations or simultaneously. When fabricated simultaneously, first and second type contacts may be formed by etching the respective trenches in situ using a single mask or fabricated using various combinations of photolithographic and hard masks and etches to define the trenches separately, followed by a single metal fill and CMP operation.

In FIG. 1E, formed on BOX 115 is first inter-level dielectric layer (ILD) 165A including electrically conductive dual-damascene wires 170A in electrical contact with contacts 160A. Formed on ILD 165A is second ILD 180A including electrically conductive dual-damascene wires 180A in electrical contact with wires 170A. Formed on ILD 175A is third ILD 190A including electrically conductive dual-damascene I/O pads 190A in electrical contact with wires 180A. Alternatively, wires 170A, 180A and pads 190A of may be single damascene wires in combination with single damascene vias. A passivation layer 195A is formed on third ILD 185A and I/O pads 190A and handle wafer 200 is removed. This completes fabrication of wafer 100A which know can be externally wired (via pads 190 and 190A) on two opposite sides.

FIGS. 2A and 2B are cross-sectional drawings illustrating fabrication of an integrated circuit chip according to a second embodiment of the present invention. The second embodiment of the present invention differs from the first embodiment of the present invention by contact 210 of FIGS. 1D and 1E being replaced by contacts 205 in a wafer 100B. Processing as illustrated in FIGS. 1A through 1C and described supra in are performed and then FIG. 2A replaces FIG. 1D and FIG. 2B replaces FIG. 1E.

In FIGS. 2A and 2B a contact 205 is in electrical and physical contact with the polysilicon of dummy gate 146. In one example, dummy gate 146 is advantageously highly doped N or P-type (between about 1E19 atm/cm³ and about 1E21 atm/cm³) in order to reduce the resistance of the contact to less than about 0.5 micro-ohms. Thus all backside contacts are etched to the same depth.

FIGS. 3A and 3B are cross-sectional drawings illustrating fabrication of an integrated circuit chip according to a second embodiment of the present invention. The third embodiment of the present invention differs from the first embodiment of the present invention by utilization of silicide-to-silicide contacts in a wafer 100C. Processing as illustrated in FIGS. 1A through 1C and described supra in are performed and then FIG. 3A replaces FIG. 1D and FIG. 3B replaces FIG. 1E.

In FIGS. 3A and 3B, an electrically conductive metal silicide layer 153 is formed from the backside of wafer 110C in selected source/drains 135 by forming contact openings in BOX layer 115, depositing a metal layer, annealing to form a metal silicide and removing the excess metal. Then contact metal (i.e. titanium/titanium nitride liner and a tungsten core) is used to fill the contact openings. Silicide layer 153 is in physical and electrical contact with silicide layer 152 on selected source/drains 135 and a contact 215 is in physical and electrical contact with silicide layer 153. Also an electrically conductive metal silicide layer 154 is formed in the polysilicon of dummy gate 146 after a contact openings is formed through BOX layer 115, PMD layer 125 and the gate dielectric layer (not shown) and a contact 205 is in physical and electrical contact with silicide layer 154. Again, examples of metal silicides include, but are not limited to, platinum, titanium cobalt and nickel silicides.

FIGS. 4A through 4E are cross-sectional drawings illustrating fabrication of an integrated circuit chip according to a third embodiment of the present invention. The third embodiment of the present invention differs from the first embodiment of the present invention with fully silicided source/drains, gates and silicon contacts replacing the silicide layer of the first embodiment.

FIG. 4A is the same as FIG. 1A except a wafer 100B differs from wafer 100D (see FIG. 1A) in that source drains 135 (see FIG. 1A) are replaced with fully silicided source/drains 136, gates 145 (see FIG. 1A) are replaced with fully silicided gates 148, dummy gates 146 (see FIG. 1A) are replaced with fully silicided dummy gates 149 and silicon contact 150 (see FIG. 1A) is replaced with fully silicided contact 156. A fully silicided source drain is one in which the silicide layer extends from a top surface of the source drain to BOX 115. Note, that the silicide does not extend the fully silicided gates. A fully silicided gate is one in which the silicide layer extends from a top surface of the gate to the gate dielectric layer. A fully silicided silicon contact is one in which the silicide layer extends from a top surface of the silicon contact to BOX 115.

Fully silicided source/drains, gates and silicon contacts are formed by deposition of a thick metal layer on a silicon surface, heating the silicon surface high enough to cause the metal layer to react with the silicon, and then dissolving away any unreacted metal. The thickness of the metal layer is great enough to supply sufficient metal, by thermal diffusion through the silicon, to react with silicon atoms throughout the source/drain, gate or silicon contact. Again, examples of metal silicides include, but are not limited to, platinum, titanium cobalt and nickel silicides.

FIGS. 4B and 4C are essentially the same as FIGS. 1B and 1C respectively except for the differences described supra.

FIG. 4D is the same as FIG. 1D except for the differences described supra and the replacement of contacts 205 and 210 of FIG. 1D by respective contacts 215 and 220 of FIG. 4D. In FIG. 4D, electrically conductive backside contacts 215 are formed through BOX 115. Contacts 215 extend from the top surface of BOX 115 to the bottoms of fully silicided source/drains 136 and silicon contact 156. In one example, contacts 215 are formed by a single damascene process. In one example, contacts 215 comprise a titanium/titanium nitride liner and a tungsten core.

Electrically conductive second backside contacts 220 are formed through BOX 115 and trench isolation 125. Contacts 220 extend from the top surface of BOX 115 to the bottom surface of fully silicided dummy gate 146 and to selected contacts 160A. In the case of dummy gate 146, contact 220 extends through the gate dielectric layer (not shown) as well. Thus, contacts 215 and 220 do not have to etched as deeply or through silicon as contacts 205 and 210 of FIG. 1D.

First and second contacts 215 and 220 may be fabricated independently in separate operations or simultaneously. When fabricated simultaneously, first and second type contacts may be formed by etching the respective trenches in situ using a single mask or fabricated using various combinations of photolithographic and hard masks and etches to define the trenches separately, followed by a single metal fill and CMP operation.

FIG. 4E is essentially the same as FIG. 1E except for the differences described supra.

While each of wafers 100A, 100B, 110C and 110D has been illustrated with a single contact level, two wiring levels and a pad level, more or less contact and wiring levels may be fabricated and wafers 100A and 110B may be fabricated with different numbers of contact and/or wiring levels. Also, handle wafer 200A may be detached from wafers 100A, 100B, 110C and 110D before or after dicing of wafers 100A, 100B, 110C and 110D into individual integrated circuits.

FIG. 5 is a flow diagram of a design process used in semiconductor design, manufacturing, and/or test. In FIG. 5, a design flow 300 may vary depending on the type of IC being designed. For example, a design flow 300 for building an application specific IC (ASIC) may differ from a design flow 300 for designing a standard component. Design structure 320 is preferably an input to a design process 310 and may come from an IP provider, a core developer, or other design company or may be generated by the operator of the design flow, or from other sources. Design structure 320 comprises the integrated chips of wafers 100A, 100B, 100C or 100D in the form of schematics or HDL, a hardware-description language (e.g., Verilog, VHDL, C, etc.). Design structure 320 may be contained on one or more machine readable medium. For example, design structure 320 may be a text file or a graphical representation of the integrated chips of wafers 100A, 100B, 100C or 100D. Design process 310 preferably synthesizes (or translates) the integrated chips of wafers 100A, 100B, 100C or 100D into a netlist 380, where netlist 380 is, for example, a list of wires, transistors, logic gates, control circuits, I/O, models, etc. that describes the connections to other elements and circuits in an integrated circuit design and recorded on at least one of machine readable medium. This may be an iterative process in which netlist 380 is re-synthesized one or more times depending on design specifications and parameters for the circuit.

Design process 310 may include using a variety of inputs; for example, inputs from library elements 330 which may house a set of commonly used elements, circuits, and devices, including models, layouts, and symbolic representations, for a given manufacturing technology (e.g., different technology nodes, 32 nm, 45 nm, 30 nm, etc.), design specifications 340, characterization data 350, verification data 360, design rules 370, and test data files 385 (which may include test patterns and other testing information). Design process 310 may further include, for example, standard circuit design processes such as timing analysis, verification, design rule checking, place and route operations, etc. One of ordinary skill in the art of integrated circuit design can appreciate the extent of possible electronic design automation tools and applications used in design process 310 without deviating from the scope and spirit of the invention. The design structure of the invention is not limited to any specific design flow.

Ultimately, design process 310 preferably translates the integrated chips of wafers 100A, 100B, 100C or 100D, along with the rest of the integrated circuit design (if applicable), into a final design structure 330 (e.g., information stored in a GDS storage medium). Final design structure 330 may comprise information such as, for example, test data files, design content files, manufacturing data, layout parameters, wires, levels of metal, vias, shapes, test data, data for routing through the manufacturing line, and any other data required by a semiconductor manufacturer to produce the integrated chips of wafers 100A, 100B, 100C or 100D. Final design structure 330 may then proceed to a stage 335 where, for example, final design structure 330: proceeds to tape-out, is released to manufacturing, is sent to another design house or is sent back to the customer.

Thus, the embodiments of the present invention provide for greater wiring density and increased contact pad count for connection of integrated circuit chips to the next level of packaging.

The description of the embodiments of the present invention is given above for the understanding of the present invention. It will be understood that the invention is not limited to the particular embodiments described herein, but is capable of various modifications, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, it is intended that the following claims cover all such modifications and changes as fall within the true spirit and scope of the invention.

Claims

1. A design structure embodied in a machine readable medium used in a design process, the design structure comprising: one or more devices in a silicon-on-insulator substrate, said substrate comprising a buried oxide layer between an upper silicon layer and a lower silicon layer and a pre-metal dielectric layer on a top surface of said upper silicon layer;a first set of wiring levels over said pre-metal dielectric layer, each wiring level of said first set of wiring levels comprising electrically conductive wires in a corresponding dielectric layer, a lowermost wiring level in physical contact with a top surface of said pre-metal dielectric layer;electrically conductive first contacts to said devices, one or more of said first contacts extending from said top surface of said pre-metal dielectric layer to said devices, one or more wires of said lowermost wiring level of first set of wiring levels in electrical contact with said first contacts;electrically conductive second contacts to said devices, one or more of said second contacts extending from said bottom surface of said buried oxide layer to said devices; anda second set of wiring levels over said buried oxide layer, each wiring level of said second set of wiring levels comprising electrically conductive wires in a corresponding dielectric layer, a lowermost wiring level of said second set of wiring levels in physical contact with a top surface of said buried oxide layer, one or more wires of said lowermost wiring level of said second set of wiring levels in electrical contact with said second contacts.

2. The design structure of claim 1, wherein said devices include field effect transistors comprising source/drains formed in said upper silicon layer and gate electrodes formed over said upper silicon layer and separated from said upper silicon layer by a gate dielectric layer.

3. The design structure of claim 3, wherein said each of one or more devices includes electrically conductive metal silicide layers on top surfaces of said source/drains and said gate electrodes.

4. The design structure of claim 3, wherein at least one of said first contacts extends from said top surface of said pre-metal dielectric layer to said metal silicide layer on a corresponding gate electrode.

5. The design structure of claim 3, wherein at least one of said first contacts extends from said top surface of said pre-metal dielectric layer to said metal silicide layer on a corresponding source/drain.

6. The design structure of claim 3, further including: one or more silicon contact regions in said upper silicon layer and said metal silicide layer on top surfaces of said one or more silicon contact regions; andwherein at least one of said first contacts extends from said top surface of said pre-metal dielectric layer to said metal silicide layer on a corresponding silicon contact region of said one or more silicon contact regions, andwherein at least one of said second contacts extends from said bottom surface of said oxide layer through said upper silicon layer to said metal silicide of said corresponding silicon contact region.

7. The design structure of claim 3, further including: a dielectric trench isolation in regions of said upper silicon layer, said trench isolation extending from said top surface of said upper silicon layer to said oxide layer; andwherein at least one of said first contacts extends from said top surface of said pre-metal dielectric layer to said trench isolation to physically and electrically contact a corresponding contact of said second contacts, said corresponding contact extending from said bottom surface of said oxide layer through said trench isolation.

8. The design structure of claim 3, further including: one or more dummy gate electrodes in said pre-metal dielectric layer, said metal silicide layer also formed on top surfaces of said one or more dummy gates; andwherein at least one of said first contacts extends from said top surface of said pre-metal dielectric layer to said metal silicide layer of a corresponding dummy gate electrode of said one or more dummy gate electrodes, andwherein at least one of said second contacts extends from said bottom surface of said oxide layer through said upper silicon layer and through said corresponding dummy gate electrode to said metal silicide layer on said corresponding dummy gate electrode.

9. The design structure of claim 3, further including: one or more dummy gate electrodes in said pre-metal dielectric layer;a metal silicide layer on top surfaces of said one or more dummy gates;wherein at least one of said first contacts extends from said top surface of said pre-metal dielectric layer to said metal silicide layer of a corresponding dummy gate electrode of said one or more dummy gate electrodes, andwherein at least one of said second contacts extends from said bottom surface of said buried oxide layer through a trench isolation formed in said upper silicon layer, through a gate dielectric layer formed under said gate electrode to said dummy gate electrode.

10. The design structure of claim 3, further including: a metal silicide region in at least one of said source/drains, said silicide region extending from said bottom surface of said at least one source/drain to said silicide layer on said top surface of said at least one source/drain region; andwherein at least on of said second contacts extends to and is in electrical contact with said metal silicide region of said at least one source/drain.

11. The design structure of claim 3, wherein at least one of said second contacts extends from said bottom surface of said oxide layer through said upper silicon layer to said metal silicide layer on a corresponding source/drain.

12. The design structure of claim 3, wherein said metal silicide layer comprises platinum silicide, titanium silicide, cobalt silicide or nickel silicide.

13. The design structure of claim 3, further including: electrically conductive metal silicide regions of a metal silicide in said source/drains and electrically conductive metal silicide regions of said metal silicide in said gate electrodes, said metal silicide regions of said source/drains extending from top surfaces of said source/drains to bottom surfaces of said source drains and said metal silicide regions of said gate electrodes extending from top surfaces of said gate electrodes to bottom surfaces of said gate electrodes.

14. The design structure of claim 13, wherein at least one of said first contacts extends from said top surface of said pre-metal dielectric layer to said metal silicide region of a corresponding gate electrode.

15. The structure of claim 13, wherein at least one of said first contacts extends from said top surface of said pre-metal dielectric layer to a corresponding metal silicide region of a corresponding source/drain.

16. The design structure of claim 13, further including: one or more silicon contact regions in said upper silicon layer and metal silicide regions of said metal silicide in said one or more silicon contact regions, said metal silicide regions of said one or more silicon contact regions extending from a top surface of said one or more silicon contract regions to bottom surfaces of said one or more silicon contact regions;wherein at least one of said first contacts extends from said top surface of said pre-metal dielectric layer to said metal silicide region of a corresponding silicon contact region of said one or more silicon contact regions; andwherein at least one of said second contacts extends from said bottom surface of said oxide layer to said metal silicide region of said corresponding silicon contact region.

17. The design structure of claim 13, further including: a dielectric trench isolation in regions of said upper silicon layer, said trench isolation extending from said top surface of said upper silicon layer to said oxide layer; andwherein at least one of said first contacts extends from said top surface of said pre-metal dielectric layer to said trench isolation to physically and electrically contact a corresponding contact of said second contacts, said corresponding contact extending from said bottom surface of said oxide layer through said trench isolation.

18. The design structure of claim 13, further including: one or more dummy gate electrodes in said pre-metal dielectric layer and metal silicide regions of said metal silicide in said one or more dummy gates, said metal silicide regions extending from top surfaces of said one or more dummy gates to bottom surfaces of said one or more dummy gates;wherein at least one of said first contacts extends from said top surface of said pre-metal dielectric layer to a metal silicide region of a corresponding dummy gate electrode of said one or more dummy gate electrodes; andwherein at least one of said second contacts extends from said bottom surface of said oxide layer to said metal silicide layer of said corresponding dummy gate electrode.

19. The design structure of claim 13, wherein at least one of said second contacts extends from said bottom surface of said oxide layer to said metal silicide region of a corresponding source/drain.

20. The design structure of claim 13, wherein said metal silicide comprises platinum silicide, titanium silicide, cobalt silicide or nickel silicide

21. The design structure of claim 13, wherein each said corresponding dielectric layer of said first and second sets of wiring levels comprises a material independently selected from the group consisting of silicon dioxide, silicon nitride, silicon carbide, silicon oxy nitride, silicon oxy carbide, organosilicate glass, plasma-enhanced silicon nitride, constant having a dielectric) material, hydrogen silsesquioxane polymer, methyl silsesquioxane polymer polyphenylene oligomer, methyl doped silica, organosilicate glass, porous organosilicate glass and a dielectric having relative permittivity of about 2.4 or less.

22. The design structure of claim 21, wherein said substrate consists of an integrated circuit chip.

23. The design structure of claim 1, wherein the design structure resides on a GDS storage medium.

24. The design structure of claim 1, wherein the design structure includes at least one of test data files, characterization data, verification data, or design specifications.