Claims
- 1. A failure analysis equipment for an electronic circuit, comprising:
- (a) a voltage source for supplying a voltage to a wiring of a circuit to be analyzed;
- (b) an energy beam irradiator for irradiating an energy beam to said wiring to vary an electrical resistance of said wiring;
- (c) a current detector for detecting a difference between a first current running when said energy beam is irradiated to said wiring and a second current running when said energy beam is not irradiated to said wiring, and for producing first data indicative of said difference;
- (d) a data holder for storing second data indicative of said wiring; and
- (e) a controller for responding to said first and second data, and calculating a third current actually running through said wiring to determine whether said wiring is in failure.
- 2. The failure analysis equipment as claimed in claim 1, wherein said controller further responds to third data indicative of said energy beam to calculate said third current.
- 3. The failure analysis equipment as claimed in claim 1, further comprising a temperature controller for controlling a temperature of a portion of said circuit.
- 4. The failure analysis equipment as recited in claim 1, wherein said energy beam comprises one of a laser beam, an infrared ray beam, an electron beam, a corpuscular beam, and an ion beam.
- 5. The failure analysis equipment as recited in claim 1, further comprising:
- (j) a current-luminance convertor for converting currents running through sections of said wiring to which one of said energy beam is irradiated into luminance in accordance with a magnitude of said current; and
- (k) a display for displaying said luminance thereon.
- 6. The failure analysis equipment as claimed in claim 1, wherein said controller further responds to third data indicative of said energy beam to calculate said third current, and
- wherein said failure analysis equipment further comprises a temperature controller for controlling a temperature of a portion of said circuit.
Priority Claims (2)
Number |
Date |
Country |
Kind |
6-226314 |
Sep 1994 |
JPX |
|
7-38253 |
Feb 1995 |
JPX |
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CROSS REFERENCE TO RELATED APPLICATION
This application is a divisional of application Ser. No. 08/524,433 filed Sep. 6, 1995, now U.S. Pat. No. 5,659,244.
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Divisions (1)
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Number |
Date |
Country |
Parent |
524433 |
Sep 1995 |
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