Number | Name | Date | Kind |
---|---|---|---|
3282243 | Phillips, Jr. et al. | Nov 1966 | |
4123316 | Tsuchimoto | Oct 1978 | |
4151034 | Yamamoto et al. | Apr 1979 | |
4160690 | Shibagaki et al. | Jul 1979 | |
4292342 | Sarma et al. | Sep 1981 |
Number | Date | Country |
---|---|---|
2951453 | Jul 1980 | DEX |
2125075 | Jan 1972 | FRX |
2397067 | Jan 1979 | FRX |
Entry |
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Sarma, "Plasma Deposited Polycrystalline Silicon Films," Solid State Technology, vol. 4, Apr. 1980, pp. 143-146. |