The present invention relates to an integrated circuit (IC) device, and more particularly, to an integrated circuit device with thermal dissipating package.
Usually, the heat generation of a semiconductor chip would increase greatly with the computing speed thereof. If the heat generated by the chip cannot be dissipated effectively, it would cause the chip to overheat and then work in the underclocking state or even break down. Due to the popularity of electric vehicles, the demand for the fast charging and discharging of power batteries and the demand for heat dissipation of in-vehicle insulated gate bipolar transistor (IGBT) power chips have increased dramatically, and the chips with high computing power are also required for self-driving functions. The central processing unit (CPU) power of data center servers for cloud computing has continuously increased. Under the aforementioned conditions, the power of a single packaged integrated circuit (IC) has reached 500 W or 700 W, and there will be requirements for more than 1000 W of an integrated circuit.
It is known that the heat dissipation technology for semiconductor chips usually uses an external heat dissipator attached to the package case of the chip, so as to transfer the heat generated by the chip to the heat dissipator and then dissipate the heat by air cooling or water cooling. In the prior art, the packaged IC device and the heat dissipator are two separate components and many interface thermal resistances exist between the two components. Once the power of the IC is high, a slight increase of interface thermal resistance would cause a large temperature rise in the chip.
Therefore, in order to solve the problems of the prior art, it is necessary to improve the chip package and reduce the excess interface and thermal resistance between the IC device and heat dissipator to break the power limit of a high computing capacity IC.
Therefore, the present invention provides an integrated circuit device with thermal dissipating package to solve the problems of the prior art.
The present invention provides an integrated circuit device with thermal dissipating package, which comprises a circuit board, a chip and a three-dimensional vapor chamber device. The circuit board has an upper board surface. The chip is configured on the upper board surface of the circuit board. The chip has a chip surface. The three-dimensional vapor chamber device comprises an upper cover and a bottom cover. The upper cover comprises a base plate and a tube. The base plate has an opening hole, an upper outer surface and an upper internal surface. The tube has a tubular cavity and a tubular internal surface. The tube is configured on the upper outer surface and located above the opening hole and extended outwardly from the upper outer surface. The bottom cover corresponding to the upper cover has a bottom groove. The bottom groove has a bottom groove surface. An airtight cavity is formed from the tubular cavity when the bottom cover is sealed to the upper cover. The bottom groove is configured to accommodate the chip. The chip surface of the chip is contacted with the bottom groove surface of the bottom groove.
Wherein, the integrated circuit device with thermal dissipating package of the present invention further comprises a semi-open case. The semi-open case has an inlet and an outlet. The semi-open case is coupled to the bottom cover of the three-dimensional vapor chamber device to form a heat-exchanging chamber and the upper cover is configured in the heat-exchanging chamber. The inlet and the outlet are connected to the heat-exchanging chamber. The bottom groove is configured to accommodate the circuit board with the chip. The circuit board has a plurality of locking holes, and the circuit board with the chip is locked to the bottom groove surface of the bottom groove by a plurality of screws.
Wherein, a cold liquid fluid is configured in the heat-exchanging chamber, the inlet and the outlet, and the cold liquid fluid is selected from the group consisting of water, acetone, ammonia, methanol, tetrachloroethane, and hydrofluorocarbon chemical refrigerants.
Wherein, the bottom cover has a plurality of grooves, and a groove rib is formed between the grooves, the groove rib has a rib surface, and each of the grooves has a groove internal surface and a groove cavity.
Wherein, the integrated circuit device with thermal dissipating package of the present invention further comprises a porous wick structure, the bottom cover has a bottom internal surface, the porous wick structure is continuously disposed on the upper internal surface, the bottom internal surface, the tubular internal surface, the rib surface of the groove rib and the groove internal surfaces.
Wherein, the three-dimensional vapor chamber device further comprises a plurality of heat dissipation fins, the tube further comprises a condenser area, and the heat dissipation fins are coupled to the condenser area of the tube.
Wherein, the porous wick structure is disposed by pre-laying a copper-containing powder on the upper internal surface, the bottom internal surface, the tubular internal surface, the rib surface and the groove internal surfaces, and after the heat dissipation fins are disposed on the condenser area of the tube, the porous wick structure is continuously disposed on the upper internal surface, the bottom internal surface, the tubular internal surface, the rib surface and the groove internal surfaces and the heat dissipation fins are coupled to the condenser area simultaneously by the same sintering process.
Wherein, the tube further has a top end having a sealed structure, the base plate further has a base cavity, and the airtight cavity is formed from the base cavity and the tubular cavity when the bottom cover is sealed to the upper cover.
Wherein, the sealed structure is formed by pre-setting a liquid injection port at the top end, and injecting the working fluid into the airtight cavity through the liquid injection port, and then sealing the liquid injection port.
The present invention provides another integrated circuit device with thermal dissipating package, which comprises a circuit board, a plurality of chips, a plurality of three-dimensional vapor chamber devices and a semi-open case. The circuit board has an upper board surface. The plurality of chips is configured on the upper board surface of the circuit board, and each of the chips has a chip surface. The plurality of three-dimensional vapor chamber devices comprises a plurality of upper covers and a bottom cover. Each of upper covers comprises a base plate and a tube. The base plate has an opening hole, an upper outer surface and an upper internal surface. The tube has a tubular cavity and a tubular internal surface. The tube is configured on the upper outer surface and located above the opening hole and extended outwardly from the upper outer surface. The bottom cover corresponding to the upper covers has a bottom groove. The bottom groove has a bottom groove surface. An airtight cavity is formed from the corresponding tubular cavity when the bottom cover is sealed to the upper covers. The bottom groove is configured to accommodate the chips. Each of the chip surfaces is contacted with the bottom groove surface of the bottom groove. In practice, the tube can be directly sealed to the base plate, and the airtight cavity can be formed only by the tube cavity.
In summary, the present invention provides an integrated circuit device with thermal dissipating package, integrating the circuit board with the chip and the heat dissipator in an integrated circuit device. The integrated circuit device with thermal dissipating package in the present invention can reduce the thermal resistances between the chip and the heat dissipator in the integrated circuit packaging of the prior art by contacting the chip surface with the bottom groove surface of the three-dimensional vapor chamber device. Moreover, by directly contacting with the cold liquid fluid in the heat-exchanging chamber through the condenser area of the three-dimensional vapor chamber device with two-phase flow circulation for heat exchange to enhance the heat dissipation efficiency of the integrated circuit device with thermal dissipating package of the present invention. In addition, the screws in the integrated circuit device with thermal dissipating package of the present invention can fix the circuit board with the chip to the lower case surface. The screws can increase the contact pressure between the chip and the bottom groove surface of the bottom cover in the three-dimensional vapor chamber device, so as to reduce the contact thermal resistance and improve the heat dissipation efficiency of the integrated circuit device. Furthermore, the plurality of grooves of the bottom cover in the integrated circuit device with thermal dissipating package of the present invention can reduce the thermal resistance of heat conduction from the heat source to the porous wick structure disposed on the bottom internal surface of the bottom cover by reducing the heat conduction distance between the porous wick structure disposed on the bottom cover and the heat source, while taking into account the structural strength of the bottom cover, so as to enhance the heat conduction efficiency. Furthermore, the integrated circuit device with thermal dissipating package of the present invention can increase the contact area between the condenser area and the cold liquid fluid through the heat dissipation fins disposed on the tube to enhance the heat dissipation efficiency; and increase the heat exchange efficiency with the cold liquid fluid in the heat-exchanging chamber through the flow disturbance structure disposed on the heat dissipation fins generates mixed flow in the heat-exchanging chamber, so as to increase the heat dissipation efficiency. In the integrated circuit device with thermal dissipating package of the present invention, the plurality of upper covers of the three-dimensional vapor chamber device can be coupled with the same bottom cover to be contacted with the plurality of heat sources or the same heat source, and dissipate heat in the same heat exchanger, so as to enhance the whole heat dissipation efficiency of the present invention. Compared to the prior art, the integrated circuit device with thermal dissipating package of the present invention integrates the circuit board with the chip and the heat dissipator in an integrated circuit device to reduce the redundant interface and thermal resistance between the integrated circuit device and the heat dissipator, so as to enhance the whole heat dissipation efficiency of the integrated circuit device with thermal dissipating package.
For the sake of the advantages, spirits and features of the present invention can be understood more easily and clearly, the detailed descriptions and discussions will be made later by way of the embodiments and with reference of the diagrams. It is worth noting that these embodiments are merely representative embodiments of the present invention, wherein the specific methods, devices, conditions, materials and the like are not limited to the embodiments of the present invention or corresponding embodiments. Moreover, the devices in the figures are only used to express their corresponding positions and are not drawing according to their actual proportion.
In the description of the presentation, the description with reference to the terms “an embodiment”, “another embodiment” or “part of an embodiment” means that a particular feature, structure, material or characteristic described in connection with the embodiment including in at least one embodiment of the present invention. In the presentation, the schematic representations of the above terms do not necessarily refer to the same embodiment. Furthermore, the particular features, structures, materials or characteristics described may be combined in any suitable manner in one or more embodiments. Furthermore, the indefinite articles “a” and “an” preceding a device or element of the present invention are not limiting on the quantitative requirement (the number of occurrences) of the device or element. Thus, “a” should be read to include one or at least one, and a device or element in the singular also comprises the plural unless the number clearly refers to the singular.
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In addition, in the present embodiment, the bottom cover 32 of the three-dimensional vapor chamber device 3 corresponding to the upper cover 31 has a bottom groove 321. The bottom groove 321 has a bottom groove surface 3211. The bottom groove 321 is configured to accommodate the chip 2. The chip surface 21 of the chip 2 is contacted with the bottom groove surface 3211 of the bottom groove 321. Furthermore, the bottom groove 321 is configured to accommodate the circuit board 1 with the chip 2. The circuit board 1 has a plurality of locking holes 12, and the circuit board 1 with the chip 2 is locked to the bottom groove surface 3211 of the bottom groove 321 by a plurality of screws (not shown), so the circuit board 1 can be fixed to the bottom cover 32 by the corresponding plurality of screws. The screw locking by the screws can increase the contact pressure between the chip 2 and the bottom groove surface 3211 of the bottom groove 321 in the three-dimensional vapor chamber device 3, so as to reduce the contact thermal resistance and improve the heat dissipation efficiency of the integrated circuit device A with thermal dissipating package. In practice, when the circuit board 1 does not fit completely and tightly in the bottom groove 321 of the bottom cover 32, the gap between the circuit board 1 and the bottom groove 321 can be filled with thermal gel to make the circuit board 1 and the bottom groove 321 fit more tightly and reduce the heat conduction efficiency from the contact thermal resistance.
Furthermore, in the present embodiment, the bottom cover 32 of the three-dimensional vapor chamber device 3 has a plurality of grooves 322, and a groove rib 3220 is formed between the grooves 322. The groove rib 3220 has a rib surface 3221, and each of the grooves 322 has a groove internal surface 3222 and a groove cavity 3223. The airtight cavity 33 is formed from the base cavity 3111, the groove cavity 3223 and the tubular cavity 3121 when the bottom cover 32 is sealed to the upper cover 31. It is worth noting that in the present embodiment, the shape of the grooves 322 of the bottom cover 32 is square, but it is not limited in practice. The shape and number of the grooves 322 can be designed according to the requirements.
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In the present embodiment, a cold liquid fluid (not shown) is configured in the heat-exchanging chamber 43, the inlet 41 and the outlet 42 of the integrated circuit device A′ with thermal dissipating package. When the integrated circuit device A′ with thermal dissipating package is operating, the cold liquid fluid can flow from the inlet 41 to the heat-exchanging chamber 43 and then flow to the outlet 42 (as shown by the arrow in
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In the present embodiment, the plurality of grooves 322 of the bottom cover 32 in the three-dimensional vapor chamber device 3 can reduce the thermal resistance of heat conduction from the chip 2 to the bottom 32 by reducing the heat conduction distance between the porous wick structure 7 disposed on the bottom cover 32 and the chip 2. Since the three-dimensional vapor chamber device 3 has a complete and continuous porous wick structure 7, the liquid working fluid in the porous wick structure 7 of the condenser area 3124 of the tube 312 can smoothly and quickly return to the porous wick structure 7 of an evaporator area of the bottom cover 32 to make the two-phase flow circulation in the three-dimensional vapor chamber device 3 smooth and further enhance the heat dissipation efficiency.
Furthermore, as shown in
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The integrated circuit device with thermal dissipating package of the present can be in other forms in addition to the aforementioned forms. Please refer to
Furthermore, the integrated circuit device D with thermal dissipating package in the present embodiment can further comprise a semi-open case 4′″. The semi-open case 4′″ has an inlet 41′″ and an outlet 42′″. The semi-open case 4′″ is coupled to the bottom cover 32′″ of the three-dimensional vapor chamber device 3′″ to form a heat-exchanging chamber 43′″ and the upper cover 31′″ is configured in the heat-exchanging chamber 43′″. The inlet 41′″ and the outlet 42′″ are connected to the heat-exchanging chamber 43′″.
As shown in
When the integrated circuit device D with thermal dissipating package is operating, the cold liquid fluid can flow from the inlet 41′″ to the heat-exchanging chamber 43′″, carry the heat energy from the condenser area 3124′″ disposed on the different upper covers 31′″ through the different upper covers 31′″, and flow from the heat-exchanging chamber 43′″ to the outlet 42′″ (as shown by the arrow in
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In summary, the present invention provides an integrated circuit device with thermal dissipating package, integrating the circuit board with the chip and the heat dissipator in an integrated circuit device. The integrated circuit device with thermal dissipating package in the present invention can reduce the thermal resistances between the chip and the heat dissipator in the integrated circuit packaging of the prior art by contacting the chip surface with the bottom groove surface of the three-dimensional vapor chamber device. Moreover, by directly contacting with the cold liquid fluid in the heat-exchanging chamber through the condenser area of the three-dimensional vapor chamber device with two-phase flow circulation for heat exchange to enhance the heat dissipation efficiency of the integrated circuit device with thermal dissipating package of the present invention. In addition, the screws in the integrated circuit device with thermal dissipating package of the present invention can fix the circuit board with the chip to the lower case surface. The screws can increase the contact pressure between the chip and the bottom groove surface of the bottom cover in the three-dimensional vapor chamber device, so as to reduce the contact thermal resistance and improve the heat dissipation efficiency of the integrated circuit device. Furthermore, the plurality of grooves of the bottom cover in the integrated circuit device with thermal dissipating package of the present invention can reduce the thermal resistance of heat conduction from the heat source to the porous wick structure disposed on the bottom internal surface of the bottom cover by reducing the heat conduction distance between the porous wick structure disposed on the bottom cover and the heat source, while taking into account the structural strength of the bottom cover, so as to enhance the heat conduction efficiency. Furthermore, the integrated circuit device with thermal dissipating package of the present invention can increase the contact area between the condenser area and the cold liquid fluid through the heat dissipation fins disposed on the tube to enhance the heat dissipation efficiency; and increase the heat exchange efficiency with the cold liquid fluid in the heat-exchanging chamber through the flow disturbance structure disposed on the heat dissipation fins generates mixed flow in the heat-exchanging chamber, so as to increase the heat dissipation efficiency. In the integrated circuit device with thermal dissipating package of the present invention, the plurality of upper covers of the three-dimensional vapor chamber device can be coupled with the same bottom cover to be contacted with the plurality of heat sources or the same heat source, and dissipate heat in the same heat exchanger, so as to enhance the whole heat dissipation efficiency of the present invention. Compared to the prior art, the integrated circuit device with thermal dissipating package of the present invention integrates the circuit board with the chip and the heat dissipator in an integrated circuit device to reduce the redundant interface and thermal resistance between the integrated circuit device and the heat dissipator, so as to enhance the whole heat dissipation efficiency of the integrated circuit device with thermal dissipating package.
With the examples and explanations mentioned above, the features and spirits of the invention are hopefully well described. More importantly, the present invention is not limited to the embodiment described herein. Those skilled in the art will readily observe that numerous modifications and alterations of the device may be made while retaining the teachings of the invention. Accordingly, the above disclosure should be construed as limited only by the metes and bounds of the appended claims.
Number | Date | Country | Kind |
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202222972384.6 | Nov 2022 | CN | national |
202310131381.6 | Feb 2023 | CN | national |