INTEGRATED HYBRID HEAT SPREADER MANUFACTURING METHOD AND THEREOF

Abstract

A semiconductor package comprises a die mounted on a substrate by flip-chip solder balls; an integrated hybrid heat spreader including a thin flexible perforated foil and a supporter; a high temperature durable bonding material applied to the backside of the integrated hybrid heat spreader to bond the backside of the integrated hybrid heat spreader to the die; a heat sink fixed and attached to the heat sink supporter, wherein the backside of the heat sink is provided with vents and the backside of the heat sink, the integrated hybrid heat spreader and the exposed major portion of the die together define a cavity-like container portion; and a thermal interface material applied within the cavity-like container portion, wherein the heat generated from the die is conducted through the thermal interface material to the heat sink, and the vents in the heat sink can accommodate the expansion or shrinkage of the thermal interface material during thermal cycling. The thin flexible perforated foil is bonded onto the top of a silicon die by using the cold spray additive manufacturing method.

Description

BACKGROUND

1 Technical Field

The present disclosure relates to a semiconductor package for maximizing the heat dissipation of high-performance computing (HPC) and data center applications, and more particularly to an Integrated Hybrid Heat Dissipation System (IHHDS) which can provide the higher efficiency of computing capability and more reliable transient thermal management for ultra-high power density heterogeneous integration in a semiconductor package.

2. Description of the Related Art

Advanced semiconductor technology brings high performance computing but the faster core clock frequency and heterogeneous chips integration in limited dimension also increases higher power densities in computing chips and generates more heat in its package. Therefore, a thermal management system for those silicon chips with high-performance computing (HPC) application becomes the main focus and challenges for the modern processor architecture design. For example. Intel's Xe-HPC GPU, Ponte Vecchio, as shown in FIG. 8-1 is a hybrid heterogeneous integration of multiple high-performance chips and high bandwidth memory (HBM) with super high 600W thermal design power (TDP). There are many new challenges of thermal management in this “hot” silicon chips package, such as:

• • 1) Thermal cross-talks between neighboring silicon components;
  • 2) Height differences between heterogeneous components;
  • 3) Additive thermal resistance from stacked silicon dies;
  • 4) Thermal-induced deformations (such as warpage and stress) due to large package dimension and CTE mismatch of heterogeneous integration, as shown in FIGS. 8-1; and
  • 5) Thermal throttling due to hot spots of individual silicon dies.

Even with applying the water-cooling heat sink, typical thermal management systems (referring to FIG. 5) still cannot solve the above bottlenecks and challenges of high-performance computing (HPC) application. According to the description of the typical thermal management system of monolithic (single silicon die) CPU (as shown in FIG. 1) and simplified thermal dissipation model (as shown in FIG. 2), thermal interface material 1 (TIM1) obviously takes more important role and impact than thermal interface material 2 (TIM2) because TIM1 directly contacts the heat source (CPU die) and TIM1 dominates the heat transfer path, efficiency and reliability due to its material features and characteristics. Therefore, the material characteristic (thermal conductivity, k) of TIM1 and the contact area (A) between TIM1 and CPU die are the first pivotal factors to improve the heat transfer of overall thermal management system (referring to FIG. 6-3).

Accordingly, a semiconductor package is required for maximizing the heat dissipation for the high-performance computing (HPC) and data center applications, and providing higher efficiency of computing capability and more reliable transient thermal management for ultra-high power density heterogeneous integration in the semiconductor package.

SUMMARY

An object of the present disclosure is to provide an Integrated Hybrid Heat Dissipation System (IHHDS) that consists of novel materials, novel architecture, and novel manufacturing technology to maximize the heat dissipation of heterogeneous integration package with large package size, ultra-high thermal design power (TDP) and complicated hybrid 2D/3D chiplet packages. Moreover, IHHDS can provide the more reliable and efficient transient thermal management system for high-performance computing (HPC) applications.

According to one aspect of the present disclosure, the semiconductor package comprises a die mounted on a substrate by flip-chip solder balls; an Integrated Hybrid Heat Spreader including a thin IHHS flexible foil and a IHHS Supporter, wherein the thin flexible IHHS foil has a hollowed out central area and a curve-shaped thermal-induced stress absorbing mechanism on its lateral ends and hermetically bonded with the IHHS Supporter; a high temperature durable bonding material applied to the backside of the Integrated Hybrid Heat Spreader along the hollowed out central area to bond the backside of the Integrated Hybrid Heat Spreader to the peripheral edges of the die in such a manner that a major portion of the die is exposed out through the hollowed out central area of the Integrated Hybrid Heat Spreader; a Heat Sink fixed and attached to the Heat Sink Supporter, wherein the backside of the Heat Sink is provided with vents and the backside of the Heat Sink, the Integrated Hybrid Heat Spreader and the exposed major portion of the die together define a cavity-like container portion; and a thermal interface material applied within the cavity-like container portion, wherein the heat generated from the die is conducted through the Thermal Interface Material to the Heat Sink, and the vents in the Heat Sink can accommodate the expansion or shrinkage of the Thermal Interface Material during thermal cycling.

According to another aspect of the present disclosure, the semiconductor package comprises at least two dies mounted on a substrate by flip-chip solder balls, wherein the two dies have different thickness from each other; an Integrated Hybrid Heat Spreader including a thin flexible IHHS foil and a IHHS Supporter, wherein the thin flexible IHHS foil has at least two hollowed out central areas and a curve-shaped thermal-induced stress absorbing mechanism on its lateral ends and hermetically bonded with the IHHS Supporter; a high temperature durable bonding material applied to the backside of the Integrated Hybrid Heat Spreader along the hollowed out central areas to bond the backside of the Integrated Hybrid Heat Spreader to the peripheral edges of the dies in such a manner that a major portion of each die is exposed out through the hollowed out central areas of the Integrated Hybrid Heat Spreader; a Heat Sink fixed and attached to the Heat Sink Supporter, wherein the backside of the Heat Sink is provided with vents and the backside of the Heat Sink, the Integrated Hybrid Heat Spreader and the exposed major portion of the dies together define a cavity-like container portion; and a Thermal Interface Material applied within the cavity-like container portion, wherein the heat generated from the die is conducted through the Thermal Interface Material to the Heat Sink, and the vents in the Heat Sink can accommodate the expansion or shrinkage of the Thermal Interface Material during thermal cycling.

According to another aspect of the present disclosure, the Heat Sink includes a microjet impingement mechanism having an inlet chamber, a plurality of inlet vents and jet nozzles, an outlet queue chamber, a plurality of restored nozzles outlet vents; wherein cold liquid is filled into the inlet chamber through the inlet vents and direct-jetted on to the surface of die through the jet nozzles, and heated liquid is also filled into the outlet queue chamber through the restored nozzles and then pumped out through the outlet vents.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the following detailed description when read with the accompanying figures. It is noted that, in accordance with the standard practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of discussion.

FIG. 1 illustrates the cross-section view of typical monolithic CPU package and the expanded view graph of CPU-package and heat sink module of the Fujitsu prior art.

FIG. 2 illustrates the simple resistance model of heat dissipation system of typical monolithic silicon package (lidded type).

FIG. 3A illustrates schematic showing that real area of contact is less than apparent area of contact. This figure also shows an ideal TIM, which completely fills the gap with zero thickness.

FIG. 3B illustrates schematic showing a real TIM.

FIG. 4A illustrates no constraint between DIMM socket and PCB during the reflow heating process, and FIG. 4B illustrates thermally-induced warpage of the PCB assembly due to a coefficient of thermal expansion (CTE) mismatch during the reflow cooling process.

FIG. 5 illustrates the simple resistance model of heat dissipation system of typical monolithic silicon package for lidless and lidded types.

FIG. 5-1A is a schematic diagram illustrating the prior art from US 20200194817 A1 and FIG. 5-1B is a schematic diagram illustrating the prior art from US 20210305227 A1.

FIG. 5-2A is a schematic diagram illustrating the prior arts from U.S. Pat. No. 9,646,910 B2 and FIG. 5-2B is the graphs/chart from the article “Advanced System Integration for High Performance Computing with Liquid Cooling”.

FIG. 6-1 is a schematic diagram illustrating the table for common types of commercial thermal interface materials (TIMs) and typical properties.

FIG. 6-2A, FIG. 6-2B, and FIG. 6-2C are schematic diagrams illustrating the examples of metal matrix composite (MMC).

FIG. 6-3 is a schematic diagram illustrating the Fourier's Formula for Thermal Conduction.

FIG. 6-4A and FIG. 6-4B are schematic diagrams illustrating prior art from graphs of article “Backside Metallization for Low Cost High Thermal Package”

FIG. 7-1 is a schematic diagram illustrating the cross-section view of IHHDS for monolithic silicon die according to an embodiment of the present disclosure.

FIG. 7-1-1 is a schematic diagram illustrating the top view A-A′ of FIG. 7-1, the cross-section view of IHHDS for monolithic silicon die.

FIG. 7-1-2 is a schematic diagram illustrating the cross-section view of IHHDS for monolithic silicon die with protruded part of het sink.

FIG. 7-2 is a schematic diagram illustrating the cross-section view of IHHDS for monolithic silicon die with phase change material and uniform distributed fin array embedded heat sink.

FIG. 7-2-1 is a schematic diagram illustrating the cross-section view of IHHDS for monolithic silicon die with phase change material and fin array (hotspots-oriented) embedded heat sink.

FIG. 7-3 is a schematic diagram illustrating the cross-section view of IHHDS for monolithic silicon die with microjet impingement liquid cooling heat sink.

FIG. 7-3-1 is a schematic diagram illustrating the top view A-A′ of FIG. 7-3, the cross-section view of IHHDS for monolithic silicon die with microjet impingement liquid cooling heat sink.

FIG. 7-3-2A is a schematic diagram illustrating the graphs of lidded cooling module.

FIG. 7-3-2B is a schematic diagram illustrating the graphs of direct cooling module.

FIG. 7-3-2C is a schematic diagram illustrating the graphs of package with microjet hotspot-targeted cooling system.

FIG. 7-4 is a schematic diagram illustrating that the phase change material can absorb instantly the conductive heat from the silicon die during its phase-change period from the solid state toward the liquid state as reach its melting temperature.

FIG. 7-5 is a schematic diagram illustrating that the more (thicker) the phase change material (PCM) is used, the more heat can be absorbed.

FIG. 7-6A and FIG. 7-6B are schematic diagrams illustrating the graph for five power electronics package stacks and thermal responses under forced convection cooling.

FIG. 7-7A, FIG. 7-7B, and FIG. 7-7C are schematic diagrams illustrating the graph for one-dimensional thermal model of transient cooling package used for analyzing thermal response under three cases involving different thermal R and C.

FIG. 7-8 is a schematic diagram illustrating the graph for thermal management systems selecting appropriate thermal resistance (R) and thermal capacitance (C) values.

FIG. 7-9 is a schematic diagram illustrating the cross-section view of IHHDS for monolithic silicon die with protruded part of Heat Sink, new Integrated Hybrid Heat Spreader design and hybrid bonding method.

FIG. 7-9-1 is a schematic diagram illustrating the top view A-A′ of FIG. 7-9, the cross-section view of IHHDS for monolithic silicon die.

FIG. 7-9-2A is a brief diagram for the schematic diagram of FIG. 7-9.

FIG. 7-9-2B and FIG. 7-9-2C are the explanation drawings for elements 728 and 727 in FIG. 7-9-2A.

FIG. 8-1 is a schematic diagram illustrating the challenges of INTEL prior art.

FIG. 8-2A is a schematic diagram illustrating the detailed packaging graph of silicon components of INTEL prior art.

FIG. 8-2B is a schematic diagram illustrating the detailed packaging graph of HBM (High Bandwidth Memory) prior art.

FIG. 9-1 is a schematic diagram illustrating the cross-section view of IHHDS for chiplet heterogeneous integration.

FIG. 9-1-1 is a schematic diagram illustrating the top view A-A′ of FIG. 9-1, the cross-section view of IHHDS for chiplet heterogeneous integration.

FIG. 9-1-2 is a schematic diagram illustrating the top view of IHHDS for chiplet heterogeneous integration with isolated grid bars on thin flexible IHHS foil.

FIG. 9-1-3 is a schematic diagram illustrating the cross-section view of IHHDS for chiplet heterogeneous integration with different protruded parts of het sink.

FIG. 9-2 is a schematic diagram illustrating the cross-section view of IHHDS for chiplet heterogeneous integration with phase change material and uniform distributed fin array embedded heat sink.

FIG. 9-2-1 is a schematic diagram illustrating the cross-section view of IHHDS for chiplet heterogeneous integration with phase change material and fin array (hotspots-oriented) embedded heat sink.

FIG. 9-3 is a schematic diagram illustrating the cross-section view of IHHDS for chiplet heterogeneous integration with microjet impingement liquid cooling heat sink.

FIG. 9-3-1 is a schematic diagram illustrating the top view A-A′ of FIG. 9-3, cross-section view of IHHDS for chiplet heterogeneous integration with microjet impingement liquid cooling heat sink.

FIG. 9-4 is a schematic diagram illustrating the cross-section view of IHHDS for chiplet heterogeneous integration with protruded parts of Heat Sink, new Integrated Hybrid Heat Spreader design and hybrid bonding method.

FIG. 9-4-1 is a schematic diagram illustrating the top view A-A′ of FIG. 9-4, the cross-section view of IHHDS for chiplet heterogeneous integration.

FIG. 9-4-2 is a schematic diagram illustrating the top view A-A′ of IHHDS for chiplet heterogeneous integration with isolated grid bars on thin flexible IHHS foil.

FIG. 9-4-3A is a brief diagram for the schematic diagram of FIG. 9-4, FIG. 9-4-3B and

FIG. 9-4-3C are the explanation drawings for elements 928 and 927 in FIG. 9-4-3A.

FIG. 10-1, FIG. 10-2, FIG. 10-3, and FIG. 10-4 are schematic diagrams illustrating the assembly process of thin flexible IHHS foil attachment toward monolithic silicon chip package.

FIG. 11-1, FIG. 11-2, FIG. 11-3, and FIG. 11-4 are schematic diagrams illustrating the assembly process of thin flexible IHHS foil attachment toward heterogeneous integration silicon chips package.

FIG. 12-1, FIG. 12-2, FIG. 12-3, FIG. 12-4, FIG. 12-5 and FIG. 12-6 are schematic diagrams illustrating the assembly process of thin flexible IHHS foil attachment toward monolithic silicon chip package.

FIG. 13-1, FIG. 13-2, FIG. 13-3, FIG. 13-4, FIG. 13-5 and FIG. 13-6 are schematic diagrams illustrating the assembly process of thin flexible IHHS foil attachment toward heterogeneous integration silicon chips package.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

The following disclosure provides many different embodiments, or examples, for implementing different features of the invention. Specific examples of components and arrangements are described below to simplify the present disclosure. These are, of course, merely examples and are not intended to be limiting. For example, the formation of a first feature over or on a second feature in the description that follows may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features may be formed between the first and second features, such that the first and second features may not be in direct contact. In addition, the present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.

Further, spatial relative terms, such as “beneath.” “below,” “lower,” “above,” “upper” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatial relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The apparatus may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatial relative descriptors used herein may likewise be interpreted accordingly.

As shown in FIG. 3B, the thermal resistance R_th between Material 1 and Material 2 is the sum of R_c1, R_bulk, and R_c2, where R_c1 is the interface contact resistance between Material 1 and TIM, R_c2 is the interface contact resistance between Material 2 and TIM, and R_bulk is the thermal resistance of bulk TIM (R_bulk=BLT/K_TIM, BLT is bonding line thickness and K_TIM is thermal conductivity of bulk TIM). Normally, thermal conductivity of metal is much higher than polymer (referring to FIG. 6-1). Therefore, the bulk thermal conductivity of metal-TIM is higher than film-TIM and gel-TIM. Even though polymer or epoxy has better modulus and viscosity for mating with rough surface (FIG. 3B) of heat spreader (Material 2) and backside metal of silicon die (Material 1), but film-TIM or gel-TIM cannot compete with metal-TIM because of their lower thermal conductivity. Moreover, the interface contact resistance (R_c1 and R_c2) between thermal interface material (TIM) and mating surfaces of Material 1 and Material 2 depends on the bonding quality between mating interfaces, such as good wettability, no void and gaps in between. Thermal resistance of TIM (R_th) is included in overall thermal resistance of package (Φ_JC) and varied as temperature changes. The main reasons are the thermal-induced stress and warpage between mating surfaces originated from the CTE (Coefficient of Thermal Expansion) mismatch between different materials during thermal cycling (referring to FIG. 4). Thermal resistance of TIM2 is also under the same situation as TIM1 but not near to silicon die. The above thermal-induced deformations not only effect the thermal resistance of TIMs but also impact their bonding interface reliability and quality between different mating materials.

As shown in FIG. 5, there are two package structures for typical passive heat dissipation system: Lidless and Lidded. Apparently, Lidless package has better thermal resistance than the Lidded one because of less material and thickness in overall package. However, Lidless package also shows the potential tilt of TIM2 and the unreliable support structure of heat sink. The above both passive heat dissipation systems cannot meet the requirement of heterogeneous integration for multiple chips package. Meanwhile, as the overall chips' area increase and super high power dissipation flow request, the thermal-induced deformations are getting worse. In other words, TIMs play more important part in the overall thermal management and TIM's bulk material characteristic is also the bottlenecks of heat dissipation performance. In addition, interface contact resistance and bonding/mating quality between TIMs and mating substrates are essential to the reliability of whole heat dissipation system. Therefore, the novel heat dissipation solution with brand new architecture and materials is necessary for the thermal management of emerging heterogeneous integration.

As FIG. 5-1A shown, US 2020/0294817 A1 disclosed the perforated foil sheet (PFS) including through-openings and thermal interface material (TIM) filled over perforated foil sheet (PFS). The TIM/PFS/TIM sandwiched structure provides direct heat path between silicon chip (hotspots) toward heat dissipation lid directly through the openings of perforated foil sheet (PFS). Moreover, US 2020/0294817 A1 also disclosed the stress absorber mechanism in the perforated foil sheet (PFS) to avoid the thermal induced stress cause by CTE mismatch during thermal cycling. As FIG. 5-2A exhibited, U.S. Pat. No. 9,646,910 B2 is disclosed that an individual heat spreader with different thickness mates with individual mated silicon chip with different thickness and those heat spreaders are put into the openings of stiffener plate in order to maximize heat transfer from silicon chips to heat sink. As silicon chip size and power density increasing, the higher junction temperature, the more serious thermal induced deformation (warpage and stress). Therefore, larger silicon area should be exposed and thermal interface material should directly contact the backside of silicon chip. Accordingly, die-exposed thin flexible integrated hybrid heat spreader metal foil should bond to backside metallization of silicon chip directly (FIG. 7-1).

As FIG. 6-1 table shown, solder has potential to provide better thermal conductivity and thermal interface resistance but its poor modulus cannot endure the thermal-induced deformations, such as warpage and thermal stress. Moreover, interfacial intermetallic compound (IMC) generated by the inter-diffusion between solder and mating metal substrates is the most reliability concern during thermal cycling and power cycling. Metal matrix composites (MMC) technology of Powder Metallurgy (PM) shows high potential to have better thermal characteristics, such as SLH (Solid/Liquid Hybrid) Metal TIM of Indium company (FIG. 6-2A), TLPS (transient liquid phase sintering) paste of Merck company (FIG. 6-2B), and high temperature lead-free Cu—Ni/Sn composite solder paste that mentioned by Dr. I. E. Anderson (FIG. 6-2C). Micrometer-scaled high melting point metal (HMPM) particles are mixed with micro/nanometer-scaled low melting point metal (LMPM) particles in specific ratio and infiltrated with fillers to have good viscosity to handle, such as paste or preform.

According to one embodiment of the present disclosure, the composite solder joints are produced with a variety of blends of gas-atomized Cu-10Ni wt. % powder and Sn-0.7Cu-0.05Ni+0.01Ge wt. % Nihon-Superior SN100C solder powder. The Cu-10Ni powders are of the size range 25-32 μm and the SN100C powders are of the size range 5-15 μm. The powder size of the Cu—Ni is chosen to be larger than the SN100C, so as to maximize surface area for wetting and minimize IMC formation. After analysis, the best ratio of powders is determined to be about 70 volume percent Cu-10Ni with 30 volume percent SN100C. This combination resulted in the best continuous Cu—Ni conductive network while not sacrificing the tin alloy matrix needed to wet the particles together to form our important IMC.

Due to the above specific particle diameter and ratio mixing technology, it will shorten the interaction period (about 1 minute) than typical soldering (typical reflow process time is about 6 minutes). Quick thermal compression bonding or other solid-state bonding such as thermosonic bonding can perform this shorter and quicker heating process and avoid the damage of silicon dies cause longer heating process. After this shorter and quicker heating, the mixed particles will perform inter-diffusion in between high melting point metal (HMPM) particles and low melting point metal (LMPM) particles, and then form hybrid metal composite with Cu—Sn—Ni intermetallic compound (IMC) networks (shown as middle part of FIG. 6-2C). Appropriate particle's diameter (Cu-10Ni powders of the size range 25-32 μm and the SN100C powders of the size range 5-15 μm) and mixing ratio between high melting point metal (HMPM) particles and low melting point metal (LMPM) particles (about 70 volume percent Cu-10Ni with 30 volume percent SN100C) not only provides the capability to absorb the thermal-induced stress but also forms higher thermal conductivity than typical leadfree solder. Moreover, the higher melting point of remaining un-melting Cu-10Ni (melting point: 1100° C.) particles and (Cu, Ni)₆Sn₅ (melting point: 415° C.) formed intermetallic compound (IMC) networks (i.e. 3d skeleton), metal matrix composite (MMC) after heating process shows higher re-melting point (i.e. application temperature) to affordable the following mass-reflow assembly processes. Moreover, MMC also have much better and reliable contact interface with heat sink and backside metallization of silicon die than typical leadfree solder (shown as the arrow-pointed of FIG. 6-2C). The high temperature durable bonding material is composed of metal matrix composite (MMC) with quick/short process period less than about 5 minutes, higher re-melting point more than 300° C., higher thermal conductivity and better contact interface with mating surfaces.

Meanwhile, the area (A) of interface contact is proportional to the rate of heat flow (Q) according to Fourier's formula of heat conduction (law of heat conduction, FIG. 6-3). Even though the overall thermal resistance of lidless package is much better than lidded package but the whole heat flux of lidless package system is limited as much smaller interface contact area (A) of silicon die.

As FIG. 6-4A and FIG. 6-4B exhibited, die-exposed molded fcCSP with backside metallization package (arrow-pointed in FIG. 6-4A and FIG. 6-4B) shows much better overall thermal resistance than typical Lidless and Lidded heat dissipation system (as shown in FIG. 5A and FIG. 5B) because the larger and very thin backside metallization layer replaces the typical integrated heat spreader and the sputtered thin metal layer is directly attached on the silicon die. In other words, TIM1 of typical Lidded heat dissipation system (FIG. 5B) is perished completely in order to reach the better overall thermal resistance of the dissipation system. Meanwhile, the backside metal layer on the top of chip and mold not only shows much flexible than typical metal integrated heat spreader to absorb the stress from thermal-induced deformation during the thermal cycling period but also has same heat spreader area as Lidded dissipation system (FIG. 5B). As FIG. 6-4B shown, it is also pointed out that thermal dissipation performance of two packages is almost same and thus high-cost LID is not necessary for die-exposed molded fcCSP with backside metallization package. Unfortunately, there is necessary to develop the novel BSM layer that can afford to large monolithic silicon die and also large dimension of chiplets' heterogeneous integration.

In a new passive heat dissipation package (700) shown in FIG. 7-1, a large silicon die (750) mounted on a PCB substrate (770) by flip-chip solder balls (780) and infiltrated with underfill (760) between the gap of silicon die (750) and PCB substrate (770). An Integrated Hybrid Heat Spreader (IHHS, 720) with die-exposed mechanism as shown in FIG. 6-4A and FIG. 6-4B which comprises a flexible die-exposed IHHS foil (721) and an IHHS foil Supporter (722) is sealed with the PCB substrate (770) with a sealant (740). The thin flexible IHHS foil (721) has curve-shaped thermal-induced stress absorbing mechanism (723) on lateral ends (the top view of A-A′ of FIG. 7-1) and is hermetically bonded on the edges of silicon die (750) with high temperature durable bonding material (735) which composed of metal matrix composite (MMC) (mentioned as above). A Heat Sink Supporter (714) is hermetically bonded on Integrated Hybrid Heat Spreader (IHHS, 720) and then a cavity-like container (715) is formed by the Heat Sink Supporter (714), exposed silicon die, and Integrated Hybrid Heat Spreader (IHHS), wherein the height of Heat Sink Support (714) is higher than thickness of thermal interface material (730). A Thermal Interface Material (TIM1.5, 730) is applied into the container (715) and covered on the top of thin flexible IHHS foil (721) and die-exposed area in the container (715) completely, where the Thermal Interface Material TIM1.5 (730) is different with typical TIM1 and TIM2 (shown in FIG. 5) because it is applied among the exposed silicon die, the IHHS foil (721), and the Heat Sink (710). Then the Heat Sink (710) with empty vents (712) and protruded part (713) is attached to the top of the Heat Sink Supporter (714) by a sealant or other mechanical attachments (such as screws, not shown) and contacted with the surface level of Thermal Interface Material (TIM1.5, 730) as close as possible to keep good contact interface for better thermal conduction. The empty vents (712) can be tolerated the volume change of the Thermal Interface Material (TIM1.5, 730) during thermal cycling. The thin flexible die-exposed IHHS foil (721) is composed of high thermal conductivity material such as copper foil or other metal coated composite foil which made of graphite, graphene or carbon nanotube (CNT) inside. Therefore, the IHHS foil (721) not only has good adhesion with Thermal Interface Material (TIM1.5, 730) and high temperature durable bonding material (735) which composed of metal matrix composite (MMC). but also forms the good interface contact resistance between the Thermal Interface Material (TIM1.5, 730) and high temperature durable bonding material (735). Meanwhile, the temperature of this quick bonding process (such as quick TCB or other solid-state thermosonic bonding) is relatively lower than the typical solder and the shorter bonding period can avoid the damage of silicon dies cause longer heating process. The application temperature of high temperature durable bonding material (735) which composed of metal matrix composite (MMC) is much higher than the melting point of the typical solder. The protruded part (713-2) of Heat Sink (710) can keep as close (near) as to the surface of silicon chip (730) to provide the best overall thermal resistance because the Bonding Line Thickness (BLT) of TIM 1.5 (730) is implemented as minimum as possible (referring to FIG. 7-1-2).

The heat dissipation package (700) provides much more overall heat flux flow than those two typical heat dissipation packages that shown in FIG. 5 and can meet the high TDP challenges of thermal management system for large monolithic silicon die (750). Moreover, the thin flexible die-exposed Integrated Hybrid Heat Spreader (IHHS, 720) replaces the typical thick and rigid metal IHS (FIG. 5) because its curve-shaped mechanism (723) plays a key role as thermal stress damper to overcome the issue of thermal-induced deformation (such as warpage or die crack). The die-exposed Integrated Hybrid Heat Spreader (IHHS, 720) is bonded quickly and firmly to the edges of silicon die (750) by using high temperature durable Thermal Interface Material (735). The novel thin flexible die-exposed IHHS foil (721) with high temperature durable bonding material (735) which made of specific metal matrix composite (MMC) paste or preform sheet not only provides more thinner thickness between Junction (Silicon Die) and Case (IHS Lid) of thermal dissipation package (FIG. 2 and FIG. 5) but also shows the resilience to absorb thermal-induced stress. This also prevents the happening of potential die-crack risk due to high thermal-induced stress during thermal cycling and power cycling.

Owing to the increasing frequency of computing cores and the limited die dimension for the chip package, the power density of the CPU chip is getting higher enormously. The high temperature spikes on the CPU chip resulted by the power density and is a threat to the processor's performance and chip's reliability. The CPU architect designer is forced to lower the system clock frequency and allocate the thread workflow to avoid the unexpected high temperature spikes happened in specific areas of the silicon chip and therefore deteriorates the computing efficiency of the CPU. Because of the die-exposed mechanism of the Integrated Hybrid Heat Spreader (IHHS, 720), the heat flux from silicon die (750) can be directly transferred toward the Heat Sink (710) through the Thermal Interface Material (TIM1.5, 730).

The areas, referred to as hot spots, have high temperature spikes that reach the rated operating temperature range of the CPU chip within a very short period (such as millisecond or less). Hot spots throttle the workload and performance of the individual silicon chip processor. Typical heat dissipation system cannot immediately respond to absorb the extra heat flux in the short high temperature spike period. Therefore, the phase change material (PCM), sometimes referred to as latent heat storage (LHS) material, can be useful in reducing the temperature peaks during high computing periods and balancing commutation of cores' workloads, and therefore reduces more demands on the thermal conduction and breaks the power throttling constrains of the processor. As FIG. 7-4 exhibited, the phase change material (PCM) can absorb instantly the conductive heat from the silicon die during its phase-change period from the solid state toward the liquid state as reach its melting temperature. Moreover, As shown in FIG. 7-5, the more (thicker) the phase change material (PCM) is used, the more heat can be absorbed and thus the peak temperature can be kept toward its melting point temperature longer.

According to another embodiment of the present disclosure as shown in FIG. 7-2, the phase change material (PCM, 730-2) can perform its latent heat storage function to absorb the heat from the silicon die (750) intrinsically and then can lower the peak temperature of the silicon die (750) toward the melting point of the phase change material (PCM, 730-2). The more phase change material (PCM, 730-2) is used, the more heat can be absorbed and then the peak temperature can be kept toward the melting point of the phase change material (PCM, 730-2) longer (FIG. 7-5). The height of the heat sink supporter (714-2) can be defined as the proportional of the volume of the phase change material (PCM, 730-2) that filled in the container (715-2). The Heat Sink (HS, 710-2), the die-exposed area, and the Integrated Hybrid Heat Spreader (IHHS, 720) together form a confined container (715-2) to storage the phase change material (PCM, 730-2). Normally the phase change material (PCM, 730-2) has very a low thermal conductivity (such as the paraffin wax has a lower thermal conductivity about 0.2 W/MK). In order to improve the overall thermal conductivity between the Heat Sink (HS, 710-2) and the Integrated Hybrid Heat Spreader (IHHS, 720), high thermal conductivity particles (such as Cu particles, no shown) are mixed within the phase change material (PCM, 730-2), herein referred to as hybrid phase change material (hybrid PCM), and then this hybrid phase change material (hybrid PCM) is filled into the container (715-2) through the vent (712-2) of the Heat Sink (710-2). Fin array (713-2) of the Heat Sink (710-2) is also immersed with hybrid phase change material (hybrid PCM) for the same purpose to enhance overall thermal conductivity of the heat dissipation system.

As shown in FIG. 5-2B, U.S. Pat. No. 9,646,910 B2 discloses the related experiments data charts that show the relationship between the silicon chip surface temperature drop and diameter/spacing/heights of the fin array. It is implied that the distribution density of the fin array (713-2) can be coped with the hot spots area of the silicon chip to provide more efficiency in the heat dissipation. The fin array is arranged in more denser corresponding to the more hot-spots located (refer to FIG. 7-2-1). It was reported in “A REVIEW ON TRANSIENT THERMAL MANAGEMENT OF ELECTRONIC DEVICES, Jhon Mathew and Shankar Krishnan, 2022” that transient thermal management solutions play essential role to ensure the performance and reliability of high-performance computing (HPC) applications, such as high TDP CPU/GPU or AI and Data Center. Typical steady-state thermal management (shown in FIG. 2 and FIG. 5) is not suitable for those high-power density and high temperature swing applications any more.

As FIG. 7-6A shown, there are five power electronic package stacks are analyzed in transient thermal management of power electronics. FIG. 7-6B shows the junction temperature response of Case 1, 3 and 5 to a square pulse train with 1 watt/cm² power, 1 second period, and 10% duty cycle (100 ms pulse width). The final set of pulses in the pulse train is shown in the graph (well after the slower Case 1 package has achieved steady-state temperature oscillations). It is obviously clear that the “improved and better” packages 3 and 5 actually have worse performance with respect to peak temperature rise. The minimum and maximum temperatures seen by the junction during the pulses are listed in following table:

	Tmin	Tmax	Tmax	ΔT	ΔT
Case	[K/(W/cm2)]	[K/(W/cm2)]	% diff	[K/(W/cm2)]	% diff
#1	0.11	0.29	—	0.18	—
#3	0.01	0.38	30	0.37	106
#5	0	0.90	207	0.90	401
Normalized temperature rise for Case 1, 3, 5

The faster thermal responses of Cases 3 and 5 cause peak temperatures (T_max) to exceed Case 1 by 30% and 207%, while the increased heat rejection rates lead to temperature swings (ΔT % diff) 106% and 401% larger, also. This case shows that although the absolute magnitudes of the AC analysis may not directly translate to pulsed response, the qualitative result of degraded performance over certain operating regimes appears to be valid. As expected, however, Case 3 and Case 5 do thermally reset (heat discharge) much faster than the Case 1. This would allow devices to switch at higher pulse rates without resulting temperature increases (remaining heat accumulation).

Typical steady-state thermal management system of microelectronics devices often results in over-designed cooling systems that are sized in basis of peak loads according the definition of thermal design power (TDP). It can also result in undesirably large temperature swings when pulsed heat load employed. Large temperature variations within short period of time cause thermo-mechanical fatigue effects (thermal-induced deformation: warpage and stress due to the CTE mismatches of different materials) that endanger device reliability. Therefore, metallic/hybrid PCMs (mentioned in “A REVIEW ON TRANSIENT THERMAL MANAGEMENT OF ELECTRONIC DEVICES”) are found to be suitable cooling solutions for the applications involving short-duration high-power pulses. An important aspect of transient thermal management is the appropriate selection (FIG. 7-8) of the overall thermal resistance (R) and thermal capacitance (C) of the cooling package. The “thermal time constant (see the definition as below)” must be designed to be larger than the time period of the power cycles in order to reduce temperature deviations. Heat dissipation systems offering tunable thermal resistance (R) and thermal capacitance (C) show much promise for future transient thermal management applications as they can dynamically adapt to time-varying workloads.

Therefore, transient thermal management systems should focus on selecting appropriate thermal resistance (R) and thermal capacitance (C) values such that (1) the junction temperature swing is lowered, and (2) the total time period of thermal response is matched with the time period of the pulsed load. An equivalent R-C thermal circuit of the model is shown in FIG. 7-7A. FIG. 7-7B shows the applied transient heat pulse, while FIG. 7-7C presents the corresponding temperature responses for the three Cases. In Case 1, the high thermal resistance (R) and low thermal capacitance (C) result in a rapid temperature excursion (large ΔT_j) during the heating cycle (heater “on”) and in an incomplete dissipation of the stored thermal energy during the cooling cycle (heater “off”). As a result of the thermal energy accumulated in each heating cycle, the peak junction temperature can be seen to rise with each subsequent cycle whereas for Case 2 involving low thermal resistance (R) and high thermal capacitance (C), the temperature rise during each heating cycle is suppressed (thermal time constant is much larger than the time period of the power cycles). Moreover, there is a lesser accumulation of thermal energy during the cooling cycle as the stored heat is dissipated more readily. Case 3, which involves a low thermal resistance (R) and low thermal capacitance (C), exhibits a similar thermal response as Case 1. The peak junction temperature increases rapidly under a pulsed power input on account of its small thermal capacity. Therefore, heat dissipation system with low R and high thermal capacitance (C) as Case 2 described (II in FIG. 7-8) is suitable for high power density microprocess and data server application.

For high-performance computing (HPC) applications in which only the junction temperature (T_jmax) is limited, the package should be designed with a low thermal resistance (R) and high thermal capacitance (C). This will facilitate the reduction of the maximum temperature amplitude as well as suppress temperature increment rates. This thermal design guidelines on appropriate thermal resistance (R) and thermal capacitance (C) combinations for different applications are depicted in FIG. 7-8. In the case II, thermal system designs should employ low thermal resistance (R) and high thermal capacitance (C) such that the thermal time constant, s=RC, is higher than the period of the pulsed load. This is the purpose that the novel Integrated Hybrid Heat Spreader (720) and the metallic/hybrid PCM (730-2) shown in FIG. 7-2 can have capability to lower the overall thermal resistance and increase the overall thermal capacitance of thermal management system. In other words, novel Integrated Hybrid Heat Spreader (IHHS, 720) of Integrated Hybrid Heat Dissipation System (IHHDS) contributes similar low thermal resistance (R) as lidless package (shown as FIG. 5A). Novel hybrid combination of TIM1.5 (PCM, 730-2) and Heat Sink (710-2) also can provide more thermal capacitance (C) than typical lidded package (shown as FIG. 5B).

As the emerging ultra high TDP (>400W) and ultra-high power density (>10W/cm²) of modern high performance computing (HPC) applications, the limited phase change material (PCM) container (715-2) of IHHDS (FIG. 7-2) cannot have enough PCM to absorb the huge heat spikes from package in order to avoid thermal throttling issue (Dark Silicon). Therefore, the high-performance liquid cooling or the microjet hotspot-targeted cooler may be taken into the consideration. As shown in FIG. 7-3-2A, FIG. 7-3-2B and FIG. 7-3-2C, lidded cooling (FIG. 7-3-2A) and direct cooling (FIG. 7-3-2B) both has micro-pins built on the surface of lid and silicon die separately. It is also discussed that the shape (diameter, and height) of micro-pins and the liquid flow rate can affect the overall capability of heat dissipation system. Unfortunately, this system cannot provide the solution for the hot spot issue of large die. Moreover, FIG. 7-3-2C exhibits microjet hotspot-targeted cooling and also discusses how the jet nozzle, distribution and velocity (liquid flow rate) affects overall thermal dissipation system. In FIG. 7-3, it shows the example of IHHDS with full micro-jet array and FIG. 7-3-1 shows the well distribution jet streams on the top view of A-A′ of FIG. 7-3. Cold liquid (730-3) is filled into inlet chamber (716-3) through inlet vent (711-3) and is jetted on to the surface of silicon die (750) directly through jet nozzles (714-3). Heated liquid is also filled into outlet queue chamber (718-3) through restored nozzles (717-3) and then pump out through outlet vents (712-3). Direct jet impingement of cold liquid has much better cooling effect than flow-over on the surface of silicon die. Moreover, the hotspot-targeted nozzles distribution also delaminates the thermal throttling effectively.

Recently, there has been a growing popularity of novel silicon backside direct metallization methods for enhancing cooling capabilities through additive manufacturing. Several relevant papers and patents in this field include:

• • a) Additive Laser Metal Deposition onto Silicon for Enhanced Microelectronics Cooling (DOI 10.1109/ECTC.2019.00302)
  • b) Additive Manufacturing Processes and Additive Manufacturing Products (U.S. Pat. No. 11,426,818 B2)
  • c) Direct manufacturing of diamond composite coatings onto silicon wafers and heat transfer performance (DOI 10.1016/j.cirp.2018.04.092)
  • d) Cold spray additive manufacturing and repair: Fundamentals and application (DOI 10.1016/j.addma.2018.04.017)
  • e) Thermal Structures for Dissipating Heat and Methods for Manufacture Thereof (U.S. Pat. No. 11,158,560 B2)
  • f) Cold Spray: A Disruptive Technology for Enabling Novel Packaging Thermomechanical Solutions (DOI 10.1109/ECTC32696.2021.00181)
  • g) Package with a Highly Conductive Layer Deposited on Die Using Throughput Additive Deposition Prior to TIM1 Dispense (U.S. Pat. No. 11,328,978 B2, US 2022/0238411 A1)
  • h) Warpage Mitigation Structures Created on Substrate Using High Throughput Additive Manufacturing (U.S. Pat. No. 11,233,015 B2)
  • i) Die Back Side Structures for Warpage Control (U.S. Pat. No. 11,322,456 B2)

Based on the insights provided by the above papers and patents, additive metal deposition methods not only enhance cooling capabilities but also exhibit physical characteristics that can reduce the warpage between silicon dies and substrates. Moreover, the Cold Spray additive manufacturing method can effectively replace the traditional thermal liquid-based phase change bonding method and high-temperature durable bonding materials.

As shown in FIGS. 7-9 and 9-4, a thin flexible IHHS perforated foil (721* or 921*) with a thickness of a few or tens of micrometers is bonded onto the top of a silicon die (750) or multiple silicon dies (950, 951, and 952) using the cold spray additive manufacturing method. The resulting structure comprises a metal deposition base layer (790 or 990) with a main composition that exhibits superior adhesion compared to copper (Cu) and serves as a buffer to absorb the impact from injected copper or metal particles. Additionally, a thin flexible IHHS perforated foil (721* or 921*), and a high thermal conductivity metal deposition layer (792 or 992), forming a sandwich-like structure firmly attached to the silicon die(s) (750) or (950, 951, and 952). This hybrid structure, in combination with the Heat Sink (710 or 910) and Heat Sink Supporter layer (714* or 914*) manufactured using cold spray technology, is not limited to metal particles but can also include polymer particles. Together, they form a cavity-like container (715 or 915). The cavity-like container (715 or 915) acts as hermetically confined space, containing thermal interface material without any leakage. Additionally, the thick high thermal conductivity metal deposition layer (792 or 992) helps reduce the thermal-induced warpage between silicon die (750) or silicon dies (950, 951, and 952) and PCB substrate (770 or 970).

In FIG. 9-1, there is new package system (900) of heterogeneous integration to provide thermal management system of hybrid package (such as the package shown in FIG. 8-1) that includes chiplets with different sizes, heights and structures. Such as small/tall silicon die (950), flat/large silicon die (951) and stacked silicon dies (952) which mounted on interposer (960) by micro bumps (no shown) and interposer (960) also is mounted on PCB substrate (970) by micro bumps (no shown). A thin flexible dies-exposed Integrated Hybrid Heat Spreader (IHHS, 920) which comprises the flexible dies-exposed IHHS foil (921) and IHHS foil Supporter (922) is sealed with PCB substrate (970) with sealant (940). The thin flexible die-exposed IHHS foil (921) is composed of high thermal conductivity material such as copper foil or other metal coated composite foil which made of graphite, graphene or carbon nanotube (CNT) inside. Thin flexible dies-exposed IHHS foil (921) has curve-shaped thermal-induced stress absorbing mechanism (923) on lateral ends (refer to FIG. 9-1-1, the top view of A-A′ of FIG. 9-1) and is bonded firmly on silicon dies (950, 951, and 952) with high temperature durable bonding material (935) such as metal matrix composite (MMC) mentioned as above. A heat sink supporter (914) is bonded hermetically on Integrated Hybrid Heat Spreader (IHHS, 920) by sealant (not shown) and then a cavity-like container (915) is formed in between Heat Sink Supporter (914), exposed silicon dies, and Integrated Hybrid Heat Spreader (IHHS, 920) where the height of Heat Sink Support (914) is higher than the thickness of Thermal Interface Material (TIM 1.5, 930). Thermal Interface Material (TIM1.5, 930) is applied into the container (915) and covered on the top of thin flexible die-exposed IHHS foil (921) and die-exposed area in the container (915) completely where Thermal Interface Material (TIM1.5, 930) is different with typical TIM1 and TIM2 (shown in FIG. 5) because it is applied between exposed silicon die, flexible die-exposed IHHS foil (921), and Heat Sink (910). Then the Heat Sink (910) with empty vents (912) and protruded part (913) are attached to the top of Heat Sink Supporter (914) by sealant or other mechanical attachments (such as screws, not shown) and contacted with the surface level of Thermal Interface Material (TIM1.5, 930) as close as possible to keep good contact interface for better thermal conduction. The empty vents (912) can be tolerated the volume change of Thermal Interface Material (TIM1.5, 930) during thermal cycling-Therefore, IHHS foil (921) not only has good adhesion with Thermal Interface Material (TIM1.5, 930) and high temperature durable bonding material (935) but also forms the good interface contact resistance between Thermal Interface Material (TIM1.5, 930) and high temperature durable bonding material (935). Meanwhile, the temperature of this quick bonding process (such as quick TCB or other solid-state thermosonic bonding) is relatively lower than the typical solder and the shorter bonding period can avoid the damage of silicon dies cause longer heating process. The application temperature of high temperature durable bonding material (935) which composed of metal matrix composite (MMC) is much higher than the melting point of the typical solder. In addition, the protruded parts (913-1, 913-2, and 913-3) of Heat Sink (910) can have different heights to mate with the different thickness and structure of individual chip to provide the best overall thermal resistance for individual chip. (Refer to FIG. 9-1-3)

Moreover, thickness of high temperature durable bonding material (935) on each silicon die is different because silicon dies have different height. In other words, the total height that each silicon die height plus the thickness of high temperature durable bonding material (935) is almost same. As FIG. 9-1-2 shown, isolated supporter grids (938) which composed of heat isolated material with low thermal conductivity is attached onto flexible die-exposed IHHS foil (921) in order to apply different TIM1.5 onto different area for better overall thermal performance and avoid the thermal cross-talk between neighboring silicon dies or area.

For higher TDP HPC heterogeneous integration (refer to FIG. 9-2), the hybrid PCM (930-2) is applied and filled into the container (915-2) through vent (912-2) of Heat Sink (910-2). Well-distributed fin array (913-2) of Heat Sink (910-2) are also immersed with hybrid phase change material (hybrid PCM, 930-2) for increasing the thermal performance of whole heat dissipation system. In addition, the distribution density of fin array (913-2) can be adjusted to cope with the hot spots located area of silicon chip.

For ultra-high TDP (>400W) and ultra-high-power density (>10W/cm²) of HPC applications, the example of microjet impingement cooling heat dissipation system is shown as FIG. 9-3. In FIG. 9-3-1 shows the well distribution jet streams in individual die-exposed die area (924-1, 924-2, and 924-3) on the top view of A-A′ of FIG. 9-3. Cold liquid (930-3) is filled into inlet chamber (917-3) through inlet vent (911-3) and is jetted onto the surface of silicon dies (950, 951, and 952) through jet nozzles (915-3). Heated liquid is also filled into outlet queue chamber (919-3) through restored nozzles (918-3) and then pump out through outlet vents (912-3). Direct jet impingement of cold liquid has much better cooling effect than horizontal flow-over on the surface of silicon die. Moreover, the hotspot-targeted nozzles distribution also delaminates the thermal throttling effectively.

In accordance with one embodiment of the present disclosure, FIG. 7-1 is a schematic diagram illustrating the cross-section view of IHHDS (700) for a silicon die. A large silicon die (750) mounted on a PCB substrate (770) by flip-chip solder balls (780) and infiltrated with underfill (760) between the gap of silicon die (750) and PCB substrate (770). An Integrated Hybrid Heat Spreader (IHHS, 720) includes a thin flexible IHHS foil (721) and an IHHS foil Supporter (722), wherein the IHHS foil has a hollowed out central area and a curve-shaped thermal-induced stress absorbing mechanism (723) on its lateral ends and bonded with the IHHS foil Supporter (722) hermetically. The thin flexible die-exposed IHHS foil (721) is composed of high thermal conductivity material such as copper foil or other metal coated composite foil which made of graphite, graphene or carbon nanotube (CNT) inside. In FIG. 10-1, STEP 701 exhibits the process to hermetically bond the Heat Sink Supporter (714) and the Integrated Hybrid Heat Spreader (720) together. In FIG. 10-2, STEP 702 exhibits that the high temperature durable bonding material is applied to the back side of die-exposed hollowed Integrated Hybrid Heat Spreader (720) with good alignment, and then bonds the Integrated Hybrid Heat Spreader (720) to the peripheral edges of the die in such a manner that a major portion of the die is exposed out through the hollowed out central area of the integrated hybrid spreader. The high temperature durable bonding material (735) is composed of metal matrix composite (MMC) with quick/short process period less than about 5 minutes, higher re-melting point more than 300° C., higher thermal conductivity and better contact interface with mating surfaces. In FIG. 10-3, STEP 703 exhibits that the Integrated Hybrid Heat Spreader (720) is hermetically bonded with the backside metallization (no shown) of the silicon chip with the high temperature durable bonding material (735). IHHS foil Supporter (722) is sealed toward the PCB substrate (770) with the sealant (740). The above bonding process can be conducted in the same time or one after another. Finally, the Thermal Interface Material (TIM1.5, 730) is applied into the cavity-like container (715) to cover the top surface of backside metallization of the silicon die and the Integrated Hybrid Heat Spreader (720). In some case, the high thermal conductivity Thermal Interface Material (TIM1.5, 730) such Indium or liquid metal composite with low modulus will become liquid-like phase as temperature goes high and thus is not easily fixed on the surface of silicon die. The cavity-like container (715) can confine the liquid-like thermal interface material and seal it inside the cavity without any leakage. Then the Heat Sink (710) is fixed and attached to the Heat Sink Supporter (714). The Heat Sink with vents (712) can accommodate the expansion or shrinkage of TIM1.5 (730) during thermal cycling.

FIG. 7-1-1 is a schematic diagram illustrating the top view A-A′ of FIG. 7-1, the cross-section view of IHHDS (700) for monolithic silicon die. The silicon die (750) is located at the middle of the thin flexible die-exposed IHHS foil (721). The die-exposed area (724) of the thin flexible die-exposed IHHS foil (721) is smaller than the area of the silicon die (750) and the edge-to-edge distance (d) is about 2-3 mm for the attachment area of the high temperature durable bonding material (735). The thermal-induced stress absorbing mechanism (723) of the thin flexible die-exposed IHHS foil (721) is located laterally between the silicon die (750) and the Heat Sink Supporter (714).

FIG. 7-1-2 is a schematic diagram illustrating the cross-section view of IHHDS (700) for monolithic silicon die with protruded part of the heat sink. The protruded part (713) of the Heat Sink (710) shortens the distance with the silicon die (750) as less bonding line thickness (BLT) of the Thermal Interface Material (TIM1.5, 730) as possible in order to achieve the best thermal performance.

FIG. 7-2 is a schematic diagram illustrating the cross-section view of IHHDS (700-2) for the monolithic silicon die with the phase change material and the uniform distributed fin array embedded heat sink. A large silicon die (750) is mounted on the PCB substrate (770) by flip-chip solder balls (780) and is infiltrated with underfill (760) between the gap of the silicon die (750) and the PCB substrate (770). The Integrated Hybrid Heat Spreader (IHHS, 720) includes a thin flexible IHHS foil (721) and an IHHS foil Supporter (722). The IHHS foil has a curve-shaped thermal-induced stress absorbing mechanism (723) on its lateral ends and hermetically bonded with the IHHS foil Supporter (722). The thin flexible die-exposed IHHS foil (721) is composed of high thermal conductivity material such as copper foil or other metal coated composite foil which made of graphite, graphene or carbon nanotube (CNT) inside. In FIG. 10-1, STEP 701 exhibits the process to hermetically bond the Heat Sink Supporter (714) and the Integrated Hybrid Heat Spreader (720) together. In FIG. 10-2, STEP 702 exhibits that the die-exposed hollowed high temperature durable bonding material is applied to the back side of the die-exposed hollowed Integrated Hybrid Heat Spreader (720) with good alignment. The high temperature durable bonding material (735) is composed of metal matrix composite (MMC) with features of quick/short process period, higher re-melting point, higher thermal conductivity and better contact interface with mating surfaces. In FIG. 10-3, STEP 703 exhibits that the Integrated Hybrid Heat Spreader (IHHS, 720) is hermetically bonded with the backside metallization (no shown) of the silicon chip with the high temperature durable bonding material (735). The IHHS foil Supporter (722) is sealed toward the PCB substrate (770) with the sealant (740). The above bonding process can be conducted in the same time or one after another. Finally, the phase change material (730-2) is applied into the cavity-like container (715-2) to cover the top surface of the backside metallization of the silicon die and the Integrated Hybrid Heat Spreader (IHHS, 720). In some case, the high thermal conductivity phase change material will have phase-change phenomenon (solid phase to liquid phase) as reach melting point. The cavity-like container (715-2) can confine phase change material and seal inside the cavity without any leakage. Then the Heat Sink (710-2) with well-distributed fin array (713-2) is fixed to the Heat Sink Supporter (714-2). The Heat Sink (710-2) with vents (712-2) can accommodate the expansion or shrinkage of phase change material (730-2) during thermal cycling. Normally the phase change material (PCM, 730-2) has very low thermal conductivity (such as paraffin wax has lower thermal conductivity about 0.2 W/MK). In order to improve the overall thermal conductivity between Heat Sink (HS, 710-2) and Integrated Hybrid Heat Spreader (IHHS, 720), the high thermal conductivity particles (such as Cu particles, no shown) is mixed with the phase change material (PCM, 730-2), sometimes referred to as hybrid phase change material (hybrid PCM), and then this hybrid phase change material (hybrid PCM) is filled into the container (715-2) through vent (712-2) of the Heat Sink (710-2). The well-distributed fin array (713-2) of the Heat Sink (710-2) is also immersed with hybrid phase change material to enhance the overall thermal conductivity.

FIG. 7-2-1 is a schematic diagram illustrating the cross-section view of IHHDS (700-2) for the monolithic silicon die with the phase change material and fin array (hotspots-oriented distribution) embedded heat sink. As the hotspots located at silicon chip (750), hotspot-oriented distributed fin array (713-2) of Heat Sink (710-2) improves the heat transfer flux from the silicon die (750) effectively.

FIG. 7-3 is a schematic diagram illustrating the cross-section view of IHHDS (700-3) for monolithic silicon die with microjet impingement liquid cooling heat sink. A large silicon die (750) mounted on PCB substrate (770) by flip-chip solder balls (780) and infiltrated with underfill (760) between the gap of silicon die (750) and PCB substrate (770). Integrated hybrid Heat Spreader (IHHS, 720) which consists of thin flexible IHHS foil (721) and IHHS foil supporter (722). IHHS foil has a curve-shaped thermal-induced stress absorbing mechanism (723) on lateral ends and bond with IHHS foil Supporter (722) hermetically. In FIG. 10-1, STEP 701 exhibits the process to hermetically bond Heat Sink Supporter (714-3) and Integrated Hybrid Heat Spreader (720) together. In FIG. 10-2, STEP 702 exhibits that apply die-exposed hollowed high temperature durable bonding material to the back side of die-exposed hollowed Integrated Hybrid Heat Spreader (720) with good alignment. High temperature durable bonding material (735) is composed of metal matrix composite (MMC) with features of quick/short process period, higher re-melting point, higher thermal conductivity and better contact interface with mating surfaces. In FIG. 10-3, STEP 703 exhibits Integrated Hybrid Heat Spreader (IHHS, 720) is hermetically bonded with backside metallization (no shown) of silicon chip with high temperature durable bonding material (735). IHHS foil Supporter (722) is sealed toward PCB substrate (770) with sealant (740). The above bonding process maybe happen in the same time or one after another. Heat Sink (710-3) consists of complicated microjet impingement mechanism that cold liquid (730-3) is filled into inlet chamber (717-3) through inlet vent (711-3) and is direct-jetted on to the surface of silicon die (750) through jet nozzles (716-3). Heated liquid (730-3) is also filled into outlet queue chamber (719-3) through restored nozzles (718-3) and then pump out through outlet vents (712-3). Heat Sink (710-3) is attached to HS supporter (714-3) by O-ring other fixture mechanism (no shown) firmly without leakage.

FIG. 7-3-1 is a schematic diagram illustrating the top view A-A′ of FIG. 7-3, the cross-section view of the IHHDS (700-3) for the monolithic silicon die with the microjet impingement liquid cooling heat sink. The schematic drawing also shows that the well-distributed cool liquid jet stream (726) is sprayed onto the surface of the silicon chip (750) and restored streams (727) toward outlet queue chamber (718-3).

FIG. 7-3-2A and FIG. 7-3-2B are schematic diagrams illustrating the graphs from Ref. 7 and FIG. 7-3-2C is schematic diagrams illustrating the graphs from Ref. 8.

FIG. 7-3-2A exhibits cross-section view of lidded cooling, and FIG. 7-3-2B exhibits cross-section view of direct cooling. both has micro-pins built on the surface of lid and silicon die separately. FIG. 7-3-2C exhibits microjet hotspot-targeted cooling and show distribution and direction of the jet nozzles onto the hotspots of silicon chip.

FIG. 7-4 is a schematic diagram illustrating the graph from Ref. 5. The equilibrium phase change material temperature (PCM) curve illustrates the effect of a constant rate of heat flow into an otherwise thermally insulated volume of a PCM. The time history of this sample can be divided into three different stages. In the first and third stages, the phase change material (PCM) is entirely in a single phase: in the first stage, the material is 100% solid. In the third stage, it is 100% liquid. However, in stages 1 and 3, the temperature rises linearly under the influence of the constant rate of heat flow (so-called sensible heating period). Once the melting temperature, T_Melt, has been reached at the end of stage 1, the material begins to liquefy, and becomes 100% liquid at the end of stage 2. The temperature remains equal to T_Melt throughout stage 2 (so-called latent heat storage period). During the second stage, the melting process absorbs heat from component and maintains component temperature still. In actual applications, the PCM is not thermally isolated, but, rather, it is configured to transfer heat to the ambient to extend the time before the PCM completely melts. Hence, the period time of second stage is related to specific heat of the phase change material and the temperature difference between T_Melt and ambient temperature.

FIG. 7-5 is a schematic diagram illustrating the Temperature Profiles for uncoated and PCM coated copper heat spreaders, Samples 1-4. Conditions: 2.4W constant power for 10 minutes. Ambient temperature=25° C. refer to FIG. 6 from Ref. 4. It shows the temperature profiles of two copper heat spreader control samples and two PCM-coated samples. The more volume of PCM (thicker), the more heat can be absorbed and the peak temperature can be kept toward its melting point temperature longer.

FIG. 7-6A is a schematic diagram illustrating: Five different package configurations with increasing cooling integration from cases 1-5 and FIG. 7-6B is a schematic diagram illustrating: comparison of the thermal responses of cases 1, 3, and 5 under forced convection cooling when subjected to 1 watt/cm² power pulses with duration of 1s (Ref. 6).

FIG. 7-7A is a schematic diagram illustrating the graph for one-dimensional thermal model of transient cooling package used for analyzing thermal response under three cases involving different thermal R and C.

FIG. 7-7B is a schematic diagram illustrating the graph for profile of applied heating power pulse with time.

FIG. 7-7C is a schematic diagram illustrating the graph for junction temperature response (T_j) for three types packages.

FIG. 7-8 is a schematic diagram illustrating the graph for thermal design guidelines on the selection of system level thermal resistance (R) and thermal capacitance (C) values.

FIG. 7-9 is a schematic diagram illustrating the cross-section view of IHHDS (700) for a silicon die. A large silicon die (750) is mounted on a PCB substrate (770) using flip-chip solder balls (780) and underfill material (760) is infiltrated into the gap between the silicon die (750) and the PCB substrate (770). An Integrated Hybrid Heat Spreader (IHHS, 720*) comprises a thin flexible IHHS perforated foil (721*) and an IHHS foil Supporter (722). The IHHS perforated foil (721*) includes a central exposed die through area (725), a silicon die bonding through area (726), a die attaching and fixing mechanism (728), a curve-shaped thermal-induced stress absorbing mechanism (723) on its lateral ends and IHHS supporter bonding through area (727). The thin flexible IHHS perforated foil (721*) comprises high thermal conductivity material such as copper foil or other metal coated composite foil which is made of graphite, graphene or carbon nanotube (CNT) inside.

The assembly process firstly includes hermetic bonding the thin flexible IHHS perforated foil (721*) with the IHHS foil Supporter (722) through the IHHS supporter bonding through area (727) using cold spray additive manufacturing. The cold spray additive manufacturing can penetrate the flexible IHHS perforated foil (721*) and thus secure the flexible IHHS perforated foil (721*) in hermetic manner to the IHHS foil Supporter (722). This forms the Heat Sink Supporter layer (714*) on top of the thin flexible IHHS perforated foil (721*) so as to form an one-piece frame module including the thin flexible IHHS perforated foil (721*), Heat Sink Supporter layer (714*), and IHHS foil Supporter (722).

Next, a thin metal deposition base layer (790) is cold-sprayed onto the silicon die (750). The one-piece frame module is properly attached onto top of silicon die (750), which is coated with the metal base layer (790) using die attaching and fixing mechanism (728). Meanwhile, one-piece frame module is also attached to substrate (770) with sealant (740). A thick metal deposition layer (792) is then deposited onto the top position of the one-piece frame module, corresponding to the position of the silicon die (750), through the central exposed die through area (725) and the silicon die bonding through area (726) using cold spray additive manufacturing.

Finally, a thermal interface material (TIM1.5, 730) is applied into the cavity-like container (715) to cover the top surface of the metal deposition layer (792) of the silicon die (750) and the thin flexible IHHS perforated foil (721*). In some case, the high thermal conductivity thermal interface material (TIM1.5, 730) such as Indium or liquid metal composite with low modulus may become liquid-like phase as temperature increases and may be not easily fixed. The cavity-like container (715) is designed to confine the liquid-like thermal interface material and seal it inside the cavity without any leakage. Then the Heat Sink (710) is attached to the Heat Sink Supporter layer (714*) by applying sealant (742) and then perform curing process onto full module and fix the Heat Sink (710). The Heat Sink (710) with vents (712) can accommodate the expansion or shrinkage of TIM 1.5 (730) during thermal cycling.

FIG. 7-9-1 is a schematic diagram depicting the top view A-A′ of FIG. 7-9, the cross-section view of IHHDS (700) for monolithic silicon die. The silicon die (750) is located at the middle of the thin flexible IHHS perforated foil (721*). The die-exposed area (724) of thin flexible IHHS perforated foil (721*) is smaller than the area of the silicon die (750), and the edge-to-edge distance (d) for silicon die bonding through area (726), where the thin flexible IHHS perforated foil (721*) is bonded onto silicon die (750), is about 2-3 mm. The thin flexible IHHS perforated foil (721*) is hermetically bonded to the IHHS foil Supporter (722) through the IHHS supporter bonding through area (727) using cold spray additive manufacturing. This process forms the Heat Sink Supporter layer (714*) on top of the thin flexible IHHS perforated foil (721*). The perforated pattern of the silicon die bonding through area (726) and the IHHS supporter bonding through area (727) is densely distributed design to allow the thick high thermal conductivity metal deposition layer (792) to thrust through and firmly attach the thin flexible IHHS perforated foil (721*) onto the silicon die (750) in a secure and hermetic manner. The shape of the perforated pattern can vary, such as round holes, strips, or irregular shapes (as illustrated in FIG. 7-9-1, the example shows round holes). The perforated pattern of central exposed die through area (725) is less dense or fully hollowed as specific purpose. The thermal-induced stress absorbing mechanism (723) of the thin flexible IHHS perforated foil (721*) is located laterally between the silicon die (750) and Heat Sink Supporter layer (714*).

FIG. 7-9-2B and FIG. 7-9-2C are explanation drawings for 728 and 727 of FIG. 7-9. The protruded part (713*) of the Heat Sink (710), made by cold spray additive manufacturing, reduces the distance between the silicon die (750) and the metal deposition layer (792) of high thermal conductivity. This design aims to minimize the bonding line thickness (BLT) of the thermal interface material (TIM1.5, 730) in order to achieve optimal thermal performance. In FIG. 7-9-2B, the die attaching and fixing mechanism (728) for the thin flexible IHHS perforated foil (721*) is illustrated. The die attaching and fixing mechanism (728) is provided with cap-like portions corresponding to the periphery of the silicon die so as to ensure proper alignment and fixation of the thin flexible IHHS perforated foil (721*) onto the thin high thermal conductivity metal deposition layer (790) after the silicon die (750) has been coated with the metal deposition base layer (790) and the thick metal deposition layer (792) of high thermal conductivity. In FIG. 7-9-2C, the thin flexible IHHS perforated foil (721*) is hermetically bonded to the IHHS foil Supporter (722) through the IHHS foil Supporter bonding through area (727) using cold spray additive manufacturing. This bonding process forms the Heat Sink Supporter layer (714*) on top of the thin flexible IHHS perforated foil (721*). Finally, after attaching the thin flexible IHHS perforated foil (721*) onto the thin high thermal conductivity metal deposition layer (790) using the die attaching and fixing mechanism (728), the thick high thermal conductivity metal deposition layer (792) is coated onto the thin flexible IHHS perforated foil (721*) through cold spray additive manufacturing, as illustrated in FIG. 7-9.

FIG. 9-1 is a schematic diagram illustrating the cross-section view of IHHDS (900) for chiplet heterogeneous integration. Multiple silicon dies which composed of tall chip (950), thin and flat chip (951), and stacked dies (952) mounted on PCB substrate (970) by flip-chip solder balls (no shown) and infiltrated with underfill (960) between the gap of multiple silicon die (950, 951, and 952) and PCB substrate (970). Integrated Hybrid Heat Spreader (IHHS, 920) which consists of thin flexible IHHS foil (921) and IHHS foil Supporter (922). IHHS foil has a curve-shaped thermal-induced stress absorbing mechanism (923) on lateral ends and bond with IHHS foil Supporter (922) hermetically. The thin flexible die-exposed IHHS foil (921) is composed of high thermal conductivity material such as copper foil or other metal coated composite foil which made of graphite, graphene or carbon nanotube (CNT) inside. In FIG. 11-1, STEP 901 exhibits the process to hermetically bond Heat Sink Supporter (914) and Integrated Hybrid Heat Spreader (920) together. In FIG. 11-2, STEP 902 exhibits that apply die-exposed hollowed high temperature durable bonding material (935) with different thickness to the back side of die-exposed hollowed Integrated Hybrid Heat Spreader (920) with good alignment. High temperature durable bonding material (935) is composed of metal matrix composite (MMC) with quick/short process period, higher re-melting point, higher thermal conductivity and better contact interface with mating surfaces. In FIG. 11-3, STEP 903 exhibits Integrated Hybrid Heat Spreader (920) is hermetically bonded with backside metallization (no shown) of silicon chip with high temperature durable bonding material (935). IHHS foil Supporter (922) is sealed toward PCB substrate (970) with sealant (940). The above bonding process maybe happen in the same time or one after another. Finally apply Thermal Interface Material (TIM1.5, 930) into the cavity-like container (915) and covered over the top surface of backside metallization of silicon die and Integrated Hybrid Heat Spreader (920). In some case, high thermal conductivity thermal interface material such Indium or liquid metal composite with low modulus will become liquid-like phase as temperature go high and not easily fix on the surface of silicon die. The cavity-like container (915) can confine liquid-like thermal interface material and seal it inside the cavity without any leakage. Then fix and attach Heat Sink (910) to Heat Sink Supporter (914). Heat Sink with vents (912) can accommodate the expansion or shrinkage of TIM1.5 (930) during thermal cycling.

FIG. 9-1-1 is a schematic diagram illustrating the top view A-A′ of FIG. 9-1, the cross-section view of IHHDS (900) for chiplet heterogeneous integration. Multiple silicon dies (950, 951, and 952) are located at the middle of thin flexible die-exposed IHHS foil (921). Die-exposed area (924-1, 924-2, and 924-3) of thin flexible die-exposed IHHS foil (921) are smaller than related area of silicon dies (950, 951, and 952) and edge-to-edge distance (d) is about 2-3 mm for the attachment area of high temperature durable bonding material (935). Thermal-induced stress absorbing mechanism (923) of thin flexible die-exposed IHHS foil (921) is located laterally between multiple silicon dies (950, 951, and 952) and Heat Sink Supporter (914).

FIG. 9-1-2 is a schematic diagram illustrating the cross-section view of IHHDS (900) for chiplet heterogeneous integration with isolated grid bars on thin flexible IHHS foil. Isolated supporter grids (938) which composed of heat isolated material with low thermal conductivity is attached onto flexible die-exposed IHHS foil (921) in order to apply different TIM1.5 onto separated area for better overall thermal performance for each area and avoid the thermal cross-talk between neighboring silicon dies or area.

FIG. 9-1-3 is a schematic diagram illustrating the cross-section view of IHHDS (900) for chiplet heterogeneous integration with different protruded parts of het sink. Individual protruded parts (913-1, 913-2, and 913-3) of Heat Sink (910) shorten the distance with Individual silicon dies (950, 951, and 952) as less Bonding Line Thickness (BLT) of Thermal Interface Material (TIM1.5, 930) as possible in order to reach best thermal performance for each silicon dies.

FIG. 9-2 is a schematic diagram illustrating the cross-section view of IHHDS (900-2) for chiplet heterogeneous integration with phase change material and uniform distributed fin array embedded heat sink. Multiple silicon dies (950, 951, and 952) mounted on PCB substrate (970) by flip-chip solder balls (no shown) and infiltrated with underfill (960) between the gap of silicon die (950) and PCB substrate (970). Integrated Hybrid Heat Spreader (IHHS, 920) which consists of thin flexible IHHS foil (921) and IHHS foil Supporter (922). IHHS foil has a curve-shaped thermal-induced stress absorbing mechanism (923) on lateral ends and bond with IHHS foil Supporter (922) hermetically. The thin flexible die-exposed IHHS foil (921) is composed of high thermal conductivity material such as copper foil or other metal coated composite foil which made of graphite, graphene or carbon nanotube (CNT) inside. In FIG. 11-1, STEP 901 exhibits the process to hermetically bond Heat Sink Supporter (914) and Integrated Hybrid Heat Spreader (920) together. In FIG. 11-2, STEP 902 exhibits that apply die-exposed hollowed high temperature durable bonding material (935) with different thickness to the back side of die-exposed hollowed Integrated Hybrid Heat Spreader (920) with good alignment. High temperature durable bonding material (935) is composed of metal matrix composite (MMC) with features of quick/short process period, higher re-melting point, higher thermal conductivity and better contact interface with mating surfaces. In FIG. 11-3, STEP 903 exhibits Integrated Hybrid Heat Spreader (IHHS, 920) is hermetically bonded with backside metallization (no shown) of silicon chip with high temperature durable bonding material (935). IHHS foil Supporter (922) is sealed toward PCB substrate (970) with sealant (940). The above bonding process maybe happen in the same time or one after another. Finally apply Phase change material (935) into the cavity-like container (915-2) and covered over the top surface of backside metallization of silicon die and Integrated Hybrid Heat Spreader (920). In some case, high thermal conductivity phase change material (930-2) will have phase-change phenomenon (solid phase to liquid phase) as reach melting point. The cavity-like container (915-2) can confine phase change material (930-2) and seal inside the cavity without any leakage. Then fix Heat Sink (910-2) to HS supporter (914-2). Heat Sink (910-2) with vents (912-2) can accommodate the expansion or shrinkage of phase change material (930-2) during thermal cycling. Normally phase change material (PCM, 930-2) has very low thermal conductivity (such as paraffin wax has lower thermal conductivity about 0.2 W/MK). In order to improve the overall thermal conductivity between Heat Sink (HS, 910-2) and Integrated Hybrid Heat Spreader (IHHS, 920), mixing high thermal conductivity particles (such as Cu particles, no shown) with phase change material (PCM, 930-2), sometimes referred to as hybrid phase change material (hybrid PCM), and then filling this hybrid phase change material (hybrid PCM) into the container (915-2) through vent (912-2) of Heat Sink (910-2). The well-distributed fin array (913-2) of Heat Sink (910-2) is also immersed with hybrid phase change material to enhance the overall thermal conductivity.

FIG. 9-2-1 is a schematic diagram illustrating the cross-section view of IHHDS (900-2) for chiplet heterogeneous integration with phase change material and fin array (hotspots-oriented) embedded heat sink. As the hotspots located at silicon chips (950, 951, and 952), hotspot-oriented distributed fin array (913-2) of Heat Sink (910-2) improves the heat transfer flux from multiple silicon dies (950, 951, and 952) effectively.

FIG. 9-3 is a schematic diagram illustrating the cross-section view of IHHDS for chiplet heterogeneous integration with microjet impingement liquid cooling heat sink. Multiple silicon dies which composed of tall chip (950), thin and flat chip (951), and stacked dies (952) mounted on PCB substrate (970) by flip-chip solder balls (no shown) and infiltrated with underfill (960) between the gap of multiple silicon die (950, 951, and 952) and PCB substrate (970). Integrated Hybrid Heat Spreader (IHHS, 920) which consists of thin flexible IHHS foil (921) and IHHS foil Supporter (922). IHHS foil has a curve-shaped thermal-induced stress absorbing mechanism (923) on lateral ends and bond with IHHS foil Supporter (922) hermetically. The thin flexible die-exposed IHHS foil (921) is composed of high thermal conductivity material such as copper foil or other metal coated composite foil which made of graphite, graphene or carbon nanotube (CNT) inside. In FIG. 11-1, STEP 901 exhibits the process to hermetically bond Heat Sink Supporter (914-3) and Integrated Hybrid Heat Spreader (920) together. In FIG. 11-2, STEP 902 exhibits that apply die-exposed hollowed high temperature durable bonding material (935) with different thickness to the back side of die-exposed hollowed Integrated Hybrid Heat Spreader (920) with good alignment. High temperature durable bonding material (935) is composed of metal matrix composite (MMC) with quick/short process period, higher re-melting point, higher thermal conductivity and better contact interface with mating surfaces. In FIG. 11-3, STEP 903 exhibits Integrated Hybrid Heat Spreader (920) is hermetically bonded with backside metallization (no shown) of silicon chip with high temperature durable bonding material (935). IHHS foil Supporter (922) is sealed toward PCB substrate (970) with sealant (940). The above bonding process maybe happen in the same time or one after another. Heat Sink (910-3) consists of complicated microjet impingement mechanism that cold liquid (930-3) is filled into inlet chamber (917-3) through inlet vent (911-3) and is direct-jetted on to the surface of silicon dies (950, 951, and 952) through jet nozzles (916-3). Heated liquid (930-3) is also filled into outlet queue chamber (919-3) through restored nozzles (918-3) and then pump out through outlet vents (912-3). Heat Sink (910-3) is attached to Heat Sink Supporter (914-3) by O-ring other fixture mechanism (no shown) firmly without leakage.

FIG. 9-3-1 is a schematic diagram illustrating the top view A-A′ of FIG. 9-3, cross-section view of IHHDS for chiplet heterogeneous integration with microjet impingement liquid cooling heat sink. The schematic drawing also shows that well-distributed cool liquid jet stream (926) onto the surface of silicon chips (950) and restored streams (927) toward outlet queue chamber (918-3, no shown).

FIG. 9-4 is a schematic diagram illustrating the cross-section view of IHHDS (900) for chiplet heterogeneous integration. Multiple silicon dies which include a tall chip (950), a thin and flat chip (951), and stacked dies (952) are mounted on PCB substrate (970) using flip-chip solder balls (no shown) and infiltrated with underfill (960) between the gap of multiple silicon dies (950, 951, and 952) and PCB substrate (970). An Integrated Hybrid Heat Spreader (IHHS, 920*) comprises a thin flexible IHHS perforated foil (921*) and an IHHS foil Supporter (922). The IHHS perforated foil (921*) includes serval corresponded exposed die area (925), serval corresponded silicon die bonding through area (926), serval corresponded die attaching and fixing mechanism (928, no shown), a curve-shaped thermal-induced stress absorbing mechanism (923) on its lateral ends and IHHS supporter bonding through area (927). The thin flexible IHHS perforated foil (921*) comprises high thermal conductivity material such as copper foil or other metal coated composite foil which made of graphite, graphene or carbon nanotube (CNT) inside.

The assembly process firstly includes hermetic bonding the thin flexible IHHS perforated foil (921*) with the IHHS foil Supporter (922) through IHHS foil Supporter bonding through area (927) using cold spray additive manufacturing. The cold spray additive manufacturing can penetrate the flexible IHHS perforated foil (921*) and thus secure the flexible IHHS perforated foil (921*) in hermetic manner to the IHHS foil Supporter (922). This forms the Heat Sink Supporter layer (914*) on the top of thin flexible IHHS perforated foil (921*) so as to form an one-piece frame module which includes the thin flexible IHHS perforated foil (921*), Heat Sink Supporter layer (914*), and IHHS foil Supporter (922).

Next, thin metal deposition base layer (990) is cold-sprayed onto silicon dies (950, 951, and 952). The one-piece frame module is properly attached onto top of corresponded silicon dies (950, 951, and 952), which are coated with metal base layer (990) using corresponded die attaching and fixing mechanism (928, no shown). Meanwhile. The one-piece frame module is also attached to substrate (950) with sealant (940). A thick high thermal conductivity metal deposition layer (992) is then deposited onto the top position of one-piece frame module, corresponding to the position of corresponded silicon dies (950, 951, and 952), through the corresponded exposed die through area (925) and the corresponded silicon die bonding through area (926) by using cold spray additive manufacturing.

Finally, a thermal interface material (TIM1.5, 930) is applied into the cavity-like container (915) to cover the top surface of high thermal conductivity metal deposition layer (992) of corresponded silicon dies (950, 951, and 952) and thin flexible IHHS perforated foil (921*). In some case, the high thermal conductivity thermal interface material (TIM1.5, 930) such Indium or liquid metal composite with low modulus will become liquid-like phase as temperature increases and may be not easily fixed. The cavity-like container (915) is designed to confine the liquid-like thermal interface material and seal it inside the cavity without any leakage. Then the Heat Sink (910) is attached to the metal Heat Sink Supporter layer (914*) by applying sealant (942) and then perform curing process onto full module and fix the Heat Sink (910). The Heat Sink (910) with vents (912) can accommodate the expansion or shrinkage of TIM1.5 (930) during thermal cycling.

FIG. 9-4-1 is a schematic diagram illustrating the top view A-A′ of FIG. 9-4, the cross-section view of IHHDS (900) for chiplet heterogeneous integration. Multiple silicon dies (950, 951, and 952) are located at the middle of the thin flexible IHHS perforated foil (921*). The corresponded die-exposed area (924) of thin flexible IHHS perforated foil (921*) is smaller than the area of corresponded silicon dies (950, 951, and 952), and the edge-to-edge distance (d) for corresponded multiple silicon die bonding through area (926), where the thin flexible IHHS perforated foil (921*) is bonded onto corresponded silicon dies (950, 951, and 952), is about 2-3 mm. The thin flexible IHHS perforated foil (921*) is hermetically bonded to IHHS foil Supporter (922) through the IHHS foil Supporter bonding through area (927) using cold spray additive manufacturing. This process forms the Heat Sink Supporter layer (914*) on the top of thin flexible IHHS perforated foil (921*). The perforated pattern of the silicon die bonding through area (926) and the IHHS Supporter bonding through area (927) is densely distributed design to allow the thick high thermal conductivity metal deposition layer (992) to thrust through and firmly attach the thin flexible IHHS perforated foil (921*) onto the corresponded silicon dies (950, 951, and 952) in secure and hermetic manner. The shape of the perforated pattern can vary, such as round holes, strips, or irregular shapes (as illustrated in FIG. 9-4-1, the example shows round holes). The shape of the perforated pattern in the silicon die bonding through area (926) and the IHHS Supporter bonding through area (927) ensures the metal deposition layer (992) can penetrate the flexible IHHS perforated foil (921*) and thus secure the flexible IHHS perforated foil (921*) in hermetic manner. The perforated pattern of exposed die through area (925) is less dense or fully hollowed as specific purpose. The thermal-induced stress absorbing mechanism (923) of the thin flexible IHHS perforated foil (921*) is located laterally between multiple silicon dies (950, 951, and 952) and Heat Sink Supporter layer (914*).

FIG. 9-4-2 is a schematic diagram illustrating the cross-section view of IHHDS (900) for chiplet heterogeneous integration with isolated grid bars (938) on thin flexible IHHS perforated foil (921*). These isolated supporter grids (938) are made which of a heat isolated material with low thermal conductivity and are attached to thin flexible IHHS perforated foil (921*). The purpose is to apply different TIM1.5 on separated area based on the corresponded silicon dies' requirement. The approach aims to achieve the optimal overall thermal performance and avoid the thermal cross-talk between neighboring silicon dies or area. Additionally, the height of isolated supporter grids (938) is slightly higher than the height of the thermal interface material (TIM1.5, 930) but the same as Heat Sink Supporter layer (914*) height. Consequently, the Heat Sink (910), isolated grid bars (938), and Heat Sink Supporter layer (914*) together form several sub-cavity-like area that can accommodate and confine different thermal interface material (TIM1.5, 930) for the corresponded silicon dies.

FIG. 9-4-3A, FIG. 9-4-3B and FIG. 9-4-3C are explanation drawings for 928 and 927 of FIG. 9-4. The protruded part (913*) of the Heat Sink (910), made by cold spray additive manufacturing, reduces the distance between corresponded multiple silicon dies (950,951, and 952) and the metal deposition layer (992) of high thermal conductivity. This design aims to minimize the bonding line thickness (BLT) of the thermal interface material (TIM 1.5, 930) in order to achieve optimal thermal performance. In FIG. 9-4-3B, the die attaching and fixing mechanism (928) of thin flexible IHHS perforated foil (921*) is illustrated. This mechanism ensures proper alignment and fixation of the thin flexible IHHS perforated foil (921*) onto the thin high thermal conductivity metal deposition layer (990) after the corresponded silicon dies (950, 951, and 952) has been coated with the metal deposition base layer (990) and the thick high metal deposition layer (992) of high thermal conductivity. In FIG. 9-4-3 C, the thin flexible IHHS perforated foil (921*) is hermetically bonded to the IHHS foil Supporter (922) through the IHHS foil Supporter bonding through area (927) using cold spray additive manufacturing. This bonding process forms the Heat Sink Supporter layer (914*) on top of the thin flexible IHHS perforated foil (921*). Finally, after attaching the thin flexible IHHS perforated foil (921*) onto the thin high thermal conductivity metal deposition layer (990) using the die attaching and fixing mechanism (928), the thick high thermal conductivity metal deposition layer (992) is coated onto the thin flexible IHHS perforated foil (921*) through cold spray additive manufacturing, as illustrated in FIG. 9-4.

FIG. 10-1, FIG. 10-2, FIG. 10-3, and FIG. 10-4 are schematic diagrams illustrating the assembly process of thin flexible IHHS foil attachment toward monolithic silicon chip package.

In FIG. 10-1, STEP 701 exhibits the process to hermetically bond Heat Sink Supporter (714) and Integrated Hybrid Heat Spreader (720) together.

In FIG. 10-2, STEP 702 exhibits that the die-exposed hollowed high temperature durable bonding material is applied to the back side of die-exposed hollowed Integrated Hybrid Heat Spreader (720) with good alignment. High temperature durable bonding material is composed of metal matrix composite (MMC) with quick/short process period, higher re-melting point, higher thermal conductivity and better contact interface with mating surfaces. Before this material attachment, the backside surface of Integrated Hybrid Heat Spreader (720) may need surface treatment to keep the surface cleanness. Moreover, the pre-heating process may be also needed after this attachment to increase the contact surface stickiness.

In FIG. 10-3, STEP 703 exhibits Integrated Hybrid Heat Spreader (720) is hermetically bonded with backside metallization (no shown) of silicon chip with high temperature durable bonding material (735). This quick bonding process (such as quick TCB or other solid-state thermosonic bonding) is relatively lower than the typical solder and the shorter bonding period can avoid the damage of silicon dies cause longer heating process. The application temperature of high temperature durable bonding material (735) which composed of metal matrix composite (MMC) is much higher than the melting point of the typical solder. IHHS foil Supporter (722) is sealed toward PCB substrate (770) with sealant (740). The above bonding process can be conducted in the same time or one after another.

FIG. 11-1, FIG. 11-2, FIG. 11-3, and FIG. 11-4 are schematic diagrams illustrating the assembly process of thin flexible IHHS foil attachment toward heterogeneous integration silicon chips package.

In FIG. 11-1, STEP 901 exhibits the process to hermetically bond Heat Sink Supporter (914) and Integrated Hybrid Heat Spreader (920) together.

In FIG. 11-2, STEP 902 exhibits that the die-exposed hollowed high temperature durable bonding material (935) with different thickness is applied to the back side of die-exposed hollowed Integrated Hybrid Heat Spreader (920) with good alignment. High temperature durable bonding material (935) is composed of metal matrix composite (MMC) with quick/short process period, higher re-melting point, higher thermal conductivity and better contact interface with mating surfaces. Before this material attachment, the backside surface of Integrated Hybrid Heat Spreader (920) may need surface treatment to keep the surface cleanness. Moreover, the pre-heating process may be also needed after this attachment to increase the contact surface stickiness.

In FIG. 11-3, STEP 903 exhibits Integrated Hybrid Heat Spreader (920) is hermetically bonded with backside metallization (no shown) of silicon chip with high temperature durable bonding material (935). This quick bonding process (such as quick TCB or other solid-state thermosonic bonding) is relatively lower than the typical solder and the shorter bonding period can avoid the damage of silicon dies cause longer heating process. The application temperature of high temperature durable bonding material (935) which composed of metal matrix composite (MMC) is much higher than the melting point of the typical solder. IHHS foil Supporter (922) is sealed toward PCB substrate (970) with sealant (940). The above bonding process can be conducted in the same time or one after another.

FIG. 12-1, FIG. 12-2, FIG. 12-3, and FIG. 12-4 are schematic diagrams illustrating the assembly process of thin flexible IHHS foil attachment toward monolithic silicon chip package.

In FIG. 12-1, STEP 701* exhibits the process to hermetically bond Heat Sink Supporter (714*) and Integrated Hybrid Heat Spreader (720*) together. The assembly process firstly includes hermetic bonding the thin flexible IHHS perforated foil (721*) of thickness about 6-100 um with the IHHS foil Supporter (722) by using cold spray additive manufacturing. The cold spray additive manufacturing can penetrate the flexible IHHS perforated foil (721*) and thus secure the flexible IHHS perforated foil (721*) in hermetic manner to the IHHS foil Supporter (722). This forms the Heat Sink Supporter layer (714*) on top of the thin flexible IHHS perforated foil (721*) so as to form a one-piece frame module (700*) including the thin flexible IHHS perforated foil (721*), Heat Sink Supporter layer (714*), and IHHS foil Supporter (722), as shown in FIG. 12-2, STEP 702*.

Referring to FIG. 12-3, in STEP 703*, a thin metal deposition base layer (790) of thickness less than 1 um is cold-sprayed onto the silicon die (750). The metal deposition base layer (790) such as aluminum material can adsorb impact from thick metal layer deposition by cold spray additive manufacturing.

Referring to FIG. 12-4, in STEP 704*, the one-piece frame module (700*) is properly attached onto top of silicon die (750), which is coated with the metal base layer (790) using die attaching and fixing mechanism (728). Meanwhile, one-piece frame module is also attached to substrate (770) with sealant (740).

Referring to FIG. 12-5, in STEP 705*, a thick metal deposition layer (792, not shown) of thickness about 200 um or more is then deposited onto the top position of the one-piece frame module (700*), corresponding to the position of the silicon die (750) by using cold spray additive manufacturing.

Referring to FIG. 12-6, in STEP 706*, a thermal interface material (TIM1.5, 730) is applied into the cavity-like container (715, not shown) to cover the top surface of the metal deposition layer (792) of the silicon die (750) and the thin flexible IHHS perforated foil (721*). The Heat Sink (710) is provided with a protruded part (713*) by cold spray additive manufacturing. The protruded part (713*) reduces the distance between the silicon die (750) and the Heat Sink (710). This design aims to minimize the Bonding Line Thickness (BLT) of the thermal interface material (TIM1.5, 730) in order to achieve optimal thermal performance. Then the Heat Sink (710) is attached to the Heat Sink Supporter layer (714*) by applying sealant (742) and then perform curing process onto full module and fix the Heat Sink (710).

IG. 13-1, FIG. 13-2, FIG. 13-3, and FIG. 13-4 are schematic diagrams illustrating the assembly process of thin flexible IHHS foil attachment toward heterogeneous integration silicon chips package.

In FIG. 13-1, STEP 901* exhibits the process to hermetically bond Heat Sink Supporter layer (914*) and Integrated Hybrid Heat Spreader (920*) together. The assembly process firstly includes hermetic bonding the thin flexible IHHS perforated foil (921*) with the IHHS foil Supporter (922) by using cold spray additive manufacturing. The cold spray additive manufacturing can penetrate the flexible IHHS perforated foil (921*) and thus secure the flexible IHHS perforated foil (921*) in hermetic manner to the IHHS foil Supporter (922). This forms the Heat Sink Supporter layer (914*) on top of the thin flexible IHHS perforated foil (921*) so as to form an one-piece frame module (900*) including the thin flexible IHHS perforated foil (921*), Heat Sink Supporter layer (914*), and IHHS foil Supporter (922), as shown in FIG. 13-2, STEP 902*.

Referring to FIG. 13-3, in STEP 903*, a thin metal deposition base layer (990) of thickness less than 1 um is cold-sprayed onto the silicon dies (950, 951, and 952). The metal deposition base layer (990) such as aluminum material can adsorb impact from thick metal layer deposition by cold spray additive manufacturing.

Referring to FIG. 13-4, in STEP 904*, the one-piece frame module (900*) is properly attached onto top of silicon dies (950, 951, and 952) which are coated with the metal base layer (990) using die attaching and fixing mechanism (928). Meanwhile, one-piece frame module is also attached to substrate (970) with sealant (940).

Referring to FIG. 13-5, in STEP 905*, a thick metal deposition layer (992, not shown) of thickness about 200 um or more is then deposited onto the top position of the one-piece frame module, corresponding to the position of the silicon dies (950, 951, and 952) by using cold spray additive manufacturing.

Referring to FIG. 13-6, in STEP 906*, a Thermal Interface Material (TIM1.5, 930) is applied into the cavity-like container (915, not shown) to cover the top surface of the metal deposition layer (992, not shown) of the silicon dies (950, 951 and 952) and the thin flexible IHHS perforated foil (921*). The Heat Sink (910) is provided with protruded parts (913*) by cold spray additive manufacturing. The protruded parts (913*) reduce the distance between the silicon dies (950, 951 and 952) and the Heat Sink (910). This design aims to minimize the Bonding Line Thickness (BLT) of the Thermal Interface Material (TIM1.5, 930) in order to achieve optimal thermal performance. Then the Heat Sink (910) is attached to the Heat Sink Supporter layer (914*) by applying sealant (942) and then perform curing process onto full module and fix the Heat Sink (910).

It will become apparent to those people skilled in the art that various modifications and variations can be made to the structure of the disclosure without departing from the scope or spirit of the disclosure. In view of the foregoing description, it is intended that all the modifications and variation fall within the scope of the following appended claims and their equivalents.

Claims

1. A semiconductor package, comprising: a large silicon die mounted on a substrate by flip-chip solder balls;an integrated hybrid heat spreader including a thin flexible perforated foil and a supporter, wherein the thin flexible perforated foil has a central exposed die through area, a silicon die bonding through area, a die attaching and fixing mechanism, a curve-shaped thermal-induced stress absorbing mechanism on its lateral ends and a supporter bonding through area;a metal deposition base layer of thickness less than 1 um cold-sprayed onto the silicon die;a metal deposition layer of thickness about 200 um or more deposited onto the top position of the integrated hybrid heat spreader corresponding to the position of the silicon die, through the central exposed die through area and the silicon die bonding through area by using cold spray additive manufacturing.a heat sink fixed and attached to the heat sink supporter, wherein the backside of the heat sink is provided with vents, and the integrated hybrid heat spreader and the exposed major portion of the die together define a cavity-like container portion; anda thermal interface material applied within the cavity-like container portion, wherein the thermal interface material is high thermal conductivity with low modulus and may become liquid-like phase as temperature increases so as to be confined and sealed inside the cavity-like container portion without any leakage, thereby the heat generated from the die is conducted directly through the thermal interface material to the heat sink, and the vents in the heat sink can accommodate the expansion or shrinkage of the thermal interface material during thermal cycling.

2. The semiconductor package as claimed in claim 1, wherein the die-exposed area of thin flexible perforated foil is smaller than the area of the silicon die, and the edge-to-edge distance for the silicon die bonding through area, where the thin flexible perforated foil is bonded onto silicon die, is about 2-3 mm.

3. The semiconductor package as claimed in claim 1, wherein the thin flexible perforated foil is hermetically bonded to the supporter through the supporter bonding through area using cold spray additive manufacturing, thereby forming a heat sink supporter layer on top of the thin flexible perforated foil.

4. The semiconductor package as claimed in claim 1, wherein the thin flexible perforated foil includes perforated openings corresponding to the silicon die bonding through area and the supporter bonding through area, and the perforated openings are densely distributed design to allow the thick high thermal conductivity metal deposition layer to thrust through and firmly attach the thin flexible perforated foil onto the silicon die in a secure and hermetic manner.

5. The semiconductor package as claimed in claim 1, wherein the thermal-induced stress absorbing mechanism of the thin flexible perforated foil is located laterally between the silicon die and the supporter layer.

6. The semiconductor package as claimed in claim 1, wherein the die attaching and fixing mechanism is provided with cap-like portions corresponding to the periphery of the silicon die, thereby ensuring proper alignment and fixation of the thin flexible perforated foil onto the thin high thermal conductivity metal deposition layer after the silicon die has been coated with the metal deposition base layer and the thin metal deposition layer of high thermal conductivity.

7. The semiconductor package as claimed in claim 1, wherein the perforated openings are of the shape such as round holes, strips, or irregular shapes.

8. A semiconductor package, comprising: at least two dies mounted on a substrate by flip-chip solder balls, wherein the dies have different thickness from each other;an integrated hybrid heat spreader including a thin flexible perforated foil and a supporter, wherein the thin flexible perforated foil has at least two exposed dies through areas corresponding the two dies, at least two silicon die bonding through areas corresponding the two dies, at least two die attaching and fixing mechanisms corresponding the two dies, a curve-shaped thermal-induced stress absorbing mechanism on its lateral ends and a supporter bonding through area;a metal deposition base layer cold-sprayed onto the at least two silicon dies;a thick metal deposition layer of high thermal conductivity deposited onto the top position of the integrated hybrid heat spreader corresponding to the position of the silicon dies, through the exposed die through areas and the silicon die bonding through areas by using cold spray additive manufacturing.a heat sink fixed and attached to the heat sink supporter, wherein the backside of the heat sink is provided with vents, and the integrated hybrid heat spreader and the exposed major portion of the die together define a cavity-like container portion; anda thermal interface material applied within the cavity-like container portion, wherein the thermal interface material is high thermal conductivity with low modulus and may become liquid-like phase as temperature increases so as to be confined and sealed inside the cavity-like container portion without any leakage, thereby the heat generated from the dies is conducted directly through the thermal interface material to the heat sink, and the vents in the heat sink can accommodate the expansion or shrinkage of the thermal interface material during thermal cycling.

9. The semiconductor package as claimed in claim 8, wherein the die-exposed areas of thin flexible perforated foil are smaller than the areas of the corresponding silicon dies, and the edge-to-edge distance for the silicon dies bonding through areas, where the thin flexible perforated foil is bonded onto silicon die, is about 2-3 mm.

10. The semiconductor package as claimed in claim 8, wherein the thin flexible perforated foil is hermetically bonded to the supporter through the supporter bonding through area using cold spray additive manufacturing, thereby forming a heat sink supporter layer on top of the thin flexible perforated foil.

11. The semiconductor package as claimed in claim 8, wherein the thin flexible perforated foil includes perforated openings corresponding to the silicon die bonding through areas and the supporter bonding through area, and the perforated openings are densely distributed design to allow the thick high thermal conductivity metal deposition layer to thrust through and firmly attach the thin flexible perforated foil onto the silicon dies in a secure and hermetic manner.

12. The semiconductor package as claimed in claim 8, wherein the thermal-induced stress absorbing mechanism of the thin flexible perforated foil is located laterally between the silicon dies and the supporter layer.

13. The semiconductor package as claimed in claim 8, wherein the die attaching and fixing mechanism is provided with cap-like portions corresponding to the periphery of the silicon die, thereby ensuring proper alignment and fixation of the thin flexible perforated foil onto the thin high thermal conductivity metal deposition layer after the silicon dies has been coated with the metal deposition base layer and the thin metal deposition layer of high thermal conductivity.

14. The semiconductor package as claimed in claim 8, wherein the perforated openings are of the shape such as round holes, strips, or irregular shapes.

15. The semiconductor package as claimed in claim 8, further comprising isolated grid bars disposed on thin flexible perforated foil for avoiding the thermal cross-talk between neighboring silicon dies.

16. The semiconductor package as claimed in claim 15, wherein the height of isolated supporter grids is slightly higher than the height of the thermal interface material but the same as the height of the supporter layer.

17. A method for making a semiconductor package, comprising: mounting a silicon die on a substrate by flip-chip solder balls;hermetically bonding a thin flexible IHHS perforated foil with an IHHS supporter by using cold spray additive manufacturing to form a heat sink supporter layer on top of the thin flexible IHHS perforated foil, thereby forming an one-piece frame module;cold spraying a first metal deposition base layer onto the silicon die;attaching the one-piece frame module onto the top of silicon die which is cold sprayed with the metal base layer to the substrate with a sealant;depositing a second metal deposition layer onto the top position of the one-piece frame module corresponding to the position of the silicon die by using cold spray additive manufacturing;applying a thermal interface material to cover the top surface of the metal deposition layer of the silicon die and the thin flexible IHHS perforated foil;and attaching a heat sink to the heat sink supporter layer by applying a second sealant and then perform curing process onto full module and fix the heat sink.

18. The method as claimed in claim 17, wherein the thickness of the first metal deposition base layer is less than 1 um and the thickness of the second metal deposition base layer is about 200 um or more.

19. The method as claimed in claim 17, wherein the one-piece frame module includes a die attaching and fixing mechanism provided with cap-like portions corresponding to the periphery of the silicon die, thereby ensuring proper alignment and fixation of the thin flexible perforated foil onto the first metal deposition layer on the silicon die.

20. The method as claimed in claim 17, wherein the thin flexible perforated foil is provided with a thermal-induced stress absorbing mechanism located laterally between the silicon die and the supporter layer.