(Not Applicable)
The present invention relates generally to integrated circuit chip package technology, and more particularly to a unique lead frame design for a micro lead frame (MLF) package wherein a special plated half-etched feature is included in the lead frame design which increases the solderable area of the leads of the lead frame to a printed circuit board, thus creating stronger final solder joints with increased second level reliability.
Integrated circuit dies are conventionally enclosed in plastic packages that provide protection from hostile environments and enable electrical interconnection between the integrated circuit die and an underlying substrate such as a printed circuit board (PCB) or motherboard. The elements of such a package include a metal lead frame, an integrated circuit die, bonding material to attach the integrated circuit die to the lead frame, bond wires which electrically connect pads on the integrated circuit die to individual leads of the lead frame, and a hard plastic encapsulant material which covers the other components and forms the exterior of the package.
The lead frame is the central supporting structure of such a package. A portion of the lead frame is internal to the package, i.e., completely surrounded by the plastic encapsulant. Portions of the leads of the lead frame extend externally from the package or are partially exposed within the encapsulant material for use in electrically connecting the chip package to another component. In certain chip packages, a portion of the die pad of the lead frame also remains exposed within the exterior of the package for use as a heat sink.
For purposes of high-volume, low-cost production of chip packages, a current industry practice is to etch or stamp a thin sheet of metal material to form a panel or strip which defines multiple lead frames. A single strip may be formed to include multiple arrays, with each such array including a multiplicity of lead frames in a particular pattern. In a typical chip package manufacturing process, the integrated circuit dies are mounted and wire bonded to respective ones of the lead frames, with the encapsulant material then being applied to the strip so as to encapsulate the integrated circuit dies, bond wires, and portions of each of the lead frames in the above-described manner.
Upon the hardening of the encapsulant material, the lead frames within the strip are cut apart or singulated for purposes of producing the individual chip packages. Such singulation is typically accomplished via a saw singulation process. In this process, a saw blade is advanced along “saw streets” which extend in prescribed patterns between the lead frames as required to facilitate the separation of the lead frames from each other in the required manner.
As indicated above, in certain current MLF package designs, the bottom surface of each of the leads of the lead frame is exposed within the bottom surface of the package body formed by the hardening of the encapsulant material, with one end surface of each of the leads being exposed within a corresponding peripheral or side surface of the package body. In this design, solderable surfaces are provided on only the bottom surface of the package body, and more particularly, by the exposed bottom surfaces of the leads. The MLF package is attached to the printed circuit board or motherboard by printing solder paste on the board, positioning the exposed bottom surfaces of the leads upon the solder paste, and completing a hot reflow process. However, the limited solderable area on the MLF package and resultant decreased solder joint strength gives rise to reliability problems concerning the potential failure of one or more of the solder joints between the MLF package and the motherboard. Previous attempts to increase solder joint life were to optimize or increase the size of the leads, the material set, and the board design. However, material sets which give the best package level performance may also produce the worst board level performance, thus necessitating another option to increase overall solder strength and reliability between the MLF package and the motherboard.
The present invention addresses the solder joint reliability issue by providing a lead frame design wherein those surfaces of the leads exposed within the bottom and side surfaces of the package body are plated and configured in a manner allowing solder to reflow up the lead ends, thereby increasing the overall solder joint strength and reliability between the MLF package and motherboard. In this regard, the plated lead ends increase the solderable area of the leads of the MLF package to the motherboard, with the final solder joint being stronger with increased second level reliability.
The uniquely configured lead ends may be formed as a half-etched feature in the lead frame design. This half-etched design has the effect of increasing saw efficiency in the saw singulation process due to the resultant reduction of copper or other metal in the saw streets. The half-etched design further reduces the cut line interface between the saw and each of the leads, thus reducing the amount of burring which typically occurs upon the leads as a result of the saw singulation process. Saw generated burrs at the seating plan of each lead in the lead frame adversely affect solder mounting and joint reliability. In current MLF package fabrication methodologies, lead burrs are controlled by limiting the feed rate of the saw along the saw streets and by using specifically developed, high cost saw blades. The reduced burring attributable to the half-etched design of the lead ends increases output and allows for the use of lower cost saw blades.
As indicated above, as a result of forming the half-etched plated ends of the leads, metal material is removed from the saw streets, thus reducing the area of each of the leads susceptible to burring. This plated, half-etched feature in the present lead frame design becomes an integral part of the finished lead connection of the MLF package. The uniquely configured, plated ends of the leads of the lead frame constructed in accordance in accordance with the present invention may alternatively be formed through the implementation of a two-pass saw process, though such process does not provide the same saw cut efficiency and reduced burring attributes of the half-etched design. The half-etched or sawed leads can be incorporated into standard lead frame designs at no additional cost, and provide higher board-level (solder joint) reliability and improved lead dimensional stability. In the case of the half-etched leads, further advantages include the improvement of the saw singulation process (increased saw cut efficiency), and reduced burring on the saw cut leads as indicated above.
In accordance with the present invention, there is provided a lead frame which comprises a frame defining a central opening. Disposed within the central opening is a die pad which is connected to the frame. Also connected to the frame are a plurality of leads which extend within the opening toward the die pad. Each of the leads defines opposed top and bottom surfaces, an inner end, an outer end, and an opposed pair of side surfaces. The bottom surface and the outer end collectively define a corner region of the lead. Formed within the corner region is a recess. The recesses facilitate the reflow of solder up the lead ends, thereby increasing the overall solder joint strength and reliability between the semiconductor package incorporating the lead frame and an underlying substrate such as a printed circuit board or motherboard. The surfaces of the lead defining the recess are plated, with the inclusion of the recess within each lead effectively increasing the solderable area of the leads of the semiconductor package to the printed circuit board, with the final solder joint being stronger with increased second level reliability.
The recesses within the leads may be formed as a half-etched feature in the lead frame design. This half-etched design has the effect of increasing saw efficiency in the saw singulation process due to the resultant reduction of copper or other metal material in the saw streets. The half-etched design further reduces the cut line interface between the saw and each of the leads, thus reducing the amount of burring which typically occurs upon the leads as a result of the saw singulation process.
Further in accordance with the present invention, there is provided a modified inboard design for a semiconductor package which is adapted to facilitate an increase in second level solder joint reliability by creating solder fillets upon those portions of the bottom surfaces of the leads which are exposed within the bottom surface of the package body. More particularly, the solder fillets are created by forming copper bumps upon the exposed bottom surfaces of each of the leads, the copper bumps facilitating the creation of solder fillets. Each of the copper bumps may optionally include a solder plate formed thereon.
The present invention is best understood by reference to the following detailed description when read in conjunction with the accompanying drawings.
These, as well as other features of the present invention, will become more apparent upon reference to the drawings wherein:
Common reference numerals are used throughout the drawings and detailed description to indicate like elements.
Referring now to the drawings wherein the showings are for purposes of illustrating preferred embodiments of the present invention only, and not for purposes of limiting the same,
Each lead frame 12 comprises an outer frame portion 14 which defines a centrally positioned opening 16. Disposed within the opening 16 is a die pad 18 of the lead frame 12. Though not shown in
Each lead frame 12 further comprises a multiplicity of leads 20 which are integrally connected to the outer frame portion 14 and protrude therefrom into the opening 16 toward the peripheral edge of the die pad 18. The leads 28 are typically segregated into four equal sets, with each set being disposed in spaced relation to a respective one of the four peripheral edge segments defined by the die pad 18. Each lead 20 defines a distal, inner end 22 which, as indicated above, is disposed in spaced relation to the peripheral edge of the corresponding die pad 18. As further seen in
In each array within the strip 10, the outer frame portions 14 of the lead frames 12 are integrally connected to each other such that the lead frames 12 of each array are arranged in a matrix wherein the leads 20 thereof extend in multiple rows and columns. As further seen in
The strip 10 typically comprises a first layer which is formed from an insulating material (e.g., a molding compound), and a second layer which is applied to the first layer and formed from a conductive metallic material (e.g., copper). The second layer defines the lead frames 12 and slots 30. The second layer of the strip 10 is preferably formed by chemical etching, with the slots 30 being formed through the implementation of a half-etched technique. In this regard, wherein the first layer is exposed within the opening 16, the slots 30 do not extend all the way to the first layer.
In the strip 10, each gap G (collectively defined by sections of the outer frame portions 14 as indicated above), portions of the leads 20 extending thereto, and the slots 30 formed therein collectively define a saw street S of the strip 10. Due to the arrangement of the lead frames 12 in a matrix within each array of the strip 10, multiple lateral and longitudinal saw streets S are defined within the strip 10. In the manufacture of integrated circuit chip packages from the strip 10, the passage of a cutting blade along each saw street S separates the lead frames 12 from each other. During the saw singulation process used to separate the lead frames 12 from each other, the saw blade cutting along each saw street S removes the metal material collectively defined by the outer frame portions 14 in each gap G, and further removes or severs a portion of each lead 20 disposed furthest from the corresponding die pad 18. Additionally, the saw blade passes through each slot 30 within each gap G. As it cuts along each saw street S, the saw blade is always cutting the metal within the gap G, though the amount of metal cut is reduced when the saw blade passes through the aligned spaces separating the leads 20 from each other (such spaces including only the first layer due to the complete etching of the metal second layer) and the slots 30 (attributable to the reduced thickness facilitated by the half-etched second layer).
Referring now to
Referring now to
In addition to the slots 30 (alone or in combination with the secondary slots 36) increasing saw efficiency in the saw singulation process due to the resultant reduction of copper or other metal material in each saw street S, the slots 30 further reduce the cut line interface between the saw blade and each of the leads 20, thus reducing the amount of burring which typically occurs as a result of the saw singulation process. As indicated above, saw generated burrs at the seating plan of each lead 20 in the lead frame 12 adversely affect solder mounting and joint reliability. In current semiconductor package fabrication methodologies, lead burrs are controlled by limiting the feed rate of the saw blade along each saw street S and by using specifically developed, high cost saw blades. The reduced burring attributable to the inclusion of the slots 30 within the strip 10 increases output and allows for the use of lower cost saw blades, thereby providing a further increased cost benefit. Stated another way, the reduced area of those portions of each of the leads 20 which are cut by the saw blade during the saw singulation process attributable to the removal of metal material by the formation of the slots 30 in turn reduces the area of the leads 20 susceptible to burring.
Referring now to
The package body 42 of the semiconductor package 40 is applied to the lead frame 12 such that the bottom surface of the die pad 18 is exposed within the bottom surface 46 of the package body 42. Additionally, at least portions of the bottom surfaces 28 of the leads 20 of the lead frame 12 are exposed within the bottom surface 46 of the package body 42, with the outer ends 32 of the leads 20 being exposed within the side surface 50 of the package body 42. Thus, each of the recesses 34 is fully exposed within the semiconductor package 40. The inner ends 22, side surfaces 24 and top surfaces 26 of the leads 20 are covered by the package body 42, as are the top and side surfaces of the die pad 18. As shown in
Referring now to
Referring now to
As seen in
The recesses 54 formed in accordance with the second embodiment of the present invention provide the same functionality as the recesses 34, i.e., allow solder to reflow up the ends of the leads 20 within the recesses 54. However, the formation of the recesses 54 via the two-pass saw process does not provide the same saw cut efficiency and reduced burring attributes as result from the formation of the recesses 34 through the use of the slots 30.
Further in accordance with the present invention, it is contemplated that the leads 20 of each of the lead frames 12 may have a solder bump 56 formed thereon prior to any saw singulation of the strip 10 either along the saw street S or first and second saw cuts S1, S2. Exemplary solder bumps 56 formed on one of the leads 20 are shown in
If the solder bumps 56 are to be pre-formed on each of the leads 20 including the recesses 54, the complete fabrication of the semiconductor packages will occur in a three-step process. The first step would entail the completion of the first saw cut S1 described above in relation to
The leads 20 of the lead frames 12 may each be provided with the solder bump 56 without necessarily completing the saw singulation of the strip in the aforementioned two-step or three-step process. In this regard, the solder bumps 56 could simply be formed on each of the leads 20, with the cuts being completed in the manners previously described in relation to the first and second embodiments of the present invention. However, if the solder bumps 56 are to be formed on the leads 20 prior to the single cut (in the case of the first embodiment) or the two-step cut (in the case of the second embodiment), such solder bumps 56 must be carefully positioned on the leads 20 so that the saw singulation process does not cause excessive burring or smearing thereof.
The solder bumps 56 are typically created by screen printing solder paste on the leads 20, and are optimized for reworkability and second level reliability. In current chip package designs, solderable surfaces are provided by the bottom surfaces of the leads as indicated above, with the chip package being attached to the printed circuit board by printing solder paste on the board and completing a hot reflow process. Thus, the solder joint standoff height is completely dependent upon the amount of paste printed on the printed circuit board. The solder bumps 56, if included on the leads 20, increase the standoff by two or three mils, thus enhancing solder joint reliability. Additionally, the rework process at the printed circuit board level involves removing the old component, printing paste on the printed circuit board at the component site, and attaching a new component. For tight spaces, it is very difficult to print paste on the printed circuit board, with the joint formation usually being relied upon by solder balls on CSP packages. This poses a challenge for MLF packages as there are no solder balls on the package. By creating solder bumps 56 on the semiconductor package 40, the same will not require solder paste printing on the printed circuit board for reworking.
The portion of the semiconductor package 40 shown in
Referring now to
The semiconductor package 58 of the inboard lead design as shown in
Referring now to
Subsequent to the formation of the mold cap 82, the tape layer 80 is removed from the lead frame strip 76 (
This disclosure provides exemplary embodiments of the present invention. The scope of the present invention is not limited by these exemplary embodiments. Numerous variations, whether explicitly provided for by the specification or implied by the specification, such as variations in structure, dimension, type of material and manufacturing process may be implemented by one of skill in the art in view of this disclosure.
The present application is a continuation of U.S. application Ser. No. 10/122,598 entitled LEAD FRAME WITH PLATED END LEADS AND RECESSES filed Apr. 15, 2002 now U.S. Pat. No. 6,608,366.
Number | Name | Date | Kind |
---|---|---|---|
5703407 | Hori | Dec 1997 | A |
5710064 | Song et al. | Jan 1998 | A |
5723899 | Shin | Mar 1998 | A |
5736432 | Mackessy | Apr 1998 | A |
5745984 | Cole, Jr. et al. | May 1998 | A |
5753977 | Kusaka et al. | May 1998 | A |
5763940 | Shibusawa et al. | Jun 1998 | A |
5766972 | Takahashi et al. | Jun 1998 | A |
5770888 | Song et al. | Jun 1998 | A |
5776798 | Quan et al. | Jul 1998 | A |
5783861 | Son | Jul 1998 | A |
5801440 | Chu et al. | Sep 1998 | A |
5814877 | Diffenderfer et al. | Sep 1998 | A |
5814881 | Alagaratnam | Sep 1998 | A |
5814883 | Sawai et al. | Sep 1998 | A |
5814884 | Davis et al. | Sep 1998 | A |
5817540 | Wark | Oct 1998 | A |
5818105 | Kouda | Oct 1998 | A |
5821457 | Mosley et al. | Oct 1998 | A |
5821615 | Lee | Oct 1998 | A |
5834830 | Cho | Nov 1998 | A |
5835988 | Ishii | Nov 1998 | A |
5844306 | Fujita et al. | Dec 1998 | A |
5856911 | Riley | Jan 1999 | A |
5859471 | Kuraishi et al. | Jan 1999 | A |
5866939 | Shin et al. | Feb 1999 | A |
5871782 | Choi | Feb 1999 | A |
5874784 | Aoki et al. | Feb 1999 | A |
5877043 | Alcoe et al. | Mar 1999 | A |
5886397 | Ewer | Mar 1999 | A |
5886398 | Low et al. | Mar 1999 | A |
5894108 | Mostafazadeh | Apr 1999 | A |
5897339 | Song et al. | Apr 1999 | A |
5900676 | Kweon et al. | May 1999 | A |
5903049 | Mori | May 1999 | A |
5903050 | Thurairajaratnam et al. | May 1999 | A |
5917242 | Ball | Jun 1999 | A |
5939779 | Kim | Aug 1999 | A |
5942794 | Okumura et al. | Aug 1999 | A |
5951305 | Haba | Sep 1999 | A |
5959356 | Oh | Sep 1999 | A |
5969426 | Baba et al. | Oct 1999 | A |
5973388 | Chew et al. | Oct 1999 | A |
5976912 | Fukutomi et al. | Nov 1999 | A |
5977613 | Takata et al. | Nov 1999 | A |
5977615 | Yamaguchi et al. | Nov 1999 | A |
5977630 | Woodworth et al. | Nov 1999 | A |
5981314 | Glenn et al. | Nov 1999 | A |
5986333 | Nakamura | Nov 1999 | A |
5986885 | Wyland | Nov 1999 | A |
6001671 | Fjelstad | Dec 1999 | A |
6018189 | Mizuno | Jan 2000 | A |
6025640 | Yagi et al. | Feb 2000 | A |
6031279 | Lenz | Feb 2000 | A |
RE36613 | Ball | Mar 2000 | E |
6034423 | Mostafazadeh | Mar 2000 | A |
6040626 | Cheah et al. | Mar 2000 | A |
6043430 | Chun | Mar 2000 | A |
6060768 | Hayashida et al. | May 2000 | A |
6060769 | Wark | May 2000 | A |
6072228 | Hinkle et al. | Jun 2000 | A |
6075284 | Choi et al. | Jun 2000 | A |
6081029 | Yamaguchi | Jun 2000 | A |
6084310 | Mizuno et al. | Jul 2000 | A |
6087722 | Lee et al. | Jul 2000 | A |
6100594 | Fukui et al. | Aug 2000 | A |
6113474 | Constantini et al. | Sep 2000 | A |
6118174 | Kim | Sep 2000 | A |
6118184 | Ishio et al. | Sep 2000 | A |
RE36907 | Templeton, Jr. et al. | Oct 2000 | E |
6130115 | Okumura et al. | Oct 2000 | A |
6130473 | Mostafazadeh et al. | Oct 2000 | A |
6133623 | Otsuki et al. | Oct 2000 | A |
6140154 | Hinkle et al. | Oct 2000 | A |
6143981 | Glenn | Nov 2000 | A |
6169329 | Farnworth et al. | Jan 2001 | B1 |
6177718 | Kozono | Jan 2001 | B1 |
6181002 | Juso et al. | Jan 2001 | B1 |
6184465 | Corisis | Feb 2001 | B1 |
6194777 | Abbott et al. | Feb 2001 | B1 |
6197615 | Song et al. | Mar 2001 | B1 |
6198171 | Huang et al. | Mar 2001 | B1 |
6201186 | Daniels et al. | Mar 2001 | B1 |
6201292 | Yagi et al. | Mar 2001 | B1 |
6204554 | Ewer et al. | Mar 2001 | B1 |
6208020 | Minamio | Mar 2001 | B1 |
6208021 | Ohuchi et al. | Mar 2001 | B1 |
6208023 | Nakayama et al. | Mar 2001 | B1 |
6211462 | Carter, Jr. et al. | Apr 2001 | B1 |
6218731 | Huang et al. | Apr 2001 | B1 |
6222258 | Asano et al. | Apr 2001 | B1 |
6225146 | Yamaguchi et al. | May 2001 | B1 |
6229200 | Mclellan et al. | May 2001 | B1 |
6229205 | Jeong et al. | May 2001 | B1 |
6238952 | Lin | May 2001 | B1 |
6239384 | Smith et al. | May 2001 | B1 |
6242281 | Mclellan et al. | Jun 2001 | B1 |
6256200 | Lam et al. | Jul 2001 | B1 |
6258629 | Niones et al. | Jul 2001 | B1 |
6281566 | Magni | Aug 2001 | B1 |
6281568 | Glenn et al. | Aug 2001 | B1 |
6282095 | Houghton et al. | Aug 2001 | B1 |
6285075 | Combs et al. | Sep 2001 | B1 |
6291271 | Lee et al. | Sep 2001 | B1 |
6291273 | Miyaki et al. | Sep 2001 | B1 |
6294100 | Fan et al. | Sep 2001 | B1 |
6294830 | Fjelstad | Sep 2001 | B1 |
6295977 | Ripper et al. | Oct 2001 | B1 |
6297548 | Moden et al. | Oct 2001 | B1 |
6303984 | Corisis | Oct 2001 | B1 |
6303997 | Lee | Oct 2001 | B1 |
6307272 | Takahashi et al. | Oct 2001 | B1 |
6309909 | Ohgiyama | Oct 2001 | B1 |
6316838 | Ozawa et al. | Nov 2001 | B1 |
6323550 | Martin et al. | Nov 2001 | B1 |
6326243 | Suzuya et al. | Dec 2001 | B1 |
6326244 | Brooks et al. | Dec 2001 | B1 |
6326678 | Karnezos et al. | Dec 2001 | B1 |
6339255 | Shin | Jan 2002 | B1 |
6348726 | Bayan et al. | Feb 2002 | B1 |
6355502 | Kang et al. | Mar 2002 | B1 |
6358778 | Shinohara | Mar 2002 | B1 |
6369454 | Chung | Apr 2002 | B1 |
6373127 | Baudouin et al. | Apr 2002 | B1 |
6380048 | Boon et al. | Apr 2002 | B1 |
6384472 | Huang | May 2002 | B1 |
6388336 | Venkateshwaran et al. | May 2002 | B1 |
6395578 | Shin et al. | May 2002 | B1 |
6400004 | Fan et al. | Jun 2002 | B1 |
6414385 | Huang et al. | Jul 2002 | B1 |
6437429 | Su et al. | Aug 2002 | B1 |
6444499 | Swiss et al. | Sep 2002 | B1 |
6448633 | Yee et al. | Sep 2002 | B1 |
6452279 | Shimoda | Sep 2002 | B2 |
6464121 | Reijnders | Oct 2002 | B2 |
6476474 | Hung | Nov 2002 | B1 |
6482680 | Khor et al. | Nov 2002 | B1 |
6498099 | McLellan et al. | Dec 2002 | B1 |
6498392 | Azuma | Dec 2002 | B2 |
6507120 | Lo et al. | Jan 2003 | B2 |
6559525 | Huang | May 2003 | B2 |
6700188 | Lin | Mar 2004 | B2 |
6888231 | Maeda | May 2005 | B2 |
20010014538 | Kwan et al. | Aug 2001 | A1 |
20020063315 | Huang et al. | May 2002 | A1 |
20020066948 | Kim | Jun 2002 | A1 |
20020079563 | Shimanuki | Jun 2002 | A1 |
20020182773 | Su et al. | Dec 2002 | A1 |
20030006055 | Chien-Hung et al. | Jan 2003 | A1 |
20030073265 | Hu et al. | Apr 2003 | A1 |
20030102537 | McLellan et al. | Jun 2003 | A1 |
20030155638 | Ito | Aug 2003 | A1 |
20040046240 | Hasebe et al. | Mar 2004 | A1 |
20040140541 | Shimanuki | Jul 2004 | A1 |
20050116321 | Li et al. | Jun 2005 | A1 |
Number | Date | Country |
---|---|---|
1973494 | Aug 1997 | DE |
54021117 | Jun 1979 | EP |
59050939 | Mar 1984 | EP |
0393997 | Oct 1990 | EP |
0459493 | Dec 1991 | EP |
0720225 | Mar 1996 | EP |
0720234 | Mar 1996 | EP |
0794572 | Oct 1997 | EP |
0844665 | May 1998 | EP |
0936671 | Aug 1999 | EP |
0989608 | Mar 2000 | EP |
1032037 | Aug 2000 | EP |
55163868 | Dec 1980 | JP |
5745959 | Mar 1982 | JP |
58160095 | Aug 1983 | JP |
59208756 | Nov 1984 | JP |
59227143 | Dec 1984 | JP |
60010756 | Jan 1985 | JP |
60116239 | Aug 1985 | JP |
60195957 | Oct 1985 | JP |
60231349 | Nov 1985 | JP |
61395855 | Feb 1986 | JP |
629639 | Jan 1987 | JP |
63205935 | Aug 1988 | JP |
63233555 | Sep 1988 | JP |
63249345 | Oct 1988 | JP |
63316470 | Dec 1988 | JP |
64054749 | Mar 1989 | JP |
1106456 | Apr 1989 | JP |
4098864 | Mar 1992 | JP |
5129473 | May 1993 | JP |
5166992 | Jul 1993 | JP |
5283460 | Oct 1993 | JP |
692076 | Apr 1994 | JP |
6260532 | Sep 1994 | JP |
7297344 | Nov 1995 | JP |
7312405 | Nov 1995 | JP |
864634 | Mar 1996 | JP |
8125066 | May 1996 | JP |
8222682 | Aug 1996 | JP |
8306853 | Nov 1996 | JP |
98205 | Jan 1997 | JP |
98206 | Jan 1997 | JP |
98207 | Jan 1997 | JP |
992776 | Apr 1997 | JP |
9293822 | Nov 1997 | JP |
10022447 | Jan 1998 | JP |
10199934 | Jul 1998 | JP |
10256240 | Sep 1998 | JP |
00150765 | May 2000 | JP |
941979 | Jan 1994 | KR |
199772358 | Nov 1997 | KR |
100220154 | Jun 1999 | KR |
0049944 | Jun 2002 | KR |
9956316 | Nov 1999 | WO |
9967821 | Dec 1999 | WO |
Number | Date | Country | |
---|---|---|---|
Parent | 10122598 | Apr 2002 | US |
Child | 10459230 | US |