Number | Name | Date | Kind |
---|---|---|---|
5958635 | Reich et al. | Sep 1999 | A |
6120952 | Pierrat et al. | Sep 2000 | A |
6284419 | Pierrat et al. | Sep 2001 | B2 |
6319644 | Pierrat et al. | Nov 2001 | B2 |
Number | Date | Country |
---|---|---|
1164432 | Dec 2001 | EP |
Entry |
---|
McCallum, Some Lithographic Limits of Back End Lithography, Nikon Precision Europe GmbH. Nikon Court, Kirkton Campus, Livingston EH54 7DL, UK, 8 pgs (2001). |