The present invention relates to a manufacturing method of an imaging device having an imaging optical system to lead object light and an imaging element to perform photoelectric conversion of the object light led by the imaging optical system, an imaging device and a portable terminal provided with the imaging device.
A compact and thin imaging device has been installed in a portable terminal represented by a compact and thin electronic device such as a mobile phone and a PDA (Personal digital Assistant), as a result, transmission of sound data as well as image data to a remote area has became possible.
As the manufacturing method of the above compact imaging device, there is known a method where a plurality of image sensors are formed on a silicon wafer in an array, a lens array where a plurality of optical lenses are formed is adhered on the silicon wafer and the silicon wafer is divided in accordance with the arrangement of the image sensors (for example. Patent Document 1: Unexamined Japanese Patent Application Publication No. 2002-290842).
On the other hand, conventionally, in order to identify semiconductor devices, there have been known a method to apply solder resist and print on the solder resist (for example, Patent Document 2: Unexamined Japanese Patent Application Publication No. 2000-332376), and a method that an stamping area is formed at an inner lead or a tub of an IC package sealed by a transparent resin and a mark is stamped there (for example, Patent Document 3: Unexamined Japanese Patent Application Publication No. 2001-127236).
However, in the manufacturing method of the Patent Document 1, the lens array is adhered so as to correspond to individuals of the plurality of the image sensors on the silicon wafer, thereafter the wafer is cut. Thus there is a problem that the wafer is divided into very small image sensors and orientation of each image sensor is not easily identified.
On the other hand, printing in a post-processing for identification such as the above Patent Document 2 requires a new process which creates a problem of cost increase. Also, in case of the imaging device, since it is covered by a member having light shielding characteristic, marking inside marks no sense.
The present invention has one aspect to solve the above problems and an object of the present invention is to provide a manufacturing method of the imaging device which enables to facilitate identification of orientation of the image sensors after separating when the plurality of imaging devices are formed integrally and cut into the individual imaging devices, and can identify at which position the imaging device was formed when it is formed integrally, as well as an imaging device.
The above problems are solved by the following items.
forming a plurality of the imaging elements on one surface of a silicon wafer;
sealing the light receiving pixel sections with respect to each imaging element by the imaging optical system;
cutting the silicon wafer into each imaging element;
placing the plurality of the imaging elements having been cut on a substrate;
connecting the plurality of the imaging elements with the substrate electrically;
molding the substrate, the imaging optical system and imaging element integrally by a metal mold at which identification marks are formed with respect to each of the plurality of the imaging elements; and
cutting the molded substrate into each of the imaging elements to separate.
forming a plurality of the imaging elements on one surface of a silicon wafer;
sealing the light receiving pixel sections with respect to each imaging element by an optical member nearest to an image surface side to configure the imaging optical system;
cutting the silicon wafer into each of the imaging elements;
placing the plurality of the imaging elements having been cut on a substrate;
connecting the plurality of the imaging elements with the substrate electrically;
molding the substrate, the optical member nearest to the image surface side to configure the imaging optical system and the imaging element integrally by an metal mold at which identification marks are formed with respect to each of the plurality of the imaging elements;
installing other optical member to configure the imaging optical system; and
cutting the molded substrate into each of the imaging elements to separate.
forming a plurality of the imaging elements on one surface of a silicon wafer;
sealing the light receiving pixel sections with respect to each imaging element by an optical member nearest to an image surface side to configure the imaging optical system;
cutting the silicon wafer into each imaging element;
placing the plurality of the imaging elements having been cut on a substrate;
connecting the plurality of the imaging elements with the substrate electrically;
molding the substrate, a part of the optical member to configure the imaging optical system and the imaging element integrally;
installing other optical member to configure the imaging optical system and a light shielding member unit at which identification marks with respect to each of the plurality of the imaging elements and
cutting the molded substrate into each of the imaging elements to separate.
According to the present embodiment, there are provided an imaging device manufacturing method which facilitates identification of orientation of the image sensors after separating when the plurality of the imaging devices are formed integrally and cut into the individual imaging devices and enables to identify at which position the imaging device was formed when it is formed integrally, as well as an imaging device.
a), (b) and (c) are frame formats showing process steps in an initial stage of a manufacturing method of an imaging device related to a first embodiment.
a), (b) (c) and (d) are frame formats showing process steps in a later stage of a manufacturing method of an imaging device related to a first embodiment.
a), (b), (c) and (d) are frame formats showing process steps in an initial stage of a manufacturing method of an imaging device related to a second embodiment.
a), (b) and (c) are frame formats showing process steps in a middle stage of a manufacturing method of an imaging device related to a second embodiment.
a) and (b) are frame formats showing process steps in a later stage of a manufacturing method of an imaging device related to a second embodiment.
a) and (b) are frame formats showing process steps in a later stage of a manufacturing method of an imaging device related to a third embodiment.
a) and (b) are views showing an example where a lens group integral unit and a light shielding member unit are formed integrally in advance.
11 Silicon wafer
12 Imaging element
13 Adhesive
14 Optical member
19 Dicing blade
21 Substrate
25 Identification mark
30 Lens group integral unit
31 Lens
32 Light shielding member unit
50 Imaging device
100 Mobile phone
MD Molding
YB Wire bonding
Embodiments of the present invention will be described specifically as follow without the present invention being limited to the embodiments thereof.
a), (b) and (c) are frame formats showing process steps in an initial stage of a manufacturing method of an imaging device related to a first embodiment. The figures on the left hand side schematically show total appearances and the figures on the right hand side schematically show cross-sectional views of individuals in the total appearance thereof.
First, a plurality of imaging elements 12 are formed on one surface of a silicon wafer 11 shown by
Next, as the
Next, as
a), (b) (c) and (d) are frame formats showing process steps in a later stage of a manufacturing method of an imaging device related to a first embodiment.
As
Incidentally, the chips of the imaging elements 12 to be placed are only the chips of the imaging elements 12 which are judged to be conforming chips through an inspection. Whereby wasting of parts such as the lenses to be installed afterward can be saved.
Next, as
After that, as
When this occurs, at the metal mold used in molding, an identification mark 25 to show a position of a reference pin among terminals of the imaging element is formed in respect to each image element. As the figure shows, on outer surfaces of the plurality of the imaging devices formed integrally, the identification marks 25 to show the individual positions of the reference pins are formed. The identification mark can be in a shape of a projection or a recess.
After that, the silicon wafer is cut along a broken lines shown in the
Incidentally, in the above description, while the imaging optical system has a single lens, an imaging optical system wherein a plurality of lenses are integrated by an adhesive is possible.
The identification mark 25 shown in
As above, using alphabet or numeral as the identification mark, the positions when the individual imaging devices were integrally formed can be identified.
a), (b), (c) and (d) are frame formats showing process steps in an initial stage of a manufacturing method of an imaging device related to a second embodiment. The figures on the left hand side schematically show total appearances and the figures on the right hand side are cross-sectional views showing individuals in the total appearances thereof.
First, a plurality of the imaging elements 12 are formed on one surface of the silicon water 11 shown by
Next, as
After that, as
Next, as
a), (b) and (c) are frame formats showing process steps in a middle stage of a manufacturing method of an imaging device related to a second embodiment.
The plurality of the chips of the individual imaging elements 12 to which the optical members 14 are adhered are placed on the substrate 21. On the substrate 21, a plurality of wires corresponding to the chips of the individual imaging elements 12 are formed so that the plurality of the imaging elements can be placed.
Incidentally, the chips of the imaging elements 12 to be placed are only the chips of the imaging elements 12 which are judged to be conforming chips through an inspection. Whereby wasting of parts such as lenses to be installed afterward can be saved.
Next, as
After that, as
a) and (b) are frame formats showing process steps in a later stage of a manufacturing method of an imaging device related to a second embodiment.
As
Whereby, eight units of imaging devices shown in the
Thereafter, by cutting the wafer at broken lines shown in
By the above manner, the position of the identification mark 25 indicates the position of the reference pin among the terminals of the imaging element, also indicates at which position the individual imaging devices were located when the plurality of the imaging devices were integrally formed. Whereby mis-installation of the imaging elements in an unillustrated equipment can be avoided.
Further, by always installing each lens 31 of the lens group integrated unit 30 at a position corresponding to the same identification mark, for example, in case the lens 31 at a specific position is defective due to a problem of the metal mold among the lens group integral unit, judgment is possible even after the imaging element in which the lens has been installed is cut to be separated.
Meanwhile, the examples where the infrared ray protection coating is applied to the optical member 14 have been described without being limited to the coating thereof. The lens 31 applied by infrared ray protection coating or a separate infrared ray protection filter can be installed.
Also, the examples using the optical member, wherein the positioning member is formed in the area through which the object light does not pass and the area through which the object light passes is formed to be the parallel plane have been described. The optical member and the lens entirely configured with the parallel plane are possible.
The manufacturing method of the third embodiment is the same as that of the second embodiment at the process steps in the initial and middle stage. Thus only the process step in the later stage will be described.
a) and (b) are frame formats showing process steps in a later stage of a manufacturing method of an imaging device related to a third embodiment.
After process steps of the initial stage and the middle stage shown by
Incidentally, as
After that, by cutting the wafer alone the broken lines shown in
Incidentally, the light shielding member unit 32 is not limited to the resin mold product, it can be a metal member formed by etching and so forth. Also, it can be used by stacking a plurality of the shields. Meanwhile, it is preferred that the lens and the light shielding member unit are installed while being connected with the flexible arm sections 31r costwise, however individual lens 31 and the light shielding member unit 32 can be installed separately.
As above, the position of the identification mark 25 shows the position of the reference pin among the terminals of the imaging element, also shows at which position each imaging device has been located when the plurality of the imaging devices are formed integrally. Thus mis-installation of the imaging device into an unillustrated equipment is avoided.
Further, by always installing each lens 31 of the lens group integral unit 30 at the position which corresponds to the same identification mark, for example, in case the lens 31 at a specific position is defective due to a problem of the metal mold among the lens group integral unit 30, the defective lens can be identified even after the imaging devices in which the lenses are installed are separated.
Incidentally, while the examples in which the optical member 14 is coated with infrared ray protection coating have been described without being limited to the coated optical member thereof, the lens 31 coated with infrared ray protection coat or a separate infrared ray protection filter can be installed.
Also, the examples using the optical member, wherein the positioning member is formed in the area through which the object light does not pass and the area through which the object light passes is formed to be the parallel plane have been described. The optical member entirely configured with the parallel plane are possible.
a) and (b) are views showing an example where a lens grope integral unit and a light shielding member unit are formed integrally in advance.
In the lens group integral unit 30 and the light shielding member unit 32, shown in
In the lens group integral unit 30 shown in
The above configuration can be formed as follow. Two arm sections and the light shielding section 33 are molded in advance with the resin having light shielding characteristic by the first metal mold, then the product molded with the resin having light shielding characteristic is inserted in the second metal mold, and then the lens 31 and two arm sections 31r are molded by the second metal mold with the resin having transparency, in addition to the two arm sections and the shielding section 33 having the light shielding characteristic in the second metal mold.
As above, the lens and the shielding member unit on which the identification mark for each imaging element are formed integrally in advance and then installation can be carried out after the plurality of the chips of the imaging elements 12 are molded integrally.
Incidentally, in the above first to third embodiments, the examples where eight imaging devices integrally formed and separated have been described, however the number of the products molded integrally is obviously not limited to eight.
In the mobile phone 100 shown in
Meanwhile, the imaging device can be located above or a side surface of the display screen D2 in the upper housing. Also, the mobile phone is obviously not limited to a folding type.
As
On the other hand, the mobile phone 100 controls each section overall and is provided with the control section (CPU) 101 to execute programs in accordance with each process, the operation buttons 60 representing the input section to instruct and input telephone numbers, the display screens D1 and D2 to display predetermined data and photographed images, a wireless communication section 80 to realize various information communication with an external server, a memory section (ROM) 91 to store a system program of the mobile phone 100, various processing programs and necessary data such as terminal ID, temporary memory (RAM) 92 to temporarily store programs and data executed by the control section 101, processed data and image data captured by the imaging device 50 or to be used as a work area.
Also, the image signal inputted from the imaging device 50 is stored in a nonvolatile memory section (flush memory) 93 via control section 101 of the mobile phone 100, displayed on the display screens D1 and D2 or outputted to an outside as image information via the wireless communication section 80.
Number | Date | Country | Kind |
---|---|---|---|
2007-179529 | Jul 2007 | JP | national |
Filing Document | Filing Date | Country | Kind | 371c Date |
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PCT/JP2008/061450 | 6/24/2008 | WO | 00 | 12/15/2009 |