Number | Date | Country | Kind |
---|---|---|---|
4-223072 | Aug 1992 | JPX | |
4-273202 | Oct 1992 | JPX | |
5-077151 | Apr 1993 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4483194 | Rudolf | Nov 1984 | |
4574327 | Wilner | Mar 1986 | |
4598585 | Boxenhorn | Jul 1986 | |
4609968 | Wilner | Sep 1986 | |
4653326 | Danel et al. | Mar 1987 | |
4679434 | Stewart | Jul 1987 | |
4711128 | Boura | Dec 1987 | |
4744248 | Stewart | May 1988 | |
4744249 | Stewart | May 1988 | |
4783237 | Aine et al. | Nov 1988 | |
4891984 | Fujii et al. | Jan 1990 | |
4922756 | Henrion | May 1990 | |
5016072 | Greiff | May 1991 | |
5151763 | Marek et al. | Sep 1992 | |
5277053 | McLane et al. | Jan 1994 |
Number | Date | Country |
---|---|---|
60-244864 | Dec 1985 | JPX |
61-073071 | Apr 1986 | JPX |
61-114123 | May 1986 | JPX |
62-27666 | Feb 1987 | JPX |
62-207917 | Sep 1987 | JPX |
374926 | Nov 1991 | JPX |
2240178 | Jul 1991 | GBX |
WO9322690 | Nov 1993 | WOX |
Entry |
---|
Richard S. Payne, et al.: "Surface Micromachined Accelerometer: A Technology Update", SAE International, Feb. 25-Mar. 1, 1991, pp. 127-135. |