Number | Date | Country | Kind |
---|---|---|---|
62-234119 | Sep 1987 | JPX |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/JP88/00941 | 9/16/1988 | 3/17/1989 | 3/17/1989 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO89/02572 | 3/23/1989 |
Number | Name | Date | Kind |
---|---|---|---|
3601492 | Reichard | Aug 1971 | |
4498772 | Jastrzebski et al. | Feb 1985 | |
4625114 | Bosacchi et al. | Nov 1986 | |
4707611 | Southwell | Nov 1987 |
Number | Date | Country |
---|---|---|
4838169 | JPX | |
533363 | Jan 1978 | JPX |
62-11106 | Jan 1987 | JPX |
62-119403 | May 1987 | JPX |
62-134507 | Jun 1987 | JPX |
0737817 | May 1980 | SUX |
Entry |
---|
Raif et al., "Rapid Nondestructive Method for Measuring the Refractive Index and Thickness of Thin Dielectric Films" Aug. 1972, pp. 48-50. |
Warnecke et al., IBM J. Res. Develop, pp. 256-262 "Refractive Index Dispersion in Semiconductor-Related Thin Films". |