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3686528 | Sheets | Aug 1972 | |
3709434 | Gebbardt et al. | Jan 1973 | |
3876149 | Futerko | Apr 1975 | |
3972474 | Keur | Aug 1976 | |
4161280 | Kasinskas | Jul 1979 | |
4178078 | Hausmann | Dec 1979 | |
4408338 | Grobman | Oct 1983 | |
4455470 | Klein et al. | Jun 1984 | |
4549082 | McMillan | Oct 1985 | |
4560880 | Perrie et al. | Dec 1985 | |
4577122 | Kung | Mar 1986 | |
4584479 | Lamattina et al. | Apr 1986 | |
4607167 | Petric | Aug 1986 | |
4692934 | Forsyth | Sep 1987 | |
4730784 | Boch et al. | Mar 1988 | |
4820927 | Langner et al. | Apr 1989 | |
4830280 | Yankoff | May 1989 | |
4954715 | Zold | Sep 1990 | |
4980563 | George et al. | Dec 1990 | |
4982067 | Marantz et al. | Jan 1991 | |
4990789 | Uesaki | Feb 1991 | |
5012105 | Ando et al. | Apr 1991 | |
5012853 | Bihlmaier | May 1991 | |
5103102 | Economou et al. | Apr 1992 | |
5175929 | Anthony et al | Jan 1993 | |
5185552 | Suzuki et al. | Feb 1993 | |
5204506 | Asmus et al. | Apr 1993 | |
5214290 | Sakai | May 1993 | |
5298835 | Muehlberger et al. | Mar 1994 | |
5376791 | Swanson et al. | Dec 1994 | |
5499282 | Silfvast | Mar 1996 | |
5577092 | Kublak et al. | Nov 1996 | |
5643801 | Ishihara et al. | Jul 1997 | |
5644137 | Waggener et al. | Jul 1997 |
Entry |
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Electron-Gun-Driven EUV Lithography System, OSA Proceedings On Extreme Ultraviolet Lithography, vol. 23, Alan M. Todd, Ira S. Lehrman, Jayaram Krishnaswamy, Vincent Calia, and Robert Gutowski, 1994, 274-277. |
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