Number | Name | Date | Kind |
---|---|---|---|
4889829 | Kawai | Dec 1989 | |
5001539 | Inoue et al. | Mar 1991 | |
5083190 | Pfiester | Jan 1992 | |
5159416 | Kudoh | Oct 1992 | |
5266507 | Wu | Nov 1993 | |
5294821 | Iwamatsu | Mar 1994 | |
5338965 | Malhi | Aug 1994 | |
5373170 | Pfiester et al. | Dec 1994 | |
5399507 | Sun | Mar 1995 | |
5818111 | Jeng | Oct 1998 | |
5854131 | Dawson | Dec 1998 | |
5858869 | Chen | Jan 1999 | |
6034399 | Brady | Mar 2000 |
Entry |
---|
Wolf, "Silicon Processing for the VLSI Era," v.2, p. 66-79, 1990. |