Rausch et al., "Palladium Silicide Contact . . . ", in IBM TDB, vol. 24, No. 7A, Dec. 1981. |
Silicides for VLSI Applications, S. P. Murarka, 1983, Academic Press, pp. 66-69. |
Extended Abstracts of the 17th Conference on Solid State Devices and Materials, "A 2.1-GHz 56-mW Two-Modulus Prescaler IC Using Salicide Base Contact Technology", T. Hirao et al., Tokyo, 1985, pp. 381-384. |
S. P. Murarka, "Refractory Silicides for Integrated Circuits", Journal of Vacuum Science Technology, 17(4), Jul./Aug. 1980, pp. 775-792. |