Number | Date | Country | Kind |
---|---|---|---|
62-71747 | Mar 1987 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3751310 | Cho | Aug 1973 | |
4088515 | Blakeslee et al. | May 1978 | |
4261771 | Dingle et al. | Apr 1981 | |
4389973 | Suntola et al. | Jun 1983 | |
4413022 | Suntola et al. | Nov 1983 | |
4575462 | Dobson et al. | Mar 1986 | |
4640720 | Fexon | Feb 1987 |
Entry |
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Chang et al., "Smooth and Coherent Layers of GaAs and AlAs Grown by M.B.E.", Applied Physics Letters, vol. 28, No. 1, Jan. 1976, pp. 39 to 41. |
Bedair et al., "Atomic Layer Epitaxy of III-V Binary Compounds", Applied Physics Letters, vol. 47, (1), Jul. 1, 1985, pp. 51 to 53. |
"Kinetic Processes in Atomic-Layer Epitaxy of GaAs and AlAs Using Pulsed Vapor-Phased Method", M. Ozeki et al; J. Vac. Sci. Techn. B 5(4), Jul./Aug. 1987, pp. 1184-1186. |