Number | Date | Country | Kind |
---|---|---|---|
2-139616 | May 1990 | JPX | |
2-139620 | May 1990 | JPX | |
2-139621 | May 1990 | JPX |
This application is a division, of application Ser. No. 08/259,125 filed Jun. 13, 1994, which was a continuation of application Ser. No. 07/705,597, filed May 24, 1991, both now abandoned.
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4375717 | Tonnel | Mar 1983 | |
4538344 | Okumura et al. | Sep 1985 | |
4977105 | Okamoto et al. | Dec 1990 | |
5040049 | Raaijmakers | Aug 1991 | |
5049969 | Orbach et al. | Sep 1991 | |
5049980 | Saito et al. | Sep 1991 | |
5060029 | Nishizawa et al. | Oct 1991 | |
5063433 | Matsuo et al. | Nov 1991 | |
5084413 | Fujita et al. | Jan 1992 | |
5126825 | Harada | Jun 1992 | |
5132774 | Matsuura et al. | Jul 1992 | |
5173442 | Carey | Dec 1992 | |
5179042 | Mikoshiba et al. | Jan 1993 | |
5180687 | Mikoshiba et al. | Jan 1993 | |
5210053 | Yamagata | May 1993 | |
5279988 | Saadat et al. | Jan 1994 | |
5286674 | Roth et al. | Feb 1994 | |
5316972 | Mikoshiba et al. | May 1994 | |
5328873 | Mikoshiba et al. | Jul 1994 |
Number | Date | Country |
---|---|---|
0288767 | Nov 1988 | EPX |
0333132 | Sep 1989 | EPX |
0353426 | Feb 1990 | EPX |
0420594A3 | Sep 1991 | EPX |
63-275142 | Nov 1988 | JPX |
1194440 | Aug 1989 | JPX |
1248643 | Oct 1989 | JPX |
Entry |
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H. Pierson, Aluminum Coatings by the Decomposition of Alkyls, Thin Solid Films vol. 45, 1977, Netherlands, at pp. 257-263. |
App. Phys. Let., vol. 57, No. 12, Sep. 17, 1990, pp. 1221-1223, Tsubouchi et al., "Complete Planarization etc.". |
Jp. J. Appl. Phys, Suppl. 21st Conf., 1989, pp. 29-32, Sekiguchi et al. "Epitaxial Growth of Al (100) etc.". |
IEEE Frans. Comp. Hyb. & Manuf. Tech, vol. 10, No. 3, Sep. 1967, pp. 314-320, Kwon et al. "Closely packed Microstrip Lines etc.". |
Number | Date | Country | |
---|---|---|---|
Parent | 259125 | Jun 1994 |
Number | Date | Country | |
---|---|---|---|
Parent | 705597 | May 1991 |