Number | Date | Country | Kind |
---|---|---|---|
4-326944 | Dec 1992 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4774205 | Choi et al. | Sep 1988 | |
4837175 | Calviello | Jun 1989 | |
5045494 | Choi et al. | Sep 1991 | |
5270245 | Gaw et al. | Dec 1993 |
Number | Date | Country |
---|---|---|
59-13487 | Aug 1984 | JPX |
Entry |
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L. Jastrzebski, "SOI by CVD: Epitaxial Lateral Overgrowth (ELO) Process" Jour. of Crystal Growth, vol. 63, 1983, pp. 493-494. |