The present disclosure relates to a method of manufacturing an electrical package, in particular to a method applicable to an electrical package including a carrier with uneven surface.
During grinding, a tape, such as back grind (BG), is used to protect a carrier from moisture or contamination from the carrier. However, when a carrier has an uneven surface, the BG tape cannot conformally attach, resulting in moisture or contamination entering between the carrier and BG tape, degrading the quality of the product.
In some embodiments, a method for manufacturing an electrical package includes: providing a substrate having a first surface and a second surface opposite to the first surface, wherein the second surface has a first level difference; forming an adhesive layer on the second surface of the substrate, wherein the adhesive layer is configured to cover the second surface and provides a third surface spaced apart from the second surface of the substrate, wherein the third surface has a second level difference; disposing a tape on the third surface of the adhesive layer; and performing a removing operation on the first surface of the substrate; wherein the second level difference is smaller than the first level difference.
In some embodiments, a method for manufacturing an electrical package includes: providing a substrate having a first surface and a second surface opposite to the first surface, wherein the substrate comprises a plurality of components and a plurality of recesses on the second surface; forming an adhesive layer on the second surface of the substrate, wherein the adhesive layer comprises a material configured to surround the component or fill into the recesses; disposing a tape on the adhesive layer; and performing a removing operation on the first surface of the substrate.
In some embodiments, a method for manufacturing an electrical package includes: providing a substrate having a first surface and a second surface opposite to the first surface, where the second surface has a first unevenness; forming a leveling layer on the second surface of the substrate and configured to provide a third surface having a second unevenness more even than the first unevenness; disposing a carrier on the third surface to support the substrate; and removing at least a portion of the substrate from the first surface of the substrate.
Aspects of some embodiments of the present disclosure are readily understood from the following detailed description when read with the accompanying figures. It is noted that various structures may not be drawn to scale, and dimensions of the various structures may be arbitrarily increased or reduced for clarity of discussion.
Common reference numerals are used throughout the drawings and the detailed description to indicate the same or similar components. Embodiments of the present disclosure will be readily understood from the following detailed description taken in conjunction with the accompanying drawings.
The following disclosure provides many different embodiments, or examples, for implementing different features of the provided subject matter. Specific examples of components and arrangements are described below to explain certain aspects of the present disclosure. These are, of course, merely examples and are not intended to be limiting. For example, the formation of a first feature over or on a second feature in the description that follows may include embodiments in which the first and second features are formed or disposed in direct contact, and may also include embodiments in which additional features may be formed or disposed between the first and second features, such that the first and second features may not be in direct contact. In addition, the present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.
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The electronic structure 102 may include a substrate 110. In some embodiments, the substrate 110 may include a semiconductor carrier, a glass carrier, a ceramic carrier or other suitable carriers. For example, the substrate 110 may include a wafer, which may include silicon; germanium; a compound semiconductor including silicon carbide, gallium arsenic, gallium phosphide, indium phosphide, indium arsenide, and/or indium antimonide; an alloy semiconductor including SiGe, GaAsP, AlinAs, AlGaAs, GalnAs, GaInP, and/or GaInAsP; or combinations thereof. Further, one or more integrated circuits (ICs) are formed within the substrate 110.
In some embodiments, the substrate 110 may have a surface 110s1 and a surface 110s2 opposite thereto. In some embodiments, the surface 110s1 may be a backside surface. In some embodiments, the surface 110s2 may be an active surface. In this disclosure, the term “active surface” may refer to a surface that can output signal, including electronic or optical signal. In some embodiments, the term “active surface” may refer to an electronic component on which contact terminals, such as contact pads, are disposed to receive or transmit signals.
In some embodiments, the electronic structure 102 may include a redistribution structure 112. The redistribution structure 112 may be disposed on the surface 110s2 of the substrate 110. The electronic structure 102 may include at least one dielectric layer, with metal traces as well as vias embedded therein.
In some embodiments, the electronic structure 102 may include a plurality of terminals 114. Each terminal 114 may protrude from the surface 110s2 of the substrate 110 such that the electronic structure 102 has an uneven surface on the surface 110s2. The terminals 114 may be disposed on the surface 110s2 of the substrate 110. The terminals 114 may be disposed on the redistribution structure 112. In some embodiments, each of the terminals 114 may include a bump. The bump may include lead or may be lead-free (e.g., including one or more materials such as alloys of gold and tin solder or alloys of silver and tin solder).
The surface 110s1 may have a level difference (or unevenness) L1. The surface 110s2 may have a level difference (or unevenness) L2. In some embodiments, L2 is greater than L1. In some embodiments, the surface 110s2 may include an uneven surface. In this disclosure, the level difference may refer to a relief from a surface. For example, the level difference may refer to, but is not limited to, a maximum height difference between the highest and lowest points of the surface. In some embodiments, L1 may be less than 30 μm, such as 30 μm, 20 μm, 10 μm, or less. In some embodiments, L2 may be greater than or equal to 80 μm, such as 80 μm, 100 μm, 120 μm, 140 μm, 160 μm, 180 μm, 200 μm, 220 μm or more. In this embodiments, L2 may be defined by the size of the terminal 114.
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In some embodiments, the leveling layer 120 may include a liquid glue or other suitable fluid materials configured to provide a relatively smooth surface. In some embodiments, the leveling layer 120 may include thermally sensitive material, optically sensitive material or other suitable materials, which may be cured by heating or by illuminating light. In some embodiments, the leveling layer 120 may include a solid component, a liquid component and other suitable components. The solid component may include resin, such as epoxy acrylate resin or other suitable materials. The liquid component may include an organic solvents or solutions, such as acrylic acid, its derivatives, or other suitable materials.
In some embodiments, the method may include performing a curing operation or baking operation to cure the leveling layer 120. After the curing operation or baking operation, the liquid component of the leveling layer 120 may be evaporated and removed from the leveling layer 120. As a result, the solid component of the leveling layer 120 remains. The temperature and process time of the curing operation may depend on the liquid components of the leveling layer 120, and are not intended to be limiting.
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In a comparative example, a tape (e.g., a BG tape) is formed on an uneven surface of a carrier, which has height difference equal to or greater than 80 μm. In some conditions, the BG tape cannot compensate the height difference of the carrier, resulting in failure of the BG tape being conformally attached to aforesaid uneven surface of the carrier. As a result, voids and gaps are formed between the BG tape and the carrier. When a grinding operation is performed, the pressure in the chamber is reduced. During reduction of pressure, moisture or other substances may infiltrate into the said voids and gaps, which may adversely affect yield. In this embodiment, the leveling layer 120 is provided on an uneven surface (e.g., the surface 110s2) of the substrate 110 to compensate the height difference on the surface 110s2 of the substrate 110. The leveling layer 120 can provide a relatively smooth surface (e.g., the surface 120s2) to which the tape 130 can be conformally attached. In this embodiment, during the removing operation 204, the tape 130 may be tightly and conformally attached to the surface 120s2 of the leveling layer 120 even in pressure-decreasing environments. As a result, fewer or no voids or gaps are formed between the tape 130 and the leveling layer 120. As a result, the protective ability of the tape 130 can be enhanced during the removing operation 204. Further, residue of the BG tape may remain on the terminals and the redistribution structure when the BG tape is directly attached to the terminals. In comparison with direct attachment of the BG tape to the terminals, the leveling layer 120 of the present disclosure can be removed more completely.
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In this embodiment, the half-cut operation 202 may be performed before forming the leveling layer 120 on the surface 110s2 of the substrate 110. In this embodiment, the leveling layer 120 is provided on an uneven surface (e.g., the surface 110s2) of the substrate 110 to compensate the height difference on the surface 110s2 of the substrate 110. The leveling layer 120 can provide a relatively smooth surface (e.g., the surface 120s2) to which tape 130 can be conformally attached. In this embodiment, during the removing operation 204, the tape 130 may be tightly and conformally attached to the surface 120s2 of the leveling layer 120 even in decreased pressure environments. As a result, fewer or no voids or gaps, which may cause moisture or other substances to infiltrate into, are formed between the tape 130 and the leveling layer 120. As a result, the protective ability of the tape 130 can be enhanced during the removing operation 204.
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In this embodiment, an leveling layer 120 may be formed on the surface 110s2 to compensate the height difference of the surface 110s2 of the substrate 110′. The leveling layer 120 may fill the trenches 110t′. The leveling layer 120 may have a surface 120s1 and a surface 120s2. The leveling layer 120 may fill the recess 110r on the surface 110s2 of the substrate 110. The surface 120s1 is conformally formed on the surface 110s2 of the substrate 110. The surface 120s2 may be a substantially flat surface.
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Spatial descriptions, such as “above,” “below,” “up,” “left,” “right,” “down,” “top,” “bottom,” “vertical,” “horizontal,” “side,” “higher,” “lower,” “upper,” “over,” “under,” and so forth, are indicated with respect to the orientation shown in the figures unless otherwise specified. It should be understood that the spatial descriptions used herein are for purposes of illustration only, and that practical implementations of the structures described herein can be spatially arranged in any orientation or manner, provided that the merits of embodiments of this disclosure are not deviated from by such an arrangement.
As used herein, the terms “approximately,” “substantially,” “substantial” and “about” are used to describe and account for small variations. When used in conjunction with an event or circumstance, the terms can refer to instances in which the event or circumstance occurs precisely as well as instances in which the event or circumstance occurs to a close approximation. For example, when used in conjunction with a numerical value, the terms can refer to a range of variation less than or equal to ±10% of that numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. For example, two numerical values can be deemed to be “substantially” the same or equal if a difference between the values is less than or equal to ±10% of an average of the values, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%.
Two surfaces can be deemed to be coplanar or substantially coplanar if a displacement between the two surfaces is no greater than 5 μm, no greater than 2 μm, no greater than 1 μm, or no greater than 0.5 μm.
As used herein, the singular terms “a,” “an,” and “the” may include plural referents unless the context clearly dictates otherwise.
As used herein, the terms “conductive,” “electrically conductive” and “electrical conductivity” refer to an ability to transport an electric current. Electrically conductive materials typically indicate those materials that exhibit little or no opposition to the flow of an electric current. One measure of electrical conductivity is Siemens per meter (S/m). Typically, an electrically conductive material is one having a conductivity greater than approximately 104 S/m, such as at least 105 S/m or at least 106 S/m. The electrical conductivity of a material can sometimes vary with temperature. Unless otherwise specified, the electrical conductivity of a material is measured at room temperature.
Additionally, amounts, ratios, and other numerical values are sometimes presented herein in a range format. It is to be understood that such range format is used for convenience and brevity and should be understood flexibly to include numerical values explicitly specified as limits of a range, but also to include all individual numerical values or sub-ranges encompassed within that range as if each numerical value and sub-range is explicitly specified.
While the present disclosure has been described and illustrated with reference to specific embodiments thereof, these descriptions and illustrations are not limiting. It should be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the true spirit and scope of the present disclosure as defined by the appended claims. The illustrations may not be necessarily drawn to scale. There may be distinctions between the artistic renditions in the present disclosure and the actual apparatus due to manufacturing processes and tolerances. There may be other embodiments of the present disclosure which are not specifically illustrated. The specification and drawings are to be regarded as illustrative rather than restrictive. Modifications may be made to adapt a particular situation, material, composition of matter, method, or process to the objective, spirit and scope of the present disclosure. All such modifications are intended to be within the scope of the claims appended hereto. While the methods disclosed herein have been described with reference to particular operations performed in a particular order, it will be understood that these operations may be combined, sub-divided, or re-ordered to form an equivalent method without departing from the teachings of the present disclosure. Accordingly, unless specifically indicated herein, the order and grouping of the operations are not limitations of the present disclosure.