Number | Date | Country | Kind |
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10-057771 | Mar 1998 | JP |
Number | Name | Date | Kind |
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4626450 | Tani et al. | Dec 1986 | |
5091332 | Bohr et al. | Feb 1992 | |
5096839 | Amai et al. | Mar 1992 | |
5244843 | Chau et al. | Sep 1993 | |
5677208 | Itou et al. | Oct 1997 |
Number | Date | Country |
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54-102964 | Aug 1979 | JP |
56-162850 | Dec 1981 | JP |
5-221786 | Aug 1983 | JP |
3-217019 | Sep 1991 | JP |
4-36457 | Jun 1992 | JP |
5-190850 | Jul 1993 | JP |
6-12801 | Feb 1994 | JP |
2-2843037 | Oct 1998 | JP |
Entry |
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“Oxygen Precipitation and OSF” pp. 199-220. |
“VLSI Manufacturing Technology” Tokuyama & Hashimoto: Nikkei BP, pp. 61-63, Jan. 14, 1989. |