Number | Name | Date | Kind |
---|---|---|---|
5639316 | Cabral, Jr. et al. | Jun 1997 | A |
5960289 | Tsui et al. | Sep 1999 | A |
6027961 | Maiti et al. | Feb 2000 | A |
6027977 | Mogami | Feb 2000 | A |
6100120 | Yu | Aug 2000 | A |
6114258 | Miner et al. | Sep 2000 | A |
6184072 | Kaushik et al. | Feb 2001 | B1 |
6204203 | Narwankar et al. | Mar 2001 | B1 |
6228721 | Yu | May 2001 | B1 |
6255698 | Gardner et al. | Jul 2001 | B1 |
Entry |
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“Device and Reliability of High-K A12O3 Gate Dielectric with Good Mobility and Low Dit”, by Chin et al., 1999 Symposium on VLSI Technology Digest of Technical Papers, pp. 135-136. |