Number | Date | Country | Kind |
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4-267231 | Oct 1992 | JPX | |
5-104098 | Apr 1993 | JPX |
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4845054 | Mitchener | Jul 1989 | |
5051380 | Maeda et al. | Sep 1991 | |
5094983 | Furthaler et al. | Mar 1992 | |
5262358 | Sigmund et al. | Nov 1993 | |
5290736 | Sato et al. | Mar 1994 |
Number | Date | Country |
---|---|---|
3933908 | Apr 1991 | DEX |
492427A | Mar 1992 | JPX |
Entry |
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Garcia et al, Journal of Chemical Vapor Deposition Copyright 1994, ACS, vol. 1-Jan. 1993, pp. 232-251. |