Number | Name | Date | Kind |
---|---|---|---|
3491236 | Newberry | Jan 1970 | |
3519873 | O'Keeffe | Jul 1970 | |
3614423 | Heynick | Oct 1971 | |
3619608 | Westerberg | Nov 1971 | |
3715580 | Mackawa et al. | Feb 1973 | |
3717785 | Guernet | Feb 1973 | |
3745358 | Firtz et al. | Jul 1973 | |
3900737 | Collier et al. | Aug 1975 | |
3999097 | Ko et al. | Dec 1976 | |
4110623 | Azann et al. | Aug 1978 | |
4153843 | Pease | May 1979 | |
4200794 | Newberry | Apr 1980 | |
4214162 | Hoppe et al. | Jul 1980 | |
4390789 | Smith | Jun 1983 |
Entry |
---|
"Electron Beam Lithography Creates World's Smallest Man-Made Object" Pen, vol. 4, No. 18, 7-74, pp. 1-2. |
"BES: A Practical Electron Lithograhic System", IEEE Trans., Herriott et al., vol. ED-22, No. 7, 7-75, pp. 385-392. |
"Projection Electron Lithography using Aperature Lenses", IEEE Trans., Heynick et al., vol. ED-22, No. 7, 7-75, pp. 355-409. |
Number | Date | Country | |
---|---|---|---|
Parent | 227620 | Jan 1981 |