Patent Application
20160147154
1. Field of the Invention
The present invention relates to a pattern formation method using a developer including an organic solvent, which is suitably used in an ultra microlithography process in producing an ultra LSI or a high-capacity microchip or other photofabrication processes, an active light-sensitive or radiation-sensitive resin composition, a resist film, a production method for an electronic device using these, and an electronic device. In more detail, the present invention relates to a pattern formation method using a developer including an organic solvent, which can be suitably used in fine processing of a semiconductor element using an electron beam or EUV light (wavelength: around 13 nm), an active light-sensitive or radiation-sensitive resin composition, a resist film, a production method for an electronic device using these, and an electronic device.
2. Description of the Related Art
In the related art, fine processing by lithography using a photoresist composition has been performed in the production process of semiconductor devices such as IC and LSI. In recent years, with higher integration of integrated circuits, ultra fine patterns have been required to be formed in a sub-micron region or a quarter-micron region. Accordingly, exposure wavelengths tend to be shortened, for example, from g-line to i-line, and to a KrF excimer laser light. Furthermore, at present, lithography using an electron beam, X-rays, or EUV light, in addition to the excimer laser light, is also being developed.
Lithography using an electron beam, X-rays, or EUV light is positioned as a next generation or next after next generation pattern forming technology, and a resist composition having high sensitivity and high-resolution is desired.
In particular, for shortening the wafer processing time, sensitivity improvement is a very important issue, but when trying to improve sensitivity, the pattern shape or the resolving power represented by the limit resolution line width decreases, and therefore, development of a resist composition which satisfies these properties at the same time has been strongly desired.
High sensitivity, and high resolution and a favorable pattern shape are in a trade-off relationship, and how to satisfy these at the same time is very important.
In general, there are two types of the active light-sensitive or radiation-sensitive resin composition, that is, a “positive type” in which a pattern is formed by solubilizing the exposed portion with respect to an alkali developer by exposure to radiation using a resin poorly soluble or insoluble in the alkali developer, and a “negative type” in which a pattern is formed by poorly solubilizing or insolubilizing the exposed portion with respect to an alkali developer by exposure to radiation using a resin soluble in the alkali developer.
As the active light-sensitive or radiation-sensitive resin composition suitable for a lithography process using an electron beam, X-rays, or EUV light, from the viewpoint of high sensitivity, a chemical amplification positive resist composition using mainly an acid catalytic reaction has been considered, and a chemical amplification positive resist composition consisting of a phenolic resin (hereinafter, abbreviated as a phenolic acid decomposable resin) which is insoluble or poorly soluble in an alkali developer, and has properties of becoming soluble in an alkali developer by the action of an acid, as a main component, and an acid generator is effectively used.
On the other hand, in the production of a semiconductor element or the like, formation of patterns having various shapes such as a line, a trench, and a hole is required. To meet the requirement for formation of patterns having various shapes, development of not only a positive type active light-sensitive or radiation-sensitive resin composition but also a negative type active light-sensitive or radiation-sensitive resin composition has also been performed (for example, refer to JP2002-148806A, JP2008-268935A, and JP1995-261392A (JP-H07-261392A)).
In formation of an ultra fine pattern, further reduction in resolving power decrease and further improvement of the pattern shape have been demanded.
To solve this problem, the use of a resin having a photoacid generator on the polymer main chain or the side chain has been studied (JP2010-85971A and JP2010-256856A). In addition, a method of developing an acid decomposable resin using a developer other than an alkali developer (refer to JP2010-217884A and JP2011-123469A) and a method of developing a PAG-supported acid decomposable resin using a developer other than an alkali developer (refer to WO2012/114963A) have also been proposed.
However, with miniaturization of patterns in recent years, in an ultra fine region (for example, a region having a line width of 50 nm or less), a pattern formation method which satisfies high sensitivity, high resolution, and film loss reduction performance at the same time to a very high level has been required, and there was still room for improvement in the pattern formation methods in the related art.
Objects of the present invention is to solve the problems in performance improvement techniques in fine processing of a semiconductor element using active light or radiation, and is to provide a pattern formation method which satisfies high sensitivity, high resolution (high resolving power, and the like), high roughness performance, film loss reduction performance, high exposure latitude, and high dry etching resistance at the same time to a very high level in an ultra fine region (for example, a region having a line width of 50 nm or less), an active light-sensitive or radiation-sensitive resin composition, a resist film, a production method for an electronic device using these, and an electronic device.
It was found that the above problems are achieved by the following configurations.
[1]
A pattern formation method including (1) forming a film using an active light-sensitive or radiation-sensitive resin composition, (2) exposing the film to active light or radiation, and (3) developing the exposed film using a developer including an organic solvent, in which the active light-sensitive or radiation-sensitive resin composition contains a resin (A) having a repeating unit represented by General Formula (I) and a repeating unit represented by any one of General Formulas (II) to (IV), and a crosslinking agent (C).
In General Formula (I), each of R41, R42, and R43 independently represents a hydrogen atom, an alkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group. Here, R42 may be bonded to Ar4 to form a ring, and R42 in this case represents a single bond or an alkylene group. X4 represents a single bond. —COO—, or —CONR44—, and, in the case of forming a ring with R42, represents a trivalent connecting group. R44 represents a hydrogen atom or an alkyl group. L4 represents a single bond or an alkylene group. Ar4 represents an (n+1) valent aromatic ring group, and, in the case of being bonded to R42 to form a ring, represents an (n+2) valent aromatic ring group. n represents an integer of 1 to 4.
In General Formula (II), each of R61, R62, and R63 independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group. Here, R62 may be bonded to Ar6 to form a ring, and R62 in this case represents a single bond or an alkylene group. X6 represents a single bond, —COO—, or —CONR64—. R64 represents a hydrogen atom or an alkyl group. L6 represents a single bond or an alkylene group. Ar6 represents a divalent aromatic ring group, and, in the case of being bonded to R62 to form a ring, represents a trivalent aromatic ring group. R3 represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, an alkoxy group, an acyl group, or a heterocyclic group. M3 represents a single bond or a divalent connecting group. Q3 represents an alkyl group, a cycloalkyl group, an aryl group, or a heterocyclic group. At least two of Q3, M3, and R3 may be bonded to each other to form a ring.
In General Formula (III), each of R51, R52, and R53 independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group. R52 may be bonded to L5 to form a ring, and R52 in this case represents an alkylene group. L5 represents a single bond, or an alkylene group, —COO-L1-, —O-L1-, or a divalent connecting group selected from the groups formed by combining two or more thereof, and L1 represents an alkylene group or a cycloalkylene group. Here, in a case where L5 is bonded to R52 to form a ring, L5 represents a trivalent connecting group. R54 represents an alkyl group, and each of R55 and R56 independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, or an aralkyl group. R55 and R56 may be bonded to each other to form a ring. However. R55 and R56 do not represent a hydrogen atom at the same time in any case.
In General Formula (IV), each of R71, R72, and R73 independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group. R72 may be bonded to L7 to form a ring, and R72 in this case represents an alkylene group. L7 represents a single bond or a divalent connecting group, and in the case of forming a ring with R72, represents a trivalent connecting group. R74 represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, an alkoxy group, an acyl group, or a heterocyclic group. M4 represents a single bond or a divalent connecting group. Q4 represents an alkyl group, a cycloalkyl group, an aryl group, or a heterocyclic group. At least two of Q4, M4, and R74 may be bonded to each other to form a ring.
[2]
The pattern formation method according to [1], in which the crosslinking agent (C) is a compound having a hydroxymethyl group, an alkoxymethyl group, an oxirane ring, or an oxetane ring.
[3]
The pattern formation method according to [2], in which the crosslinking agent (C) is a phenol derivative, a urea-based compound, or a melamine-based compound, having a hydroxymethyl group or an alkoxymethyl group.
[4]
The pattern formation method according to any one of [1] to [3], in which the content of the crosslinking agent (C) is 3% by mass to 65% by mass with respect to the total solid content in the active light-sensitive or radiation-sensitive resin composition.
[5]
The pattern formation method according to any one of [1] to [4], in which the resin (A) has the repeating unit represented by General Formula (II), and R3 in General Formula (II) is a group having 2 or more carbon atoms.
[6]
The pattern formation method according to [5], in which the resin (A) has the repeating unit represented by General Formula (II), and R3 in General Formula (II) is a group represented by the following General Formula (II-2).
In General Formula (II-2), each of R81, R82, and R83 independently represents an alkyl group, an alkenyl group, a cycloalkyl group, or an aryl group. n81 represents 0 or 1. At least two of R81 to R83 may be connected to each other to form a ring.
[7]
The pattern formation method according to any one of [1] to [4], in which the resin (A) has the repeating unit represented by General Formula (III), and the repeating unit represented by General Formula (III) is a repeating unit represented by the following General Formula (III-1).
In General Formula (III-1), each of R1 and R2 independently represents an alkyl group, each of R11 and R12 independently represents an alkyl group, and R13 represents a hydrogen atom or an alkyl group. R11 and R12 may be connected to each other to form a ring, and R11 and R13 may be connected to each other to form a ring. Ra represents a hydrogen atom, an alkyl group, a cyano group, or a halogen atom, L5 represents a single bond, or an alkylene group, —COO-L1-, —O-L1-, or a divalent connecting group selected from the groups formed by combining two or more thereof, and L1 represents an alkylene group or a cycloalkylene group.
[8]
The pattern formation method according to [7], in which R11 and R12 in General Formula (III-1) are connected to each other to form a ring.
[9]
The pattern formation method according to any one of [1] to [8], in which the bond between X4 and L4 in General Formula (I) is a single bond.
[10]
The pattern formation method according to any one of [1] to [9], in which the content of the repeating unit represented by General Formula (I) is 10 mol % to 40 mol % with respect to the entirety of repeating units in the resin (A).
[11]
The pattern formation method according to any one of [1] to [10], in which the active light-sensitive or radiation-sensitive resin composition further includes a compound (B) that generates an acid by active light or radiation.
[12]
The pattern formation method according to [11], in which the compound (B) that generates an acid by active light or radiation is a compound that generates an acid having a volume of 240 Angstroms3 or greater.
[13]
The pattern formation method according to any one of [1] to [12], in which an electron beam or extreme ultraviolet rays are used as the active light or radiation.
[14]
An active light-sensitive or radiation-sensitive resin composition which is supplied to the pattern formation method according to any one of [1] to [13].
[15]
A resist film which is formed of the active light-sensitive or radiation-sensitive resin composition according to [14].
[16]
A production method for an electronic device, including: the pattern formation method according to any one of [1] to [13].
[17]
An electronic device produced by the production method for an electronic device according to [16].
According to the present invention, a pattern formation method which satisfies high sensitivity, high resolution (high resolving power, and the like), high roughness performance, film loss reduction performance, high exposure latitude, and high dry etching resistance at the same time to a very high level in an ultra fine region (for example, a region having a line width of 50 nm or less), an active light-sensitive or radiation-sensitive resin composition, a resist film, a production method for an electronic device using these, and an electronic device can be provided.
Hereinafter, embodiments of the invention will be described in detail.
Regarding the description of a group (atomic group) in the present specification, when the description does not indicate whether a group is substituted or unsubstituted, the description includes both the group having a substituent and the group not having a substituent. For example, “alkyl group” includes not only an alkyl group (an unsubstituted alkyl group) which does not have a substituent, but also an alkyl group (a substituted alkyl group) which has a substituent.
The term “active light” or “radiation” in the present specification refers to, for example, a bright line spectrum of a mercury lamp, far-ultraviolet rays represented by an excimer laser, extreme ultraviolet rays (EUV light), X-rays, an electron beam (EB), and the like. The light in the present invention refers to the active light or the radiation.
In addition, the term “exposure” in the present specification includes not only the exposure performed using a mercury lamp, far-ultraviolet rays represented by an excimer laser, extreme ultraviolet rays, X-rays, or EUV light, but also drawing performed using a particle beam such as an electron beam, an ion beam, or the like, unless otherwise specified.
A pattern formation method of the present invention includes (1) forming a film using an active light-sensitive or radiation-sensitive resin composition, (2) exposing the film to active light or radiation, and (3) developing the exposed film using a developer (hereinafter, as necessary, referred to as “organic-based developer”) including an organic solvent.
Furthermore, the active light-sensitive or radiation-sensitive resin composition contains a resin (A) having the repeating unit represented by General Formula (I) described below and a repeating unit represented by any one of General Formulas (II) to (IV) described below, and a crosslinking agent (C).
Examples of the active light or the radiation include infrared light, visible light, ultraviolet light, far-ultraviolet light, X-rays, and an electron beam. The active light or the radiation, for example, more preferably has a wavelength of 250 nm or less, in particular, 220 nm or less. Examples of the active light or the radiation include a KrF excimer laser (248 nm), an ArF excimer laser (193 nm), an F2 excimer laser (157 nm), X-rays, and an electron beam. Preferable examples of the active light or the radiation include a KrF excimer laser, an ArF excimer laser, an electron beam, X-rays, and extreme ultraviolet rays (EUV light). An electron beam or extreme ultraviolet rays are more preferable.
According to the pattern formation method of the present invention, a pattern formation method which satisfies high sensitivity, high resolution (high resolving power, and the like), high roughness performance, film loss reduction performance, high exposure latitude, and high dry etching resistance at the same time to a very high level, an active light-sensitive or radiation-sensitive resin composition, a resist film, a production method for an electronic device using these, and an electronic device can be provided. In particular, in a case where the active light or the radiation is an electron beam, X-rays, or EUV light, the effects are significant. The reason for this is not clear, however, it is thought to be as follows.
In the pattern formation method of the present invention, first, when a resin (A) has the repeating unit represented by General Formula (I) described below, that is, an aromatic ring such as a phenol structure, in an exposed portion, secondary electrons are sufficiently emitted. In addition, when the repeating unit represented by any one of General Formulas (II) to (IV) is used, the activation energy for generating a polar group by being decomposed due to the action of an acid can be reduced. It is thought that for these factors, in the exposed portion, the reaction in which the resin produces a polar group and the crosslinking reaction by a crosslinking agent proceed efficiently, and thus, sensitivity becomes high.
In addition, for EUV exposure, out of band light (leaked light generated in a region of ultraviolet light having a wavelength of 100 nm to 400 nm) deteriorates the surface roughness of a resist film, and as a result, reduction in resolution or deterioration of film loss due to a bridge pattern or disconnection of a pattern is likely to be caused. However, it thought that the aromatic ring functions as an internal filter by absorbing the out of band light, and due to this, resolution and film loss reduction performance become excellent.
For example, it is expected that an extremely fine pattern (for example, pattern having a region with a line width of 50 nm or less) should be able to be favorably formed by a pattern formation method in which exposure is performed by an electron beam or extreme ultraviolet rays.
However, for example, in a case where a line and space pattern having a line width of 50 nm or less and a ratio between the line width and the space width of 1:1 is formed, stronger capillary force is likely to be generated in the fine space formed at the time of development. Therefore, when a developer is discharged from the space, the capillary force is applied to the side wall of the pattern having a fine line width. In a case where a positive pattern is formed by an alkali developer, the affinity between the pattern having a resin as a main component and the alkali developer tends to be decreased, and thus, the capillary force applied to the side wall of the pattern is increased, and collapse of the pattern is likely to occur. On the other hand, in a case where a negative pattern is formed by an organic-based developer, as in the present invention, the affinity between the pattern having a resin as a main component and the organic-based developer tends to be increased, and the contact angle of the developer on the pattern side wall is increased, and thus the capillary force can be reduced. As a result, it is thought that pattern collapse is prevented, and high resolution can be achieved (marginal resolving power is excellent).
In the exposed portion, the degree of solibility with respect to an organic-based developer is decreased not only due to production of a polar group by the resin, and the degree of solibility with respect to an organic-based developer is decreased but also due to process of the crosslinking reaction by the crosslinking agent. The repeating unit represented by any one of General Formulas (II) to (IV) is a repeating unit of which the affinity for an organic-based developer is greatly decreased (that is, a repeating unit having a high contrast of the affinity for an organic-based developer before and after the generation of a polar group), in a case where the affinity thereof for an organic-based developer is high and a polar group is generated by being decomposed due to the action of an acid. It is thought that for these factors, the film loss reduction performance is improved, and the dissolution contrast between the exposed portion and the unexposed portion with respect to an organic-based developer is improved, and as a result, the resolution and the roughness performance are further improved.
In the exposed portion, curing for forming a film is performed by a crosslinking reaction of a crosslinking agent. Thus, it is thought that for these factors, dry etching resistance is improved, and the acid generated in the exposed portion is less likely to diffuse to the unexposed portion, and thus, the exposure latitude is improved. It is thought that the resolution is improved since collapse of a pattern is less likely to occur.
Furthermore, a phenolic hydroxyl group in the repeating unit represented by General Formula (I) represented by hydroxystyrene is likely to react with a crosslinking agent, and thus, improvement of the dry etching resistance, improvement of the exposure latitude, and improvement of the resolution can be more significantly achieved.
Hereinafter, the pattern formation method of the present invention will be described in detail.
<Pattern Formation Method>
The pattern formation method according to the present invention includes (1) forming a film (resist film) using the composition described in Step (1), (2) exposing the film to an active light or radiation, and (3) developing the exposed film using an organic-based developer. This method preferably further includes (4) rinsing the developed film using a rinse liquid, for the reason of superior effects of the present invention.
In addition, the pattern formation method according to the present invention is typically a negative type pattern formation method.
The present invention also relates to the resist film formed by using the composition.
After film formation, before an exposure step, a prebake (PB) step is also preferably included. In addition, after an exposure step and before a developing step, a post exposure bake (PEB) step is also preferably included.
Both the PB step and the PEB step are preferably performed at a heating temperature of 40° C. to 130° C., more preferably at a heating temperature of 50° C. to 120° C. and still more preferably at a heating temperature of 60° C. to 110° C. In particular, in a case where the PEB step is performed at a low temperature of 60° C. to 90° C., exposure latitude (EL) and resolving power can be significantly improved.
In addition, the heating time is preferably 30 seconds to 300 seconds, more preferably 30 seconds to 180 seconds, and still more preferably 30 seconds to 90 seconds.
In the pattern formation method according to the present invention, a step of forming a film formed of a composition on a substrate, a step of exposing the film, a heating step, and a developing step can be performed by methods generally known in the art.
The light source used in the above-described exposure is preferably extreme ultraviolet rays (EUV light) or an electron beam (EB).
When the film formed of the resist composition according to the present invention is irradiated with active light or radiation, exposure (immersion exposure) may be performed in a state of being filled with liquid (immersion medium) having a higher refractive index than the air between a film and a lens. Thus, the resolution can be increased. Although the immersion medium used is not particularly limited as long as it is liquid having a higher refractive index than air, pure water is preferable.
Regarding the immersion liquid used when liquid immersion exposure is performed, the description in paragraphs “0059” and “0060” of JP2013-76991A can be referred to, and the contents thereof are incorporated in the present specification.
An immersion liquid poorly soluble film (hereinafter, also referred to as “topcoat”) may be provided between the film formed of the composition of the present invention and the immersion liquid such that the film does not come into contact with the immersion liquid. Functions required for the topcoat are coating suitability to the upper layer portion of a composition film and immersion liquid poor solubility. The topcoat is preferably a topcoat which is not mixed with the composition film, and can be uniformly applied to the upper layer of the composition film.
Regarding the topcoat, the description in paragraphs “0061” and “0062” of JP2013-76991A can be referred to, and the contents thereof are incorporated in the present specification.
When EUV exposure or EB exposure is performed, for the purpose of suppression of outgassing, suppression of blob defects, prevention of perpendicularity deterioration due to reverse taper shape improvement, prevention of LWR deterioration due to surface roughness, and the like, a topcoat layer may be formed on the upper layer of a resist film formed of the active light-sensitive or radiation-sensitive resin composition of the present invention. The topcoat composition used in formation of a topcoat layer will be described below.
The solvent of the topcoat composition in the present invention is preferably water or an organic solvent. Water or an alcohol-based solvent is more preferable.
In a case where the solvent is an organic solvent, the solvent is preferably a solvent which does not dissolve a resist film. As a solvent capable of being used, an alcohol-based solvent, a fluorine-based solvent, or a hydrocarbon-based solvent is preferably used, and an alcohol-based solvent which is nonfluorine-based is more preferably used. As the alcohol-based solvent, a primary alcohol is preferable, and a primary alcohol having 4 to 8 carbon atoms is more preferable, form the viewpoint of coating properties. Although a linear, a branched, or a cyclic alcohol can be used as a primary alcohol having 4 to 8 carbon atoms, a linear or a branched alcohol is preferable. Specific examples thereof include 1-butanol, 1-hexanol, 1-pentanol, and 3-methyl-1-butanol.
In a case where the solvent of the topcoat composition in the present invention is water or an alcohol-based solvent, the solvent preferably contains a water-soluble resin. It is considered that the evenness of solubility in a developer can be enhanced when the solvent contains a water-soluble resin. Examples of the preferable water-soluble resin include polyacrylic acid, polymethacrylic acid, polyhydroxystyrene, polyvinyl pyrrolidone, polyvinyl alcohol, polyvinyl ether, polyvinyl acetal, polyacrylic imide, polyethylene glycol, polyethylene oxide, polyethylene imine, polyester polyol, polyether polyol, and polysaccharides. Polyacrylic acid, polymethacrylic acid, polyhydroxystyrene, polyvinyl pyrrolidone, or polyvinyl alcohol is particularly preferable. Moreover, the water-soluble resin is not limited only to a homopolymer, and may be a copolymer. For example, the water-soluble resin may be a copolymer which has a monomer corresponding to the repeating unit of the homopolymer described above and another monomer unit. Specifically, an acrylic acid-methacrylic acid copolymer or an acrylic acid-hydroxystyrene copolymer can also be used in the present invention.
In addition, as the resin for the topcoat composition, a resin having an acid group described in JP2009-134177A or JP2009-91798A can also be preferably used.
Although the weight average molecular weight of the water-soluble resin is not particularly limited, the weight average molecular weight is preferably 2000 to 1000000, more preferably 5000 to 500000, and particularly preferably 10000 to 100000. Here, the weight average molecular weight of a resin is a molecular weight in terms of polystyrene measured by using GPC (carrier: THE or N-methyl-2-pyrrolidone (NMP)).
Although the pH of the topcoat composition is not particularly limited, the pH is preferably 0 to 10, more preferably 0 to 8, and particularly preferably 1 to 7.
In a case where the solvent of the topcoat composition is an organic solvent, the topcoat composition may contain a hydrophobic resin as the hydrophobic resin (E) to be described in the section of the active light-sensitive or radiation-sensitive resin composition. As the hydrophobic resin, the hydrophobic resin described in JP2008-209889A is also preferably used.
The concentration of the resin in the topcoat composition is preferably 0.1% by mass to 10% by mass, more preferably 0.2% by mass to 5% by mass, and particularly preferably 0.3% by mass to 3% by mass.
The topcoat material may include components other than a resin, and the proportion of the resin in the solid content of the topcoat composition is preferably 80% by mass to 100% by mass, more preferably 90% by mass to 100% by mass, and particularly preferably 95% by mass to 100% by mass.
The solid content concentration of the topcoat composition in the present invention is preferably 0.1 to 10, more preferably 0.2% by mass to 6% by mass, and particularly preferably 0.3% by mass to 5% by mass. When the solid content concentration is within the above range, the topcoat composition can be uniformly applied to a resist film.
Examples of components other than resins capable of being added to the topcoat material include a surfactant, a photoacid generator, and a basic compound. Specific examples of the photoacid generator and the basic compound include the same compounds as compounds that generate an acid by irradiation with active light or radiation and the basic compounds described above.
In a case where a surfactant is used, the amount of the surfactant used is preferably 0.0001% by mass to 2% by mass, and more preferably 0.001% by mass to 1% by mass, with respect to the total amount of the topcoat composition.
When a surfactant is added to the topcoat composition, coating properties in a case of being coated with the topcoat composition can be improved. Examples of the surfactant include nonionic, anionic, cationic, and amphoteric surfactants.
As the nonionic surfactant, Plufarac series manufactured by BASF Corp., ELEBASE series, FINESURF series, or BLAUNON series, manufactured by Aoki Oil Industrial Co., Ltd., Adeka Pluronic P-103 manufactured by Adeka Corporation, EMULGEN series, AMIET series, AMINON PK-02S, EMANON CH-25, or LHEODOL series, manufactured by Kao Chemical Co., SURFLON S-141 manufactured by AGC SEIMI CHEMICAL CO., LTD., NOIGEN series manufactured by Dai-ichi Kogyo Seiyaku Co., Ltd., NEWKALGEN series manufactured by TAKEMOTO OIL & FAT Co., Ltd., DYNOL 604, EnviroGem AD01, OLFINE EXP series, and Surfynol series, manufactured by Nissin Chemical Industry Co., Ltd., FTERGENT 300 manufactured by Ryoko Chemical Co., Ltd., or the like can be used.
As the anionic surfactant, EMAL 20T or POIZ 532A manufactured by Kao Chemical Co., Phosphanol ML-200 manufactured by Toho Chemical Industry Co., Ltd., EMULSOGEN series manufactured by Clariant Japan KK, SURFLON S-111N or SURFLON S-211 manufactured by AGC SEIMI CHEMICAL CO., LTD., PLYSURF series manufactured by Dai-ichi Kogyo Seiyaku Co., Ltd., PIONIN Series manufactured by TAKEMOTO OIL & FAT Co., Ltd., OLFINE PD-201 or Olfine PD-202 manufactured by Nissin Chemical Industry Co., Ltd., AKYPO RLM45 or ECT-3 manufactured by Nihon Surfactant Kogyo K.K., LIPON manufactured by Lion Corporation, or the like can be used.
As the cationic surfactant. ACETAMIN 24, ACETAMIN 86 manufactured by Kao Chemical Co., or the like can be used.
As the amphoteric surfactant, SURFLON S-131 (manufactured by AGC SEIMI CHEMICAL CO., LTD.), ENADICOL C-40H or Lipomin LA (all manufactured by Kao Chemical Co., Ltd.), or the like can be used.
In addition, there surfactants can also be used in combination.
In the pattern formation method of the present invention, a resist film can be formed on a substrate by using the active light-sensitive or radiation-sensitive resin composition, and a topcoat layer can be formed on the resist film using the topcoat composition described above. The film thickness of the resist film is preferably 10 nm to 100 nm, and the film thickness of the topcoat layer is preferably 10 nm to 200 nm, more preferably 20 nm to 100 nm, and particularly preferably 40 nm to 80 nm.
As a method of coating the substrate with the active light-sensitive or radiation-sensitive resin composition, spin coating is preferable, and the rotation speed thereof is preferably 1000 rpm to 3000 rpm.
For example, a resist film is formed by applying the active light-sensitive or radiation-sensitive resin composition to a substrate (example: silicon/silicon dioxide coating) which is used in production of precision integrated circuit elements by using a suitable coating method such as a spinner or a coater and drying the resultant product. Moreover, a known antireflection film can also be applied in advance. In addition, the resist film is preferably dried before formation of a topcoat layer.
Next, a topcoat layer can be formed by applying a topcoat composition to the obtained resist film by the same means as that in the resist film forming method and by drying the resultant product.
Development is performed by irradiating a resist film having a topcoat layer on the upper layer with an electron beam (EB), X-rays, or EUV light typically through a mask and by, preferably, baking (heating) the resultant product. Thus, an excellent pattern can be obtained.
Moreover, the performance required for the topcoat and the method of use thereof are explained in Chapter 7 in “Process and Ingredient of Immersion Lithography” published by CMC Publishing Co., Ltd.
When the top coat is peeled off after exposure, a developer may be used, or a separate peeling agent may be used. As the peeling agent, a solvent which hardly penetrates into a film is preferable. From the viewpoint of being capable of performing a peeling step simultaneously with a developing treatment step of a film, the topcoat can be preferably peeled off with a developer.
The substrate on which a film is formed, in the present invention, is not particularly limited. As the substrate, a substrate which is generally used in a step of producing a semiconductor such as IC, a step of producing a circuit board for liquid crystal or a thermal head, or a lithography step of photofabrication can be used. Examples of such a substrate include inorganic substrates such as silicon, SiN, and SiO2, and coated inorganic substrates such as SOG. As necessary, an organic antireflection film may be formed between a film and a substrate.
Examples of the organic-based developer include developers which include a polar solvent such as a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, an amide-based solvent, or an ether-based solvent, or include a hydrocarbon-based solvent. In addition, mixed solvents thereof may be used.
Examples of the ketone-based solvent include 1-octanone, 2-octanone, 1-nonanone, 2-nonanone, acetone, 4-heptanone, 1-hexanone, 2-hexanone, diisobutyl ketone, cyclohexanone, methyl cyclohexanone, phenyl acetone, methyl ethyl ketone, methyl isobutyl ketone, methyl amyl ketone, acetyl acetone, acetonyl acetone, ionone, diacetonyl alcohol, acetyl carbinol, acetophenone, methyl naphthyl ketone, isophorone, and propylene carbonate.
Examples of the ester-based solvent include methyl acetate, butyl acetate, ethyl acetate, isopropyl acetate, amyl acetate, isoamyl acetate, n-pentyl acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, diethylene glycol monoethyl ether acetate, ethyl-3-ethoxypropionate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, methyl formate, ethyl formate, butyl formate, propyl formate, ethyl lactate, butyl lactate, propyl lactate, methyl propionate, methyl 3-methoxypropionate (MMP), ethyl propionate, ethyl 3-ethoxypropionate (EEP), and propyl propionate. In particular, an acetic acid alkyl ester such as methyl acetate, butyl acetate, ethyl acetate, isopropyl acetate, or amyl acetate, or a propionic acid alkyl ester such as methyl propionate, ethyl propionate, or propyl propionate is preferable.
Examples of the alcohol-based solvent include alcohols such as methyl alcohol, ethyl alcohol, n-propyl alcohol, isopropyl alcohol, n-butyl alcohol, sec-butyl alcohol, tert-butyl alcohol, isobutyl alcohol, n-hexyl alcohol, 4-methyl-2-pentanol, n-heptyl alcohol, n-octyl alcohol, and n-decanol; glycols such as ethylene glycol, diethylene glycol, and triethylene glycol; and glycol ethers such as ethylene glycol monomethyl ether, propylene glycol monomethyl ether, ethylene glycol monoethyl ether, propylene glycol monoethyl ether, diethylene glycol monomethyl ether, triethylene glycol monoethyl ether, and methoxymethyl butanol.
Examples of the ether-based solvent include dioxane and tetrahydrofuran, in addition to glycol ethers described above.
Examples of the amide-based solvent include N-methyl-2-pyrrolidone, N,N-dimethyl acetamide, N,N-dimethyl formamide, hexamethylphosphoric triamide, and 1,3-dimethyl-2-imidazolidinone.
Examples of the hydrocarbon-based solvent include aromatic hydrocarbon-based solvents such as toluene, xylene, and anisole, and aliphatic hydrocarbon-based solvents such as pentane, hexane, octane, and decane.
The above solvents may be used in combination of two or more types thereof. In addition, within a range capable of exhibiting sufficient performance, the above solvents may be used in combination with a solvent other than the above solvents and/or water. Here, the water content of the entirety of the developer is preferably less than 10% by mass, and the developer more preferably does not contains water substantially. That is, the developer is preferably a developer formed of substantially only an organic solvent. Even in this case, the developer can include a surfactant described below. In addition, in this case, the developer may include inevitable impurities derived from the atmosphere.
The amount of the organic solvent used with respect to the developer is preferably 80% by mass to 100% by mass, more preferably 90% by mass to 100% by mass, and still more preferably 95% by mass to 100% by mass, with respect to the total amount of the developer.
In particular, the organic solvent included in the developer is preferably at least one selected from a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, amide-based solvent, and an ether-based solvent.
The vapor pressure of the organic-based developer is preferably 5 kPa or lower, more preferably 3 kPa or lower, and particularly preferably 2 kPa or lower at 20° C. When the vapor pressure of the developer is 5 kPa or lower, evaporation of the developer on the substrate or in a development cup is suppressed, the temperature evenness in the wafer surface is improved, and as a result, the dimensional evenness in the wafer surface is improved.
Specific examples of the developer having a vapor pressure of 5 kPa or lower include ketone-based solvents such as 1-octanone, 2-octanone, 1-nonanone, 2-nonanone, 4-heptanone, 2-hexanone, diisobutyl ketone, cyclohexanone, methyl cyclohexanone, phenyl acetone, and methyl isobutyl ketone; ester-based solvents such as butyl acetate, amyl acetate, propylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, diethylene glycol monoethyl ether acetate, ethyl-3-ethoxypropionate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, butyl formate, propyl formate, ethyl lactate, butyl lactate, and propyl lactate; alcohol-based solvents such as n-propyl alcohol, isopropyl alcohol, n-butyl alcohol, sec-butyl alcohol, tert-butyl alcohol, isobutyl alcohol, n-hexyl alcohol, 4-methyl-2-pentanol, n-heptyl alcohol, n-octyl alcohol, and n-decanol; glycol-based solvents such as ethylene glycol, diethylene glycol, and triethylene glycol; glycol ether-based solvents such as ethylene glycol monomethyl ether, propylene glycol monomethyl ether, ethylene glycol monoethyl ether, propylene glycol monoethyl ether, diethylene glycol monomethyl ether, triethylene glycol monoethyl ether, and methoxy methyl butanol; ether-based solvents such as tetrahydrofuran; amide-based solvents such as N-methyl-2-pyrrolidone, N,N-dimethyl acetamide, and N,N-dimethyl formamide; aromatic hydrocarbon-based solvents such as toluene and xylene; and aliphatic hydrocarbon-based solvents such as octane and decane.
Specific examples of the developer having a vapor pressure of 2 kPa or lower include ketone-based solvents such as 1-octanone, 2-octanone, 1-nonanone, 2-nonanone, 4-heptanone, 2-hexanone, diisobutyl ketone, cyclohexanone, methyl cyclohexanone, and phenyl acetone; ester-based solvents such as butyl acetate, amyl acetate, propylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, diethylene glycol monoethyl ether acetate, ethyl-3-ethoxypropionate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, ethyl lactate, butyl lactate, and propyl lactate; alcohol-based solvents such as n-butyl alcohol, sec-butyl alcohol, tert-butyl alcohol, isobutyl alcohol, n-hexyl alcohol, 4-methyl-2-pentanol, n-heptyl alcohol, n-octyl alcohol, and n-decanol; glycol-based solvents such as ethylene glycol, diethylene glycol, and triethylene glycol; glycol ether-based solvents such as ethylene glycol monomethyl ether, propylene glycol monomethyl ether, ethylene glycol monoethyl ether, propylene glycol monoethyl ether, diethylene glycol monomethyl ether, triethylene glycol monoethyl ether, and methoxy methyl butanol; amide-based solvents such as N-methyl-2-pyrrolidone, N,N-dimethyl acetamide, and N,N-dimethyl formamide; aromatic hydrocarbon-based solvents such as xylene; and aliphatic hydrocarbon-based solvents such as octane and decane.
A suitable amount of a surfactant can be added to the developer, as necessary.
The surfactant is not particularly limited, and for example, an ionic or nonionic fluorine-based surfactant and/or a silicon-based surfactant can be used. Examples of the fluorine-based surfactant and/or the silicon-based surfactant include surfactants described in JP1987-36663A (JP-S62-36663A), JP1986-226746A (JP-S61-226746A), JP1986-226745A (JP-S61-226745A), JP1987-170950A (JP-S62-170950A), JP1988-34540A (JP-S63-34540A), JP1995-230165A (JP-H7-230165A), JP1996-62834A (JP-H8-62834A), JP1997-54432A (JP-H9-54432A), and JP1997-5988A (JP-H9-5988A), and the specifications of U.S. Pat. No. 5,405,720A, U.S. Pat. No. 5,360,692A, U.S. Pat. No. 5,529,881A, U.S. Pat. No. 5,296,330A, U.S. Pat. No. 5,436,098A, U.S. Pat. No. 5,576,143A, U.S. Pat. No. 5,294,511A, and U.S. Pat. No. 5,824,451A. The surfactant is preferably nonionic. As the nonionic surfactant, a fluorine-based surfactant or a silicon-based surfactant is more preferably used.
The amount of the surfactant used is typically 0.001% by mass to 5% by mass, preferably 0.005% by mass to 2% by mass, and more preferably 0.01% by mass to 0.5% by mass, with respect to the total amount of developer.
As described, in particular, in paragraphs “0032” to “0063” of JP2013-11833A, a basic compound can also be included in the organic-based developer. In addition, as the basic compound, a basic compound (N) described below which may be contained in the active light-sensitive or radiation-sensitive resin composition can also be exemplified.
Examples of the developing method include a method in which a substrate is dipped in a bath filled with a developer for a predetermined period of time (dipping method), a method in which developing is performed by placing a developer on the substrate surface by surface tension and by holding stationary for a predetermined period of time (puddle method), a method in which a developer is sprayed onto a substrate surface (spray method), a method in which a substrate is spun at a constant rate, and a developer discharge nozzle is then scanned across the substrate at a constant rate while a developer is discharged continuously on the substrate from the nozzle (dynamic dispensing method).
The above-described various developing methods include a step of discharging a developer toward a resist film from a developing nozzle of a developing device, the discharge pressure (flow rate per unit area of a developer to be discharged) of a developer to be discharged is preferably 2 mL/sec/mm2 or less, more preferably 1.5 mL/sec/mm2 or less, and still more preferably 1 mL/sec/mm2 or less. Although the lower limit of the flow rate is not particularly limited, in consideration of throughput, 0.2 mL/sec/mm2 or greater is preferable.
When the discharge pressure of a developer to be discharged is within the above range, the defects of the pattern resulting from a resist residue after development can be significantly reduced.
Details of the mechanism are not clear, however, it is considered that this is probably because, when the discharge pressure is within the above range, the pressure applied to the resist film by the developer decreases, or unexpected scraping or collapsing of the composition film and/or the pattern is suppressed.
Moreover, the discharge pressure (mL/sec/mm2) of a developer is a value at the developing nozzle exit in the developing device.
Examples of the method of adjusting the discharge pressure of a developer include a method of adjusting the discharge pressure using a pump and a method of adjusting the pressure by supply from a pressure tank.
In addition, after a step of performing development, while replacing with another solvent, a step of stopping the development may be performed.
The pattern formation method according to the present invention preferably further includes a rinsing step (step of washing a film using a rinse liquid including an organic solvent) after a developing step.
The rinse liquid used in the rinsing step is not particularly limited as long as it does not dissolve the pattern after development, and a solution including a general organic solvent can be used.
Examples of the rinse liquid include a rinse liquid including at least one type of organic solvent selected from a hydrocarbon-based solvent, a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, an amide-based solvent, and an ether-based solvent. The rinse liquid more preferably includes at least one type of organic solvent selected from a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, or an amide-based solvent, and still more preferably includes an alcohol-based solvent or an ester-based solvent.
The rinse liquid more preferably includes a monohydric alcohol, and more preferably includes a monohydric alcohol having 5 or more carbon atoms.
These monohydric alcohols may be linear, branched, or cyclic. Examples of these monohydric alcohols include 1-butanol, 2-butanol, 3-methyl-1-butanol, tert-butyl alcohol, 1-pentanol, 2-pentanol, 1-hexanol, 4-methyl-2-pentanol(methyl isobutyl carbinol), 1-heptanol, 1-octanol, 2-hexanol, cyclopentanol, 2-heptanol, 2-octanol, 3-hexanol, 3-heptanol, 3-octanol, and 4-octanol. Examples of the monohydric alcohol having 5 or more carbon atoms include 1-hexanol, 2-hexanol, 4-methyl-2-pentanol, 1-pentanol, and 3-methyl-1-butanol.
Respective components described above may be used in combination of two or more types thereof, and may be used in combination with an organic solvent other than the components described above.
The water content of the rinse liquid is preferably less than 10% by mass, preferably less than 5% by mass, and still more preferably less than 3% by mass. That is, the amount of an organic solvent used with respect to the rinse liquid is preferably 90% by mass to 100% by mass, more preferably 95% by mass to 100% by mass, and still more preferably 97% by mass to 100%, with respect to the total amount of the rinse liquid. When the water content of the rinse liquid is less than 10% by mass, more favorable development characteristics are obtained.
The vapor pressure of the rinse liquid is preferably 0.05 kPa to 5 kPa, more preferably 0.1 kPa to 5 kPa, and still more preferably 0.12 kPa to 3 kPa, at 20° C. When the vapor pressure of the rinse liquid is 0.05 kPa to 5 kPa, the temperature evenness in the wafer surface is improved, swelling due to penetration of the rinse liquid is suppressed, and the dimensional evenness in the wafer surface is improved.
Moreover, a suitable amount of a surfactant may be added to the rinse liquid.
In the rinsing step, the developed wafer is washed with the above-described rinse liquid. The method of washing treatment is not particularly limited, and examples thereof include a method in which a rinse liquid is discharged continuously onto a substrate while the substrate is spun at a constant rate (spin coating method), a method in which a substrate is dipped in a bath filled with a rinse liquid for a predetermined period of time (dipping method), and a method in which a rinse liquid is sprayed onto a substrate surface (spray method). Among these, it is preferable that after a washing treatment is performed by the spin coating method, and then, a rinse liquid is removed from the substrate by rotating the substrate at a rotation speed of 2000 rpm to 4000 rpm.
The pattern formation method of the present invention can further include a step (alkali development step) of forming a resist pattern by performing development using an alkali aqueous solution. Thus, a finer pattern can be formed.
In the present invention, a portion having weak exposure intensity is removed in an organic solvent development step, and a portion having strong exposure intensity is also removed by performing the alkali development step. Since pattern formation is performed without dissolving only a region having intermediate exposure intensity by the multiple development process performing development multiple times in this manner, a finer pattern than usual can be formed (the same mechanism as that in paragraph “0077” of JP2008-292975A).
Although the alkali development can be performed either before or after a step of developing using a developer including an organic solvent, the alkali development is more preferably performed before the organic solvent development step.
Although the type of alkali developer is not particularly limited, typically, an aqueous solution of tetramethylammonium hydroxide is used. A suitable amount of an alcohol and/or a surfactant may be added to the alkali developer.
The alkali concentration of the alkali developer is typically 0.1% by mass to 20% by mass. The pH of the alkali developer is typically 10.0 to 15.0. As the alkali developer, 2.38% by mass tetramethylammonium hydroxide aqueous solution is particularly preferably used.
In a case where a rinse treatment is performed after development using an alkali developer, as the rinse liquid, pure water is typically used. A suitable amount of a surfactant may be added to the rinse liquid.
In addition, the present invention also relates to a production method for an electronic device including the pattern formation method of the present invention described above and an electronic device produced by the production method.
The electronic device of the present invention is suitably mounted on electrical and electronic equipment (home electric appliances, OA and media-related equipment, optical equipment, communication equipment, or the like).
<Active Light-Sensitive or Radiation-Sensitive Resin Composition>
The active light-sensitive or radiation-sensitive resin composition capable of being used in the present invention will be described below.
The active light-sensitive or radiation-sensitive resin composition according to the present invention is used in negative type development (development in which, when exposed, solubility is decreased with respect to a developer, the exposed portion remains as a pattern, and the unexposed portion us removed). That is, the active light-sensitive or radiation-sensitive resin composition according to the present invention can be used as an active light-sensitive or radiation-sensitive resin composition for organic solvent development used in development using a developer including an organic solvent. Here, “for organic solvent development” means an application to be subjected to a step of developing using a developer including at least an organic solvent.
Thus, the present invention also relates to the active light-sensitive or radiation-sensitive resin composition which is provided to the pattern formation method according to the present invention described above.
The active light-sensitive or radiation-sensitive resin composition of the present invention is typically a resist composition, and a negative resist composition (that is, resist composition for organic solvent development) is preferable since particularly significant effects can be obtained. The composition according to the present invention is typically a chemical amplification resist composition.
The composition used in the present invention contains the resin (A) having the repeating unit represented by General Formula (I) and the repeating unit represented by any one of General Formulas (II) to (IV), and the crosslinking agent (C).
Furthermore, the composition used in the present invention preferably includes the compound (B) that generates an acid by active light or radiation, a basic compound (D), and a solvent, and may further include at least one of a hydrophobic resin (E), a surfactant (F), and other additives (G).
Hereinafter, these respective components will be described in the above-described order.
Resin (A) Having Repeating Unit Represented by General Formula (I) and Repeating Unit Represented by any One of General Formulas (II) to (IV)
The resin (A) has the repeating unit represented by the following General Formula (I). Here, the repeating unit represented by General Formula (I) corresponds to a repeating unit having a phenolic hydroxyl group.
In General Formula (I), each of R41, R42, and R43 independently represents a hydrogen atom, an alkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group, here, R42 may be bonded to Ar4 to form a ring, and R42 in this case represents a single bond or an alkylene group; X4 represents a single bond, —COO—, or —CONR44—, and, in the case of forming a ring with R42, represents a trivalent connecting group. R44 represents a hydrogen atom or an alkyl group. L4 represents a single bond or an alkylene group; Ar4 represents an (n+1) valent aromatic ring group, and, in the case of being bonded to R42 to form a ring, represents an (n+2) valent aromatic ring group. n represents an integer of 1 to 4.
Specific examples of an alkyl group, a halogen atom, or an alkoxycarbonyl group, represented by each of R41, R42, and R43 in Formula (I), or substituents which these groups can have are the same as those described for each group represented by R51, R52, and R53 in General Formula (III) described below.
Ar4 represents an (n+1) valent aromatic ring group. The divalent aromatic ring group in a case where n is 1 may have a substituent, and preferable examples thereof include arylene groups having 6 to 18 carbon atoms such as a phenylene group, a tolylene group, a naphthylene group, and an anthracenylene group, and aromatic ring groups including a hetero ring, such as thiophene, furan, pyrrole, benzothiophene, benzofuran, benzopyrrole, triazine, imidazole, benzimidazole, triazole, thiadiazole, and thiazole.
Suitable specific examples of the (n+1) valent aromatic ring group in a case where n is an integer of 2 or greater can include a group obtained by excluding arbitrary (n−1) hydrogen atoms from a specific example described above of the divalent aromatic ring group.
The (n+1) valent aromatic ring group may further have a substituent.
Examples of the substituent which the alkyl group, the alkoxycarbonyl group, the alkylene group, or the (n+1) valent aromatic ring group described above can have include alkoxy groups such as an alkyl group, a methoxy group, an ethoxy group, a hydroxyethoxy group, a propoxy group, a hydroxypropoxy group, and a butoxy group, and aryl groups such as a phenyl group, represented by each of R51 to R53 in General Formula (III) described below.
Examples of the alkyl group represented by R44 in —CONR44— (R44 represents a hydrogen atom or an alkyl group) represented by X4 include the same as the alkyl group represented by each of R41 to R43.
X4 is preferably a single bond, —COO—, or —CONH—, and more preferably a single bond or —COO—.
Examples of the alkylene group in L4 include an alkylene group having 1 to 8 carbon atoms such as a methylene group, an ethylene group, a propylene group, a butylene group, a hexylene group, or an octylene group, which preferably may have a substituent.
Ar4 is more preferably an aromatic ring group having 6 to 18 carbon atoms which may have a substituent, and particularly preferably a benzene ring group, a naphthalene ring group, or a biphenylene ring group.
The repeating unit represented by Formula (I) preferably has a hydroxystyrene structure. That is, Ar4 is preferably a benzene ring group.
In General Formula (I), each of X4 and L4 is preferably a single bond.
Specific examples of the repeating unit represented by General Formula (I) will be described below, but the present invention is not limited thereto. In the formula, a represents 1 or 2.
The resin (A) may include two or more types of repeating unit (I).
The content of the repeating unit (I) in the resin (A) is preferably large from the viewpoint of enhancing the sensitivity by the increase in the secondary electron generation amount at the time of the exposure described above, and the content should not be so great from the viewpoint of ensuring the contrast by increasing the amount of the repeating unit represented by any one of General Formulas (II) to (IV) as a repeating unit having an acid-decomposable group. For this reason, the content of the repeating unit (I) in the resin (A) is preferably 5 mol % to 80 mol %, more preferably 10 mol % to 75 mol %, still more preferably 10 mol % to 40 mol %, and particularly preferably 20 mol % to 40 mol %, with respect to the entirety of repeating units in the resin (A).
The resin (A) has the repeating unit represented by any one of the following General Formulas (II) to (IV). Here, the repeating unit represented by any one of General Formulas (II) to (IV) corresponds to a repeating unit having a group (acid-decomposable group) which generates a polar group by being decomposed due to the action of an acid. That is, the repeating unit represented by General Formula (II) generates a group represented by —Ar6OH as a polar group by being decomposed due to the action of an acid, and the repeating unit represented by General Formula (III) or (IV) generates a carboxylic acid group as a polar group by being decomposed due to the action of an acid.
In General Formula (II), each of R61, R62, and R63 independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group. Here. R62 may be bonded to Ar6 to form a ring, and R62 in this case represents a single bond or an alkylene group.
X6 represents a single bond, —COO—, or —CONR64—. R64 represents a hydrogen atom or an alkyl group.
L6 represents a single bond or an alkylene group;
Ar6 represents a divalent aromatic ring group, and, in the case of being bonded to R62 to form a ring, represents a trivalent aromatic ring group.
R3 represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, an alkoxy group, an acyl group, or a heterocyclic group.
M3 represents a single bond or a divalent connecting group.
Q3 represents an alkyl group, a cycloalkyl group, an aryl group, or a heterocyclic group.
At least two of Q3, M3, and R3 may be bonded to each other to form a ring.
General Formula (II) will be described in more detail.
R61 to R63 in General Formula (II) have the same meaning as R51, R52, and R53 in General Formula (III) described below, respectively, and the preferable ranges thereof are also the same.
In a case where R62 represents an alkylene group, examples of the alkylene group include an alkylene group having 1 to 8 carbon atoms such as a methylene group, an ethylene group, a propylene group, a butylene group, a hexylene group, and an octylene group, which preferably may have a substituent.
Examples of the alkyl group represented by R6 in —CONR6— (R6 represents a hydrogen atom or an alkyl group) represented by X6 include the same as the alkyl group represented by each of R61 to R63.
X6 is preferably a single bond, —COO—, or —CONH—, and more preferably a single bond or —COO—.
Examples of the alkylene group in L6 include an alkylene group having 1 to 8 carbon atoms such as a methylene group, an ethylene group, a propylene group, a butylene group, a hexylene group, or an octylene group, which preferably may have a substituent. A ring formed by bonding of R62 and L6 is particularly preferably 5- or 6-membered ring.
Ar6 represents a divalent aromatic ring group. The divalent aromatic ring group may have a substituent, and preferable examples thereof include an arylene group having 6 to 18 carbon atoms such as a phenylene group, a tolylene group, and a naphthylene group, and divalent aromatic ring groups including a hetero ring, such as thiophene, furan, pyrrole, benzothiophene, benzofuran, benzopyrrole, triazine, imidazole, benzimidazole, triazole, thiadiazole, or thiazole.
Ar6 may have a plurality of substituents, and in this case, the plurality of substituents may be bonded to each other to form a ring.
Examples of the substituent which the alkyl group, the cycloalkyl group, the alkoxycarbonyl group, the alkylene group, or the divalent aromatic ring group described above can have include the same specific examples as those of the substituent which each group represented by R51 to R53 in General Formula (III) described below can have.
The alkyl group represented by R3 may be linear or branched, and is preferably an alkyl group having 1 to 8 carbon atoms, and examples thereof include a methyl group, an ethyl group, a propyl group, an n-butyl group, a sec-butyl group, a hexyl group, and an octyl group.
The cycloalkyl group represented by R3 may be monocyclic or polycyclic. The monocyclic type is preferably a cycloalkyl group having 3 to 10 carbon atoms, and examples thereof can include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, and a cyclooctyl group. The polycyclic type is preferably a cycloalkyl group having 6 to 20 carbon atoms, and examples thereof can include an adamantyl group, a norbornyl group, an isobornyl group, a camphanyl group, a dicyclopentyl group, an α-pinene group, a tricyclodecanyl group, a tetracyclododecyl group, and an androstanyl group. Moreover, some of the carbon atoms in a cycloalkyl group may be substituted with a heteroatom such as an oxygen atom.
The aryl group represented by R3 is preferably an aryl group having 6 to 10 carbon atoms, and examples thereof include aryl groups such as a phenyl group, a naphthyl group, and an anthryl group, and divalent aromatic ring groups including a hetero ring, such as thiophene, furan, pyrrole, benzothiophene, benzofuran, benzopyrrole, triazine, imidazole, benzimidazole, triazole, thiadiazole, and thiazole.
The aralkyl group represented by R3 is preferably an aralkyl group having 7 to 12 carbon atoms, and examples thereof can include a benzyl group, a phenethyl group, and naphthylmethyl group.
The alkyl group portion in the alkoxy group represented by R3 is the same as the alkyl group represented by R3 described above, and the preferable range thereof is also the same.
Examples of the acyl group represented by R3 include an aliphatic acyl group having 1 to 10 carbon atoms such as a formyl group, an acetyl group, a propionyl group, a butyryl group, an isobutyryl group, a valeryl group, a pivaloyl group, a benzoyl group, or a naphthoyl group, and the acyl group is preferably an acetyl group or a benzoyl group.
Examples of the heterocyclic group represented by R3 include the cycloalkyl group including a heteroatom and the aryl group including a heteroatom, described above, and the heterocyclic group is preferably a pyridine ring group or a pyran ring group.
R3 is preferably a linear or branched alkyl group (specifically, a methyl group, an ethyl group, a propyl group, an i-propyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a neopentyl group, a hexyl group, a 2-ethylhexyl group, or an octyl group) having 1 to 8 carbon atoms, a cycloalkyl group (specifically, a cyclopentyl group, a cyclohexyl group, a norbornyl group, or an adamantyl group) having 3 to 15 carbon atoms, or a group having 2 or more carbon atoms. R3 is more preferably an ethyl group, an i-propyl group, a sec-butyl group, a tert-butyl group, a neopentyl group, a cyclohexyl group, an adamantyl group, a cyclohexyl methyl group, or an adamantane methyl group, and still more preferably a tert-butyl group, a sec-butyl group, a neopentyl group, a cyclohexyl methyl group, or an adamantane methyl group.
Examples of the divalent connecting group represented by M3 include alkylene groups (for example, a methylene group, an ethylene group, a propylene group, a butylene group, a hexylene group, and an octylene group), cycloalkylene groups (for example, a cyclopentylene group, a cyclohexylene group, and adamantylene group), alkenylene groups (for example, an ethylene group, a propenylene group, and a butenylene group), divalent aromatic ring groups (for example, a phenylene group, a tolylene group, and a naphthylene group), —S—, —O—, —CO—, —SO2—, —N(R0)—, and divalent connecting groups obtained by combining a plurality of these. R0 is a hydrogen atom or an alkyl group (which is, for example, an alkyl group having 1 to 8 carbon atoms, and specifically, a methyl group, an ethyl group, a propyl group, an n-butyl group, a sec-butyl group, a hexyl group, or an octyl group).
The alkyl group represented by Q3 is, for example, an alkyl group having 1 to 8 carbon atoms, and specifically, preferable examples thereof can include a methyl group, an ethyl group, a propyl group, an n-butyl group, a sec-butyl group, a hexyl group, and an octyl group.
The cycloalkyl group represented by Q3 is, for example, a cycloalkyl group having 3 to 15 carbon atoms, and specifically, preferable examples thereof can include a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group.
The aryl group represented by Q3 is, for example, an aryl group having 6 to 15 carbon atoms, and specifically, preferable examples thereof can include a phenyl group, a tolyl group, a naphthyl group, and anthryl group.
Examples of the heterocyclic group represented by Q3 include a cycloalkyl group including a heteroatom and an aryl group including a heteroatom.
In the cycloalkyl group which may include a heteroatom and the aryl group which may include a heteroatom, represented by Q3, examples of an aliphatic hydrocarbon ring group which does not include a heteroatom or an aryl group which does not include a heteroatom include the cycloalkyl group and the aryl group represented by Q3 described above, and each of the cycloalkyl group and the aryl group preferably has 3 to 15 carbon atoms.
Examples the cycloalkyl group including a heteroatom and the aryl group including a heteroatom include a group having a heterocyclic structure such as thiirane, cyclothiolane, thiophene, furan, pyrrole, benzothiophene, benzofuran, benzopyrrole, triazine, imidazole, benzimidazole, triazole, thiadiazole, thiazole, or pyrrolidone, and the cycloalkyl group and the aryl group are not limited thereto as long as, in general, the groups have a structure (a ring formed by carbon and a heteroatom or a ring formed by heteroatoms) called a hetero ring.
As a ring which may be formed by bonding of at least two of Q3, M3, and R3 to each other, a case where at least two of Q3, M3, and R3 are bonded to each other to form, for example, a propylene group or a butylene group, and as a result, a 5- or 6-membered ring containing an oxygen atom is formed is exemplified.
Each of the groups represented by Q3, M3, and R3 in General Formula (II) may have a substituent, and examples of the substituent can include an alkyl group, a cycloalkyl group, an aryl group, an amino group, an amide group, a ureido group, a urethane group, a hydroxyl group, a carboxyl group, a halogen atom, an alkoxy group, a thioether group, an acyl group, an acyloxy group, an alkoxycarbonyl group, a cyano group, and nitro group, and the substituent preferably has 8 or less carbon atoms.
The group represented by -M3-Q3 is preferably a group which is configured of 1 to 30 carbon atoms.
R3 in General Formula (II) is preferably a group having 2 or more carbon atoms, and is more preferably a group represented by the following General Formula (II-2).
In General Formula (II-2), each of R81, R82, and R83 independently represents an alkyl group, an alkenyl group, a cycloalkyl group or an aryl group. n81 represents 0 or 1.
At least two of R81 to R83 may be connected to each other to form a ring.
The alkyl group represented by each of R81 to R83 may be linear or branched, and is preferably an alkyl group having 1 to 8 carbon atoms.
The alkenyl group represented by each of R81 to R83 may be linear or branched, and is preferably an alkenyl group having 1 to 8 carbon atoms.
Examples of the cycloalkyl groups represented by R81 to R83 include the same groups as those described as the cycloalkyl group of R3 described above.
Examples of the aryl groups represented by R81 to R83 include the same groups as those described as the aryl group of R3 described above.
Each of R81 to R83 is preferably an alkyl group, and more preferably a methyl group.
A ring which at least two of R81 to R83 can form is preferably a cyclopentyl group, a cyclohexyl group, a norbornyl group, or adamantyl group.
Specific examples of the repeating unit represented by General Formula (II) will be described below, but the present invention is not limited thereto.
In General Formula (III), each of R51, R52, and R53 independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group. R52 may be bonded to L5 to form a ring, and R52 in this case represents an alkylene group.
L5 represents a single bond, or an alkylene group, —COO-L1-, —O-L1-, or a divalent connecting group selected from the groups formed by combining two or more thereof, and L1 represents an alkylene group or a cycloalkylene group. Here, in a case where L5 is bonded to R52 to form a ring, L5 represents a trivalent connecting group.
R54 represents an alkyl group, and each of R55 and R56 independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, or an aralkyl group. R55 and R53 may be bonded to each other to form a ring. However, R55 and R56 do not represent a hydrogen atom at the same time in any case.
General Formula (III) will be described in more detail.
Preferable examples of the alkyl group represented by each of R51 to R53 in General Formula (III) include an alkyl group having 20 or less carbon atoms such as a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a hexyl group, a 2-ethylhexyl group, an octyl group, or a dodecyl group, which may have a substituent, and an alkyl group having 8 or less carbon atoms is more preferable, and an alkyl group having 3 or less carbon atoms is particularly preferable.
The alkyl group included in an alkoxycarbonyl group is preferably the same alkyl group as that represented by each of R51 to R53 described above.
The cycloalkyl group may be monocyclic or polycyclic. Preferable examples include a monocyclic cycloalkyl group having 3 to 10 carbon atoms, such as a cyclopropyl group, a cyclopentyl group, or a cyclohexyl group, which may have a substituent.
Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom, and a fluorine atom is particularly preferable.
Examples of the preferable substituent in each group described above can include an alkyl group, a cycloalkyl group, an aryl group, an amino group, an amide group, a ureido group, a urethane group, a hydroxyl group, a carboxyl group, a halogen atom, an alkoxy group, a thioether group, an acyl group, an acyloxy group, an alkoxycarbonyl group, a cyano group, and nitro group, and the substituent preferably has 8 or less carbon atoms.
In a case where R52 represents an alkylene group and is bonded to L5 to form a ring, preferable examples of the alkylene group include alkylene groups having 1 to 8 carbon atoms such as a methylene group, an ethylene group, a propylene group, a butylene group, a hexylene group, and an octylene group. The alkylene more preferably has 1 to 4 carbon atoms, and particularly preferably has 1 or 2 carbon atoms. A ring formed by bonding of R52 and L5 is particularly preferably 5- or 6-membered ring.
As R51 and R53 in Formula (III), a hydrogen atom, an alkyl group, or a halogen atom is more preferable, and a hydrogen atom, a methyl group, an ethyl group, a trifluoromethyl group (—CF3), a hydroxymethyl group (—CH2—OH), a chloromethyl group (—CH2—Cl), or a fluorine atom (—F) is particularly preferable. As R52, a hydrogen atom, an alkyl group, a halogen atom, or an alkylene group (which is bonded to L5 to form a ring) is more preferable, and a hydrogen atom, a methyl group, an ethyl group, a trifluoromethyl group (—CF3), a hydroxymethyl group (—CH2—OH), a chloromethyl group (—CH2—Cl), a fluorine atom (—F), a methylene group (which is bonded to L5 to form a ring), or an ethylene group (which is bonded to L5 to form a ring) is particularly preferable.
Examples of the alkylene group represented by L1 include alkylene groups having 1 to 8 carbon atoms such as a methylene group, an ethylene group, a propylene group, a butylene group, a hexylene group, and an octylene group. The alkylene more preferably has 1 to 4 carbon atoms, and particularly preferably has 1 or 2 carbon atoms.
As the cycloalkylene group represented by L1, a cycloalkylene group having 3 to 20 carbon atoms is preferable, and examples thereof include a cyclopropylene group, a cyclobutylene group, a cyclopentylene group, a cyclohexylene group, a cycloheptylene group, a cyclooctylene group, a norbornylene group, and an adamantylene group.
In the cycloalkylene group represented by L1, carbon atoms configuring the ring (carbon(atoms) which contribute to ring formation) may be carbonyl carbons, may be heteroatoms such as oxygen atoms, or may form a lactone ring containing an ester bond.
L5 is preferably a single bond or a group represented by —COO-L1-, and more preferably a single bond.
Preferable and specific examples of the divalent connecting group represented by L5 are shown below, but the present invention is not limited thereto.
In a case where L5 forms a ring by bonding to R52, suitable examples of the trivalent connecting group represented by L5 can include a group obtained by excluding one arbitrary hydrogen atom from a specific example described above of the divalent connecting group represented by L5.
The alkyl group represented by each of R54 to R56 is preferably an alkyl group having 1 to 20 carbon atoms, more preferably an alkyl group having 1 to 10 carbon atoms, and particularly preferably an alkyl group having 1 to 4 carbon atoms such as a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, or a t-butyl group.
The cycloalkyl group represented by R55 or R56 is preferably a cycloalkyl group having 3 to 20 carbon atoms, may be a cycloalkyl group which is monocyclic, such as a cyclopentyl group or a cyclohexyl group, and may be a cycloalkyl group which is polycyclic, such as a norbornyl group, an adamantyl group, a tetratricyclodecanyl group, or a tetracyclodododecanyl group.
A ring formed by bonding of R55 and R56 to each other is preferably a ring having 3 to 20 carbon atoms, may be a monocyclic ring such as a cyclopentyl group or a cyclohexyl group, and may be a polycyclic ring such as a norbornyl group, an adamantyl group, a tetratricyclodecanyl group, or a tetracyclododecanyl group. In a case where R55 and R56 are bonded to each other to form a ring, R54 is preferably an alkyl group having 1 to 3 carbon atoms, and a methyl group or an ethyl group is more preferable.
The aryl group represented by R55 or R56 preferably has 6 to 20 carbon atoms, and may be monocyclic or polycyclic, or may have a substituent. Examples thereof include a phenyl group, a 1-naphthyl group, a 2-naphthyl group, a 4-methylphenyl group, and a 4-methoxyphenyl group. In a case where any one of R55 and R56 is a hydrogen atom, the other is preferably an aryl group.
The aralkyl group represented by R55 or R56 may be monocyclic or polycyclic, or may have a substituent. The aralkyl group preferably has 7 to 21 carbon atoms, and examples thereof include a benzyl group and a 1-naphthylmethyl group.
As the synthetic method of a monomer corresponding to the repeating unit represented by General Formula (III), a general synthetic method of a polymerizable group-containing ester can be applied, but the method is not be particularly limited.
Specific examples of the repeating unit represented by General Formula (III) will be described below, but the present invention is not limited thereto.
In the specific examples, each of Rx and Xa1 represents a hydrogen atom, CH3, CF3, or CH2OH. Each of Rxa and Rxb independently represents an alkyl group having 1 to 4 carbon atoms, an aryl group having 6 to 18 carbon atoms, or an aralkyl group having 7 to 19 carbon atoms. Z represents a substituent. p represents 0 or a positive integer, and p is preferably 0 to 2, and more preferably 0 or 1. When a plurality of Z's are present, Z's may be the same as or different from each other. As Z, from the viewpoint of increasing dissolution contrast with respect to a developer including an organic solvent before and after acid decomposition, a group consisting of only hydrogen and carbon atoms is suitably exemplified, and for example, a linear or branched alkyl group or cycloalkyl group is preferable.
The repeating unit represented by General Formula (III) is preferably the repeating unit represented by the following General Formula (III-1), for the reason of superior effects of the present invention.
In General Formula (III-1), each of R1 and R2 independently represents an alkyl group, each of R11 and R12 independently represents an alkyl group, and R13 represents a hydrogen atom or an alkyl group. R11 and R12 may be connected to each other to form a ring, and R11 and R13 may be connected to each other to form a ring.
Ra represents a hydrogen atom, an alkyl group, a cyano group, or a halogen atom, L5 represents a single bond, or an alkylene group, —COO-L1-, —O-L1-, or a divalent connecting group selected from the groups formed by combining two or more thereof, and L1 represents an alkylene group or a cycloalkylene group.
In General Formula (III-1), the alkyl group represented by each of R1, R2, and R11 to R13 is preferably an alkyl group having 1 to 10 carbon atoms, and examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a t-butyl group, a neopentyl group, a hexyl group, a 2-ethylhexyl group, an octyl group, and a dodecyl group.
The alkyl group represented by R1 or R2 is more preferably an alkyl group having 2 to 10 carbon atoms, and it is more preferable that any of R1 and R2 is an ethyl group, from the viewpoint of reliably achieving effects of the present invention.
The alkyl group represented by R11 or R12 is more preferably an alkyl group having 1 to 4 carbon atoms, still more preferably a methyl group or an ethyl group, and particularly preferably a methyl group.
R13 is more preferably a hydrogen atom or a methyl group.
R11 and R12 are particularly preferably connected to each other to form a ring, and R11 and R13 may be connected to each other to form a ring.
The ring formed by connection of R11 and R12 to each other is preferably a 3- to 8-membered ring, and more preferably a 5- or 6-membered ring.
The ring formed by connection of R11 and R13 to each other is preferably a 3- to 8-membered ring, and more preferably a 5- or 6-membered ring.
The time when R11 and R13 are connected to each other to form a ring is preferably the time when R11 and R12 are connected to each other to form a ring.
The ring formed by connection of R11 and R12 (or R11 and R13) to each other is more preferably an alicyclic group described below as X in General Formula (I-1).
The rings formed by connection of alkyl groups represented by R1, R2, R11 to R13, or R11 and R12 (or R11 and R13) may further have substituents.
Examples of the substituents which the rings formed by connection of alkyl groups represented by R1, R2, R11 to R13, or R11 and R12 (or R11 and R13) can further have include a cycloalkyl group, an aryl group, an amino group, a hydroxy group, a carboxy group, a halogen atom, an alkoxy group, an aralkyloxy group, a thioether group, an acyl group, an acyloxy group, an alkoxycarbonyl group, a cyano group, and a nitro group. The substituents may be bonded to each other to form a ring, and examples of the ring when the substituents are bonded to each other to form a ring include a cycloalkyl group having 3 to 10 carbon atoms and a phenyl group.
The alkyl group represented by Ra may have a substituent, and is preferably an alkyl group having 1 to 4 carbon atoms.
Preferable examples of the substituent which the alkyl group represented by Ra may have include a hydroxyl group and a halogen atom.
Examples of the halogen atom represented by Ra include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
Ra is preferably a hydrogen atom, a methyl group, a hydroxymethyl group, a perfluoroalkyl group having 1 to 4 carbon atoms (for example, a trifluoromethyl group), and a methyl group is particularly preferable from the viewpoint of raising the glass transition point (Tg) of the resin (A) and improving resolving power and a space width roughness.
Specific examples and preferable examples of L5 and L1 include the same as those described in L5 and L1 of General Formula (III).
To achieve a higher contrast (high γ value), high resolution, high film loss reduction performance, and high sensitivity, the repeating unit represented by General Formula (III-1) is preferably the repeating unit represented by the following General Formula (III-2).
In General Formula (III-2), X represents an alicyclic group.
R1, R2, Ra, and L5 has the same meaning as R1, R2, Ra, and L5 in General Formula (III-1), respectively, and R1, R2, Ra, and L5 in the specific examples and the preferable examples has the same meaning as R1, R2, Ra, and L5 in General Formula (III-1), respectively.
The alicyclic group represented by X may be monocyclic, polycyclic, or bridged, and preferably represents an alicyclic group having 3 to 25 carbon atoms.
In addition, the alicyclic group may have a substituent, and examples of the substituent include the same substituents as those described above as the substituents which the rings formed by connection of alkyl groups represented by R1, R2, R11 to R13, or R11 and R12 (or R11 and R13) can further have and alkyl groups (a methyl group, an ethyl group, a propyl group, a butyl group, a perfluoroalkyl group (for example, a trifluoromethyl group), and the like).
X preferably represents an alicyclic group having 3 to 25 carbon atoms, more preferably represents an alicyclic group having 5 to 20 carbon atoms, and particularly preferably a cycloalkyl group having 5 to 15 carbon atoms.
In addition, X is preferably an alicyclic group having a 3- to 8-membered ring or a fused ring group thereof, and more preferably 5- or 6-membered ring or a fused ring group thereof.
Examples of the structure of the alicyclic group represented by X are shown below.
Preferable examples of the alicyclic group can include an adamantyl group, a noradamantyl group, a decalin residue, a tricyclodecanyl group, a tetracyclododecanyl group, a norbornyl group, a cedrol group, a cyclopentyl group, a cyclohexyl group, cycloheptyl group, a cyclooctyl group, a cyclodecanyl group, and a cyclododecanyl group. The alicyclic group is more preferably a cyclohexyl group, a cyclopentyl group, an adamantyl group, or a norbornyl group, still more preferably a cyclohexyl group or a cyclopentyl group, and particularly preferably a cyclohexyl group.
Specific examples of the repeating unit represented by General Formula (III-1) or (III-2) are shown below, but the present invention is not limited thereto.
In General Formula (IV), each of R71, R72, and R73 independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group. R42 may be bonded to L4 to form a ring, and R72 in this case represents an alkylene group.
L7 represents a single bond or a divalent connecting group, and in the case of forming a ring with R72, represents a trivalent connecting group.
R74 represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, an alkoxy group, an acyl group, or a heterocyclic group.
M4 represents a single bond or a divalent connecting group.
Q4 represents an alkyl group, a cycloalkyl group, an aryl group, or a heterocyclic group.
At least two of Q4, M4, and R74 may be bonded to each other to form a ring.
Specific examples and preferable examples of respective groups represented by R71, R72, and R73 include the same as those described as R51, R52, and R53 in General Formula (III).
Examples of the divalent connecting group represented by L7 include an alkylene group, a divalent aromatic ring group, —COO-L2-, —O-L2-, and a group formed by combining two or more thereof. Here, L2 represents an alkylene group, a cycloalkylene group, a divalent aromatic ring group, a group obtained by combining an alkylene group and a divalent aromatic ring group.
Specific examples and preferable examples of the alkylene group and the cycloalkylene group represented by L2 are the same as those described as the alkylene group and the cycloalkylene group represented by L1 in General Formula (III).
As the divalent aromatic ring group represented by L2, a 1,4-phenylene group, a 1,3-phenylene group, a 1,2-phenylene group, or a 1,4-naphthylene group is preferable, and a 1,4-phenylene group is more preferable.
L7 is preferably a single bond, a group represented by —COO-L2-, or a divalent aromatic ring group, and more preferably a single bond.
Specific examples and preferable examples of each group represented by R74 include the same as those described as R3 in General Formula (II).
Specific examples and preferable examples of M4 include the same as those described as M3 in General Formula (II).
Specific examples and preferable examples of Q4 include the same as those described as Q3 in General Formula (II). Specific examples and preferable examples of a ring formed by bonding of at least two of Q4, M4, and R44 to each other include the same as those described as a ring formed by bonding of at least two of Q3, M3, and R3 to each other.
Specific examples of the repeating unit represented by General Formula (IV) will be described below, but the present invention is not limited thereto.
As the repeating unit represented by any one of General Formulas (II) to (IV), one type thereof may be used or two or more types thereof may be used in combination.
The content (in the case of containing plural types, the total) of the repeating unit represented by any one of General Formulas (II) to (IV) in the resin (A) is preferably 5 mol % to 80 mol %, more preferably 5 mol % to 75 mol %, and still more preferably 10 mol % to 70 mol %, with respect to the entirety of repeating units in the resin (A).
Repeating Unit (c) Having Polar Group Other than Repeating Unit Represented by General Formula (I)
The resin (A) preferably includes the repeating unit (c) having a polar group other than the repeating unit represented by General Formula (I). When the resin (A) includes the repeating unit (c), for example, the sensitivity of a composition including the resin can be improved. The repeating unit (c) is preferably a non-acid-decomposable repeating unit (that is, a repeating unit which does not include an acid-decomposable group).
Regarding “polar group” which can be included in the repeating unit (c) and the repeating unit having the polar group, the description in paragraphs “0149” to “0157” of JP2013-76991A can be referred to, and the contents thereof are incorporated in the present specification.
In a case where the repeating unit (c) has an alcoholic hydroxy group or a cyano group as a polar group, as one aspect of a preferable repeating unit, a repeating unit having an alicyclic hydrocarbon structure substituted with a hydroxyl group or a cyano group is exemplified. At this time, an acid-decomposable group is not preferably included. As the alicyclic hydrocarbon structure in the alicyclic hydrocarbon structure substituted with a hydroxyl group or a cyano group, an adamantyl group, a diamantyl group, or a norbornane group is preferable. As a preferable alicyclic hydrocarbon structure substituted with a hydroxyl group or a cyano group, the substructures represented by the following General Formulas (VIIa) to (VIIc) are preferable. Thus, adhesion to substrate and developer affinity are improved.
In General Formulas (VIIa) to (VIIc), Each of R2c to R4c independently represents a hydrogen atom, a hydroxyl group, or a cyano group. Here, at least one of R2c to R4c is a hydroxyl group. Preferably, one or two of R2c to R4c are hydroxyl groups, and the other is a hydrogen atom. In General Formula (VIIa), more preferably, two of R2c to R4c are hydroxyl groups, and the others is a hydrogen atom.
As a repeating unit having a substructure represented by each of General Formulas (VIIa) to (VIIc), the repeating units represented by the following General Formulas (AIIa) to (AIIc) can be exemplified.
In General Formulas (AIIa) to (AIIc), R1c represents a hydrogen atom, a methyl group, a trifluoromethyl group, or a hydroxymethyl group.
R2c to R4c have the same meaning as R2c to R4c in General Formulas (VIIa) to (VIIc), respectively.
Although the resin (A) may contain or may not contain a repeating unit having a hydroxyl group or a cyano group, in a case where the resin (A) contains the repeating unit, the content of the repeating unit having a hydroxyl group or a cyano group is preferably 1 mol % to 60 mol %, more preferably 3 mol % to 50 mol %, and still more preferably 5 mol % to 40 mol %, with respect to the entirety of repeating units in the resin (A).
Specific examples of the repeating unit having a hydroxyl group or a cyano group are described below, but the present invention is not limited thereto.
The repeating unit (c) may be a repeating unit having a lactone structure as a polar group.
As the repeating unit having a lactone structure, the repeating unit represented by the following General Formula (AII) is more preferable.
In General Formula (AII), Rb0 represents a hydrogen atom, a halogen atom, or an alkyl group (preferably has 1 to 4 carbon atoms) which may have a substituent.
Preferable examples of the substituent which the alkyl group represented by Rb0 may have include a hydroxyl group and a halogen atom. Examples of the halogen atom represented by Rb0 include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Rb0 is preferably a hydrogen atom, a methyl group, a hydroxymethyl group, or a trifluoromethyl group, and particularly preferably a hydrogen atom or a methyl group.
Ab represents a single bond, an alkylene group, a divalent connecting group having a monocyclic or polycyclic cycloalkyl structure, an ether bond, an ester bond, a carbonyl group, or a divalent connecting group obtained by combining these. Ab is preferably single bond or a divalent connecting group represented by -Ab1-CO2—.
Ab1 is a linear or branched alkylene group or a monocyclic or polycyclic cycloalkylene group, and preferably a methylene group, an ethylene group, a cyclohexylene group, an adamantylene group, or a norbornylene group.
V represents a group having a lactone structure.
As the group having a lactone structure, any group can be used as long as the group has a lactone structure, but the group preferably has a 5- to 7-membered ring lactone structure. It is preferable that another ring structure be condensed with the 5- to 7-membered lactone structure while forming a bicyclo structure or a spiro structure. The group more preferably has a repeating unit having a lactone structure represented by any one of the following General Formulas (LC1-1) to (LC1-17). In addition, the lactone structure may be directly bonded to the main structure. A preferable structure is (LC1-1), (LC1-4), (LC1-5), (LC1-6), (LC1-8), (LC1-13), or (LC1-14).
The lactone structure portion may or may not have a substituent (Rb2). Preferable examples of the substituent (Rb) include an alkyl group having 1 to 8 carbon atoms, a monovalent cycloalkyl group having 4 to 7 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, an alkoxycarbonyl group having 2 to 8 carbon atoms, a carboxyl group, a halogen atom, a hydroxyl group, a cyano group, and an acid-decomposable group. The substituent (Rb2) is more preferably an alkyl group having 1 to 4 carbon atoms, a cyano group, or an acid-decomposable group. n2 represents an integer of 0 to 4. When n2 is 2 or greater, plural substituents (Rb2) present in a molecule may be the same as or different from each other, and plural substituents (Rb2) present in a molecule may be bonded to each other to form a ring.
The repeating unit having a lactone group typically has optical isomers, and any optical isomer may be used. In addition, one type of optical isomer may be used alone, or two or more types of optical isomers may be used in combination. In a case where one type of optical isomer is mainly used, the optical purity (ee) is preferably 90% or greater, and more preferably 95% or greater.
The resin (A) may contain or may not contain a repeating unit having a lactone structure, and in a case where the resin (A) contains the repeating unit having a lactone structure, the content of the repeating unit in the resin (A) is preferably within a range of 1 mol % to 50 mol %, more preferably within a range of 3 mol % to 40 mol %, and still more preferably within a range of 5 mol % to 30 mol %, with respect to the entirety of repeating units.
Specific examples of the repeating unit having a lactone structure in the resin (A) are shown below, but the present invention is not limited thereto. In the formula. Rx represents H, CH3, CH2OH, or CF3.
As a sultone group which the resin (A) has, the following General Formula (SL-1) or (SL-2) is preferable. Rb2 and n2 in the formula have the same definition as those in General Formulas (LC1-1) to (LC1-17), respectively.
As the repeating unit including a sultone group which the resin (A) has, a repeating unit formed by substituting the lactone group in the repeating unit having an lactone group described above with a sultone group is preferable.
The repeating unit (c) may be a repeating unit having a cyclic carbonic acid ester structure as a polar group.
The repeating unit having a cyclic carbonic acid ester structure is preferably the repeating unit represented by the following General Formula (A-1).
In General Formula (A-1), RA1 represents a hydrogen atom or an alkyl group.
In a case where RA2 is 2 or greater, each of RA2's independently represents a substituent.
A represents a single bond or a divalent connecting group.
Z represents an atomic group which forms a monocyclic or polycyclic structure together with a group represented by —O—C(═O)—O— in the formula.
n represents an integer of 0 or greater.
General Formula (A-1) will be described in detail.
The alkyl group represented by RA1 may have a substituent such as a fluorine atom. RA1 is preferably a hydrogen atom, a methyl group, or a trifluoromethyl group, and more preferably a methyl group.
The substituent represented by RA2, for example, is an alkyl group, a cycloalkyl group, a hydroxyl group, an alkoxy group, an amino group, or an alkoxycarbonylamino group. As the substituent, an alkyl group having 1 to 5 carbon atoms is preferable, and examples thereof can include a linear alkyl group having 1 to 5 carbon atoms; and a branched alkyl group having 3 to 5 carbon atoms. The alkyl group may have a substituent such as a hydroxyl group.
n is an integer of 0 or greater, which represents the number of substituents. For example, n is preferably 0 to 4, and more preferably 0.
Examples of the divalent connecting group represented by A include an alkylene group, a cycloalkylene group, an ester bond, an amide bond, an ether bond, a urethane bond, a urea bond, and combinations thereof. As the alkylene, an alkylene group having 1 to 10 carbon atoms is preferable, and an alkylene group having 1 to 5 carbon atoms is more preferable.
In an aspect of the present invention, A is preferably a single bond or an alkylene group.
As a monocycle including —O—C(═O)—O—, represented by Z, a 5- to 7-membered ring having nA of 2 to 4, in the cyclic carbonic acid ester represented by the following General Formula (a), is exemplified, and a 5-membered ring or a 6-membered ring (nA=2 or 3) is preferable, and 5-membered ring (nA=2) is more preferable.
As a polycycle including —O—C(═O)—O—, represented by Z, a structure in which a fused ring is formed by cyclic carbonic acid ester represented by the following General Formula (a) together with one or two more other ring structures or a structure in which a spiro ring is formed is exemplified. “Other ring structures” capable of forming a fused ring or a spiro ring may be an alicyclic hydrocarbon group, may be an aromatic hydrocarbon group, or may be a heterocycle.
The resin (A) may include one type of repeating units having a cyclic carbonic acid ester structure, or may include two or more types thereof.
In the resin (A), the content of the repeating unit having a cyclic carbonic acid ester structure (preferably, the repeating unit represented by General Formula (A-1)) is preferably 3 mol % to 80 mol %, more preferably from 3 mol % to 60 mol %, particularly preferably 3 mol % to 30 mol %, and most preferably from 10 mol % to 15 mol %, with respect to the entirety of repeating units constituting the resin (A). When the content is within the above range, developability, low defectivity, low LWR, low PEB temperature dependence, and profile, as a resist, can be improved.
Specific examples of the repeating unit represented by General Formula (A-1) will be described below, but the present invention is not limited thereto.
Moreover, RA1 in the following specific examples has the same meaning as RA1 in General Formula (A-1).
It is also a particularly preferable aspect that a polar group which the repeating unit (c) can have is an acidic group. Preferable examples of the acidic group include a phenolic hydroxyl group, a carboxylic acid group, a sulfonic acid group, a fluorinated alcohol group (for example, a hexafluoroisopropanol group), a sulfonamide group, a sulfonyl imide group, a (alkylsulfonyl)(alkylcarbonyl)methylene group, a (alkylsulfonyl)(alkylcarbonyl)imide group, a bis(alkylcarbonyl)methylene group, a bis(alkylcarbonyl)imide group, a bis(alkylsulfonyl)methylene group, a bis(alkylsulfonyl)imide group, a tris(alkylcarbonyl)methylene group, and a tris(alkylsulfonyl)methylene group. Among these, the repeating unit (c) is more preferably a repeating unit having a carboxyl group. Examples of the repeating unit having an acidic group include a repeating unit of which an acidic group is directly bonded to the main chain of a resin as a repeating unit by acrylic acid or methacrylic acid and a repeating unit of which an acidic group is bonded to the main chain of a resin through a connecting group, and any repeating unit introduced to a terminal of a polymer chain using a polymerization initiator or a chain transfer agent having an acidic group at the time of polymerization is preferable. A repeating unit by acrylic acid or methacrylic acid is particularly preferable.
The acidic group which the repeating unit (c) can have may include or may not include an aromatic ring, and in a case where the acidic group has an aromatic ring, the acidic group is preferably selected from acidic groups other than a phenolic hydroxyl group. In a case where the resin (A) contains a repeating unit having an acidic group, the content of the repeating unit having an acidic group in the resin (A) is typically 1 mol % or greater.
Specific examples of the repeating unit having an acidic group are shown below, but the present invention is not limited thereto.
In the specific examples, Rx represents H, CH3, CH2OH, or CF3.
(d) Repeating Unit Having Plurality of Aromatic Rings
The resin (A) may have the repeating unit (d) having a plurality of aromatic rings.
Regarding the repeating unit (d) having a plurality of aromatic rings, the description in paragraphs “0194” to “0207” of JP2013-76991A can be referred to, and the contents thereof are incorporated in the present specification.
The resin (A) may contain or may not contain the repeating unit (d), and in a case where the resin (A) contains the repeating unit (d), the content of the repeating unit (d) is preferably within a range of 1 mol % to 30 mol %, more preferably within a range of 1 mol % to 20 mol %, and still more preferably within a range of 1 mol % to 15 mol %, with respect to the entirety of repeating units in the resin (A). The repeating unit (d) included in the resin (A) may be included in combination of two or more types thereof.
The resin (A) in the present invention may suitably have a repeating unit other than the above-described repeating units. One example of such a repeating unit is a repeating unit which has an alicyclic hydrocarbon structure without a polar group (for example, an acid group, a hydroxyl group, or a cyano group described above) and does not exhibit acid-decomposability. Thus, the solubility of a resin is suitably adjusted in development using a developer including an organic solvent. As such a repeating unit, the repeating unit represented by General Formula (IV) is exemplified.
In General Formula (IV), R5 has at least one ring structure, and represents a hydrocarbon group not having a polar group.
Ra represents a hydrogen atom, an alkyl group, or a —CH2—O—Ra2 group. In the formula, Ra2 represents a hydrogen atom, an alkyl group, or an acyl group. Ra is preferably a hydrogen atom, a methyl group, a hydroxymethyl group, or a trifluoromethyl group, and particularly preferably a hydrogen atom or a methyl group.
Regarding the respective groups in General Formula (IV), the description in paragraphs “0212” to “216” of JP2013-76991A can be referred to, and the contents thereof are incorporated in the present specification.
Although the resin (A) may contain or may not contain a repeating unit which has an alicyclic hydrocarbon structure without a polar group and does not exhibit acid-decomposability, in a case where the resin (A) contains the repeating unit, the content of the repeating unit is preferably 1 mol % to 20 mol %, and more preferably 5 mol % to 15 mol %, with respect to the entirety of repeating units in the resin (A).
Specific examples of the repeating unit which has an alicyclic hydrocarbon structure without a polar group and does not exhibit acid-decomposability are shown below, but the present invention is not limited thereto. In the formula, Ra represents H, CH3, CH2OH, or CF3.
In addition, the resin (A) may include the following repeating units in consideration of rise of Tg, improvement of dry etching resistance, and effect of an internal filter with respect to the out of band light described above.
The resin (A) may further include the repeating unit represented by the following General Formula (P).
R41 represents a hydrogen atom or a methyl group. L41 represents a single bond or a divalent connecting group. L42 represents a divalent connecting group. S represents a structural portion that generates an acid on a side chain by being degraded by irradiation with an electron beam or extreme ultraviolet rays.
Specific examples of the repeating unit represented by General Formula (P) will be described below, but the present invention is not limited thereto. Regarding specific examples of the repeating unit represented by General Formula (P), the description in paragraphs “0168” to “0210” of JP2013-80002A and “0191” to “0203” of JP2013-137537A can be referred to, and the contents thereof are incorporated in the present specification.
The content of the repeating unit represented by General Formula (P) in the resin (A) is preferably within a range of 1 mol % to 40 mol %, more preferably within a range of 2 mol % to 30 mol %, and particularly preferably within a range of 5 mol % to 25 mol %, with respect to the entirety of repeating units in the resin (A).
In the resin (A) used in the composition of the present invention, the content molar ratio of respective repeating structural units is suitably set to adjust dry etching resistance or standard developer suitability of a resist, adhesion to substrate, a resist profile, and resolving power, heat resistance, and sensitivity which are properties generally required for a resist.
The form of the resin (A) of the present invention may be any form of a random form, a block form, a comb form, and a star form.
The resin (A) can be synthesized by, for example, polymerizing an unsaturated monomer corresponding to each structure through radical polymerization, cationic polymerization, or anionic polymerization. In addition, by performing a polymer reaction after polymerization is performed using an unsaturated monomer corresponding to a precursor of each structure, a target resin can also be obtained.
Examples of a general synthetic method include a collective polymerization method of performing polymerization by dissolving an unsaturated monomer and a polymerization initiator in a solvent and heating the resultant product and a dropping polymerization method of adding a solution containing an unsaturated monomer and an polymerization initiator dropwise to a heated solvent over a period of 1 hour to 10 hours, and the dropping polymerization method is preferable.
Examples of the solvent used in the polymerization can include solvents which can be used in preparing an active light-sensitive or radiation-sensitive resin composition described below, and it is more preferable that the polymerization is performed using the same solvent as the solvent (D) used in the composition of the present invention. Thus, generation of particles during storage can be suppressed.
The polymerization reaction is preferably performed in an inert gas atmosphere such as nitrogen or argon. The polymerization is initiated using a commercially available radical initiator as a polymerization initiator (azo-based initiator, peroxide, or the like). As the radical initiator, an azo-based initiator is preferable, and an azo-based initiator having an ester group, a cyano group, or a carboxyl group is preferable. Preferable examples of the initiator include azobisisobutyronitrile, azobisdimethylvaleronitrile, and dimethyl 2,2′-azobis(2-methylpropionate). As necessary, polymerization may be performed in the presence of a chain transfer agent (for example, alkyl mercaptan).
The concentration of the reaction is 5% by mass to 70% by mass, and preferably 10% by mass to 50% by mass. The reaction temperature is typically 10° C. to 150° C., preferably 30° C. to 120° C., and more preferably 40° C. to 100° C.
The reaction time is typically 1 hour to 48 hours, preferably 1 hour to 24 hours, and more preferably 1 hour to 12 hours.
After the reaction ends, cooling is performed to room temperature, and purification is performed. A usual method such as a liquid-liquid extraction method in which a residual monomer or an oligomer component is removed by washing with water or combining suitable solvents, a purification method in a solution state such as ultrafiltration which extracts and removes only substances having a specific molecular weight or less, a reprecipitation method in which a residual monomer or the like is removed by adding a resin solution dropwise to a poor solvent to coagulate the resin in the poor solvent, or a purification method in a solid state in which filtered resin slurry is washed with a poor solvent can be applied to the purification. For example, by bringing into contact with a solvent (poor solvent), which does poorly dissolve or does not dissolve the resin, corresponding to 10 times or less the volume amount of the reaction solution, or preferably 5 times to 10 times the volume amount of the reaction solution, the resin is solidified and precipitated.
The solvent (precipitation or reprecipitation solvent) used in precipitation or reprecipitation operation from the polymer solution may be a poor solvent for the polymer, and depending on the type of polymer, the solvent can be suitably selected from hydrocarbon, halogenated hydrocarbon, a nitro compound, ether, ketone, ester, carbonate, alcohol, carboxylic acid, water, and a mixed solvent including these solvents and used. Among these, as a precipitation or reprecipitation solvent, a solvent including at least alcohol (in particular, methanol) or water is preferable.
Although the amount used of precipitation or reprecipitation solvent used can be suitably selected in consideration of efficiency or yield, the amount used is generally 100 parts by mass to 10000 parts by mass, preferably 200 parts by mass to 2000 parts by mass, and more preferably 300 parts by mass to 1000 parts by mass, with respect to 100 parts by mass of the polymer solution.
Although the temperature at the time of precipitation or reprecipitation can be suitably selected in consideration of efficiency or operability, the temperature is typically about 0° C. to 50° C., and preferably around room temperature (for example, about 20° C. to 35° C.). Precipitation or reprecipitation operation can be performed by a known method such as a batch type or a continuous type using a generally used mixing vessel such as a stirring vessel.
The precipitated or reprecipitated polymer is typically subjected to generally used solid-liquid separation such as filtration or centrifugation, dried, and then, provided for use. The filtration is preferably performed under pressure using a solvent-resistant filter medium. The drying is performed at a temperature of about 30° C. to 100° C. at normal pressure or under reduced pressure (preferably, under reduced pressure), and preferably at a temperature of about 30° C. to 50° C.
Moreover, once the resin is precipitated, and after being separated, the resin is again dissolved in a solvent, and may be brought into contact with a solvent which does poorly dissolve or does not dissolve the resin. That is, a method which includes a step of precipitating a resin by bringing into contact with a poorly soluble or insoluble solvent which does not dissolve the polymer after the radical polymerization reaction ends (step a), a step of separating the resin from the solution (step b), a step of preparing a resin solution A by dissolving the resin in a solvent (step c), thereafter, by bringing the resin solution A into contact with a solvent in which the resin is poorly soluble or insoluble, corresponding to 10 times or less the volume amount (preferably 5 times or less the volume amount) of the resin solution A, the resin solid is precipitated (step d), and a step of separating the precipitated resin (step e) may be performed.
The polymerization reaction is preferably performed in an inert gas atmosphere such as nitrogen or argon. The polymerization is initiated using a commercially available radical initiator as a polymerization initiator (azo-based initiator, peroxide, or the like). As the radical initiator, an azo-based initiator is preferable, and an azo-based initiator having an ester group, a cyano group, or a carboxyl group is preferable. Preferable examples of the initiator include azobisisobutyronitrile, azobisdimethylvaleronitrile, and dimethyl 2,2′-azobis(2-methylpropionate). As necessary, an initiator is additionally added or added by being divided, and after the reaction ends, the reaction product is put into a solvent, and a target polymer is recovered by a powder recovery method or a solid recovery method. The concentration of the reaction is 5% by mass to 50% by mass, and preferably 10% by mass to 30% by mass. The reaction temperature is typically 10° C. to 150° C., preferably 30° C. to 120° C., and more preferably 60° C. to 100° C.
Although the molecular weight of the resin (A) according to the present invention is not particularly limited, the weight average molecular weight is preferably within a range of 1000 to 100000, more preferably within a range of 1500 to 60000, and particularly preferably within a range of 2000 to 30000, in terms of polystyrene measured by a GPC method. When the weight average molecular weight is within a range of 1000 to 100000, degradation of heat resistance or dry etching resistance can be prevented, and degradation of developability or degradation of film-forming properties due to increase in viscosity can be prevented.
The dispersity (Mw/Mn) is preferably 1.00 to 5.00, more preferably 1.00 to 3.50, and still more preferably 1.00 to 2.50. As the molecular weight distribution is lower, the resolution and the resist shape become better, and the side wall of the resist pattern becomes smoother, and thus, the roughness becomes excellent.
In the present specification, the weight average molecular weight (Mw) and dispersity of a resin can be determined by using, for example, HPL-8120 (manufactured by TOSOH CORPORATION), TSK gel Multipore HXL-M (manufactured by TOSOH CORPORATION, 7.8 mmHD×30.0 cm) as a column, and THF (tetrahydrofuran) or NMP (N-methyl-2-pyrrolidone) as an eluent.
The resin (A) can be used alone, or two or more types thereof can be used in combination. The content of the resin (A) is preferably 20% by mass to 99% by mass, more preferably 30% by mass to 99% by mass, and still more preferably 40% by mass to 99% by mass, based on the total solid content in the active light-sensitive or radiation-sensitive resin composition.
(C) Crosslinking Agent
The active light-sensitive or radiation-sensitive resin composition contains a compound (hereinafter, refer to as a crosslinking agent) crosslinking the resin (A) by the action of an acid. Here, a known crosslinking agent can be effectively used.
The crosslinking agent (C), for example, is a compound having a crosslinkable group which can crosslink the resin (A), examples of the crosslinkable group include a hydroxymethyl group, an alkoxymethyl group, an acyloxymethyl group, an alkoxymethyl ether group, an oxirane ring, and an oxetane ring.
The crosslinkable group is preferably a hydroxymethyl group, an alkoxymethyl group, an oxirane ring, or an oxetane ring.
The crosslinking agent (C) is preferably a compound (which also includes a resin) having two or more crosslinkable groups.
The crosslinking agent (C) is preferably a phenol derivative, a urea-based compound (compound having a urea structure), or a melamine-based compound (compound having a melamine structure), having a hydroxymethyl group or an alkoxymethyl group.
As the particularly preferable crosslinking agent (C), phenol derivatives which have a molecular weight of 1200 or less, include three to five benzene rings in the molecule, and further have two or more combined hydroxymethyl groups or alkoxymethyl groups, in which the hydroxymethyl groups and alkoxymethyl groups are concentrated in at least one of the benzene rings or distributably bonded thereto. By using such a phenol derivative, the effects of the present invention are more significantly exhibited. The alkoxymethyl groups which are bonded to the benzene ring preferably have 6 or less carbon atoms. Specifically, examples thereof include a methoxy methyl group, an ethoxy methyl group, an n-propoxy methyl group, an i-propoxy methyl group, an n-butoxy methyl group, an i-butoxy methyl group, a sec-butoxy methyl group, and a t-butoxy methyl group. Furthermore, similarly to a 2-methoxy ethoxy group, a 2-methoxy-1-propoxy group, an alkoxy-substituted alkoxy group is also preferable.
The crosslinking agent (C) is preferably a phenol derivative having a benzene ring in the molecule, more preferably a phenol derivative having two or more benzene rings in the molecule, and preferably a phenol derivative which does not include a nitrogen atom.
The crosslinking agent (C) is preferably a phenol derivative having 2 to 8 crosslinkable groups which can crosslink the resin (A), per molecule, and more preferably a phenol derivative having 3 to 6 crosslinkable groups.
Among the phenol derivatives, the following are particularly preferable examples. In the formula, L1 to L8 indicate crosslinkable groups such as an alkoxymethyl group, which may be the same or different, and the crosslinkable group preferably indicate a hydroxymethyl group, a methoxymethyl group, or an ethoxymethyl group.
As the crosslinking agent (C), commercially available products can also be used, or the crosslinking agent (C) can also be synthesized by a known method. For example, the phenol derivatives having a hydroxymethyl group can be obtained by reacting a phenol compound which does not have a corresponding hydroxymethyl group (compound where L1 to L8 in the above-described formula are hydrogen atoms) with formaldehyde in the presence of a base catalyst. In such a case, in order to prevent resinification or gelation, the reaction is preferably performed at a reaction temperature of 60° C. or lower. Specifically, synthesis can be performed by the methods described in JP1994-282067A (JP-H06-282067A), and JP1995-64285A (JP-1107-64285A).
the phenol derivatives having an alkoxymethyl group can be obtained by reacting a phenol derivative which has a corresponding hydroxymethyl group with an alcohol in the presence of an acid catalyst. In such a case, in order to prevent resinification or gelation, the reaction is preferably performed at a reaction temperature of 100° C. or lower. Specifically, it is possible for the compounds to be synthesized with the methods which are described in EP632003A1 and the like. The phenol derivative having a hydroxymethyl group or an alkoxymethyl group, synthesized in this manner is preferable from the viewpoint of stability during storage, and, the phenol derivative having an alkoxymethyl group is particularly preferable from the viewpoint of stability during storage. The phenol derivatives which have two or more combined hydroxymethyl groups or alkoxymethyl groups in which either are concentrated in the benzene rings or distributably bonded thereto may be used alone, or may be used in a combination of two or more types.
As the crosslinking agent, a compound having the following N-hydroxymethyl group, N-alkoxymethyl group, or N-acyloxy methyl group is also preferable.
As the compound having an N-hydroxymethyl group, an N-alkoxymethyl group, or an N-acyloxy methyl group, a compound having two or more (more preferably two to eight) partial structures which are represented by the following General Formula (CLNM-1) is preferable.
In General Formula (CLNM-1), RNM1 represents a hydrogen atom, an alkyl group, a cycloalkyl group, or an oxoalkyl group.
In General Formula (CLNM-1), the alkyl group of the RNM1 is preferably a linear or branched alkyl group having 1 to 6 carbon atoms. The cycloalkyl group of RNM1 is preferably a cycloalkyl group having 5 or 6 carbon atoms. The oxoalkyl group of RNM1 is preferably an oxoalkyl group having 3 to 6 carbon atoms, and examples thereof include a β-oxopropyl group, a β-oxobutyl group, a β-oxopentyl group, and a β-oxohexyl group.
Examples of more preferable aspects of the compound having two or more partial structures represented by General Formula (CLNM-1) include the urea-based compound represented by the following General Formula (CLNM-2), the alkylene urea-based compound represented by the following General Formula (CLNM-3), the glycoluril-based compound represented by the following General Formula (CLNM-4), and the melamine compound represented by the following General Formula (CLNM-5).
In General Formula (CLNM-2), each of RNM1's independently represents the same as RNM1 in General Formula (CLNM-1).
Each of RNM2's independently represents a hydrogen atom, an alkyl group (preferably having 1 to 6 carbon atoms), or a cycloalkyl group (preferably having 5 or 6 carbon atoms).
Specific examples of the urea-based compound represented by General Formula (CLNM-2) include N,N-di(methoxy methyl) urea, N,N-di(ethoxy methyl) urea, N,N-di(propoxy methyl) urea, N,N-di(isopropoxy methyl) urea, N,N-di(butoxy methyl) urea, N,N-di(t-butoxy methyl) urea, N,N-di(cyclohexyloxy methyl) urea, N,N-di(cyclopentyloxy methyl) urea, N,N-di(adamantyloxy methyl) urea, and N,N-di(norbornyloxy methyl) urea.
In General Formula (CLNM-3), each of RNM1's independently represents the same as RNM1 in General Formula (CLNM-1).
Each of RNM3 independently represents hydrogen atom, a hydroxyl group, a linear or branched alkyl group (preferably having 1 to 6 carbon atoms), a cycloalkyl group (preferably having 5 or 6 carbon atoms), an oxoalkyl group (preferably having 1 to 6 carbon atoms), an alkoxy group (preferably having 1 to 6 carbon atoms), or an oxoalkoxy group (preferably having 1 to 6 carbon atoms).
G represents a single bond, an oxygen atom, a sulfur atom, an alkylene group (preferably having 1 to 3 carbon atoms), or a carbonyl group. More specific examples thereof include a methylene group, an ethylene group, a propylene group, a 1-methyl ethylene group, a hydroxymethylene group, and a cyano methylene group.
Specific examples of the alkylene urea-based compound represented by General Formula (CLNM-3) include N,N-di(methoxymethyl)-4,5-di(methoxymethyl)ethylene urea, N,N-di(ethoxymethyl)-4,5-di(ethoxymethyl)ethylene urea, N,N-di(propoxymethyl)-4,5-di(propoxymethyl)ethylene urea, N,N-di(isopropoxymethyl)-4,5-di(isopropoxymethyl)ethylene urea, N,N-di(butoxymethyl)-4,5-di(butoxymethyl)ethylene urea, N,N-di(t-butoxymethyl)-4,5-di(t-butoxymethyl)ethylene urea, N,N-di(cyclohexyloxymethyl)-4,5-di(cyclohexyloxymethyl)ethylene urea, N,N-di(cyclopentyloxy methyl)-4,5-di(cyclopentyloxymethyl)ethylene urea, N,N-di(adamantyloxymethyl)-4,5-di(adamantyloxymethyl)ethylene urea, and N,N-di(norbornyloxymethyl)-4,5-di(norbornyloxymethyl)ethylene urea.
In General Formula (CLNM-4), each of RNM1's independently represents the same as RNM1 in General Formula (CLNM-1).
Each of RNM1's independently represents a hydrogen atom, a hydroxyl group, an alkyl group, a cycloalkyl group, or an alkoxy group.
More specific examples of the alkyl group (preferably having 1 to 6 carbon atoms), the cycloalkyl group (preferably having 5 or 6 carbon atoms), and the alkoxy group (preferably having 1 to 6 carbon atoms) of RNM4 include a methyl group, an ethyl group, a butyl group, a cyclopentyl group, a cyclohexyl group, a methoxy group, an ethoxy group, and a butoxy group.
Specific examples of the glycoluril-based compound represented by General Formula (CLNM-4) include N,N,N,N-tetra(methoxymethyl)glycoluril, N,N,N,N-tetra(ethoxymethyl)glycoluril, N,N,N,N-tetra(propoxymethyl)glycoluril, N,N,N,N-tetra(isopropoxymethyl)glycoluril, N,N,N,N-tetra(butoxymethyl)glycoluril, N,N,N,N-tetra(t-butoxymethyl)glycoluril, N,N,N,N-tetra(cyclohexyloxymethyl)glycoluril, N,N,N,N-tetra(cyclopentyloxymethyl)glycoluril, N,N,N,N-tetra(adamantyloxymethyl)glycoluril, and N,N,N,N-tetra(norbornyl oxymethyl)glycoluril.
In General Formula (CLNM-5), each of RNM1's independently represents the same as RNM1 in General Formula (CLNM-1).
Each of RNM5's independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, or an atomic group represented by the following General Formula (CLNM-5′).
RNM6 represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, or an atomic group represented by the following General Formula (CLNM-5″).
In General Formula (CLNM-5′), RNM1 represents the same as RNM1 in General Formula (CLNM-1).
In General Formula (CLNM-5″), RNM1 represents the same as RNM1 in General Formula (CLNM-1) and RNM5 represents the same as RNM5 in General Formula (CLNM-5).
More specific examples of the alkyl group (preferably having 1 to 6 carbon atoms), the cycloalkyl group (preferably having 5 or 6 carbon atoms), and the aryl group (preferably having 6 to 10 carbon atoms) of RNM5 and RNM6 include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a t-butyl group, a pentyl group, a cyclopentyl group, a hexyl group, a cyclohexyl group, a phenyl group, and a naphthyl group.
Examples of the melamine-based compound represented by General Formula (CLNM-5) include N,N,N,N,N,N-hexa(methoxymethyl)melamine, N,N,N,N,N,N-hexa(ethoxymethyl)melamine, N,N,N,N,N,N-hexa(propoxymethyl)melamine, N,N,N,N,N,N-hexa(isopropoxymethyl)melamine, N,N,N,N,N,N-hexa(butoxymethyl)melamine, N,N,N,N,N,N-hexa(t-butoxymethyl)melamine, N,N,N,N,N,N-hexa(cyclohexyloxymethyl) melamine, N,N,N,N,N,N-hexa(cyclopentyloxy methyl)melamine, N,N,N,N,N,N-hexa(adamantyloxymethyl)melamine. N,N,N,N,N,N-hexa(norbornyl oxymethyl)melamine, N,N,N,N,N,N-hexa(methoxymethyl)acetoguanamine, N,N,N,N,N,N-hexa(ethoxymethyl)acetoguanamine, N,N,N,N,N,N-hexa(propoxymethyl)acetoguanamine, N,N,N,N,N,N-hexa(isopropoxymethyl)acetoguanamine, N,N,N,N,N,N-hexa(butoxymethyl)acetoguanamine, N,N,N,N,N,N-hexa(t-butoxymethyl)acetoguanamine, N,N,N,N,N,N-hexa(methoxymethyl)benzoguanamine, N,N,N,N,N,N-hexa(ethoxymethyl)benzoguanamine, N,N,N,N,N,N-hexa(propoxymethyl)benzoguanamine, N,N,N,N,N,N-hexa(isopropoxymethyl)benzoguanamine, N,N,N,N,N,N-hexa(butoxymethyl)benzoguanamine, and N,N,N,N,N,N-hexa(t-butoxymethyl)benzoguanamine.
In General Formula (CLNM-1) to (CLNM-5), the group represented by RNM1 to RNM6 may further have a substituent. Examples of the substituent which RNM1 to RNM6 may have include a halogen atom, a hydroxyl group, a nitro group, a cyano group, a carboxyl group, a cycloalkyl group (preferably having 3 to 20 carbon atoms), an aryl group (preferably having 6 to 14 carbon atoms), an alkoxy group (preferably having 1 to 20 carbon atoms), a cycloalkoxy group (preferably having 3 to 20 carbon atoms), an acyl group (preferably having 2 to 20 carbon atoms), and an acyloxy group (preferably having 2 to 20 carbon atoms).
Specific examples of the compound having two or more partial structures represented by General Formula (CLNM-1) are exemplified below; however, the present invention is not limited thereto.
As a compound (epoxy compound) having an oxirane ring, the compound represented by the following General Formula (EP1) is exemplified.
In Formula (EP1) each of REP1 to REP3 independently represent a hydrogen atom, a halogen atom, an alkyl group, or a cycloalkyl group, and the alkyl group and the cycloalkyl group may have a substituent. In addition, REP1 and REP2, and REP2 and REP3 may be bonded to each other to form a ring structure.
Examples of the substituent which the alkyl group or the cycloalkyl group may have include a hydroxyl group, a cyano group, an alkoxy group, an alkyl carbonyl group, an alkoxycarbonyl group, an alkyl carbonyloxy group, an alkylthio group, an alkyl sulfone group, an alkylsulfonyl group, an alkyl amino group, and an alkyl amide group.
QEP represents a single bond or an organic group having an nEP value. REP1 to REP3 may be bonded to not only each other but also QEP to form a ring structure.
nEP represents an integer of 2 or greater, preferably an integer of 2 to 10, and more preferably an integer of 2 to 6. Here, in a case where QEP is a single bond, n is 2.
In a case where QEP is an organic group having an ncp value, an organic group having an nep value, which has a structure in which a divalent connecting group such as an ether group, an ester group, an amide group, a sulfonamide group, or an alkylene group (which preferably has 1 to 4 carbon atoms, and is more preferably a methylene), a trivalent connecting group such as —N(—)2, or a combination of these is linked to a chained or cyclic saturated hydrocarbon group having an nep value (preferably having 2 to 20 carbon atoms), an aromatic ring group having an nep value (preferably having 6 to 30 carbon atoms), or a chained or cyclic saturated hydrocarbon or aromatic hydrocarbon, is preferable.
Specific examples of the compound having an oxirane ring are shown below; however, the present invention is not limited thereto. As specific examples of the compound having an oxirane ring, the compounds described in paragraphs “0112” and “0113” of JP2012-252080A can also be exemplified, and the contents thereof are incorporated in the present specification.
Examples of the compound having an oxetane ring include the compound represented by the following General Formula (EP2).
In Formula (EP2), each of REP1A to REP5A independently represents a hydrogen atom, a halogen atom, an alkyl group, or a cycloalkyl group, and the alkyl group and the cycloalkyl group may have a substituent. In addition, REP2A and REP3A, REP2A and REP4, and REP4A and REP5A may be bonded to each other to form a ring structure.
Specific examples of the substituent which the alkyl group or the cycloalkyl group may have include the same substituents as those described as the substituent which the alkyl group or the cycloalkyl group may have in Formula (EP1).
QEPA represents a single bond or an organic group having an nEP value. REP1A to REP5A may be bonded to not only each other but also QEPA to form a ring structure.
nEPA represents an integer of 2 or greater, preferably an integer of 2 to 10, and more preferably an integer of 2 to 6. Here, in a case where QEPA is a single bond, nEPA is 2.
In a case where QEPA is an organic group having an nEPA value, an organic group having an nEPA value, which has a structure in which a divalent connecting group such as an ether group, an ester group, an amide group, a sulfonamide group, or an alkylene group (which preferably has 1 to 4 carbon atoms, and is more preferably a methylene), a trivalent connecting group such as —N(—)2, or a combination of these is linked to a chained or cyclic saturated hydrocarbon group having an nEPA value (preferably having 2 to 20 carbon atoms), an aromatic ring group having an nEPA value (preferably having 6 to 30 carbon atoms), or a chained or cyclic saturated hydrocarbon or aromatic hydrocarbon, is preferable.
Specific examples of the compound having an oxetane ring include the compounds exemplified below. In addition, the compounds described in paragraph “0114” of JP2012-252080A can also be exemplified, and the contents thereof are incorporated in the present specification.
In the present invention, the crosslinking agent may be used alone, or two or more kinds thereof may be used in combination.
The content of the crosslinking agent (C) is preferably 3% by mass to 65% by mass, more preferably 5% by mass to 50% by mass, still more preferably 10% by mass to 45% by mass, with respect to the total solid content in the composition, from the viewpoint that reduction of the residual film ratio and the resolving power is prevented, and stability of the resist liquid during storage is favorably maintained.
(B) Compound that Generates Acid by Active Light or Radiation
The composition of the present invention preferably contains a compound (B) that generates an acid by active light or radiation (hereinafter, referred to as an “acid generator”).
The compound (B) that generates an acid by irradiation with active rays or radiation may have a form of a low molecular weight compound, or may have a form in which the compound (B) is incorporated into a part of a polymer. In addition, a form of a low molecular weight compound and a form in which the compound (B) is incorporated into a part of a polymer may be used in combination.
In a case where the compound (B) that generates an acid by irradiation with active rays or radiation has a form of a low molecular weight compound, the molecular weight of the compound (B) is preferably 3000 or less, more preferably 2000 or less, and still more preferably 1000 or less.
In a case where the compound (B) that generates an acid by irradiation with active rays or radiation has a form in which the compound (B) is incorporated into a part of a polymer, the compound (B) may be incorporated into a part of the resin (A), or may be incorporated into a resin different from the resin (A).
Although the acid generator (B) is not particularly limited as long as it is a known acid generator, the acid generator is preferably a compound which generates an organic acid, for example, at least any one of sulfonic acid, bis(alkylsulfonyl)imide, and tris(alkylsulfonyl)methide by irradiation with active light or radiation, preferably an electron beam or extreme ultraviolet rays.
More preferably, the compounds represented by the following General Formula (ZI), (ZII), and (ZIII) can be exemplified.
In General Formula (ZI), Each of R201, R202, and R203 independently represents an organic group.
The organic group represented by each of R201, R202, and Ra203 generally has 1 to 30 carbon atoms, and preferably has 1 to 20 carbon atoms.
Two of R201 to R203 may be bonded to each other to form a ring structure, and an oxygen atom, a sulfur atom, an ester bond, an amide bond, or a carbonyl group may be included in the ring. Examples of the group that two of R201 to R203 form by bonding to each other can include an alkylene group (for example, a butylene group and a pentylene group).
Z− represents a non-nucleophilic anion (anion which is significantly low in ability causing a nucleophilic reaction).
Examples of the non-nucleophilic anion include a sulfonate anion (an aliphatic sulfonate anion, an aromatic sulfonate anion, or a camphorsulfonate anion), a carboxylate anion (an aliphatic carboxylate anion, an aromatic carboxylate anion, or an aralkylcarboxylate anion), a sulfonylimide anion, a bis(alkylsulfonyl)imide anion, and a tris(alkylsulfonyl)methide anion.
Regarding the aliphatic portion in the aliphatic sulfonate anion and the aliphatic carboxylate anion, and the aromatic group in the aromatic sulfonate anion and the aromatic carboxylate anion, the description in paragraphs “0234” to “0235” of JP2013-76991A can be referred to, and the contents thereof are incorporated in the present specification.
The alkyl group, the cycloalkyl group, the aryl group described above may have a substituent. Regarding the specific examples, the description in paragraph “0236” of JP2013-76991A can be referred to, and the contents thereof are incorporated in the present specification.
Regarding aralkyl carboxylate anion, sulfonylimide anion, bis(alkylsulfonyl)imide anion, and tris(alkylsulfonyl)methide anion, the description in paragraphs “0237” to “0239” of JP2013-76991A can be referred to, and the contents thereof are incorporated in the present specification.
Regarding other non-nucleophilic unions, the description in paragraph “0240” of JP2013-76991A can be referred to, and the contents thereof are incorporated in the present specification.
As the non-nucleophilic anion, an aliphatic sulfonate anion in which at least α-position of sulfonic acid is substituted with a fluorine atom, an aromatic sulfonate anion substituted with a fluorine atom or a group having a fluorine atom, a bis(alkylsulfonyl)imide anion in which the alkyl group is substituted with a fluorine atom, or a tris(alkylsulfonyl)methide anion in which the alkyl group is substituted with a fluorine atom is preferable. The non-nucleophilic anion is more preferably a perfluoro aliphatic sulfonate anion (which more preferably has 4 to 8 carbon atoms) or a benzenesulfonate anion having a fluorine atom, and still more preferably a nonafluorobutanesulfonate anion, a perfluorooctanesulfonate anion, a pentafluorobenzenesulfonate anion, or a 3,5-bis(trifluoromethyl)benzenesulfonate anion.
From the viewpoint of acid strength, the pKa of the generated acid is preferably −1 or less for sensitivity enhancement.
In addition, as the non-nucleophilic anion, the anion represented by the following General Formula (AN1) is also exemplified as a preferable aspect.
In the formula, each of Xf's independently represents a fluorine atom or an alkyl group substituted with at least one fluorine atom.
Each of R1 and R2 independently represents a hydrogen atom, a fluorine atom, or an alkyl group, and in a case where a plurality of R1's and R2's are present, R1's and R2's may be the same as or different from each other.
L represents a divalent connecting group, and in a case where a plurality of L's are present, L's may be the same as or different from each other.
A represents a cyclic organic group.
x represents an integer of 1 to 20, y represents an integer of 0 to 10, and z represents an integer of 0 to 10.
General Formula (AN1) will be described in more detail.
The alkyl group in the alkyl group substituted with a fluorine atom represented by Xf preferably has 1 to 10 carbon atoms, and more preferably 1 to 4 carbon atoms. In addition, the alkyl group substituted with a fluorine atom represented by Xf is preferably a perfluoroalkyl group.
Xf is preferably a fluorine atom or a perfluoroalkyl group having 1 to 4 carbon atoms. Specific examples of Xf include a fluorine atom, CF3, C2F5, C3F7, C4F9, CH2CF3, CH2CH2CF3, CH2C2F5, CH2CH2C2F5, CH2C3F7, CH2CH2C3F7, CH2C4F9, and CH2CH2C4F9, and among these, a fluorine atom or CF3 is preferable. In particular, both of Xf's are preferably fluorine atoms.
The alkyl group represented by R1 or R2 may have a substituent (preferably a fluorine atom), and the alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, and more preferably a perfluoroalkyl group having 1 to 4 carbon atoms. Specific examples of the alkyl group having a substituent, represented by R1 or R2, include CF3, C2F5, C3F7, C4F9, C5F11, C6F13, C7F15, C8F17, CH2CF3, CH2CH2CF3, CH2CF5, CH2CH2C2F5, CH2C3F7, CH2CH2C3F7, CH2C4F9, and CH2CH2C4F9, and among these, CF3 is preferable.
Each of R1 and R2 is preferably a fluorine atom or CF3.
x is preferably 1 to 10, and more preferably 1 to 5.
y is preferably 0 to 4, and more preferably 0.
z is preferably 0 to 5, and more preferably 0 to 3.
The divalent connecting group represented by L is not particularly limited, and examples thereof can include —COO—, —OCO—, —CO—, —O—, —S—, —SO—, —SO2—, an alkylene group, a cycloalkylene group, an alkenylene group, and a connecting group obtained by connecting a plurality of these, and a connecting group having 12 or less total carbon atoms is preferable. Among these, —COO—, —OCO—, —CO—, or —O— is preferable, and —COO— or —OCO— is more preferable.
The cyclic organic group represented by A is not particularly limited as long as it has a ring structure, and examples thereof include an alicyclic group, an aryl group, and a heterocyclic group (which includes not only a heterocyclic group having aromaticity but also a heterocyclic group having no aromaticity).
The alicyclic group may be monocyclic or polycyclic, and as the alicyclic group, a monocyclic cycloalkyl group such as a cyclopentyl group, a cyclohexyl group, or a cyclooctyl group, or polycyclic cycloalkyl groups such as a norbornyl group, a tricyclodecanyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, or an adamantyl group is preferable. Among these, an alicyclic group with a bulky structure having 7 or greater carbon atoms such as a norbornyl group, a tricyclodecanyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, or an adamantyl group is preferable from the viewpoint of being capable of suppressing in-film diffusibility in a heating step after exposure and MEEF improvement.
Examples of the aryl group include a benzene ring, a naphthalene ring, a phenanthrene ring, and an anthracene ring.
Examples of the heterocyclic group include groups derived from a furan ring, a thiophene ring, a benzofuran ring, a benzothiophene ring, a dibenzofuran ring, a dibenzothiophene ring, and a pyridine ring. Among these, a group derived from a furan ring, a thiophene ring, or a pyridine ring is preferable.
In addition, as the cyclic organic group, a lactone structure can also be exemplified, and specific examples thereof can include the lactone structures represented by General Formulas (LC1-1) to (LC1-17), which the resin (A) described above may have.
The above-described cyclic organic group may has a substituent, and regarding the substituent, the description in paragraph “0251” of JP2013-76991A can be referred to, and the contents thereof are incorporated in the present specification.
Examples of the organic group represented by R201, R202, or R203 include an aryl group, an alkyl group, and a cycloalkyl group.
Preferably, at least one of R201, R202, and R203 is an aryl group, and more preferably, all of three are aryl groups. Regarding the aryl group, the alkyl group, and the cycloalkyl group, the description in paragraph “0252” of JP2013-76991A can be referred to, and the contents thereof are incorporated in the present specification.
Regarding the structure represented by General Formula (A1) in a case where two of R201 to R203 are bonded to each other to form a ring structure, the description in paragraphs “0253” to “0257” of JP2013-76991A can be referred to, and the contents thereof are incorporated in the present specification.
Moreover, examples of a preferable structure in a case where at least one of R201, R202, and R203 is not an aryl group can include cationic structures of compounds exemplified in paragraphs “0046” to “0048” of JP2004-233661A, paragraphs “0040” to “0046” of JP2003-35948A, and exemplified as Formulas (I-1) to (I-70) in the specification of US2003/0224288A1, and compounds exemplified as Formulas (IA-1) to (IA-54), and Formulas (IB-1) to (IB-24) in the specification of US2003/0077540A1.
In General Formulas (ZII) and (ZIII), each of R204 to R207 independently represents an aryl group, an alkyl group, or a cycloalkyl group.
The aryl group, the alkyl group, and the cycloalkyl group represented by each of R204 to R207 are the same as the aryl group described as the aryl group, the alkyl group, and the cycloalkyl group represented by each of R201 to R203 in the compound (ZI).
The aryl group, the alkyl group, and the cycloalkyl group represented by each of R204 to R207 may have a substituent. Examples of the substituent include the substituents that the aryl group, the alkyl group, and the cycloalkyl group represented by each of R201 to R203 in the compound (ZI) described above may have.
Z− represent a non-nucleophilic anion, and as Z−, the same as the non-nucleophilic anion in General Formula (ZI) can be exemplified.
As the acid generator, the compounds represented by General Formula (ZIV), (ZV), or (ZVI) described in paragraphs “0262” to “0264” of JP2013-76991A are also exemplified.
Particularly preferable examples of the acid generator are shown below.
In the present invention, the compound (B) that generates an acid is preferably a compound that generates an acid having a volume of 240 Angstroms3 or greater, more preferably a compound that generates an acid having a volume of 300 Angstroms3 or greater, still more preferably a compound that generates an acid having a volume of 350 Angstroms3 or greater, and particularly preferably a compound that generates an acid having a volume of 400 Angstroms3 or greater, by irradiation with an electron beam or extreme ultraviolet rays, from the viewpoint of suppressing diffusion of the acid generated by exposure to the unexposed portion and improving resolution. Here, from the viewpoint of sensitivity and coating solvent solubility, the volume is preferably 2000 Angstroms3 or less, and more preferably 1500 Angstroms3 or less. The volume value is determined by using “WinMOPAC” manufactured by FUJITSU. That is, first, the chemical structure of the acid according to each example is input, then, using this structure as an initial structure, the most stable conformation of each acid is determined by molecular force field calculation using an MM3 method, and then, by performing molecular orbital calculation using a PM3 method on these most stable conformations, the “accessible volume” of each acid can be calculated.
The acid generator can be used alone, or two or more types thereof can be used in combination.
The content of the acid generator in the composition is preferably 0.1% by mass to 50% by mass, more preferably 5% by mass to 50% by mass, and still more preferably 10% by mass to 40% by mass, based on the total solid content of the composition. In particular, to achieve both high sensitivity and high resolution when exposure is performed by an electron beam or extreme ultraviolet rays, the content of an acid generator is preferably higher, more preferably 15% by mass to 40% by mass, and most preferably 20% by mass to 40% by mass.
(D) Basic Compound
The active light-sensitive or radiation-sensitive resin composition according to the present invention preferably further includes a basic compound (D). The basic compound (D) is preferably a compound having stronger basicity compared to phenol. In addition, the basic compound is preferably an organic basic compound, and more preferably a nitrogen-containing basic compound.
The nitrogen-containing basic compound which is able to be used is not particularly limited, but for example, the compounds which are classified into (1) to (7) below can be used.
(1) Compound Represented by General Formula (BS-1)
In General Formula (BS-1), each of R's independently represents a hydrogen atom or an organic group. Here, at least one of three Rs is an organic group. This organic group is a linear or branched alkyl group, a monocyclic or polycyclic cycloalkyl group, an aryl group, or an aralkyl group.
The number of carbon atoms in the alkyl group as R is not particularly limited, but is normally 1 to 20, and preferably 1 to 12.
The number of carbon atoms in the cycloalkyl group as R is not particularly limited, but is normally 3 to 20, and preferably 5 to 15.
The number of carbon atoms in the aryl group as R is not particularly limited, but is normally 6 to 20, and preferably 6 to 10. Specific examples thereof include a phenyl group and a naphthyl group.
The number of carbon atoms in the aralkyl group as R is not particularly limited, but is normally 7 to 20, and preferably 7 to 11. Specifically, examples thereof include a benzyl group.
A hydrogen atom in the alkyl group, the cycloalkyl group, the aryl group, or the aralkyl group as R may be substituted with a substituent. Examples of the substituent include an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, a hydroxy group, a carboxy group, an alkoxy group, an aryloxy group, an alkylcarbonyloxy group, and an alkyloxycarbonyl group.
At least two of R's in the compound represented by General Formula (BS-1) are preferably organic groups.
Specific examples of the compound represented by General Formula (BS-1) include tri-n-butyl amine, tri-n-pentyl amine, tri-n-octyl amine, tri-n-decyl amine, triisodecyl amine, dicyclohexyl methyl amine, tetradecyl amine, pentadecyl amine, hexadecyl amine, octadecyl amine, didecyl amine, methyl octadecyl amine, dimethyl undecyl amine, N,N-dimethyl dodecyl amine, methyl dioctadecyl amine, N,N-dibutyl aniline, N,N-dihexyl aniline, 2,6-diisopropyl aniline, and 2,4,6-tri(t-butyl)aniline.
In addition, as the preferable basic compound represented by General Formula (BS-1), an alkyl group in which at least one R is substituted with a hydroxy group is exemplified. Specific examples thereof include triethanol amine and N,N-dihydroxyethyl aniline.
The alkyl group as R may have an oxygen atom in the alkyl chain. That is, an oxyalkylene chain may be formed. As the oxyalkylene chain, —CH2CH2O— is preferable. Specific examples thereof include tris(methoxyethoxyethyl)amine and a compound disclosed after line 60 of column 3 in the specification of U.S. Pat. No. 6,040,112A.
Among basic compounds represented by General Formula (BS-1), examples of a compound having such a hydroxyl group or an oxygen atom include the followings.
(2) Compound Having Nitrogen-Containing Heterocyclic Structure
The nitrogen-containing heterocycle may have aromatic properties, or may not have aromatic properties. The nitrogen-containing heterocycle may have a plurality of nitrogen atoms. Furthermore, the nitrogen-containing heterocycle may contain heteroatoms other than the nitrogen atom. Specific examples thereof include a compound having an imidazole structure (2-phenylbenzimidazole, 2,4,5-triphenyl imidazole and the like), a compound having a piperidine structure [N-hydroxyethylpiperidine, bis(1,2,2,6,6-pentamethyl-4-piperidyl)sebacate, and the like], a compound having a pyridine structure (4-dimethylaminopyridine and the like), and a compound having an antipyrine structure (antipyrine, hydroxyantipyrine, and the like).
Examples of the preferable compound having a nitrogen-containing heterocyclic structure include guanidine, aminopyridine, aminoalkyl pyridine, aminopyrrolidine, indazole, imidazole, pyrazole, pyrazine, pyrimidine, purine, imidazoline, pyrazoline, piperazine, aminomorpholine, and aminoalkyl morpholine. These may further have a substituent.
Examples of the preferable substituent include an amino group, an aminoalkyl group, an alkylamino group, an aminoaryl group, an arylamino group, an alkyl group, an alkoxy group, an acyl group, an acyloxy group, an aryl group, an aryloxy group, a nitro group, a hydroxyl group, and a cyano group.
Examples of the particularly preferable basic compound include imidazole, 2-methyl imidazole, 4-methyl imidazole, N-methyl imidazole, 2-phenyl imidazole, 4,5-diphenyl imidazole, 2,4,5-triphenyl imidazole, 2-amino pyridine, 3-amino pyridine, 4-amino pyridine, 2-dimethyl amino pyridine, 4-dimethyl amino pyridine, 2-diethyl amino pyridine, 2-(aminomethyl)pyridine, 2-amino-3-methyl pyridine, 2-amino-4-methyl pyridine, 2-amino-5-methyl pyridine, 2-amino-6-methyl pyridine, 3-amino ethyl pyridine, 4-amino ethyl pyridine, 3-amino pyrrolidine, piperazine, N-(2-aminoethyl)piperazine, N-(2-aminoethyl)piperidine, 4-amino-2,2,6,6-tetramethyl piperidine, 4-piperidinopiperidine, 2-iminopiperidine, 1-(2-aminoethyl)pyrrolidine, pyrazole, 3-amino-5-methyl pyrazole, 5-amino-3-methyl-1-p-tolyl pyrazole, pyrazine, 2-(aminomethyl) 5-methyl pyrazine, pyrimidine, 2,4-diaminopyrimidine, 4,6-dihydroxypyrimidine, 2-pyrazoline, 3-pyrazoline, N-aminomorpholine, and N-(2-aminoethyl)morpholine.
A compound having two or more ring structures can also be suitably used. Specific examples thereof include 1,5-diazabicyclo[4.3.0]non-5-ene and 1,8-diazabicyclo[5.4.0]undeca-7-ene.
(3) Amine Compound Having Phenoxy Group
An amine compound having a phenoxy group is a compound having a phenoxy group at the terminal on the opposite side to the N atom of the alkyl group which is contained in an amine compound. The phenoxy group may have a substituent such as an alkyl group, an alkoxy group, a halogen atom, a cyano group, a nitro group, a carboxy group, a carboxylic acid ester group, a sulfonic acid ester group, an aryl group, an aralkyl group, an acyloxy group, or an aryloxy group.
The compound more preferably has at least one oxyalkylene chain between the phenoxy group and the nitrogen atom. The number of oxyalkylene chains in one molecule is preferably 3 to 9, and more preferably 4 to 6. Among oxyalkylene chains. —CH2CH2O— is particularly preferable.
Specific examples thereof include 2-[2-{2-(2,2-dimethoxyphenoxyethoxy)ethyl}-bis-(2-methoxy-ethyl)-amine and the compounds (C1-1) to (C3-3) exemplified in paragraph “0066” in the specification of US2007/0224539A1.
An amine compound having a phenoxy group is obtained by, for example, heating a mixture of a primary or secondary amine having a phenoxy group and an haloalkyl ether to be reacted, by adding an aqueous solution of a strong base such as sodium hydroxide, potassium hydroxide, or tetraalkylammonium thereto, and by extracting the resultant product with an organic solvent such as ethyl acetate or chloroform. In addition, an amine compound having a phenoxy group can also be obtained by heating a mixture of a primary or secondary amine and an haloalkyl ether having a phenoxy group at the terminal to be reacted, by adding an aqueous solution of a strong base such as sodium hydroxide, potassium hydroxide, or tetraalkylammonium thereto, and by extracting the resultant product with an organic solvent such as ethyl acetate or chloroform.
(4) Ammonium Salt
It is possible to suitably use an ammonium salt as the basic compound.
As the cation of the ammonium salt, a tetraalkylammonium cation in which an alkyl group having 1 to 18 carbon atoms is substituted is preferable, a tetramethylammonium cation, a tetraethylammonium cation, a tetra(n-butyl)ammonium cation, a tetra(n-heptyl)ammonium cation, a tetra(n-octyl)ammonium cation, a dimethylhexadecylammonium cation, or a benzyltrimethyl cation is more preferable, and tetra(n-butyl)ammonium cation is most preferable.
Examples of the anion of the ammonium salt include hydroxide, carboxylate, halide, sulfonate, borate, and phosphate. Among these, hydroxide or carboxylate is particularly preferable.
As the halide, chloride, bromide, or iodide is particularly preferable.
As the sulfonate, an organic sulfonate having 1 to 20 carbon atoms is particularly preferable. Examples of the organic sulfonate include alkyl sulfonate and aryl sulfonate having 1 to 20 carbon atoms.
The alkyl group included in the alkyl sulfonate may have a substituent. Examples of the substituent include a fluorine atom, a chlorine atom, a bromine atom, an alkoxy group, an acyl group, and an aryl group. Specific examples of the alkyl sulfonate include methanesulfonate, ethanesulfonate, butanesulfonate, hexanesulfonate, octanesulfonate, benzyl sulfonate, trifluoromethanesulfonate, pentafluoroethanesulfonate, and nonafluorobutanesulfonate.
Examples of the aryl group included in the aryl sulfonate include a phenyl group, a naphthyl group, and an anthryl group. These aryl groups may have a substituent. As the substituent, for example, a linear or branched alkyl group having 1 to 6 carbon atoms or a cycloalkyl group having 3 to 6 carbon atoms is preferable. Specifically, for example, a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an i-butyl group, a t-butyl group, an n-hexyl group, or a cyclohexyl group is preferable. Examples of other substituents include an alkoxy group having 1 to 6 carbon atoms, a halogen atom, a cyano group, a nitro group, an acyl group, and an acyloxy group.
The carboxylate may be aliphatic carboxylate or aromatic carboxylate, and examples thereof include acetate, lactate, pyruvate, trifluoroacetate, adamantane carboxylate, hydroxyadamantane carboxylate, benzoate, naphthoate, salicylate, phthalate, and phenolate, and, in particular, benzoate, naphthoate, or phenolate is preferable, and benzoate is most preferable.
In this case, as the ammonium salt, tetra(n-butyl)ammonium benzoate or tetra(n-butyl)ammonium phenolate is preferable.
In the case of hydroxide, the ammonium salt is particularly preferably tetraalkylammonium hydroxide (tetraalkyl ammonium hydroxide such as tetramethyl ammonium hydroxide, tetraethyl ammonium hydroxide, or tetra-(n-butyl)ammonium hydroxide having 1 to 8 carbon atoms.
(5) Compound (PA) which has Proton-Accepting Functional Group and Generates Compound in which Proton-Acceptibility is Reduced or Lost, or which is Changed from being Proton-Accepting to be Acidic, by being Decomposed Due to Irradiation with Active Light or Radiation
The composition according to the present invention may further include a compound (hereinafter, referred to as “compound (PA)”) which has a proton-accepting functional group and generates a compound in which the proton-acceptibility is reduced or lost, or which is changed from being proton-accepting to be acidic, by being decomposed due to irradiation with active light or radiation, as a basic compound.
Regarding the compound (PA) which has a proton-accepting functional group and generates a compound in which the proton-acceptibility is reduced or lost, or which is changed from being proton-accepting to be acidic, by being decomposed due to irradiation with active light or radiation, the description in paragraphs “0379” to “0425” of JP2012-32762A (which corresponds to paragraphs “0386” to “0435” of US2012/0003590A) can be referred to, and the contents thereof are incorporated in the present specification.
(6) Guanidine Compound
The composition of the present invention may further contain a guanidine compound having a structure represented by the following formula.
The guanidine compound exhibits strong basicity since the positive charge of the conjugate acid is dispersed and stabilized by the three nitrogen atoms.
For the basicity of the guanidine compound (A) of the present invention, the pKa of a conjugate acid is preferably 6.0 or greater, preferably 7.0 to 20.0 since neutralization reactivity with an acid is high and the roughness properties are excellent, and more preferably 8.0 to 16.0.
Due to such strong basicity, the diffusibility of an acid is suppressed, and the strong basicity can contribute to formation of an excellent pattern shape.
The “pKa” here represents pKa in an aqueous solution, and for example, it is described in Chemical Handbook (II) (revised 4th edition, 1993, edited by The Chemical Society of Japan, published by Maruzen Co., Ltd.), and a smaller value means higher acidity. Specifically, the pKa in aqueous solution can be obtained by measuring the acid dissociation constant at 25° C. using an infinite dilution aqueous solution, and a value based on the database of Hammett substituent constants and known literature values can also be determined by calculation using the following software package 1. All of pKa values described in the present specification are values determined by calculation using this software package.
Software package 1: Advanced Chemistry Development (ACD/Labs) Software V8.14 for Solaris (1994-2007 ACD/Labs).
In the present invention, log P is a logarithmic value of an n-octanol/water distribution coefficient (P), and with respect to a wide range of compounds, it is an effective parameter that can characterize the hydrophilicity/hydrophobicity. In general, the distribution coefficient is determined not by experiment but by calculation, and in the present invention, the distribution coefficient is a value calculated by a CS ChemDraw Ultra Ver. 8.0 software package (Crippen's fragmentation method).
In addition, the log P of the guanidine compound (A) is preferably 10 or less. When the log P is the above value or less, the guanidine compound can be uniformly contained in a resist film.
The log P of the guanidine compound (A) in the present invention is preferably within a range of 2 to 10, more preferably within a range of 3 to 8, and particularly preferably within a range of 4 to 8.
In addition, the guanidine compound (A) in the present invention preferably does not have a nitrogen atom other than a guanidine structure.
Specific examples of the guanidine compound are shown below, but, the present invention is not limited thereto.
(7) Low Molecular Weight Compound Having Nitrogen Atom and Group Leaving Due to Action of Acid
The composition of the present invention can contain a low molecular weight compound (hereinafter, also referred to as a “low molecular weight compound (D)” or “compound (D)”) having a nitrogen atom and a group leaving due to the action of an acid. The low molecular weight compound (D) preferably has basicity, after a group leaving due to the action of an acid leaves.
Regarding the low molecular compound (D), the description in paragraphs “0324” to “0337” of JP2012-133331A can be referred to, and the contents thereof are incorporated in the present specification.
In the present invention, the low molecular weight compound (D) may be used singly or in a mixture of two or more types thereof.
Other than this, examples of the compound according to the present invention which are able to be used include the compounds synthesized in Examples of JP2002-363146A and the compounds described in paragraph “0108” of JP2007-298569A.
As the basic compound, a photosensitive basic compound may be used. As the photosensitive basic compound, for example, the compounds described in JP2003-524799A, J. Photopolym. Sci. & Tech. Vol. 8, P. 543-553 (1995), and the like as can be used.
The molecular weight of the basic compound is usually 100 to 1500, preferably 150 to 1300, and more preferably 200 to 1000.
These basic compounds (D) may be used alone or in combination of two or more types thereof.
The content of the basic compound (D) included in the composition of the present invention is preferably 0.01% by mass to 8.0% by mass, more preferably 0.1% by mass to 5.0% by mass, and particularly preferably 0.2% by mass to 4.0% by mass, based on the total solid content of the composition.
The molar ratio of the basic compound (D) with respect to the acid generator is preferably set to 0.01 to 10, more preferably set to 0.05 to 5, and still more preferably set to 0.1 to 3. When the molar ratio is excessively large, sensitivity and/or resolution is reduced in some cases. When the molar ratio is excessively small, there is a possibility that thinning of a pattern occurs, during exposure and heating (post-baking). The molar ratio is more preferably 0.05 to 5, and still more preferably 0.1 to 3. Moreover, the acid generator in the above molar ratio is based on the total amount of the repeating unit represented by General Formula (P), of the resin (A) and the acid generator which the resin (A) further may include.
Solvent
The composition according to the present invention preferably includes a solvent.
The solvent preferably includes at least one selected from the group consisting of propylene glycol monoalkyl ether carboxylate (S1), propylene glycol monoalkyl ether (S2), lactic acid ester, acetic acid ester, alkoxypropionic acid ester, chain ketone, cyclic ketone, lactone, and alkylene carbonate. The solvent may further include a component other than the component (S1) and the component (S2).
The present inventors find that when such a solvent and the resin described above are used in combination, coating properties of a composition are improved, and a pattern having a small number of development defects can be formed. The reason is not clear, but the present inventors consider that the reason is due to the fact that, since these solvents have excellent balance among solubility with respect to the resin described above, a boiling point, and viscosity, unevenness in the film thickness of the composition layer or the generation of precipitates during the spin coating can be suppressed.
As the component (S1), at least one selected from the group of consisting of propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether propionate, and propylene glycol monoethyl ether acetate is preferable, and propylene glycol monomethyl ether acetate is particularly preferable.
As the component (S2), the followings are preferable.
As propylene glycol monoalkyl ether, propylene glycol monomethyl ether or propylene glycol monoethyl ether is preferable.
As lactic acid ester, ethyl lactate, butyl lactate, or propyl lactate is preferable.
As acetic acid ester, methyl acetate, ethyl acetate, butyl acetate, isobutyl acetate, propyl acetate, isoamyl acetate, methyl formate, ethyl formate, butyl formate, propyl formate, or 3-methoxybutyl acetate is preferable.
As alkoxypropionic acid ester, methyl 3-methoxypropionate (MMP) or ethyl 3-ethoxypropionate (EEP) is preferable.
As chain ketone, 1-octanone, 2-octanone, 1-nonanone, 2-nonanone, acetone, 4-heptanone, 1-hexanone, 2-hexanone, diisobutyl ketone, phenyl acetone, methyl ethyl ketone, methyl isobutyl ketone, acetyl acetone, acetonyl acetone, ionone, diacetonyl alcohol, acetyl carbinol, acetophenone, methyl naphthyl ketone, or methyl amyl ketone is preferable.
As cyclic ketone, methyl cyclohexanone, isophorone, or cyclohexanone is preferable.
As lactone, γ-butyrolactone is preferable.
As alkylene carbonate, propylene carbonate is preferable.
As the component (S2), propylene glycol monomethyl ether, ethyl lactate, ethyl 3-ethoxypropionate, methyl amyl ketone, cyclohexanone, butyl acetate, pentyl acetate, γ-butyrolactone, or propylene carbonate is more preferable.
As the component (S2), a component having a flash point (hereinafter, also referred to as fp) of 37° C. or higher is preferably used. As the component (S2) as described above, propylene glycol monomethyl ether (fp: 47° C.), ethyl lactate (fp: 53° C.), ethyl 3-ethoxypropionate (fp: 49° C.), methyl amyl ketone (fp: 42° C.), cyclohexanone (fp: 44° C.), pentyl acetate (fp: 45° C.), γ-butyrolactone (fp: 101° C.), or propylene carbonate (fp: 132° C.) is preferable. Among these, propylene glycol monoethyl ether, ethyl lactate, pentyl acetate, or cyclohexanone is more preferable, and propylene glycol monoethyl ether or ethyl lactate is particularly preferable. Moreover, the “flash point” described here means a value described in the reagent catalog of Tokyo Chemical Industry Co., Ltd. or Sigma-Aldrich Co. LLC.
The solvent preferably includes the component (S1). It is more preferable that the solvent consists of substantially only the component (S1) or is a mixed solvent of the component (S1) and other components. In the latter case, the solvent still more preferably includes both the component (S1) and the component (S2).
The mass ratio between the component (S1) and the component (S2) is preferably within a range of 100:0 to 15:85, more preferably within a range of 100:0 to 40:60, and still more preferably within a range of 100:0 to 60:40. That is, it is preferable that the solvent consists of only the component (S1), or includes both the component (S1) and the component (S2) and the mass ratio thereof is as follows. That is, in the latter case, the mass ratio of the component (S1) to the component (S2) is preferably 15/85 or greater, more preferably 40/60 or greater, and still more preferably 60/40 or greater. When such a configuration is adopted, the number of development defects can be further reduced.
Moreover, in a case where the solvent includes both the component (S1) and the component (S2), the mass ratio of the component (S1) with respect to the component (S2) is, for example, set to 99/1 or less.
As described above, the solvent may further include a component other than the component (S1) and the component (S2). In this case, the content of the component other than the component (S1) and the component (S2) is preferably within a range of 5% by mass to 30% by mass with respect to the total amount of the solvent.
The content of the solvent in the composition is preferably set such that the solid content concentration of all components becomes 2% by mass to 30% by mass, and more preferably set such that the solid content concentration of all components becomes 3% by mass to 20% by mass. By doing this, the coating properties of the composition can be further improved.
(E) Hydrophobic Resin
The active light-sensitive or radiation-sensitive resin composition of the present invention may have a hydrophobic resin (E) separately from the resin (A).
The hydrophobic resin (E) preferably contains a group having a fluorine atom, a group having a silicon atom, or a hydrocarbon group having 5 or more carbon atoms, in order to be unevenly distributed on a film surface. These groups may be contained in the main chain of the resin or may be substituted in the side chain. Specific examples of the hydrophobic resin (E) will be described below.
In addition to the above hydrophobic resins, the hydrophobic resins described in JP2011-248019A, JP2010-175859A, or JP2012-032544A can also be preferably used.
(F) Surfactant
The composition according to the present invention may further include the surfactant (F). By containing a surfactant, in a case where an exposure light source having a wavelength of 250 nm or less is used, in particular, 220 nm or less, a pattern having smaller adhesion and development defect can be formed with a favorable sensitivity and resolution.
As the surfactant, a fluorine-based surfactant and/or a silicon-based surfactant is particularly preferable.
Examples of the fluorine-based surfactant and/or the silicon-based surfactant include surfactants described in paragraph “0276” in the specification of US2008/0248425A. In addition, F Top EF301 or EF303 (manufactured by Shin-Akita Kasei Co., Ltd.); Fluorad FC430, 431, or 4430 (manufactured by Sumitomo 3M Ltd.); Megafac F171, F173, F176, F189, F113, F110, F177, F120, or R08 (manufactured by DIC Corporation); Surflon S-382, SC101, 102, 103, 104, 105, or 106 (manufactured by Asahi Glass Co., Ltd.); Troysol S-366 (manufactured by Troy Chemical Corp.); OF-300 or GF-150 (manufactured by Toagosei Chemical Industry Co., Ltd.), Surflon S-393 (manufactured by AGC Seimi Chemical Co., Ltd.); Eftop EF121, EF122A, EF122B, RF122C, EF125M, EF135M, EF351, EF352, EF801, EF802, or EF601 (manufactured by Jemco Co., Ltd); PF636, PF656, PF6320, or PF6520 (manufactured by OMNOVA Solutions Inc.); or FTX-204G, 208G, 218G, 230G, 204D, 208D, 212D, 218D, or 222D (manufactured by Neos Company Limited) may be used. Moreover, a polysiloxane polymer KP-341 (manufactured by Shin-Etsu Chemical Co., Ltd.) can also be used as a silicon-based surfactant.
In addition, in addition to the known surfactants as described above, the surfactant may be synthesized using a fluoroaliphatic compound prepared by a telomerization method (also referred to as a telomer method) or an oligomerization method (also referred to as an oligomer method). Specifically, a polymer having a fluoroaliphatic group derived from the fluoroaliphatic compound may be used as a surfactant. The fluoroaliphatic compound can be synthesized by the method described in JP2002-90991A.
As the polymer having a fluoroaliphatic group, a copolymer of a monomer having a fluoroaliphatic group and (poly(oxyalkylene))acrylate or methacrylate and/or (poly(oxyalkylene))methacrylate is preferable, and the polymer may be irregularly distributed, or may be a block copolymer.
Examples of the poly(oxyalkylene) group include a poly(oxyethylene) group, a poly(oxypropylene) group, and a poly(oxybutylene) group. In addition, the poly(oxyalkylene) group may be a unit having alkylenes having different chain lengths in the same chain, such as poly(block connector of oxyethylene, oxypropylene and oxyethylene) and poly(block connector of oxyethylene and oxypropylene).
Furthermore, a copolymer of a monomer having a fluoroaliphatic group and (poly(oxyalkylene))acrylate or methacrylate may be a ternary or higher compound system copolymer formed by copolymerizing a monomer having two or more different types of fluoroaliphatic group and two or more different types of (poly(oxyalkylene))acrylate or methacrylate at the same time.
For example, examples of a commercially available surfactant include Megafac F178, F-470, F-473, F-475, F-476, and F-472 (manufactured by DIC Corporation). Furthermore, examples of a commercially available surfactant include a copolymer of acrylate or methacrylate having a C6F13 group and (poly(oxyalkylene))acrylate or methacrylate, a copolymer of acrylate or methacrylate having a C6F3 group, (poly(oxyethylene))acrylate or methacrylate, and (poly(oxypropylene))acrylate or methacrylate, a copolymer of acrylate or methacrylate having a C8F17 group and (poly(oxyalkylene))acrylate or methacrylate, and a copolymer of acrylate or methacrylate having a C8F17 group, (poly(oxyethylene))acrylate or methacrylate, and (poly(oxypropylene))acrylate or methacrylate.
In addition, surfactants other than the fluorine-based surfactant and/or the silicon-based surfactant described in paragraph “0280” in the specification of US2008/0248425A may be used.
These surfactants may be used alone or in combination of two or more types thereof.
In a case where the composition according to the present invention includes a surfactant, the content thereof is preferably 0% by mass to 2% by mass, more preferably 0.0001% by mass to 2% by mass, and still more preferably 0.0005% by mass to 1% by mass, based on the total solid content of the composition.
(G) Other Additives
The composition according to the present invention may further include a compound (for example, a phenol compound having a molecular weight of 1000 or less, or an alicyclic or aliphatic compound including a carboxy group) promoting solubility with respect to a dissolution inhibiting compound, a dye, a plasticizer, a photosensitizer, a light absorber, and/or a developer.
The composition according to the present invention may further include a dissolution inhibiting compound. Here, the “dissolution inhibiting compound” is a compound having a molecular weight of 3000 or less, which decreases the degree of solubility in an organic-based developer by being decomposed due to the action of an acid.
As the dissolution inhibiting compound, an alicyclic or aliphatic compound which contains an acid-decomposable group such as a cholic acid derivative which includes an acid-decomposable group described in the Proceedings of SPIE, 2724, 355 (1996) is preferable since the transparency with respect to light having a wavelength of 220 nm or less is not reduced. Examples of the acid-decomposable group and the alicyclic structure include the same as those exemplified above.
In a case where the resist composition according to the present invention is exposed to a KrF excimer laser or irradiated with an electron beam, the dissolution inhibiting compound is preferably a compound including a structure where the phenolic hydroxyl group of a phenol compound is substituted with an acid-decomposable group. As the phenol compound, a compound containing 1 to 9 phenol skeletons is preferable, and more preferably 2 to 6 phenol skeletons.
In a case where the composition according to the present invention includes a dissolution inhibiting compound, the amount is preferably 3% by mass to 50% by mass, and more preferably 5% by mass to 40% by mass, based on the total solid content of the composition.
Specific examples of the dissolution inhibiting compound are described below.
The phenol compound having a molecular weight of 1000 or less can be easily synthesized by referencing, for example, JP1992-122938A (JP-H104-122938A), JP1990-28531A (JP-H02-28531A), U.S. Pat. No. 4,916,210A, and EP219294B.
Examples of the alicyclic or aliphatic compound including a carboxy group include carboxylic acid derivatives including a steroid structure, such as chloic acid, deoxycholic acid, and lithocholic acid, adamantane carboxylic acid derivatives, adamantane dicarboxylic acid, cyclohexanecarboxylic acid, and cyclohexanedicarboxylic acid.
Hereinbelow, the present invention will be described in further detail using examples, but the content of the invention is not limited by this.
20.0 g of poly(p-hydroxystyrene) (VP-2500, manufactured by Nippon Soda Co., Ltd.) was dissolved in 80.0 g of propylene glycol monomethyl ether acetate (PGMEA). To this solution, 10.3 g of 2-cyclohexylethyl vinyl ether and 10 mg of camphorsulfonic acid were added, followed by stirring at room temperature (25° C.) for 3 hours. 84 mg of triethylamine was added thereto, after stirring for a while, the reaction liquid was transferred to a separatory funnel that contains 100 mL of ethyl acetate. This organic layer was washed with 50 mL, of distilled water three times, and the organic layer was concentrated using an evaporator. After the obtained polymer was dissolved in 300 mL of acetone, the resultant product was added dropwise to 3000 g of hexane to precipitate, and the precipitate was filtered, whereby 17.5 g of (P-1) was obtained.
10.00 g of p-acetoxystyrene was dissolved in 40 g of ethyl acetate, then, the mixture was cooled to 0° C., and 4.76 g of sodium methoxide (28% by mass methanol solution) was added dropwise thereto over 30 minutes, followed by stirring at room temperature for 5 hours. After ethyl acetate was added thereto, the organic phase was washed with distilled water three times, then, dried over anhydrous sodium sulfate, and the solvent was distilled off, whereby 13.17 g of p-hydroxystyrene (a compound represented by the following Formula (1), a 54% by mass ethyl acetate solution) was obtained. 6.66 g (in which 3.6 g of p-hydroxystyrene (1) was contained) of the 54% by mass ethyl acetate solution of the obtained p-hydroxystyrene (1), 14.3 g of the compound represented by the following Formula (2) (manufactured by KNC Laboratories Co., Ltd.), 2.2 g of the compound represented by the following Formula (3) (manufactured by Daicel Corporation), and 2.3 g of a polymerization initiator V-601 (manufactured by Wako Pure Chemical Industries, Ltd.) were dissolved in 14.2 g of propylene glycol monomethyl ether (PGME). 3.6 g of PGME was put into a reaction vessel, and the solution adjusted to 85° C. in advance was added dropwise thereto over a period of 4 hours in a nitrogen gas atmosphere. The reaction solution was heated and stirred for 2 hours, and cooled to room temperature. The obtained reaction solution was added dropwise to 889 g of a mixed solution of hexane/ethyl acetate (8/2 (mass ratio)) to precipitate, and the precipitate was filtered, whereby 14.9 g of (P-11) was obtained.
Hereinafter, in the same manner as in Synthesis Examples 1 and 2, resins P-2 to P-10 and P-12 to P-33 were synthesized.
Hereinafter, the polymer structures, weight average molecular weights (Mw), and dispersities (Mw/Mn) of the resins P-1 to P-33 are shown. In addition, the composition ratio of each repeating unit of the following polymer structures is shown in a molar ratio.
<Resin for Comparison>
In Comparative Examples 1-3, 1-4, 2-3, and 2-4, the following resins were used. The weight average molecular weight (Mw) and the dispersity (Mw/Mn) of the resin is described below. In addition, the composition ratio of each repeating unit of the resin is shown in a molar ratio.
<B. Photoacid Generator>
As a photoacid generator, an acid generator suitably selected from the above described acid generators z1 to z141 was used.
<C. Crosslinking Agent>
[Synthesis of Crosslinking Agent]
Synthesis of (C-1)
20 g of 1-[α-methyl-α-(4-hydroxyphenyl)ethyl]-4-[α,α-bis(4-hydroxyphenyl)ethyl]benzene (Trisp-PA manufactured by Honshu Chemical Industry Co., Ltd.) was added to a 10% by mass potassium hydroxide aqueous solution, followed by stirring and dissolving. Next, while stirring the solution, 60 ml of a 37% by mass formalin aqueous solution was slowly added at room temperature over a period of 1 hour. Furthermore, the resultant product was stirred at room temperature for 6 hours, and put a into a dilute sulfuric acid aqueous solution. The precipitate was filtered, then, washed with sufficient water, and recrystallized from 30 ml of methanol, whereby 20 g of a white powder of a phenol derivative [C-1] having a hydroxymethyl group of the following structure was obtained. The purity was 92% (liquid chromatography method).
Synthesis of (C-2)
20 g of the phenol derivative [C-1] having a hydroxymethyl group obtained in the above synthesis example was added to 1 liter of methanol, followed by heating and stirring, and dissolving. Next, 1 ml of concentrated sulfuric acid was added to the solution, followed by heating to reflux for 12 hours. After the reaction ended, the reaction liquid was cooled, and 2 g of potassium carbonate was added thereto. After the mixture was sufficiently concentrated, 300 ml of ethyl acetate was added thereto. The solution was washed with water, and concentrated, dried, and solidified, whereby 22 g of a white solid of a phenol derivative [C-2] having a methoxymethyl group of the following structure was obtained. The purity was 90% (liquid chromatography method).
Furthermore, phenol derivatives shown below were synthesized in the same manner.
In addition, as other crosslinking agents, commercially available product can be used, or other crosslinking agents can be synthesized by a known method. The crosslinking agent is suitably selected from C-1 to C-8 and C-9 to C-21 described below and used.
<Basic Compound>
As a basic compound, any of the following Compounds (N-1) to (N-11) was used.
<Surfactant>
As a surfactant, the following W1 to W-4 were used.
W-1: Megafac R08 (manufactured by DIC Corporation; fluorine-based surfactant or silicon-based surfactant)
W-2: polysiloxane polymer KP-341 (manufactured by Shin-Etsu Chemical Co., Ltd.; silicon-based surfactant)
W-3: Troysol S-366 (manufactured by Troy Chemical Corp.; fluorine-based surfactant)
W-4: PF6320 (manufactured by OMNOVA Solutions Inc.; fluorine-base surfactant)
<Coating Solvent>
As a coating solvent, the following were used.
S1: propylene glycol monomethyl ether acetate (PGMEA)
S2: propylene glycol monomethyl ether (POME)
S3: ethyl lactate
S4: cyclohexanone
<Developer>
As a developer, the following were used.
SG-1: anisole
SG-2: methyl amyl ketone (2-heptanone)
SG-3: butyl acetate
TM-1: 2.38% by mass tetramethyl ammonium hydroxide aqueous solution (alkali developer for Comparative Examples)
<Rinse Liquid>
In the case of using a rinse, the followings were used.
SR-1: 2-pentanol
SR-2: 1-hexanol
SR-3: methylisobutylcarbinol
(1) Coating Liquid Preparation and Application of Active Light-Sensitive or Radiation-Sensitive Resin Composition
A coating liquid composition having the composition ratio shown in the following Table was microfiltered using a membrane filter having a pore size of 0.1 μm, whereby an active light-sensitive or radiation-sensitive resin composition (resist composition) solution having a solid content concentration of 3.5% by mass was obtained.
This active light-sensitive or radiation-sensitive resin composition solution was applied to a 6-inch Si wafer subjected to a hexamethyldisilazane (HMDS) treatment in advance using a spin coater Mark 8 manufactured by Tokyo Electron Limited, and dried on a hot plate at 100° C. for 60 seconds, whereby a resist film having a thickness of 50 nm was obtained.
(2) EB Exposure and Development
Pattern irradiation was performed on the wafer applied with the resist film obtained in the above (1) using an electron beam lithography device (HL 750 manufactured by Hitachi, Ltd., acceleration voltage of 50 KeV). At this time, lithography was performed such that a line and a space were formed in a ratio of 1:1. After the electron beam lithography, the wafer applied with the resist film was heated on the hot plate at 110° C. for 60 seconds, and developed by paddling the organic-based developer described in the following Table for 30 seconds, and, as necessary, the wafer applied with the resist film was rinsed by paddling the rinse liquid described in the following Table for 30 seconds. (an example in which a rinse liquid was not described means that rinsing was not performed in the example).
The water was rotated for 30 seconds at a rotation speed of 4000 rpm, and heating was performed at 90° C. for 60 seconds, whereby a resist pattern of a line and space pattern in a ratio of 1:1 having a line width of 50 nm was obtained.
(3) Evaluation of Resist Pattern
The sensitivity and the resolving power of the obtained resist pattern were evaluated by the following method using a scanning electron microscope (S-9220 manufactured by Hitachi, Ltd.). In addition, the amount of film loss was also evaluated. The results are shown in the following Table.
(3-1) Sensitivity
The irradiation energy when the line and space pattern in a ratio of 1:1 having a line width of 50 nm was resolved was taken as sensitivity (Eop). A smaller value indicates a better performance.
(3-2) Resolving Power
In the Eop, the minimum line width of the line and space pattern of (1:1) separated was taken as resolving power. A smaller value indicates a better performance.
(3-3) Line Width Roughness (LWR)
Regarding the line width roughness, in the Eop, line widths of arbitrary 50 points having a size of 0.5 μm in the longitudinal direction of a line and space pattern in a ratio of 1:1 having a line width of 50 nm were measured, the standard deviation thereof was determined, and 3σ was calculated. A smaller value indicates a better performance.
(3-4) Amount of Film Loss
After a series of processes were completed, the film thickness of the remaining resist film was measured, and the value obtained by subtracting the residual film thickness from the initial film thickness was taken as the amount (nm) of film loss. Moreover, an optical interference film thickness determination device (Lambda Ace, manufactured by SCREEN Holdings Co., Ltd.) was used in the film thickness measurement.
(3-5) Exposure Latitude (EL)
The exposure amount at which a mask pattern of a line and space (line:space=1:1) having a line width of 50 nm was reproduced was determined and this was taken as the optimumal exposure amount Eopt. Next, the exposure amount when the line width became ±10% of 50 nm (that is, 45 nm and 55 nm) which were target values was determined. Then, the exposure latitude (EL) defined by the following equation was calculated. As the value of EL was increased, the change in performance due to a change in the exposure amount were decreased.
[EL (%)]=[(exposure amount when line width becomes 55 nm)−(exposure amount when line width becomes 45 nm)]/Eopt×100
(3-6) Dry Etching Resistance
Overall irradiation was performed on the wafer coated with the resist film obtained in the above (1) using an electron beam lithography device (HL 750 manufactured by Hitachi, Ltd., acceleration voltage of 50 KeV). After the electron beam irradiation, the wafer applied with the resist film was heated on the hot plate at 110° C. for 60 seconds, and developed by paddling the organic-based developer described in the following Table for 30 seconds, and, as necessary, the wafer applied with the resist film was rinsed by paddling the rinse liquid described in the following table for 30 seconds. The wafer was rotated for 30 seconds at a rotation speed of 4000 rpm, and heating was performed at 90° C. for 60 seconds, whereby a resist film for a dry etching evaluation was obtained.
The initial film thickness (FT1, Angstrom) of the obtained resist film was measured. Next, using a dry etcher (U-612, manufactured by Hitachi High-Technologies Corporation), etching was performed for 30 seconds while supplying C4F6 gas. Thereafter, the film thickness (FT2, Angstrom) of the resist film obtained after the etching was performed was measured. Then, the dry etching rate (DE) defined by the following equation was calculated.
[Dry etching rate (DE Angstrom/sec)]=(FT1−FT2)/30
Superiority and inferiority of DE was evaluated according to the following criteria. Smaller value of DE indicates smaller change in the film thickness due to etching and better performance.
A . . . dry etching rate was less than 10 Angstroms/sec
B . . . dry etching rate was 10 Angstroms/sec or greater to less than 12 Angstrom/sec
C . . . dry etching rate was 12 Angstroms/sec or greater
The concentration of each component represents a concentration (% by mass) based on the total solid content of a composition.
For example, whereas, in JP1995-113272A (JP-H07-113272A), only resolution of a 250 nm half-pitch was evaluated by using a KrF light source, as can be seen from the above table, Examples 1-1 to 1-36 of the present invention can satisfy high sensitivity, high LWR performance, film loss reduction performance, high EL, and, high dry etching resistance at a high resolution of 35 nm or less at the same time to a very high level.
In more detail, first, it is found that, in contrast to Comparative Example 1-1 in which a crosslinking agent was not used, Example 1-14 in which the components are the same as those in Comparative Example 1-1 except that a crosslinking agent was used has all of high resolution, high sensitivity, high LWR performance, film loss reduction performance, high EL, and high dry etching resistance. It is thought that this is because, at the exposed portion, an acid group such as a carboxylic group or a phenolic hydroxyl group is generated by a deprotection reaction of the acid-decomposable group in the resin, and the crosslinking agent can also cause a crosslinking reaction, and due to this, the exposed portion can be further insolubilized and cured for forming a film. It is thought that further insolubilization of the exposed portion by the crosslinking reaction is effective for resolution enhancement by film loss reduction or contrast improvement, LWR performance improvement, and sensitivity enhancement, and curing for forming a film of the exposed portion by the crosslinking reaction is effective for EL improvement by acid diffusion suppression, resolution enhancement by falling prevention, and dry etching resistance improvement.
Furthermore, it is found that, in Comparative Example 1-2 in which the same compositions as those in Example 1-23 were alkali-developed, the performance thereof is inferior, and thus, it is important for expression of the effects to combine development using an organic-based developer.
Next, it is found that, in contrast to Comparative Example 1-3 in which the resin (CP-2) which does not have the repeating unit represented by General Formula (I) such as a hydroxystyrene repeating unit was used, Example 1-14 in which the components are the same as those in Comparative Example 1-3, and the resin (P-13) having a hydroxystyrene repeating unit was used has all of high resolution, high sensitivity, high LWR performance, film loss reduction performance, high EL, and high dry etching resistance. It is thought that this is because, based on the fact that the penolic hydroxyl group in the hydroxystyrene repeating unit is prone to undergo a crosslinking reaction, the effects of insolubilization and curing for forming a film are increased, and secondary electrons are greatly generated from the phenol structure by exposure, and as a result, acid is greatly generated, and a deprotection reaction of an acid-decomposable group in the resin quickly and greatly proceeds, and thus, these contribute to more enhancement of sensitivity, LWR performance, and resolution.
From comparison of Example 1-7 or 1-8 with other Comparative Examples, it is also found that the effects are more significant at a hydroxystyrene structure rather than at a hydroxyphenyl methacrylate structure or a hydroxyphenylmethacryl amide structure among the same phenol structures, and this is preferable.
Furthermore, it is also found that a resin having the acid-decomposable group (for example, Examples 1-19 to 1-28, 1-32 to 1-34, and 1-36) represented by General Formula (IV) or the acid-decomposable group (for example, Examples 1-11 to 1-13, 1-16, and 1-30) represented by General Formula (III-1) is excellent in terms of all of resolution, sensitivity, and film loss reduction performance compared to a resin having no acid-decomposable group represented by General Formula (IV) or (III-1), for example, as Examples 1-6 to 1-10. It is thought that this is because the deprotection activation energy of the acid-decomposable group in the resin is low, and thus, carboxylic acid can be easily generated with a small amount of an acid.
On the other hand, it is found that Comparative Example 1-4 in which the resin (CP-1) having a hydroxystyrene repeating unit protected by butyloxycarbonyl (BOC) group described in JP1995-113272A (JP-H07-113272A), in which deprotection energy is less likely to greatly deprotect, was used, is greatly inferior in the performance compared to Examples of the present invention.
It can be said that, when an acid generator which generates an acid having a great volume, as an acid generator, is used, the performance becomes more preferable.
In addition, it is found that, as a crosslinking agent, a phenol derivative or a urea-based compound, having a hydroxymethyl group or an alkoxymethyl group is excellent.
(4) Coating Liquid Preparation and Application of Active Light-Sensitive or Radiation-Sensitive Resin Composition
A coating liquid composition having the composition ratio shown in the following Table was microfiltered using a membrane filter having a pore size of 0.05 μm, whereby an active light-sensitive or radiation-sensitive resin composition (resist composition) solution having a solid content concentration of 2.0% by mass was obtained.
This active light-sensitive or radiation-sensitive resin composition solution was applied to a 6-inch Si wafer subjected to a hexamethyldisilazane (HMDS) treatment in advance using a spin coater Mark 8 manufactured by Tokyo Electron Limited, and dried on a hot plate at 100° C. for 60 seconds, whereby a resist film having a thickness of 50 nm was obtained.
(5) EUV Exposure and Development
Using an EUV exposure device (Micro Exposure Tool manufactured by Exitech Corporation, NA0.3, Quadrupole, outer sigma of 0.68, inner sigma of 0.36), pattern exposure was performed on the wafer applied with the resist film obtained in the above (4) using an exposure mask (line/space=1/1). After the irradiation, the wafer applied with the resist film was heated on the hot plate at 110° C. for 60 seconds, and developed by paddling the organic-based developer described in the following Table for 30 seconds, and, as necessary, the wafer applied with the resist film was rinsed by paddling the rinse liquid described in the following table for 30 seconds. (an example in which a rinse liquid was not described means that rinsing was not performed in the example).
The wafer was rotated for 30 seconds at a rotation speed of 4000 rpm, and heating was performed at 90° C. for 60 seconds, whereby a resist pattern of a line and space pattern in a ratio of 1:1 having a line width of 50 nm was obtained.
(6) Evaluation of Resist Pattern
The sensitivity and the resolving power of the obtained resist pattern were evaluated by the following method using a scanning electron microscope (S-938011 manufactured by Hitachi, Ltd.). In addition, the amount of film loss was also evaluated. The results are shown in the following Table.
(6-1) Sensitivity
The exposure amount when the line and space pattern in a ratio of 1:1 having a line width of 50 nm was resolved was taken as sensitivity (Eop). A smaller value indicates a better performance.
(6-2) Resolving Power
In the Eop, the minimum line width of the line and space pattern of (1:1) separated was taken as resolving power. A smaller value indicates a better performance.
(6-3) Line Width Roughness (LWR)
Regarding the line width roughness, in the Eop, line widths of arbitrary 50 points having a size of 0.5 μm in the longitudinal direction of a line and space pattern in a ratio of 1:1 having a line width of 50 nm were measured, the standard deviation thereof was determined, and 3σ was calculated. A smaller value indicates a better performance.
(6-4) Amount of Film Loss
After a series of processes were completed, the film thickness of the remaining resist film was measured, and the value obtained by subtracting the residual film thickness from the initial film thickness was taken as the amount (nm) of film loss. Moreover, an optical interference film thickness determination device (Lambda Ace, manufactured by SCREEN Holdings Co., Ltd.) was used in the film thickness measurement.
(6-5) Exposure Latitude (EL)
The exposure amount at which a mask pattern of a line and space (line:space=1:1) having a line width of 50 nm was reproduced was determined and this was taken as the optimumal exposure amount Eopt. Next, the exposure amount when the line width became ±10% of 50 nm (that is, 45 nm and 55 nm) which were target values was determined. Then, the exposure latitude (EL) defined by the following equation was calculated. As the value of EL was increased, the change in performance due to a change in the exposure amount were decreased.
[EL (%)]=[(exposure amount when line width becomes 55 nm)−(exposure amount when line width becomes 45 nm)]/Eopt×100
(6-6) Dry Etching Resistance
Using an EUV exposure device (Micro Exposure Tool manufactured by Exitech Corporation, NA0.3, Quadrupole, outer sigma of 0.68, inner sigma of 0.36), overall irradiation was performed on the wafer applied with the resist film obtained in the above (4). After the irradiation, the wafer applied with the resist film was heated on the hot plate at 110° C. for 60 seconds, and developed by paddling the organic-based developer described in the following Table for 30 seconds, and depending on the conditions, the wafer applied with the resist film was rinsed by paddling the rinse liquid described in the following table for 30 seconds. The wafer was rotated for 30 seconds at a rotation speed of 4000 rpm, and baking was performed at 90° C. for 60 seconds, whereby a resist film for a dry etching evaluation was obtained.
The initial film thickness (FT1, Angstrom) of the obtained resist film was measured. Next, using a dry etcher (U-612, manufactured by Hitachi High-Technologies Corporation), etching was performed for 30 seconds while supplying C4F6 gas. Thereafter, the film thickness (FT2, Angstroms) of the resist film obtained after the etching was performed was measured. Then, the dry etching rate (DE) defined by the following equation was calculated.
[Dry etching rate (DE Angstroms/sec)]=(FT1−FT2)/30
Superiority and inferiority of DE was evaluated according to the following criteria. Smaller value of DE indicates smaller change in the film thickness due to etching and better performance.
A . . . dry etching rate was less than 10 Angstroms/sec
B . . . dry etching rate was 10 Angstroms/sec or greater to less than 12 Angstroms/sec
C . . . dry etching rate was 12 Angstroms/sec or greater
The concentration of each component represents a concentration (% by mass) based on the total solid content of a composition.
For example, whereas, in JP1995-261392A (JP-H07-261392A), only resolution of a 250 nm half-pitch was evaluated by using a KrF light source, as can be seen from the above table, Examples 2-1 to 2-36 of the present invention can satisfy high sensitivity, high LWR performance, film loss reduction performance, high EL, and, high dry etching resistance at a high resolution of 28 nm or less at the same time to a very high level.
In more detail, first, it is found that, in contrast to Comparative Example 2-1 in which a crosslinking agent was not used, Example 2-14 in which the components are the same as those in Comparative Example 2-1 except that a crosslinking agent was used has all of high resolution, high sensitivity, high LWR performance, film loss reduction performance, high EL, and high dry etching resistance. It is thought that this is because, at the exposed portion, an acid group such as a carboxylic group or a phenolic hydroxyl group is generated by a deprotection reaction of the acid-decomposable group in the resin, and the crosslinking agent can also cause a crosslinking reaction, and due to this, the exposed portion can be further insolubilized and cured for forming a film. It is thought that further insolubilization of the exposed portion by the crosslinking reaction is effective for resolution enhancement by film loss reduction or contrast improvement, LWR performance improvement, and sensitivity enhancement, and curing for forming a film of the exposed portion by the crosslinking reaction is effective for EL improvement by acid diffusion suppression, resolution enhancement by falling prevention, and dry etching resistance improvement.
Furthermore, it is found that, in Comparative Example 2-2 in which the same compositions as those in Example 2-23 were alkali-developed, the performance thereof is inferior, and thus, it is important for expression of the effects to combine development using an organic-based developer.
Next, it is found that, in contrast to Comparative Example 2-3 in which the resin (CP-1) which does not have the repeating unit represented by General Formula (I) such as a hydroxystyrene repeating unit was used, Example 2-14 in which the components are the same as those in Comparative Example 2-3, and the resin (P-13) having a hydroxystyrene repeating unit was used has all of high resolution, high sensitivity, high LWR performance, film loss reduction performance, high EL, and high dry etching resistance. It is thought that this is because, based on the fact that the penolic hydroxyl group in the hydroxystyrene repeating unit is prone to undergo a crosslinking reaction, the effects of insolubilization and curing for forming a film are increased, and secondary electrons are greatly generated from the phenol structure by exposure, and as a result, acid is greatly generated, and a deprotection reaction of an acid-decomposable group in the resin quickly and greatly proceeds, and thus, these contribute to more enhancement of sensitivity, LWR performance, and resolution.
From comparison of Example 2-7 or 2-8 with other Examples, it is also found that the effects are more significant at a hydroxystyrene structure rather than at a hydroxyphenyl methacrylate structure or a hydroxyphenylmethacryl amide structure among the same phenol portions, and this is preferable.
Furthermore, it is also found that a polymer having the acid-decomposable group (for example. Examples 2-19 to 2-28, 2-32 to 2-34, and 2-36) represented by General Formula (IV) or the acid-decomposable group (for example, Examples 2-11 to 2-13, 2-16, and 2-30) represented by General Formula (III-1) is excellent in terms of all of resolution, sensitivity, and film loss reduction performance compared to a polymer having no acid-decomposable group represented by General Formula (IV) or (III-1), for example, as Examples 2-6 to 2-10. It is thought that this is because the deprotection activation energy of the acid-decomposable group is low, and thus, carboxylic acid can be easily generated with a small amount of an acid.
On the other hand, it is found that Comparative Example 2-4 in which the resin (CP-1) having a hydroxystyrene repeating unit protected by butyloxycarbonyl (BOC) group described in JP1995-113272A (JP-H07-113272A), in which deprotection energy is less likely to greatly deprotect, was used, is greatly inferior in the performance compared to Examples of the present invention.
It can be said that, when an acid generator which generates an acid having a great volume, as an acid generator, is used, the performance becomes more preferable.
In addition, it is found that, as a crosslinking agent, a phenol derivative or a urea-based compound, having a hydroxymethyl group or an alkoxymethyl group is excellent.
According to the present invention, a pattern formation method which satisfies high sensitivity, high resolution (high resolving power, and the like), high roughness performance, film loss reduction performance, high exposure latitude, and high dry etching resistance at the same time to a very high level in an ultra fine region (for example, a region having a line width of 50 nm or less), an active light-sensitive or radiation-sensitive resin composition, a resist film, a production method for an electronic device using these, and an electronic device can be provided.
The present invention has been described in detail and with reference to specific embodiments, and it is apparent to those skilled in the art that various modifications and changes are possible without departing from the spirit and the scope of the invention.
This application is based on Japanese Patent Application (Japanese Patent Application No. 2013-160615) filed on Aug. 1, 2013, and the contents thereof are incorporated herein by reference.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2013-160615 | Aug 2013 | JP | national |
This is a continuation of International Application No. PCT/JP2014/067280 filed on Jun. 27, 2014, and claims priority from Japanese Patent Application No. 2013-160615 filed on Aug. 1, 2013, the entire disclosures of which are incorporated herein by reference.
| Number | Date | Country | |
|---|---|---|---|
| Parent | PCT/JP2014/067280 | Jun 2014 | US |
| Child | 15011813 | US |
