Number | Name | Date | Kind |
---|---|---|---|
4357369 | Kilichowski et al. | Nov 1982 | |
4396704 | Taylor | Aug 1983 | |
4426247 | Tamamura et al. | Jan 1984 | |
4430153 | Gleason et al. | Feb 1984 | |
4433044 | Meyer et al. | Feb 1984 | |
4552833 | Ito et al. | Nov 1985 | |
4613389 | Tanaka | Sep 1986 | |
4613398 | Chiong et al. | Sep 1986 |
Number | Date | Country |
---|---|---|
23937 | Feb 1982 | JPX |
71-44715 | Mar 1986 | JPX |
Entry |
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Visser et al., "Mechanism and Kinetics of Silylation of Resist Layers . . .", Proceedings of SPIE, vol. 771, 1987, pp. 1-7. |