Various aspects and exemplary embodiments of the present disclosure relate to a plasma processing method and a plasma processing apparatus.
In a semiconductor manufacturing process, a plasma processing apparatus has been widely used to perform a plasma processing for the purpose of deposition or etching of a thin film. Examples of the plasma processing apparatus include a plasma chemical vapor deposition (CVD) apparatus for performing a thin film deposition processing and a plasma etching apparatus for performing an etching processing.
Meanwhile, in the plasma processing apparatus, a member disposed inside the chamber (hereinafter, referred to as an “in-chamber member” as appropriate) is exposed to plasma of a processing gas during various types of plasma processings. Thus, plasma resistance is required. In this regard, for example, Patent Document 1 discloses a method of enhancing plasma resistance of an in-chamber member by supplying a silicon-containing gas containing oxygen at a gas flow rate ratio of oxygen to SiF4 of 1.7 or more to form a fluorine-containing silicon oxide film as a protective film on the surface of the in-chamber member, before performing a plasma processing on a workpiece.
Patent Document 1: U.S. Pat. No. 6,071,573.
However, in the conventional technique in which the fluorine-containing silicon oxide film is formed as a protective film on the surface of the in-chamber member, the etch amount of the silicon oxide film by the plasma of the processing gas increases.
That is, in the conventional technique, the silicon-containing gas containing oxygen is supplied at a gas flow rate ratio of oxygen to SiF4 of 1.7 or more. Further, oxygen radicals and silicon radicals in the plasma of the silicon-containing gas containing oxygen react in the space inside the chamber to generate silicon oxide, and the generated silicon oxide is deposited as a silicon oxide film in the in-chamber member. Since the silicon oxide film deposited on the in-chamber member contains residual halogens such as, for example, F (fluorine), the etching may be performed beyond the film thickness of the silicon oxide film by the plasma of the processing gas in some cases. For this reason, in the conventional technique, the surface of the in-chamber member was deteriorated and worn. Thus, the protection of the in-chamber member was not sufficient.
According to an aspect, a plasma processing method of the present disclosure includes a film formation step, a plasma processing step, and a removal step. In the film formation step, a silicon-containing film is formed on a surface of a member disposed inside a chamber by plasma of a silicon-containing gas and a reducing gas. In the plasma processing step, a workpiece carried into the chamber is plasma-processed by plasma of a processing gas after the silicon-containing film is formed on the surface of the member. In the removal step, the silicon-containing film is removed from the surface of the member by plasma of a fluorine-containing gas after the plasma-processed workpiece is carried out of the chamber.
According to various aspects and exemplary embodiments of the present disclosure, a plasma processing method and a plasma processing apparatus capable of protecting a member disposed inside a chamber from plasma and suppressing the deterioration and wear of the member, are realized.
Hereinafter, various exemplary embodiments will be described in detail with reference to the drawings. Meanwhile, in the respective drawings, the same or corresponding parts will be denoted by the same symbols.
According to an exemplary embodiment of the present disclosure, a plasma processing method includes: a film formation step of forming a silicon-containing film on a surface of a member disposed inside a chamber by plasma of a silicon-containing gas and a reducing gas; a plasma processing step of plasma-processing a workpiece carried into the chamber by plasma of a processing gas after the silicon-containing film is formed on the surface of the member; and a removal step of removing the silicon-containing film from the surface of the member by plasma of a fluorine-containing gas after the plasma-processed workpiece is carried out of the chamber.
In an exemplary embodiment of the above-described plasma processing method, the silicon-containing gas contains at least one of SiF4, SiCl4, and SiBr4.
In an exemplary embodiment of the above-described plasma processing method, the reducing gas contains at least one of H2, CH4, and C3H6.
In an exemplary embodiment of the above-described plasma processing method, in the film formation step, a flow rate ratio of the reducing gas to the silicon-containing gas is 0.2 or more.
In an exemplary embodiment, the above-described plasma processing method further includes a pre-film formation step of forming a carbon-containing film on the surface of the member by plasma of a carbon-containing gas before the film formation step.
In an exemplary embodiment of the above-described plasma processing method, the carbon-containing gas contains a gas represented by CxHyFz (wherein x, y, z represents an integer, and (z−y)/x is 2 or less).
In an exemplary embodiment of the above-described plasma processing method, the carbon-containing gas contains at least one of CH4, C4H8, CHF3, CH3F, and C2H4.
In an exemplary embodiment of the above-described plasma processing method, the removal step includes a first removal step of removing the silicon-containing film from the surface of the member by the plasma of the fluorine-containing gas and a second removal step of removing the carbon-containing film from the surface of the member by plasma of an oxygen-containing gas.
In an exemplary embodiment of the above-described plasma processing method, the silicon-containing gas further contains a rare gas.
In an exemplary embodiment of the above-described plasma processing method, the rare gas is Ar or He.
According to another exemplary embodiment of the present disclosure, a plasma processing apparatus includes: a chamber in which a workpiece is plasma-processed; an exhaust unit that decompresses an inside of the chamber; a gas supply unit that supplies a processing gas to the inside of the chamber; and a controller that performs a film formation step of forming a silicon-containing film on a surface of a member disposed inside a chamber by plasma of a silicon-containing gas and a reducing gas; a plasma processing step of plasma-processing a workpiece carried into the chamber by plasma of a processing gas after the silicon-containing film is formed on the surface of the member; and a removal step of removing the silicon-containing film from the surface of the member by plasma of a fluorine-containing gas after the plasma-processed workpiece is carried out of the chamber.
The placing table 2 has a base 2a made of a conductive metal (e.g., aluminum) and functions as a lower electrode. The placing table 2 is supported by a conductive support table 4 through an insulating plate 3. In addition, a focus ring 5 made of, for example, single-crystal silicon, is provided on an outer periphery of the top of the placing table 2. Further, a cylindrical inner wall member 3a made of, for example, quartz, is provided to surround the periphery of the placing table 2 and the support table 4.
A shower head 16 is provided above the placing table 2 to face the placing table in parallel, in other words, to face the semiconductor wafer W supported on the placing table 2, and functions as an upper electrode. The shower head 16 and the placing table 2 function as a pair of electrodes (the upper and lower electrodes). A first high frequency power source 10a is connected to the base 2a of the placing table 2 via a first matcher 11a. Further, a second high frequency power source 10b is connected to the base 2a of the placing table 2 via a second matcher 11b. The first high frequency power source 10a is for plasma generation, and a high frequency power of a predetermined frequency (e.g., 100 MHz) is supplied from the first high-frequency power source 10a to the base 2a of the placing table 2. Further, the second high frequency power source 10b is for ion attraction (bias), and a high frequency power of a predetermined frequency lower than that of the first high frequency power source 10a (e.g., 13 MHz) is supplied from the second high-frequency power source 10b to the base 2a of the placing table 2.
An electrostatic chuck 6 is provided on the top surface of the placing table 2 to electrostatically attract the semiconductor wafer W. The electrostatic chuck 6 is constituted by interposing an electrode 6a between insulators 6b, and a DC power source 12 is connected to the electrode 6a. Then, a DC voltage is applied from the DC power source 12 to the electrode 6a, so that the semiconductor wafer W is attracted by a Coulomb force.
A coolant flow path 2b is formed inside the placing table 2. The coolant flow path 2b is connected with a coolant inlet pipe 2c and a coolant outlet pipe 2d. Then, the support table 4 and the placing table 2 may be controlled to a predetermined temperature by circulating a coolant such as, for example, Galden in the coolant flow path 2b. Further, a backside gas supply pipe 30 passes through the placing table 2 to supply a cold heat transfer gas (a backside gas) such as, for example, helium gas to the rear surface side of the semiconductor wafer W. The backside gas supply pipe 30 is connected to a backside gas source (not illustrated). With the configuration, the semiconductor wafer W attracted to and held on the top surface of the placing table 2 by the electrostatic chuck 6 may be controlled to a predetermined temperature.
The shower head 16 described above is provided on the ceiling wall portion of the processing chamber 1. The shower head 16 includes a main body 16a and an upper top plate 16b forming an electrode plate, and is supported in an upper portion of the processing chamber 1 via an insulating member 45. The main body 16a is made of a conductive material, for example, aluminum of which the surface is anodized, and is configured such that the upper top plate 16b is detachably supported under the main body 16a. The upper top plate 16b is made of a silicon-containing material, for example, quartz.
A gas diffusion chamber is provided inside the main body 16a, and a plurality of gas flow holes 16e are formed in the bottom portion of the main body 16a so as to be positioned under the gas diffusion chambers 16c and 16d. The gas diffusion chamber is divided into two portions, i.e., a gas diffusion chamber 16c provided in the central portion and a gas diffusion chamber 16d provided in the peripheral portion, and is configured such that the supply state of the processing gas is independently changed in the central portion and the peripheral portion.
In addition, gas introduction holes 16f are provided in the upper top plate 16b to penetrate the upper top plate 16b in the thickness direction and overlap with the gas flow holes 16e. With the configuration, the processing gas supplied to the gas diffusion chambers 16c, 16d is diffused in a shower form through the gas flow holes 16e and the gas introduction holes 16f and supplied into the processing chamber 1. A temperature adjustor such as, for example, a heater (not illustrated) or a pipe (not illustrated) for circulating the coolant, is provided in, for example, the main body 16a, so that the temperature of the shower head 16 is controlled to a desired temperature during the plasma etching process.
The main body 16a includes two gas introduction ports 16g, 16h to introduce the processing gas to the gas diffusion chambers 16c, 16d. The gas introduction ports 16g, 16h are connected with gas supply pipes 15a, 16b, respectively. The other ends of the gas supply pipes 15a, 16b are connected with a processing gas source 15 that supplies an etching processing gas. The processing gas source 15 is an example of the gas supply unit. The gas supply pipe 15a is provided with a mass flow controller (MFC) 15c and an opening/closing valve V1 in this order from the upstream side. In addition, the gas supply pipe 15b is provided with a mass flow controller (MFC) 15d and an opening/closing valve V2 in this order from the upstream side.
Then, a processing gas for plasma etching is supplied from the processing gas source 15 to the gas diffusion chambers 16c, 16d through the gas supply pipes 15a, 15b, diffused in a shower form from the gas diffusion chambers 16c, 16d through the gas flow holes 16e and the gas introduction holes 16f, and supplied into the processing chamber 1. For example, a silicon-containing gas and a reducing gas, which are used for forming a silicon-containing film on the surface of a member disposed inside the processing chamber 1 as described later, is supplied from the processing gas source 15. In addition, for example, a processing gas containing HBr/NF3, which is used for plasma-processing the workpiece, is supplied from the processing gas source 15. Further, for example, a fluorine-containing gas, which is used for removing the silicon-containing film on the surface of the member disposed inside the processing chamber 1, is supplied from the processing gas source 15. The details of the gas to be supplied from the processing gas source 15 will be described later.
The shower head 16 serving as an upper electrode is electrically connected with a variable DC power source 52 via a low pass filter (LPF) 51 and a switch 53. The variable DC power source 52 is capable of turning on/off the power supply by an ON/OFF switch 53. The current and voltage of the variable DC power source 52 and the ON/OFF of the ON/OFF switch 53 are controlled by a controller 16 (to be described later). As will be described later, when high frequency waves are applied from the first high frequency power source 10a and the second high frequency power source 10b to the placing table 2 to generate plasma in the processing space, the ON/OFF switch 53 is turned on by the controller 60 so that a predetermined DC voltage is applied to the shower head 16 serving as an upper electrode.
An exhaust port 71 is formed in the bottom portion of the processing chamber 1, and an exhaust device 73 is connected to the exhaust port 71 via an exhaust pipe 72. The exhaust device 73 includes a vacuum pump which, when operated, decompresses the interior of the processing chamber 1 to a predetermined degree of vacuum. The exhaust device 73 is an example of the exhaust unit. Meanwhile, a carry-in/out port 74 for the semiconductor wafer W is provided on a sidewall of the processing chamber 1, and a gate valve 75 is provided in the carry-in/out port 74 to open and close the carry-in/out port 74.
In the figure, reference numerals 76 and 77 denote detachable deposit shields. The deposit shield 76 is provided along the inner wall surface of the processing chamber 1 and plays a role of suppressing any etching byproduct (deposit) from being attached to the processing chamber 1. Hereinafter, the inner wall of the processing chamber 1 and the deposit shield 76 may be collectively referred to as “the inner wall of the processing chamber 1” in some cases. In addition, the deposit shield 77 is provided to cover the outer periphery of the placing table 2, the inner wall member 3a, and the support table 4, which serve as a lower electrode. Hereinafter, the placing table 2, the inner wall member 3a, the support table 4, and the deposit shield 77 may be collectively referred to as a “lower electrode” in some cases. A conductive member (GND block) 79 connected to the ground in a direct current manner is provided at substantially the same height position as the semiconductor wafer W of the deposit shield 76. Thus, abnormal discharge is suppressed.
Further, a ring magnet 80 is concentrically disposed around the chamber 1. The ring magnet 80 applies a magnetic field to the processing space between the shower head 16 and the placing table 2. The ring magnet 80 is rotatable by a rotation mechanism (not illustrated).
The operation of the plasma etching apparatus having the above configuration is generally controlled by the controller 60. The controller 60 is provided with a process controller 61 that includes a CPU and controls each part of the plasma etching apparatus, a user interface 62, and a memory 63.
The user interface 62 includes, for example, a keyboard or a touch panel for inputting commands by a process manager to manage the plasma etching apparatus, and a display for visually displaying the operation status of the plasma etching apparatus.
The memory 63 stores a control program (software) for realizing various processings performed in the plasma etching apparatus by the control of the controller 61, or recipe in which, for example, a processing condition data is stored. Then, an arbitrary recipe is called from the memory 63 by an instruction from the user interface 62 as necessary, and executed by the process controller 61. Therefore, a desired processing is performed in the plasma etching apparatus under the control of the process controller 61. Further, the control program or the recipe of, for example, the processing condition data may be used in a state of being stored in a computer-readable computer storage medium (e.g., a hard disc, a CD, a flexible disc, or a semiconductor memory), or may be used on-line by being transmitted at any time from other devices, for example, through a dedicated line.
For example, the controller 60 controls the respective parts of the plasma processing apparatus to perform the plasma processing method (to be described later). As a detailed example, the controller 60 forms a silicon-containing film on a surface of a member disposed inside the chamber by plasma of a silicon-containing gas and a reducing gas. Then, after the silicon-containing film is formed on the surface of the member, the controller 60 plasma-processes a workpiece carried into the processing chamber 1 by plasma of a processing gas. Then, after the plasma-processed workpiece is carried out of the processing chamber 1, the controller 60 removes the silicon-containing film from the surface of the member by plasma of a fluorine-containing gas. Here, the member disposed inside the processing chamber 1 includes, for example, the inner wall of the processing chamber 1, and the placing table 2, the inner wall member 3a, the support table 4, and the deposit shield 77, which are disposed inside the processing chamber 1 and serve as a lower electrode. Hereinafter, the member disposed inside the processing chamber 1 may be referred to as an “in-chamber member” in some cases. Further, another member includes a shower head 16 which is an upper electrode facing the lower electrode inside the processing chamber 1. Further, the workpiece is, for example, a semiconductor wafer W.
Next, the plasma processing method of the plasma processing apparatus according to the exemplary embodiment will be described.
As illustrated in
The plasma processing apparatus generates a deposit, which is a silicon-containing film, on the surface of the in-chamber member by the film formation step. The controller 60 of the plasma processing apparatus supplies the silicon-containing gas and the reducing gas from the processing gas source 15 into the processing chamber 1, and applies a high frequency power for plasma generation from the first high frequency power source 10a into the processing chamber 1 to generate plasma of the silicon-containing gas and the reducing gas. At this time, the controller 60 does not apply a high frequency power for ion attraction from the second high frequency power source 10b. As a result, a deposit is formed as a silicon-containing film on the surface of the in-chamber member.
The amount of the silicon-containing film (deposit) formed on the surface of the in-chamber member is different in each part of the processing chamber 1.
In the silicon-containing film of the exemplary embodiment illustrated in
The descriptions will refer back to
A more detailed example will be described. The controller 60 of the plasma processing apparatus carries the workpiece from the carry-in/out port 74 and the gate valve 75 into the processing chamber 1, and places the carried workpiece on the electrostatic chuck 6. Then, the controller 60 supplies the processing gas from the processing gas source 15 into the processing chamber 1, applies a high frequency power for plasma generation from the first high frequency power source 10a, and applies a high frequency power for ion attraction from the second high frequency power source 10b. As a result, the workpiece is plasma-processed.
Then, after the workpiece is carried out of the processing chamber 1, the plasma processing apparatus performs a removal step of removing the silicon-containing film from the surface of the in-chamber member by plasma of a fluorine-containing gas (step S103). The fluorine-containing gas contains, for example, at least one of NF3, SF6, and CF4. Further, the fluorine-containing gas may contain O2.
A more detailed example will be described. The controller 60 of the plasma processing apparatus carries the workpiece from the carry-in/out port 74 and the gate valve 75 to the outside of the processing chamber 1. Then, the controller 60 supplies the fluorine-containing gas from the processing gas source 15 into the processing chamber 1, and applies a high frequency power for plasma generation from the first high frequency power source 10a. At this time, the controller 60 does not apply a high frequency power for ion attraction from the second high frequency power source 10b. As a result, the silicon-containing substance is removed from the surface of the member disposed inside the processing chamber 1.
Subsequently, descriptions will be made on another exemplary process flow of the plasma processing method by the plasma processing apparatus according to the exemplary embodiment.
As illustrated in
The controller 60 of the plasma processing apparatus supplies the carbon-containing gas from the processing gas source 15 into the processing chamber 1, and applies a high frequency power for plasma generation from the first high frequency power source 10a into the processing chamber 1 to generate plasma of the carbon-containing gas. At this time, the controller 60 does not apply a high frequency power for ion attraction from the second high frequency power source 10b. As a result, a deposit is formed as a carbon-containing film on the surface of the in-chamber member.
Next, the plasma processing apparatus performs a film formation step of forming a silicon-containing film on the surface of the in-chamber member by plasma of a silicon-containing gas and a reducing gas (step S112). Since the details of step S112 are the same as those of the above-described step S101, descriptions thereof will be omitted.
Subsequently, the plasma processing apparatus performs a plasma processing step of plasma-processing the workpiece carried into the processing chamber 1 by plasma of a processing gas (step S102). Since the details of step S113 are the same as those of the above-described step S102, descriptions thereof will be omitted.
Subsequently, after the workpiece is carried out of the processing chamber 1, the plasma processing apparatus performs a first removal step of removing the silicon-containing film from the surface of the in-chamber member by plasma of a fluorine-containing gas (step S114). Since the details of step S114 are the same as those of the above-described step S103, descriptions thereof will be omitted.
Then, the plasma processing apparatus performs a second removal step of removing the carbon-containing film from the surface of the in-chamber member by plasma of an oxygen-containing gas (step S115). The oxygen-containing gas contains at least O2, and may further contain a rare gas. The rare gas is, for example, Ar or He.
A more detailed example will be described. After the first removal step of removing the silicon-containing film, the controller 60 of the plasma processing apparatus supplies the oxygen-containing gas from the processing gas source 15 into the processing chamber 1, and applies a high frequency power for plasma generation from the first high frequency power source 10a. At this time, the controller 60 does not apply a high frequency power for ion attraction from the second high frequency power source 10b. As a result, the carbon-containing film is removed from the surface of the member disposed inside the processing chamber 1.
As described above, according to the exemplary embodiment, the silicon-containing film is formed on the surface of the member disposed inside the chamber by the plasma of the silicon-containing gas and the reducing gas before the workpiece is plasma-processed. Therefore, according to the exemplary embodiment, it is possible to enhance the plasma resistance of the silicon-containing film (deposit) formed on the surface of the in-chamber member. As a result, the amount of residual halogen in the silicon-containing film is reduced as compared with the method in which the silicon oxide film is formed by the plasma of the oxygen-containing gas and the silicon-containing gas. Thus, it is possible to form a denser and higher-quality silicon-containing film, thereby improving the plasma resistance. Furthermore, since the film forming step is performed before the workpiece is plasma-processed, it is possible to enhance the plasma resistance of the in-chamber member, and to avoid consumption of the member and scattering of contaminants from the member.
Further, according to the exemplary embodiment, the silicon-containing film is removed from the surface of the inner-chamber member by plasma of a fluorine-containing gas after the plasma-processed workpiece is carried out of the processing chamber 1. As a result, the surface of the in-chamber member may be cleaned.
Further, according to the exemplary embodiment, the silicon-containing gas contains at least one of SiF4, SiCl4, and SiBr4. As a result, it is possible to enhance the plasma resistance of the silicon-containing film (deposit) formed on the surface of the in-chamber member.
Further, according to the exemplary embodiment, the reducing gas contains at least one of H2, CH4, and C3H6. As a result, since the amount of residual halogen in the silicon-containing film, it is possible to enhance the plasma resistance of the silicon-containing film (deposit) formed on the surface of the in-chamber member.
Further, according to the exemplary embodiment, in the film formation step of forming the silicon-containing film, the flow rate ratio of the reducing gas to the silicon-containing gas is 0.2 or more. As a result, since the amount of residual halogen in the silicon-containing film, it is possible to enhance the plasma resistance of the silicon-containing film (deposit) formed on the surface of the in-chamber member.
Further, according to the exemplary embodiment, the pre-film formation step of forming a carbon-containing film on the surface of the member by plasma of a carbon-containing gas is further included before the film formation step. As a result, when the silicon-containing film is removed from the surface of the in-chamber member by the plasma of the fluorine-containing gas, the fluorine-containing gas does not contact the surface of the in-chamber member. Thus, it is possible to suppress the deterioration and wear of the surface of the in-chamber member.
Further, according to the exemplary embodiment, the carbon-containing gas contains a gas represented by CxHyFz (wherein x, y, z represents an integer, and (z−y)/x is 2 or less). As a result, it is possible to suppress the deterioration and wear of the surface of the in-chamber member.
Further, according to the exemplary embodiment, the carbon-containing gas contains at least one of CH4, C4H8, CHF3, CH3F, and C2H4. As a result, it is possible to suppress the deterioration and wear of the surface of the in-chamber member.
Further, according to the exemplary embodiment, the removal step includes a first removal step of removing the silicon-containing film from the surface of the member by the plasma of the fluorine-containing gas and a second removal step of removing the carbon-containing film from the surface of the member by plasma of an oxygen-containing gas. As a result, the surface of the in-chamber member may be further cleaned.
Further, according to the exemplary embodiment, the silicon-containing gas further contains a rare gas. As a result, it is possible to more uniformly deposit the silicon-containing film (deposit) on the whole in-chamber member.
Further, according to the exemplary embodiment, the rare gas is Ar or He. As a result, it is possible to more uniformly deposit the silicon-containing film (deposit) on the whole in-chamber member.
The plasma processing method and the plasma processing apparatus according to the exemplary embodiment have been described, but the exemplary embodiment is not limited thereto. Hereinafter, other exemplary embodiments will be described.
For example, a bias voltage may be applied in the film formation step. That is, in the film formation step, the controller 60 supplies the silicon-containing gas and the reducing gas from the processing gas source 15 into the processing chamber 1, and applies a high frequency power for plasma generation from the first high frequency power source 10a into the processing chamber 1 to generate plasma of the silicon-containing gas and the reducing gas. At this time, the controller 60 applies a bias voltage to the placing table 2 by applying a high frequency power for ion attraction from the second high frequency power source 10b to the placing table 2. Thus, ions in the plasma are attracted toward the placing table 2. As a result, it is possible to more precisely control the film thickness of the film on the member, as compared with the method that does not apply the bias voltage.
1: processing chamber
2: placing table
2
a: base
2
b: coolant flow path
2
c: coolant inlet pipe
2
d: coolant outlet pipe
3: insulating plate
3
a: inner wall member
4: support table
5: focus ring
6: electrostatic chuck
6
a: electrode
6
b: insulator
10
a: first high frequency power source
10
b: second high frequency power source
15: processing gas source
16: shower head
16
a: main body
16
b: top plate
52: variable DC power source
60: controller
61: process controller
62: user interface
63: memory
71: exhaust port
72: exhaust pipe
73: exhaust device
Number | Date | Country | Kind |
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2014-206665 | Oct 2014 | JP | national |
Filing Document | Filing Date | Country | Kind |
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PCT/JP2015/077031 | 9/25/2015 | WO | 00 |