Claims
- 1. A polishing apparatus comprising:
- a polishing agent storage vessel for storing a polishing agent;
- a turntable for polishing an object to be polished;
- a polishing agent supply pipe for supplying said polishing agent from said polishing agent storage vessel onto said turntable;
- a polishing object holding jig for holding said object to be polished such that a surface to be polished of said object opposes said turntable;
- first temperature adjusting means for adjusting a temperature of said polishing agent in said polishing agent supply pipe; and
- second temperature adjusting means for adjusting a temperature of said polishing agent in said polishing agent storage vessel.
- 2. An apparatus according to claim 1, wherein said first temperature adjusting means is a temperature adjusting means for lowering a temperature of said polishing agent to a temperature lower than that of said polishing agent in said polishing agent storage vessel.
- 3. An apparatus according to claim 1, wherein said first temperature adjusting means and said second temperature adjusting means are controlled independently of each other.
- 4. An apparatus according to claim 1, further comprising third temperature adjusting means for adjusting a temperature of said turntable.
- 5. A polishing apparatus comprising:
- a polishing agent storage vessel for storing a polishing agent;
- a turntable for polishing an object to be polished;
- a polishing agent supply pipe for supplying said polishing agent from said polishing agent storage vessel onto said turntable;
- a polishing object holding jig for holding said object to be polished such that a surface to be polished of said object opposes said turntable;
- first temperature adjusting means for adjusting a temperature of said polishing agent in said polishing agent storage vessal; and
- means for returning said polishing agent passing through said polishing agent supply pipe to said polishing agent storage vessel.
- 6. An apparatus according to claim 5, further comprising third temperature adjusting means for adjusting a temperature of said turntable.
- 7. An apparatus according to claim 5, further comprising second temperature adjusting means for adjusting a temperature of said polishing agent in said polishing agent supply pipe.
- 8. An apparatus according to claim 7, wherein said second temperature adjusting means is a temperature adjusting means for lowering a temperature of said polishing agent to a temperature lower than that of said polishing agent in said polishing agent storage vessel.
Priority Claims (6)
Number |
Date |
Country |
Kind |
5-068906 |
Mar 1993 |
JPX |
|
5-231283 |
Sep 1993 |
JPX |
|
5-231284 |
Sep 1993 |
JPX |
|
5-286988 |
Nov 1993 |
JPX |
|
6-044160 |
Mar 1994 |
JPX |
|
6-044316 |
Mar 1994 |
JPX |
|
Parent Case Info
This is a Division, of application Ser. No. 08/300,127 filed on Sep. 2, 1994, U.S. Pat. No. 5,607,718, which is a Continuation-In-Part of application Ser. No. 08/217,642 filed on Mar. 25, 1994, now abandoned.
US Referenced Citations (3)
Number |
Name |
Date |
Kind |
4450652 |
Walsh |
May 1984 |
|
4513894 |
Doyle et al. |
Apr 1985 |
|
5127196 |
Morimoto et al. |
Jul 1992 |
|
Foreign Referenced Citations (1)
Number |
Date |
Country |
401199762 |
Aug 1989 |
JPX |
Divisions (1)
|
Number |
Date |
Country |
Parent |
300127 |
Sep 1994 |
|
Continuation in Parts (1)
|
Number |
Date |
Country |
Parent |
217642 |
Mar 1994 |
|