Number | Name | Date | Kind |
---|---|---|---|
4520041 | Aoyama et al. | May 1985 | |
4539744 | Burton | Sep 1985 | |
4545852 | Barton | Oct 1985 | |
4614666 | Lindenfelser | Sep 1986 | |
4628589 | Sundaresan | Dec 1986 | |
4719125 | Anello et al. | Jan 1988 | |
4721548 | Morimoto | Jan 1988 | |
4775550 | Chu et al. | Oct 1988 | |
4782030 | Katsumata et al. | Nov 1988 | |
4783238 | Roesner | Nov 1988 | |
4806504 | Cleeves | Feb 1989 | |
4826786 | Merenda et al. | May 1989 | |
4839311 | Riley et al. | Jun 1989 |
Entry |
---|
Adams et al., "Planarization of Phosphorus Doped Silicon Dioxide", J. Electrochem. Society, vol. 128, No. 2, 2/1981, pp. 423-429. |