Number | Name | Date | Kind |
---|---|---|---|
3615435 | Chu et al. | Oct 1971 | |
3953214 | Lipson et al. | Apr 1976 | |
4014771 | Rosenkranz et al. | Mar 1977 | |
4100047 | McCarty | Jul 1978 | |
4157261 | Takeda | Jun 1979 | |
4299910 | Hung et al. | Nov 1981 | |
4569901 | Guillet et al. | Feb 1986 | |
4612270 | Pampalone et al. | Sep 1986 | |
4770739 | Orvek et al. | Sep 1988 | |
4935094 | Mixon et al. | Jun 1990 | |
4985343 | Kushi et al. | Jan 1991 |
Entry |
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"Deep U. V. Hardening of Positive Photoresist Patterns," Journal of the Electrochemical Society, Accelerated Brief Communications, Jun. 1982, vol. 129, No. 6, pp. 1379-1381. |