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4472636 | Hahn | Sep 1984 | |
5863682 | Abe et al. | Jan 1999 | |
5892231 | Baylor et al. | Apr 1999 |
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0028585A1 | May 1981 | EP |
07142318A | Jun 1995 | JP |
Entry |
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“Electron-Optical Design for the Scalpel Proof-of-Concept Tool”, by W.K. Waskiewicz, et al., Proceedings of the SPIE 1995, XP 000856131. |
Eric Munro and Henry P. Freund, “Electron-Beam Sources and Charged-Particle Optics”, Proceedings of SPIE, vol. 2522, pp. 13-22, Jul. 10-14, 1995. |