Scanning electron microscope

Abstract

There is provided an electron microscope which can clearly detect a microscopic unevenness in a sample. According to a scanning electron microscope, when luminance signals from one pair of backscattered electron detectors are given by L and R, and when a luminance signal from a scattered electron detector is given by S, an adjustment value Lc of L and an adjustment value Rc of R are calculated by using primary homogeneous expressions of L, R, and S.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram showing the configuration of a scanning electron microscope according to the present invention.

FIGS. 2A to 2J are explanatory diagrams for explaining a method of synthesizing image data according to the present invention.

FIGS. 3A to 3I are explanatory diagrams for explaining a method of synthesizing image data according to the present invention.

FIGS. 4A to 4B are explanatory diagrams for explaining a method of synthesizing image data according to the present invention.

FIG. 5 is an explanatory diagram for explaining a procedure of a method of synthesizing image data according to the present invention.

FIGS. 6A to 6D are diagrams showing an example of a display screen of a display of a scanning electron microscope according to the present invention.

FIGS. 7A and 7B are diagrams showing examples of a display screen of a display of a scanning electron microscope according to the present invention.

Claims

1. A scanning electron microscope having: an electron beam irradiating system which irradiates an electron beam on a sample; one pair of backscattered electron detectors which detects backscattered electrons from the sample; and an image processing unit which processes image data from the pair of backscattered electron detectors, whereinthe image processing unit, when luminance signals from the pair of backscattered electron detectors are given by L and R, calculates an adjustment value Lc of L and an adjustment value Rc of R by using primary homogeneous expressions of L and R.

2. The scanning electron microscope according to claim 1, having a scattered electron detector which detects scattered electrons from the sample, whereinthe image processing unit, when a luminance signal from the scattered electron detector is given by S, calculates an adjustment value Lc of L and an adjustment value Rc of R by using primary homogeneous expressions of L, R, and S.

3. The scanning electron microscope according to claim 1, wherein the primary homogeneous expressions of L and R are expressed by the following equations: Lc=(L−R)Rc=(R−L).

4. The scanning electron microscope according to claim 1, wherein the primary homogeneous expressions of L and R are expressed by the following equations: Lc=(L+R)/2+(L−R)Rc=(L+R)/2+(R−L)

5. The scanning electron microscope according to claim 1, wherein the primary homogeneous expressions of L and R are expressed by the following expressions by using an arbitrary coefficient α (0≦α≦1): Lc=(L+R)/2+α·(L−R)Rc=(L+R)/2+α·(R−L).

6. The scanning electron microscope according to claim 1, wherein the primary homogeneous expressions of L and R are expressed by the following expressions by using an arbitrary coefficient α (0≦α≦1): Rc=α·(R−L)+R Lc=α·(L−R)+L.

7. The scanning electron microscope according to claim 2, wherein the primary homogeneous expressions of L and R are expressed by the following expressions: Lc=S+(L−R)Rc=S+(R−L).

8. The scanning electron microscope according to claim 2, wherein the primary homogeneous expressions of L and R are expressed by the following expressions by using an arbitrary coefficient α (0≦α≦1): Lc=α·S+(1−α)·(L−R)Lc=α·S+(1−α)·(R−L).

9. The scanning electron microscope according to claim 1 or 2, having a display which receives the image data to display an electron microscope image, whereinthe display displays images generated by the adjustment value Lc of L and the adjustment value Rc of R on one screen at once.

10. The scanning electron microscope according to claim 9, wherein the display displays a screen having a GUI to set the coefficient α of the primary homogeneous expressions.

11. An image generating method using a scanning electron microscope having: the step of irradiating an electron beam on a sample, the step of detecting backscattered electrons from the sample by one pair of backscattered electron detector; the step of, when luminance signals from the pair of backscattered electron detectors are given by L and R, calculating an adjustment value Lc of L and an adjustment value Rc of R.

12. The image generating method using a scanning electron microscope according to claim 11, having: the step of detecting scattered electrons from the sample by a scattered electron detector; the step of, when a luminance signal from the scattered electron detector is given by S, calculating an adjustment value Lc of L and an adjustment value Rc of R by using primary homogeneous expressions of L, R, and S.

13. The image generating method using a scanning electron microscope according to claim 11, wherein the primary homogeneous expressions of L and R are expressed by the following expressions by using an arbitrary coefficient α (0≦α≦1): Lc=(L+R)/2+α·(L−R)Rc=(L+R)/2+α·(R−L).

14. The image generating method using a scanning electron microscope according to claim 12, wherein the primary homogeneous expressions of L and R are expressed by the following expressions by using an arbitrary coefficient α (0≦α≦1): Lc=α·S+(1−α)·(L−R)Lc=α·S+(1−α)·(R−L).

15. The image generating method using a scanning electron microscope according to claim 11 or 12, having the step of displaying images generated by the adjustment value Lc of L and the adjustment value Rc of R on one screen at once.

16. The image generating method using a scanning electron microscope according to claim 11 or 12, having the step of displaying a screen having a GUI to set the coefficient α of the primary homogeneous expressions.

17. An optical microscope having: one pair of oblique illumination devices which irradiate illumination light on a sample from a direction oblique to an observing direction; an image pickup device which picks up an optical image of the sample; an image processing unit which processes image data from the image pickup device; and a display which receives the image data to display the optical image, whereinthe image processing unit, when luminance signals of an image of the sample illuminated by the pair of oblique illumination devices are given by L and R, calculates an adjustment value Lc of L and an adjustment value Rc of R by using primary homogeneous expressions of L and R.

18. The optical microscope according to claim 17, comprising: a vertical illumination device which irradiates illumination light on the sample from the same direction as the observing direction, whereinthe image processing unit, when a luminance signal of the image of the sample illuminated by the vertical illumination device is given by S, calculates an adjustment value Lc of L and an adjustment value Rc of R by using primary homogeneous expressions of L, R, and S.

19. A charged particle beam apparatus having: a charged particle beam irradiating system which irradiates a charged particle beam on a sample; one pair of detectors which detect an information signal from the sample; and an image processing unit which processes image data from the pair of detectors, whereinthe image processing unit, when luminance signals from the pair of detectors are given by L and R, calculates an adjustment value Lc of L and an adjustment value Rc of R by using primary homogeneous expressions of L and R.