This application is a National Stage application of International Patent Application No. PCT/EP2015/070621, filed on Sep. 9, 2015, which claims priority to German Patent Application No. 102014114096.6, filed on Sep. 29, 2014, each of which is hereby incorporated by reference in its entirety.
The invention relates to a tool for the lower die of a sintering device, the tool having a rest for an electronic subassembly to be sintered.
Sintering devices for carrying out the low-temperature pressure sintering of electronic subassemblies are already known. These have, for example, a sintering chamber which can be filled with a gas that is particularly conducive to the sintering operation or a corresponding gas mixture, and have an upper die and a lower die arranged in the sintering chamber, it being possible for the upper die and the lower die to be moved towards one another and preferably to have in each case a heating device of their own.
The lower die and/or the upper die often have to be specially shaped for carrying out specific processes or for adaptation to the products to be sintered, and so tools that can be fastened to the lower die or the upper die and allow easy modification of the device as a whole are usually provided.
For example, a sintering device for sintering an electronic subassembly comprising a circuit carrier is formed in such a way that a lower die is provided with a massive tool which carries and heats the planar circuit carrier. A temperature-resistant elastic medium of the upper die tool, in the form of a pressure pad, produces an increasing pressure on the surface of the circuit carrier, whereby the latter is pressed onto the planar support of the lower die tool. The flexible medium of the pressure pad provides a quasi-hydrostatic pressure not only on the components to be joined of the electronic subassembly but also on all of the surfaces of the lower die tool. A massive lower tool therefore forms a counter bearing in the quasi-hydrostatic sintering process, onto which the circuit carrier is pressed with compressive engagement by the elastic medium. The thermal energy is also supplied to the circuit carrier by way of this metallic compressive engagement.
However, a disadvantage of this design is that, at the temperature prevailing during the sintering operation of up to 350° C., stress cracks occur in ceramic materials which form part of the electronic subassembly, on account of the different coefficients of expansion of the ceramic material of the electronic subassembly and the lower die, which may, for example, comprise high-grade steel.
The object of the invention is therefore to provide a tool for a sintering device with which cracks and fractures of the ceramic material that occur during the sintering operation are avoided.
This object is achieved according to the invention by the tool for a sintering device comprising a tool for the lower die of a sintering device, the tool having a rest for an electronic subassembly comprising a circuit carrier, to be sintered, where the rest is formed from a material with a coefficient of linear expansion that is close to the coefficient of expansion of the circuit carrier of the electronic subassembly. The subclaims provide advantageous designs of the invention.
The basic concept of the invention is to provide a rest for the electronic subassembly, which rest has a low coefficient of linear expansion, and one that is similar to that of the electronic subassembly as a whole or the circuit carrier thereof. Such a coefficient of linear expansion may be approximately 11·10−6K−1. This results in no displacements, or only very minor displacements, between the electronic subassembly and the rest during temperature changes.
Since such low-expansion materials, that is to say materials having a low coefficient of thermal expansion, such as molybdenum or Kovar, are very cost-intensive to procure and are very difficult to machine, on account of the properties of the material, recourse is made to the designs claimed, which makes easy and work-friendly production of the tool possible.
According to the invention, therefore, a tool for the lower die of a sintering device is provided, the tool having or forming a rest for an electronic component to be sintered and the rest being formed from a material with a coefficient of linear expansion (measured at 20° C.) of less than or equal to 11·10−6K−1.
The material preferably has a coefficient of linear expansion (measured at 20° C.) of less than or equal to 6·10−6K−1.
In particular, the rest may be formed by coating at least a partial region of the tool by means of a thermal spraying method, in particular by cold gas spraying.
Alternatively, the rest may be formed as a plate, the tool having a depression receiving the rest formed as a plate. In this case, the depression has a channel in the wall or on the bottom of the depression leading to outside the tool, in order that no air or gas is trapped in the depression when the sintering operation is being carried out and a pressure equalization can take place between the depression and the atmosphere surrounding the die tools.
In order to ensure an effective heat transfer with the electronic subassembly to be sintered, the plates serving as a rest should be designed to be as thin as possible.
The surface of the plates serving as a rest may preferably be coated with the material. Alternatively, however, the plate is formed solidly from the material.
The material used is preferably molybdenum or an alloy comprising molybdenum. Other substances with a likewise low coefficient of expansion, for example the material known by the trade name Kovar, are likewise conceivable.
Furthermore, for carrying out batch processing, it is preferably provided that the tool has a plurality of rests, each for receiving an electronic subassembly to be sintered.
Finally, a sintering device in which the lower die as a whole is formed as the tool described above is also provided according to the invention.
The invention is explained in more detail on the basis of an exemplary embodiment that is represented in the appended figures. In these figures:
In all of the embodiments illustrated, if the tool 10 is at the same time the die of a sintering device, it preferably comprises a heating element (not shown).
While the present disclosure has been illustrated and described with respect to a particular embodiment thereof, it should be appreciated by those of ordinary skill in the art that various modifications to this disclosure may be made without departing from the spirit and scope of the present disclosure.
Number | Date | Country | Kind |
---|---|---|---|
10 2014 114 096 | Sep 2014 | DE | national |
Filing Document | Filing Date | Country | Kind |
---|---|---|---|
PCT/EP2015/070621 | 9/9/2015 | WO | 00 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO2016/050467 | 4/7/2016 | WO | A |
Number | Name | Date | Kind |
---|---|---|---|
2900287 | Bestler | Aug 1959 | A |
2922092 | Gazzara | Jan 1960 | A |
2945688 | Pajenkamp et al. | Jul 1960 | A |
3112388 | Wiant | Nov 1963 | A |
3480842 | Scharli | Nov 1969 | A |
3501288 | Krainer et al. | Mar 1970 | A |
3529759 | Clark | Sep 1970 | A |
3896541 | Golinski | Jul 1975 | A |
4202690 | Funke | May 1980 | A |
4252263 | Houston | Feb 1981 | A |
4257156 | Houston | Mar 1981 | A |
4340902 | Honda | Jul 1982 | A |
4348339 | Assmann | Sep 1982 | A |
4392153 | Glascock, II | Jul 1983 | A |
4591537 | Aldinger | May 1986 | A |
4800421 | Davis | Jan 1989 | A |
4903885 | Schwarzbauer | Feb 1990 | A |
4903886 | Schwarzbauer | Feb 1990 | A |
5099310 | Osada | Mar 1992 | A |
5213248 | Horton | May 1993 | A |
5247425 | Takahasi | Sep 1993 | A |
5352629 | Paik et al. | Oct 1994 | A |
5396403 | Patel | Mar 1995 | A |
5653376 | Nakamura | Aug 1997 | A |
6003757 | Beaumont | Dec 1999 | A |
6108205 | Bergstedt | Aug 2000 | A |
6161748 | Katayama et al. | Dec 2000 | A |
6199748 | Zhu | Mar 2001 | B1 |
6390439 | Cordes | May 2002 | B1 |
6435401 | Miitsu et al. | Aug 2002 | B1 |
6821381 | Yamauchi | Nov 2004 | B1 |
8822036 | Wereszczak | Sep 2014 | B1 |
20010005053 | Kitae et al. | Jun 2001 | A1 |
20030027371 | Sunagawa et al. | Feb 2003 | A1 |
20040063251 | Ootsuka | Apr 2004 | A1 |
20040157362 | Beroz | Aug 2004 | A1 |
20060186423 | Blonder | Aug 2006 | A1 |
20060210705 | Itoh et al. | Sep 2006 | A1 |
20060214291 | Sasaki | Sep 2006 | A1 |
20060266792 | Ko | Nov 2006 | A1 |
20070131353 | Gobl | Jun 2007 | A1 |
20080073776 | Suh et al. | Mar 2008 | A1 |
20080156398 | Yasuda et al. | Jul 2008 | A1 |
20090032570 | Matsumura | Feb 2009 | A1 |
20090039507 | Funaki | Feb 2009 | A1 |
20090283575 | Budd | Nov 2009 | A1 |
20090302485 | Fan | Dec 2009 | A1 |
20090325116 | Matsuura et al. | Dec 2009 | A1 |
20100051319 | Schmitt et al. | Mar 2010 | A1 |
20100055828 | Schmitt et al. | Mar 2010 | A1 |
20100093131 | Maeda | Apr 2010 | A1 |
20100224674 | Liu | Sep 2010 | A1 |
20110114708 | Maeda et al. | May 2011 | A1 |
20110259876 | Breznak | Oct 2011 | A1 |
20110290863 | Kajiwara et al. | Dec 2011 | A1 |
20120037688 | Kock et al. | Feb 2012 | A1 |
20120052402 | Turek et al. | Mar 2012 | A1 |
20120153011 | Schäfer et al. | Jun 2012 | A1 |
20120247664 | Kobayashi | Oct 2012 | A1 |
20130092310 | Ishigami et al. | Apr 2013 | A1 |
20130250538 | Le et al. | Sep 2013 | A1 |
20130271248 | Nagata et al. | Oct 2013 | A1 |
20150037197 | Komatsu | Feb 2015 | A1 |
20150077895 | Jindo | Mar 2015 | A1 |
20150090768 | Kuroda et al. | Apr 2015 | A1 |
20160059361 | Schäfer et al. | Mar 2016 | A1 |
20160190046 | Fontana | Jun 2016 | A1 |
20170141074 | Schäfer et al. | May 2017 | A1 |
20170216920 | Osterwald et al. | Aug 2017 | A1 |
20170229418 | Osterwald et al. | Aug 2017 | A1 |
20170229424 | Eisele et al. | Aug 2017 | A1 |
20170326640 | Schmitt et al. | Nov 2017 | A1 |
20180236672 | Scotchmer | Aug 2018 | A1 |
Number | Date | Country |
---|---|---|
1462067 | Dec 2003 | CN |
1823409 | Aug 2006 | CN |
101111932 | Jan 2008 | CN |
101371346 | Feb 2009 | CN |
101490831 | Jul 2009 | CN |
102709203 | Oct 2012 | CN |
103081088 | May 2013 | CN |
102569110 | Jun 2014 | CN |
102007047698 | Apr 2008 | DE |
10 2008 009 510 | Jul 2009 | DE |
102008048869 | Apr 2010 | DE |
10 2010 020 696 | Nov 2011 | DE |
10 2010 020 696 | Nov 2012 | DE |
10 2013 003 527 | Sep 2014 | DE |
2 278 032 | Jan 2011 | EP |
496763 | Dec 1938 | GB |
558382 | Jan 1944 | GB |
1459475 | Dec 1976 | GB |
S53118202 | Oct 1978 | JP |
-01005026 | Jan 1989 | JP |
2003-347360 | Dec 2003 | JP |
2004-296746 | Oct 2004 | JP |
2006-352080 | Dec 2006 | JP |
2012-0090202 | Aug 2012 | KR |
2008125726 | Oct 2008 | WO |
2014003107 | Jan 2014 | WO |
2014129626 | Aug 2014 | WO |
2014135151 | Sep 2014 | WO |
Entry |
---|
C-THERM Technologies “Summary of Coefficient of Linear Expansion (CTE) of Metals” (2020). |
International Search Report for Serial No. PCT/EP2015/070617 dated Dec. 21, 2015. |
International Search Report for Serial No. PCT/EP2015/070625 dated Dec. 21, 2015. |
International Search Report for Serial No. PCT/EP2015/071613 dated Feb. 26, 2016. |
“Die Niedertemperatur-Verbindungstechnik der Leistungselektronik” by Christian Mertens (Jan. 1, 2004), Book series: Fortschritt-Berichte VD1, Reihe 21, Elektrotechnik, No. 365, VDI Verlag, Düsseldorf, Germany, pp. 1-35, 72-101, 116-141; and English translation of pertinent parts thereof. |
“Reduction of Thermomechanical Stress by Applying a Low Temperature Joining Technique” by S. Klaka et al, Proceedings of the International Symposium on Power Semiconductor Devices (May 31-Jun. 2, 1994), Davos, Switzerland, pp. 259-264. |
International Search Report for PCT Serial No. PCT/EP2015/070621 dated Dec. 15, 2015. |
Number | Date | Country | |
---|---|---|---|
20170221852 A1 | Aug 2017 | US |