Sintering tool for the lower die of a sintering device

Information

  • Patent Grant
  • 10818633
  • Patent Number
    10,818,633
  • Date Filed
    Wednesday, September 9, 2015
    8 years ago
  • Date Issued
    Tuesday, October 27, 2020
    3 years ago
Abstract
Tool (10) for the lower die of a sintering device, the tool (10) having a rest (20) for an electronic subassembly (30) comprising a circuit carrier, to be sintered, where the rest (20) is formed from a material with a coefficient of linear expansion that is close to the coefficient of expansion of the circuit carrier of the electronic subassembly (30).
Description
CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a National Stage application of International Patent Application No. PCT/EP2015/070621, filed on Sep. 9, 2015, which claims priority to German Patent Application No. 102014114096.6, filed on Sep. 29, 2014, each of which is hereby incorporated by reference in its entirety.


TECHNICAL FIELD

The invention relates to a tool for the lower die of a sintering device, the tool having a rest for an electronic subassembly to be sintered.


BACKGROUND

Sintering devices for carrying out the low-temperature pressure sintering of electronic subassemblies are already known. These have, for example, a sintering chamber which can be filled with a gas that is particularly conducive to the sintering operation or a corresponding gas mixture, and have an upper die and a lower die arranged in the sintering chamber, it being possible for the upper die and the lower die to be moved towards one another and preferably to have in each case a heating device of their own.


The lower die and/or the upper die often have to be specially shaped for carrying out specific processes or for adaptation to the products to be sintered, and so tools that can be fastened to the lower die or the upper die and allow easy modification of the device as a whole are usually provided.


For example, a sintering device for sintering an electronic subassembly comprising a circuit carrier is formed in such a way that a lower die is provided with a massive tool which carries and heats the planar circuit carrier. A temperature-resistant elastic medium of the upper die tool, in the form of a pressure pad, produces an increasing pressure on the surface of the circuit carrier, whereby the latter is pressed onto the planar support of the lower die tool. The flexible medium of the pressure pad provides a quasi-hydrostatic pressure not only on the components to be joined of the electronic subassembly but also on all of the surfaces of the lower die tool. A massive lower tool therefore forms a counter bearing in the quasi-hydrostatic sintering process, onto which the circuit carrier is pressed with compressive engagement by the elastic medium. The thermal energy is also supplied to the circuit carrier by way of this metallic compressive engagement.


However, a disadvantage of this design is that, at the temperature prevailing during the sintering operation of up to 350° C., stress cracks occur in ceramic materials which form part of the electronic subassembly, on account of the different coefficients of expansion of the ceramic material of the electronic subassembly and the lower die, which may, for example, comprise high-grade steel.


SUMMARY

The object of the invention is therefore to provide a tool for a sintering device with which cracks and fractures of the ceramic material that occur during the sintering operation are avoided.


This object is achieved according to the invention by the tool for a sintering device comprising a tool for the lower die of a sintering device, the tool having a rest for an electronic subassembly comprising a circuit carrier, to be sintered, where the rest is formed from a material with a coefficient of linear expansion that is close to the coefficient of expansion of the circuit carrier of the electronic subassembly. The subclaims provide advantageous designs of the invention.


The basic concept of the invention is to provide a rest for the electronic subassembly, which rest has a low coefficient of linear expansion, and one that is similar to that of the electronic subassembly as a whole or the circuit carrier thereof. Such a coefficient of linear expansion may be approximately 11·10−6K−1. This results in no displacements, or only very minor displacements, between the electronic subassembly and the rest during temperature changes.


Since such low-expansion materials, that is to say materials having a low coefficient of thermal expansion, such as molybdenum or Kovar, are very cost-intensive to procure and are very difficult to machine, on account of the properties of the material, recourse is made to the designs claimed, which makes easy and work-friendly production of the tool possible.


According to the invention, therefore, a tool for the lower die of a sintering device is provided, the tool having or forming a rest for an electronic component to be sintered and the rest being formed from a material with a coefficient of linear expansion (measured at 20° C.) of less than or equal to 11·10−6K−1.


The material preferably has a coefficient of linear expansion (measured at 20° C.) of less than or equal to 6·10−6K−1.


In particular, the rest may be formed by coating at least a partial region of the tool by means of a thermal spraying method, in particular by cold gas spraying.


Alternatively, the rest may be formed as a plate, the tool having a depression receiving the rest formed as a plate. In this case, the depression has a channel in the wall or on the bottom of the depression leading to outside the tool, in order that no air or gas is trapped in the depression when the sintering operation is being carried out and a pressure equalization can take place between the depression and the atmosphere surrounding the die tools.


In order to ensure an effective heat transfer with the electronic subassembly to be sintered, the plates serving as a rest should be designed to be as thin as possible.


The surface of the plates serving as a rest may preferably be coated with the material. Alternatively, however, the plate is formed solidly from the material.


The material used is preferably molybdenum or an alloy comprising molybdenum. Other substances with a likewise low coefficient of expansion, for example the material known by the trade name Kovar, are likewise conceivable.


Furthermore, for carrying out batch processing, it is preferably provided that the tool has a plurality of rests, each for receiving an electronic subassembly to be sintered.


Finally, a sintering device in which the lower die as a whole is formed as the tool described above is also provided according to the invention.





BRIEF DESCRIPTION OF THE DRAWINGS

The invention is explained in more detail on the basis of an exemplary embodiment that is represented in the appended figures. In these figures:



FIG. 1 shows a sectional view through a first exemplary embodiment according to the invention of a particularly preferable design.



FIG. 2 shows a sectional view through a second exemplary embodiment according to the invention of a particularly preferable design.



FIG. 3 shows a perspective view of a third exemplary embodiment according to the invention of a particularly preferable design.





DETAILED DESCRIPTION


FIG. 1 shows a tool 10, which has a depression, in which a rest 20 formed as a plate and an electronic subassembly 30 to be sintered arranged thereupon are represented. The depression in the tool 10 is designed such that the rest 20 and the subassembly 30 are received completely by the depression and the surface of the subassembly 30 finishes flush with the surface of the tool 10. It may be provided in this case that the rest 20 is stocked in various thicknesses, in order to compensate for differing heights of the subassembly 30.



FIG. 2 shows a tool 10, which has a depression, in which a partial coating 20a formed as a layer at the bottom of the depression and an electronic subassembly 30 to be sintered arranged thereupon are represented. The depression in the tool 10 is designed such that the partial coating 20a and the subassembly 30 are received completely by the depression and the surface of the subassembly 30 finishes flush with the surface of the tool 10. It may be provided in this case that the partial coating 20a is varied in thickness, in order to compensate for differing heights of the subassembly 30.



FIG. 3 shows a tool 10, which has a number of depressions, in which a plurality of rests 20 formed either as a plate or a layer at the bottom of the depression. The depressions in the tool 10 are designed such that there are channels leading to the periphery of the tool 10.


In all of the embodiments illustrated, if the tool 10 is at the same time the die of a sintering device, it preferably comprises a heating element (not shown).


While the present disclosure has been illustrated and described with respect to a particular embodiment thereof, it should be appreciated by those of ordinary skill in the art that various modifications to this disclosure may be made without departing from the spirit and scope of the present disclosure.

Claims
  • 1. A lower die of a sintering device, the lower die comprising a tool, the tool having a rest for an electronic subassembly comprising a circuit carrier, to be sintered, where the rest is formed from a material with a coefficient of linear expansion measured at 20° C. of less than or equal to 15·10−6K−1, wherein the tool has a depression and the rest is located within the depression, wherein the rest is configured to receive the electronic subassembly to be sintered thereupon, wherein the rest is not a component of the electronic subassembly to be sintered, and wherein a top surface of the rest is located below a top surface of the tool.
  • 2. The lower die according to claim 1, wherein the rest is formed from a material with a coefficient of linear expansion measured at 20° C. of less than or equal to 11·10−6K−1.
  • 3. The lower die according to claim 1, wherein the rest is formed by coating at least a partial region of the tool.
  • 4. The lower die according to claim 1, wherein the rest is formed as a plate.
  • 5. The lower die according to claim 4, wherein a surface of the plate serving as a rest is coated with the material.
  • 6. The lower die according to claim 4, wherein the plate is formed solidly from the material.
  • 7. The lower die according to claim 1, wherein the depression has a channel in the wall or on the bottom of the depression leading to outside the tool.
  • 8. The lower die according to claim 1, wherein the material is molybdenum or an alloy comprising molybdenum.
  • 9. The lower die according to claim 1, wherein the tool comprises a plurality of rests.
  • 10. A sintering device comprising the lower die according to claim 1.
  • 11. The lower die according to claim 2, wherein the material is molybdenum or an alloy comprising molybdenum.
  • 12. The lower die according to claim 3, wherein the material is molybdenum or an alloy comprising molybdenum.
  • 13. The lower die according to claim 4, wherein the material is molybdenum or an alloy comprising molybdenum.
  • 14. The lower die according to claim 5, wherein the material is molybdenum or an alloy comprising molybdenum.
  • 15. The lower die according to claim 6, wherein the material is molybdenum or an alloy comprising molybdenum.
  • 16. The lower die according to claim 7, wherein the material is molybdenum or an alloy comprising molybdenum.
  • 17. The lower die according to claim 1, wherein the rest of the tool has a surface configured to removably receive the electronic subassembly.
  • 18. The lower die according to claim 1, wherein the tool comprises a plurality of depressions and a plurality of rests, each of the plurality of rests located within one of the plurality of depressions.
Priority Claims (1)
Number Date Country Kind
10 2014 114 096 Sep 2014 DE national
PCT Information
Filing Document Filing Date Country Kind
PCT/EP2015/070621 9/9/2015 WO 00
Publishing Document Publishing Date Country Kind
WO2016/050467 4/7/2016 WO A
US Referenced Citations (73)
Number Name Date Kind
2900287 Bestler Aug 1959 A
2922092 Gazzara Jan 1960 A
2945688 Pajenkamp et al. Jul 1960 A
3112388 Wiant Nov 1963 A
3480842 Scharli Nov 1969 A
3501288 Krainer et al. Mar 1970 A
3529759 Clark Sep 1970 A
3896541 Golinski Jul 1975 A
4202690 Funke May 1980 A
4252263 Houston Feb 1981 A
4257156 Houston Mar 1981 A
4340902 Honda Jul 1982 A
4348339 Assmann Sep 1982 A
4392153 Glascock, II Jul 1983 A
4591537 Aldinger May 1986 A
4800421 Davis Jan 1989 A
4903885 Schwarzbauer Feb 1990 A
4903886 Schwarzbauer Feb 1990 A
5099310 Osada Mar 1992 A
5213248 Horton May 1993 A
5247425 Takahasi Sep 1993 A
5352629 Paik et al. Oct 1994 A
5396403 Patel Mar 1995 A
5653376 Nakamura Aug 1997 A
6003757 Beaumont Dec 1999 A
6108205 Bergstedt Aug 2000 A
6161748 Katayama et al. Dec 2000 A
6199748 Zhu Mar 2001 B1
6390439 Cordes May 2002 B1
6435401 Miitsu et al. Aug 2002 B1
6821381 Yamauchi Nov 2004 B1
8822036 Wereszczak Sep 2014 B1
20010005053 Kitae et al. Jun 2001 A1
20030027371 Sunagawa et al. Feb 2003 A1
20040063251 Ootsuka Apr 2004 A1
20040157362 Beroz Aug 2004 A1
20060186423 Blonder Aug 2006 A1
20060210705 Itoh et al. Sep 2006 A1
20060214291 Sasaki Sep 2006 A1
20060266792 Ko Nov 2006 A1
20070131353 Gobl Jun 2007 A1
20080073776 Suh et al. Mar 2008 A1
20080156398 Yasuda et al. Jul 2008 A1
20090032570 Matsumura Feb 2009 A1
20090039507 Funaki Feb 2009 A1
20090283575 Budd Nov 2009 A1
20090302485 Fan Dec 2009 A1
20090325116 Matsuura et al. Dec 2009 A1
20100051319 Schmitt et al. Mar 2010 A1
20100055828 Schmitt et al. Mar 2010 A1
20100093131 Maeda Apr 2010 A1
20100224674 Liu Sep 2010 A1
20110114708 Maeda et al. May 2011 A1
20110259876 Breznak Oct 2011 A1
20110290863 Kajiwara et al. Dec 2011 A1
20120037688 Kock et al. Feb 2012 A1
20120052402 Turek et al. Mar 2012 A1
20120153011 Schäfer et al. Jun 2012 A1
20120247664 Kobayashi Oct 2012 A1
20130092310 Ishigami et al. Apr 2013 A1
20130250538 Le et al. Sep 2013 A1
20130271248 Nagata et al. Oct 2013 A1
20150037197 Komatsu Feb 2015 A1
20150077895 Jindo Mar 2015 A1
20150090768 Kuroda et al. Apr 2015 A1
20160059361 Schäfer et al. Mar 2016 A1
20160190046 Fontana Jun 2016 A1
20170141074 Schäfer et al. May 2017 A1
20170216920 Osterwald et al. Aug 2017 A1
20170229418 Osterwald et al. Aug 2017 A1
20170229424 Eisele et al. Aug 2017 A1
20170326640 Schmitt et al. Nov 2017 A1
20180236672 Scotchmer Aug 2018 A1
Foreign Referenced Citations (28)
Number Date Country
1462067 Dec 2003 CN
1823409 Aug 2006 CN
101111932 Jan 2008 CN
101371346 Feb 2009 CN
101490831 Jul 2009 CN
102709203 Oct 2012 CN
103081088 May 2013 CN
102569110 Jun 2014 CN
102007047698 Apr 2008 DE
10 2008 009 510 Jul 2009 DE
102008048869 Apr 2010 DE
10 2010 020 696 Nov 2011 DE
10 2010 020 696 Nov 2012 DE
10 2013 003 527 Sep 2014 DE
2 278 032 Jan 2011 EP
496763 Dec 1938 GB
558382 Jan 1944 GB
1459475 Dec 1976 GB
S53118202 Oct 1978 JP
-01005026 Jan 1989 JP
2003-347360 Dec 2003 JP
2004-296746 Oct 2004 JP
2006-352080 Dec 2006 JP
2012-0090202 Aug 2012 KR
2008125726 Oct 2008 WO
2014003107 Jan 2014 WO
2014129626 Aug 2014 WO
2014135151 Sep 2014 WO
Non-Patent Literature Citations (7)
Entry
C-THERM Technologies “Summary of Coefficient of Linear Expansion (CTE) of Metals” (2020).
International Search Report for Serial No. PCT/EP2015/070617 dated Dec. 21, 2015.
International Search Report for Serial No. PCT/EP2015/070625 dated Dec. 21, 2015.
International Search Report for Serial No. PCT/EP2015/071613 dated Feb. 26, 2016.
“Die Niedertemperatur-Verbindungstechnik der Leistungselektronik” by Christian Mertens (Jan. 1, 2004), Book series: Fortschritt-Berichte VD1, Reihe 21, Elektrotechnik, No. 365, VDI Verlag, Düsseldorf, Germany, pp. 1-35, 72-101, 116-141; and English translation of pertinent parts thereof.
“Reduction of Thermomechanical Stress by Applying a Low Temperature Joining Technique” by S. Klaka et al, Proceedings of the International Symposium on Power Semiconductor Devices (May 31-Jun. 2, 1994), Davos, Switzerland, pp. 259-264.
International Search Report for PCT Serial No. PCT/EP2015/070621 dated Dec. 15, 2015.
Related Publications (1)
Number Date Country
20170221852 A1 Aug 2017 US