Number | Name | Date | Kind |
---|---|---|---|
4285762 | Moustakas | Aug 1981 | |
4363828 | Brodsky et al. | Dec 1982 | |
4540647 | Borsenberger | Sep 1985 | |
4624737 | Shimbo | Nov 1986 |
Number | Date | Country |
---|---|---|
53-45974 | Apr 1978 | JPX |
53-72473 | Jun 1978 | JPX |
55-146934 | Nov 1980 | JPX |
Entry |
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H. F. Bare et al., "Etching Patterns in Amorphous Silicon", J. Vac. Sci. Technol. A4 (2), Mar./Apr. 1986, pp. 239-241. |
T. L. Chu et al., "Chemical Etching for the Evaluation of Hydrogenated Amorphous Silicon Films", Appl. Phys. Lett. 48(26), 6/30/86, pp. 1783-1784. |