Number | Name | Date | Kind |
---|---|---|---|
RE35416 | Suzuki et al. | Dec 1996 | |
5274482 | Morita et al. | Dec 1993 | |
5409566 | Kim | Apr 1995 | |
5431773 | Ikeda et al. | Jul 1995 | |
5447887 | Filipiak et al. | Sep 1995 | |
5496608 | Matsuda et al. | Mar 1996 | |
5612254 | Mu et al. | Mar 1997 | |
5663608 | Jones et al. | Sep 1997 | |
5674787 | Zhao et al. | Oct 1997 | |
5700737 | Yu et al. | Dec 1997 | |
5739579 | Chiang et al. | Apr 1998 | |
5814238 | Ashby et al. | Sep 1998 | |
5818549 | Maruyama et al. | Oct 1998 | |
5914758 | Kishida et al. | Jun 1999 |
Entry |
---|
Seki, Shunji, Takashi Unagami and Bunjiri Tsujiyama, "Reactive Ion Etching Of Tantalum Pentoxide", Journal of the Electrochemical Society, Dec. 1983, pp. 2505-2506. |