Number | Name | Date | Kind |
---|---|---|---|
3414434 | Manasevit | Dec 1968 | |
3484311 | Benzing | Dec 1969 | |
3508962 | Manasevit et al. | Apr 1970 | |
3564358 | Hahnlein | Feb 1971 | |
3990914 | Weinstein | Nov 1976 | |
4012263 | Shell | Mar 1977 | |
4060423 | Thomas | Nov 1977 |
Entry |
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Tung, Deposition & Physical Properties of Aluminosilicate Films, _J. Electrochem. Soc., Solid State Science, vol. 117, No. 1 (Pp. 91-94)(1-1970). |