Claims
- 1. A method of forming microscopic dots of the order of nanometers having quantum effects, said method comprising the steps of:
(a) arraying a masking quantum dots formed from a plurality of metal atom aggregates contained in metalloprotein complex in two-dimensional configuration on a surface of a substrate having an insulation layer with a pitch of the size of said metalloprotein complex; (b) forming column shaped structures on the surface of said substrate by plasma etching via said masking quantum dots; and (c) insulating a space between said column shaped structures.
Priority Claims (1)
Number |
Date |
Country |
Kind |
P 09-157436 |
May 1997 |
JP |
|
Parent Case Info
[0001] This application is a Divisional of Ser. No. 09/577,138, filed on May 24, 2000 which is a Divisional of Ser. No. 09/228,276, filed Jan. 11, 1999, which is a Divisional of Ser. No. 09/086,672, filed May 29, 1998.
Divisions (3)
|
Number |
Date |
Country |
Parent |
09577138 |
May 2000 |
US |
Child |
09956823 |
Sep 2001 |
US |
Parent |
09228276 |
Jan 1999 |
US |
Child |
09577138 |
May 2000 |
US |
Parent |
09086672 |
May 1998 |
US |
Child |
09228276 |
Jan 1999 |
US |