Claims
- 1. Vacuum processing apparatus comprising:
a vacuum chamber having a side wall member and a top member for separating the vacuum chamber from atmospheric condition, so as to provide a vacuum condition therein, an inner unit inside said side wall member, and a hinge unit for pivotally connecting an upper edge of said side wall member and one end of said top member; and a water stand on which a wafer is mounted in said vacuum chamber, said top member being rotated about a shaft of said hinge so that all upper portions of said wall are seen from a top view, whereby said inner unit can be lifted off upwardly.
Priority Claims (1)
Number |
Date |
Country |
Kind |
11-307997 |
Oct 1999 |
JP |
|
Parent Case Info
[0001] This application is a Divisional application of application Ser. No. 09/697,324, filed Oct. 27, 2000.
Divisions (1)
|
Number |
Date |
Country |
Parent |
09697324 |
Oct 2000 |
US |
Child |
10086708 |
Mar 2002 |
US |