The present invention relates generally to the field of integrated circuit fabrication, and more particularly to a wafer level overmold for three dimensional surfaces.
An integrated circuit is a set of electronic circuits on one small plate (“chip”) of semiconductor material. System on a chip (SOC) is an integrated circuit that integrates all components of a computer or other electronic system into a single chip. Multi-chip module (MCM) is a specialized electronic package where multiple integrated circuits, semiconductor dies or other discrete components are packaged onto a unifying substrate, facilitating their use as a single component (as though a larger integrated circuit). System in package (SIP) is a number of integrated circuits enclosed in a single module (package). The SIP can perform all or most of the functions of an electronic system. System-on-Package (SOP) is a microelectronic technology that places an entire system on a single chip-size package. SOP saves interconnection time and heat generation by keeping a full system with computing, communications, and/or consumer functions all in a single chip.
Flexible electronics is a technology for assembling electronic circuits by mounting electronic devices on flexible plastic substrates, such as polymide, polyether ether ketone (PEEK), or transparent conductive polyester film. Flexible electronic assemblies may be manufactured using components used for rigid printed circuit boards, allowing the board to conform to a desired shape, or to flex during use.
Embodiments of the invention include a method for shaping a flexible integrated circuit to a curvature and the resulting structure. The method may include providing a flexible circuit. The method may also include depositing an epoxy resin and amine composition on the flexible integrated circuit. The method may also include B-staging the deposited epoxy resin and amine composition. The method may also include placing the flexible integrated circuit within a mold of a curvature. The method may also include curing the B-staged epoxy resin and amine composition subsequent to placing the flexible integrated circuit within the mold of the curvature.
Embodiments of the present invention recognize that bonding a flexible integrated circuit to a curved surface is a difficult process because the integrated circuit is flexible and hard to work with. Embodiments of the present invention recognize that bonding a rigid structure integrated circuit, pre-shaped to a desired curvature, to a curved surface may be easier to work with than a flexible integrated circuit. Embodiments of the present invention describe structures and methods for creating a rigid integrated circuit curved to a desired curvature.
Detailed embodiments of the claimed structures and methods are disclosed herein; however, it is to be understood that the disclosed embodiments are merely illustrative of the claimed structures and methods that may be embodied in various forms. In addition, each of the examples given in connection with the various embodiments are intended to be illustrative, and not restrictive. Further, the figures are not necessarily to scale, some features may be exaggerated to show details of particular components. Therefore, specific structural and functional details disclosed herein are not to be interpreted as limiting, but merely as a representative basis for teaching one skilled in the art to variously employ the methods and structures of the present disclosure.
References in the specification to “one embodiment,” “an embodiment,” “an example embodiment,” etc., indicate that the embodiment described may include a particular feature, structure, or characteristic. Moreover, such phrases are not necessarily referring to the same embodiment. Further, when a particular feature, structure, or characteristic is described in connection with an embodiment, it is submitted that it is within the knowledge of one skilled in the art to affect such feature, structure, or characteristic in connection with other embodiments whether or not explicitly described.
For purposes of the description hereinafter, the terms “upper,” “lower,” “right,” “left,” “vertical,” “horizontal,” “top,” “bottom,” and derivatives thereof shall relate to the disclosed structures and methods, as oriented in the drawing Figures. The terms “overlaying,” “atop,” “positioned on,” or “positioned atop” mean that a first element, such as a first structure, is present on a second element, such as a second structure, wherein intervening elements, such as an interface structure may be present between the first element and the second element. The term “direct contact” means that a first element, such as a first structure, and a second element, such as a second structure, are connected without any intermediary conducting, insulating or semiconductor layers at the interface of the two elements.
The present invention will now be described in detail with reference to the Figures.
In embodiments of the present invention, substrate 104 is bonded to temporary carrier 102 via a temporary adhesive. The temporary adhesive may be, for example, an ultraviolet (UV) curable adhesive with an acrylic base resin, or a non-photodefinable polymide precursor designed for use as a temporary adhesive. For example, the temporary adhesive may be HD-3007, as produced by HD MicroSystems™, or a temporary adhesive produced by 3M™, such as 3M™ UV-Curable Adhesive LC-3200, 3M™ UV-Curable Adhesive LC-4200, 3M™ UV-Curable Adhesive LC-5200, or another type of temporary adhesive. In general, any adhesive may be used, provided that the adhesive provides a rigid, uniform support surface that minimizes stress on substrate 104 during subsequent processing steps, resulting in minimal warpage, cracking, and edge chipping. The temporary adhesive may release substrate 104 via a laser (e.g., at higher temperatures) or UV (e.g., at lower temperatures) debonding process.
In some embodiments, substrate 104 is modified based on the desired application of the resulting package. For example, solder bumps, wiring layers, wire bonding pads, metal foil, dielectrics, and/or bondwires may be affixed to substrate 104 to be used as the conductive element. In some embodiments, active components may be added, such as transistors and tunnel diodes. In some embodiments, passive components may be added, such as resistors, capacitors, inductors, and transformers.
Depending upon the integrated circuit application and the curvature desired, mold material 110 may be selected in order to provide the desired level of rigidity or flexibility. In some embodiments, a high molecular weight epoxy with a high temperature curing agent and solvent may be used. In such an embodiment, evaporation of the solvent leads to a B-staged resin (see
In some embodiments, a poly aliphatic amine may be used to create a high molecular weight amine adduct. Example poly aliphatic amines include diethylenetriamine, triethylenetetramine, and triethylenepentamine.
In embodiments of the present invention, the type of solvent used in the epoxy depends upon the preferred B-stage temperature for the specific semiconductor package. For example, a solvent may be desired that will result in the evaporation of most of the solvent at the B-stage temperature of mold material 110. Example solvents that may be selected for inclusion within mold material 110 may include, but are not limited to, acetone (evaporates at about 56° C.), methyl ethyl ketone (MEK) (evaporates at about 80° C.), cyclopentanone (evaporates at about 131° C.), and propylene glycol monomethyl ether acetate (PGMEA) (evaporates at about 146° C.).
In some embodiments, inorganic fillers and/or toughners may be added to mold material 110, depending on the desired elastic modulus and the desired coefficient of thermal expansion (CTE). Elastic modulus refers to a substance's tendency to be deformed elastically (i.e., non-permanently) when a force is applied to it. CTE describes how the size of an object changes with a change in temperature. Specifically, it measures the fractional change in size per degree change in temperature at a constant pressure. Fillers may include, for example, silicon dioxide (silica), aluminum oxide (alumina), and boron nitride. Silica may be used to lower CTE, increase elastic modulus, and is non-thermally conductive. Alumina may be used to lower CTE, increase elastic modulus, and is more thermally conductive than silica. Boron nitride may be used to lower CTE, increase modulus, and is more thermally conductive than silica. In some embodiments, fillers are added to the compound in the range of 0 to 75 percentage by weight (wt %). In embodiments for a more rigid application, mold material 110 may include fillers from 50 to 75 wt %. For a more flexible type of application, one would use a high molecular weight epoxy and very little inorganic filler. In some embodiments, other types of particles, such as fibers and rubber particles, may be added to increase toughness. In embodiments that include toughners, toughners will typically comprise one to three percentage by weight of mold material 110. In some embodiments, coupling agents are added to mold material 110 to improve bonding properties and filler resin coupling. Coupling agents may be, for example, an amine or epoxy silane compound. In embodiments that include coupling agents, the coupling agents will typically comprise less than one percent by weight of mold material 110. The particular couple agent used may depend on the filler and surfaces for bonding in the particular application. In some embodiments, a silane amine, silane epoxy, or silane anhydride is used to bond to an oxide surface.
In some embodiments, a dye or other material may be added to mold material 110. For example, carbon black may be added to provide additional structural benefit, as well as to enhance the aesthetic appearance of mold material 110.
In one particular example, if the temporary adhesive used is HD-3007, as produced by HD MicroSystems™, the integrated circuit device(s) may be released or detached via a laser-release, solvent-release, or thermal-release technique. A laser release may be accomplished by irradiation through a glass carrier, such as an embodiment of temporary carrier 102, with a laser. A single laser pulse may be sufficient to cause debonding. A solvent release may be accomplished through the use of a perforated carrier wafer, such as a perforated glass carrier. A thermal release may be accomplished at temperatures comparable to bonding temperature of HD-3007.
Upon placing the integrated circuit device(s) upon mold 116, the integrated circuit device(s) may be heated such that B-staged mold material 112 (or alternatively, molding film 114), is cured (see
The resulting structure is generally a curved integrated circuit. Based on the properties of the epoxy resin and amine composition, the structure may have varying degrees of flexibility or rigidity.
In step 210, a temporary carrier, such as temporary carrier 102 (see
In step 230, mold material, such as mold material 112 or molding film 114, is applied. In step 235, if necessary, the mold material is B-staged via the application of UV light or heat to the mold material. In step 240, the integrated circuit device(s) are detached from the temporary carrier. The integrated circuit device(s) may be detached from the temporary carrier via, for example, a laser or UV light.
In step 245, the integrated circuit device(s) are placed in a mold corresponding to the desired curvature for the resulting integrated circuit device(s). In one embodiment, the integrated circuit device(s) are held in place upon the mold through the use of a vacuum. In another embodiment, the integrated circuit device(s) are held in place upon the mold through the use of an upper and a lower mold. In step 250, the mold material is cured, such that it creates a more rigid structure, based upon the epoxy and amine composition. In some embodiments, the mold material us cured through additional heat applied via the mold or to the surrounding environment of the integrated circuit device(s). In step 255, as necessary, each integrated circuit device is singulated from the integrated circuit device(s) via, for example, a laser or water-cooled circular saw with diamond-tipped teeth.
The resulting integrated circuit chips can be distributed by the fabricator in raw wafer form (that is, as a single wafer that has multiple unpackaged chips), as a bare die, or in a packaged form. In the latter case the chip is mounted in a single chip package (such as a plastic carrier, with leads that are affixed to a motherboard or other higher level carrier) or in a multichip package (such as a ceramic carrier that has either or both surface interconnections or buried interconnections). In any case the chip is then integrated with other chips, discrete circuit elements, and/or other signal processing devices as part of either (a) an intermediate product, such as a motherboard, or (b) an end product. The end product can be any product that includes integrated circuit chips, ranging from toys and other low-end applications to advanced computer products having a display, a keyboard or other input device, and a central processor.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms “a,” “an,” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms “comprises” and/or “comprising,” when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
Having described embodiments of a wafer level overmold for three dimensional surfaces and a process of manufacturing a wafer level overmold for three dimensional surfaces (which are intended to be illustrative and not limiting), it is noted that modifications and variations may be made by persons skilled in the art in light of the above teachings. It is therefore to be understood that changes may be made in the particular embodiments disclosed which are within the scope of the invention as outlined by the appended claims.
Number | Name | Date | Kind |
---|---|---|---|
4432937 | Kuwayama et al. | Feb 1984 | A |
4460543 | Glaeser | Jul 1984 | A |
4994333 | Jose et al. | Feb 1991 | A |
5240793 | Glaeser | Aug 1993 | A |
5306580 | Mansfield, Jr. et al. | Apr 1994 | A |
5326652 | Lake | Jul 1994 | A |
5339024 | Kuo et al. | Aug 1994 | A |
5376480 | Shinoda et al. | Dec 1994 | A |
5451766 | Van Berkel | Sep 1995 | A |
5558957 | Datta et al. | Sep 1996 | A |
5591548 | Mao | Jan 1997 | A |
5827621 | Morishita et al. | Oct 1998 | A |
5897522 | Nitzan | Apr 1999 | A |
6379835 | Kucherovsky et al. | Apr 2002 | B1 |
6420071 | Lee et al. | Jul 2002 | B1 |
6482543 | Shelekhin et al. | Nov 2002 | B1 |
6540938 | Afzali-Arkadani et al. | Apr 2003 | B1 |
6982132 | Goldner et al. | Jan 2006 | B1 |
7087348 | Holman et al. | Aug 2006 | B2 |
7320845 | Zucker | Jan 2008 | B2 |
7348096 | Schubert et al. | Mar 2008 | B2 |
7435395 | Durkot et al. | Oct 2008 | B2 |
7446380 | Bojarczuk et al. | Nov 2008 | B2 |
7491464 | Merrill et al. | Feb 2009 | B2 |
7531271 | Boulton et al. | May 2009 | B2 |
7776468 | Richards et al. | Aug 2010 | B2 |
7820329 | Boulton et al. | Oct 2010 | B2 |
8029927 | Tucholski | Oct 2011 | B2 |
8268475 | Tucholski | Sep 2012 | B2 |
8441411 | Tucholski et al. | May 2013 | B2 |
8534831 | Tepedino, Jr. et al. | Sep 2013 | B2 |
8586244 | Fensore et al. | Nov 2013 | B2 |
8608310 | Otis et al. | Dec 2013 | B2 |
8637349 | Jenson et al. | Jan 2014 | B2 |
8877103 | Alvarez-Carrigan et al. | Nov 2014 | B2 |
8906088 | Pugh et al. | Dec 2014 | B2 |
20020105092 | Coyle | Aug 2002 | A1 |
20020161404 | Schmidt | Oct 2002 | A1 |
20030099884 | Chiang et al. | May 2003 | A1 |
20030165744 | Schubert et al. | Sep 2003 | A1 |
20050048699 | Matsunami | Mar 2005 | A1 |
20050079418 | Kelley et al. | Apr 2005 | A1 |
20050266158 | Pokorny et al. | Dec 2005 | A1 |
20080187824 | Tomantschger | Aug 2008 | A1 |
20090108440 | Meyer | Apr 2009 | A1 |
20100068617 | Bedjaoui et al. | Mar 2010 | A1 |
20100285372 | Lee et al. | Nov 2010 | A1 |
20100310932 | Martin et al. | Dec 2010 | A1 |
20110048781 | Neudecker et al. | Mar 2011 | A1 |
20110097623 | Marinis, Jr. et al. | Apr 2011 | A1 |
20110100458 | Kang et al. | May 2011 | A1 |
20110162972 | Furuya et al. | Jul 2011 | A1 |
20110163812 | Bansal et al. | Jul 2011 | A1 |
20110311857 | Tucholski | Dec 2011 | A1 |
20120140167 | Blum | Jun 2012 | A1 |
20120236254 | Pugh et al. | Sep 2012 | A1 |
20130035760 | Portney | Feb 2013 | A1 |
20130108907 | Bhardwaj et al. | May 2013 | A1 |
20130122132 | Pugh et al. | May 2013 | A1 |
20130174978 | Pugh et al. | Jul 2013 | A1 |
20130203895 | Dershem | Aug 2013 | A1 |
20130222759 | Pugh et al. | Aug 2013 | A1 |
20130230774 | Ortega et al. | Sep 2013 | A1 |
20130258277 | Pugh et al. | Oct 2013 | A1 |
20140000101 | Pugh et al. | Jan 2014 | A1 |
20140028969 | Pugh et al. | Jan 2014 | A1 |
20140085599 | Etzkorn | Mar 2014 | A1 |
20140107445 | Liu | Apr 2014 | A1 |
20140320800 | Collins et al. | Oct 2014 | A1 |
20140340631 | Pugh | Nov 2014 | A1 |
20140346695 | Pugh et al. | Nov 2014 | A1 |
20140349211 | Wei et al. | Nov 2014 | A1 |
20140354946 | Pugh et al. | Dec 2014 | A1 |
20150323811 | Flitsch et al. | Nov 2015 | A1 |
Number | Date | Country |
---|---|---|
2235773 | Oct 2010 | EP |
2501801 | Nov 2013 | GB |
2006274346 | Oct 2006 | JP |
2008091859 | Jul 2008 | WO |
2011113903 | Sep 2011 | WO |
2013062662 | May 2013 | WO |
Entry |
---|
Beeckman, J et al.; “Liquid-crystal photonic applications”; SPIEDigitalLibrary.org/oe; Optical Engineering; vol. 50(8); 081202; Aug. 2011; Copyright 2011 SPIE; <http://opticalengineering.spiedigitallibrary.org/on04/07/2014 Terms of Use: http://spiedl.org/terms>. |
Blue Spark Technologies, “UT Series Printed Batteries”, Product Information, UT Series Oct-12-2, Copyright 2012, website: <www.bluesparktechnologies.com>. |
Ding, Ke-Qiang; “Cyclic Voltmmetrically-prepared MnO2 Coated on a ITO Glass Substrate”; Journal of the Chinese Chemical Society; 2009; 56; pp. 171-181. |
Li, Xiaoping et al. ; “Composite of Indium and Polysorbate 20 as Inhibitor for Zinc Corrosion in Alkaline Solution”; Bull. Korean Chem. Soc.; 2012; vol. 33; No. 5.; <http://dx.doi.org/10.5012/bkcs.2012.33.5.1566>. |
Ren, Hongwen et al.; “Tunable electronic lens using a gradient polymer network liquid crystal” Received Oct. 15, 2002; accepted Nov. 12, 2002' Applied Physics Letters; vol. 82; No. 1; Jan. 6, 2003. |
U.S. Appl. No. 61/858,346, filed Jul. 25, 2013 entitled “Variable Focal Length Lens”. |
U.S. Appl. No. 61/976,595, filed Apr. 8, 2014 entitled “Thin Flexible Microsystem with Low-Profile Integrated Thin Film Battery”. |
U.S. Appl. No. 14/340,304, filed Jul. 24, 2014 entitled Cathode for Thin File Microbattery. |
U.S. Appl. No. 14/340,343, filed Jul. 24, 2014 entitled Homogeneous Solid Metallic Anode for Thin Film Microbattery. |
U.S. Appl. No. 14/340,253, filed Jul. 24, 2014 entitled Thin, Flexible Microsystem With Integrated Energy Source. |
U.S. Appl. No. 14/340,164, filed Jul. 24, 2014 entitled Variable Focal Length Lens. |
Badugu et al.; “A Glucose Sensing Contact Lens: A Non-Invasive Technique for Continuous Physiological Glucose Monitoring”; Journal of Fluorescence; vol. 13; No. 5; Sep. 2003; Copyright 2003; pp. 371-374. |
Liao et al.,; “A 3pW Wirelessly Powered CMOS Glucose Sensor for an Active Contact Lens”; 2011 IEEE International Solid-State Circuits Conference; 978-1-61284-302-5/11; copyright 2011 IEEE; pp. 38-41. |
Rolka et al.,; “Integration of a Capacitive EIS Sensor into a FIA System for pH and Penicillin Determination”; Sensors; ISSN 1424-8220; Copyright 2004 by MDPI; Sensors 2004, 4; pp. 84-94, website: <http://www.mdpi.net/sensors>. |
U.S. Appl. No. 14/460,637, filed Aug. 15, 2014 entitled “Metal-Oxide-Semiconductor Capacitor Based Sensor”. |
Appendix P List of IBM Patents or Patent Applications Treated as Related. |
Number | Date | Country | |
---|---|---|---|
20160049344 A1 | Feb 2016 | US |