Number | Date | Country | Kind |
---|---|---|---|
5-213239 | Aug 1993 | JPX | |
6-164349 | Jul 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4876223 | Yoda et al. | Oct 1989 | |
4926237 | Sun et al. | May 1990 | |
4960732 | Dixit et al. | Oct 1990 | |
5106781 | Penning De Vries | Apr 1992 | |
5231055 | Smith | Jul 1993 | |
5260232 | Muroyama et al. | Nov 1993 | |
5286675 | Chen et al. | Feb 1994 | |
5288665 | Nulman | Feb 1994 | |
5320979 | Hashimoto et al. | Jun 1994 |
Number | Date | Country |
---|---|---|
0199030 | Oct 1986 | EPX |
6423554 | Jan 1989 | JPX |
1125847 | May 1989 | JPX |
417357 | Jan 1992 | JPX |
Entry |
---|
Wolf, Stanley, PH.D., "Silicon Processing for the VLSI ERA", Process Integration, vol. 2, Lattice Press, pp. 245-252. 1990. |
Ono, Hisako, et al., "Development of a Planarized A1-Si Contact Filing Technology", VMIC Conference, Jun. 12-13, 1990, pp. 76-82. |
Drynan, J. M., et al., "A quarter-Micron Contact-Hole Definition Process Using Electron-Beam Lithography", Microelectronics Research Laboratories, NEC Corporation, pp. 38-39. Date unknown. |