Number | Date | Country | Kind |
---|---|---|---|
1-293490 | Nov 1989 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4381215 | Reynolds et al. | Apr 1983 | |
4482914 | Mano et al. | Nov 1984 |
Number | Date | Country |
---|---|---|
0166344 | Jan 1986 | EPX |
0289274 | Apr 1988 | EPX |
57-201171 | Dec 1982 | JPX |
59-188149 | Oct 1984 | JPX |
60-208845 | Oct 1985 | JPX |
61-194848 | Aug 1986 | JPX |
63-78554 | Apr 1988 | JPX |
63-292672 | Nov 1988 | JPX |
1-305531 | Dec 1989 | JPX |
2029097 | Mar 1980 | GBX |
Entry |
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R. R. Joseph et al., "Reduced Electromigration Damage at AL Contacts to SI Integrated Circuits", IBM TDB, vol. 15, No. 2, Aug. 1972, pp. 725-726. |
R. E. Oakley, et al., "Pillars-The Way to Two Micron Pitch Multilevel Metallisation," IEEE VLSI Multilevel Interconnection Conference Proceedings, Jun. 21-22, 1984, pp. 23-29. |