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Cary, NC, US
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Patents Grants
last 30 patents
Information
Patent Grant
Solution based precursors
Patent number
8,710,253
Issue date
Apr 29, 2014
Linde Aktiengesellschaft
Ce Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Container for precursors used in deposition processes
Patent number
8,261,908
Issue date
Sep 11, 2012
Linde Aktiengesellschaft
Ce Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Formation of graphene wafers on silicon substrates
Patent number
7,947,581
Issue date
May 24, 2011
Linde Aktiengesellschaft
Ce Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for using solution based precursors for atomic...
Patent number
7,514,119
Issue date
Apr 7, 2009
Linde, Inc.
Ce Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for forming low-k dielectric films
Patent number
6,936,537
Issue date
Aug 30, 2005
The BOC Group, Inc.
Richard A. Hogle
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Organosilane CVD precursors and their use for making organosilane p...
Patent number
6,649,540
Issue date
Nov 18, 2003
The BOC Group, Inc.
Qing Min Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Asymmetric organocyclosiloxanes and their use for making organosili...
Patent number
6,572,923
Issue date
Jun 3, 2003
The BOC Group, Inc.
Ce Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low-K dielectric constant CVD precursors formed of cyclic siloxanes...
Patent number
6,440,876
Issue date
Aug 27, 2002
The BOC Group, Inc.
Qing Min Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
NOVEL METHOD FOR PRETREATING AND RECOVERING A RARE GAS FROM A GAS C...
Publication number
20230183068
Publication date
Jun 15, 2023
Jennifer Bugayong Luna
C01 - INORGANIC CHEMISTRY
Information
Patent Application
NOVEL METHODS FOR GAS PHASE SELECTIVE ETCHING OF SILICON-GERMANIUM...
Publication number
20230044406
Publication date
Feb 9, 2023
Ashwini K. SINHA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRETREATING AND RECOVERING A RARE GAS FROM A GAS CONTAMI...
Publication number
20220363540
Publication date
Nov 17, 2022
Jennifer Bugayong Luna
C01 - INORGANIC CHEMISTRY
Information
Patent Application
SYSTEMS AND PROCESSES FOR PRODUCTION OF TRISILYLAMINE
Publication number
20220332579
Publication date
Oct 20, 2022
CE MA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
DIRECT LIQUID INJECTION OF SOLUTION BASED PRECURSORS FOR ATOMIC LAY...
Publication number
20150211126
Publication date
Jul 30, 2015
Ce Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW-VOLATILITY COMPOUNDS FOR USE IN FORMING DEPOSITED LAYERS
Publication number
20130125788
Publication date
May 23, 2013
Kenneth Aitchison
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR USING SOLUTION BASED PRECURSORS FOR ATOMIC...
Publication number
20120295038
Publication date
Nov 22, 2012
Ce MA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR USING SOLUTION BASED PRECURSORS FOR ATOMIC...
Publication number
20120294753
Publication date
Nov 22, 2012
Ce MA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SOLUTION BASED PRECURSORS
Publication number
20120178953
Publication date
Jul 12, 2012
Ce Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW-VOLATILITY COMPOUNDS FOR USE IN FORMING DEPOSITED LAYERS
Publication number
20110048283
Publication date
Mar 3, 2011
Kenneth Aitchison
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FORMATION OF GRAPHENE WAFERS ON SILICON SUBSTRATES
Publication number
20110034011
Publication date
Feb 10, 2011
Ce MA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOLUTION BASED LANTHANIDE AND GROUP III PRECURSORS FOR ATOMIC LAYER...
Publication number
20100290968
Publication date
Nov 18, 2010
Ce MA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SOLUTION BASED ZIRCONIUM PRECURSORS FOR ATOMIC LAYER DEPOSITION
Publication number
20100290945
Publication date
Nov 18, 2010
Ce Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR THE VAPORIZATION AND DELIVERY OF SOLUTION...
Publication number
20100151261
Publication date
Jun 17, 2010
Ce Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONTAINER FOR PRECURSORS USED IN DEPOSITION PROCESSES
Publication number
20100140120
Publication date
Jun 10, 2010
Ce MA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PRECURSORS FOR ATOMIC LAYER DEPOSITION
Publication number
20100055321
Publication date
Mar 4, 2010
Ce Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR ATOMIC LAYER DEPOSITION
Publication number
20100036144
Publication date
Feb 11, 2010
Ce Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SINGLE PRECURSORS FOR ATOMIC LAYER DEPOSITION
Publication number
20090305504
Publication date
Dec 10, 2009
Ce Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR USING SOLUTION PRECURSORS FOR ATOMIC LAYER...
Publication number
20090220374
Publication date
Sep 3, 2009
Ce MA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SOLUTION BASED LANTHANUM PRECURSORS FOR ATOMIC LAYER DEPOSITION
Publication number
20090117274
Publication date
May 7, 2009
Ce Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of forming low dielectric constant layer
Publication number
20070077778
Publication date
Apr 5, 2007
The BOC Group, Inc.
Ce Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for using solution based precursors for atomic...
Publication number
20060269667
Publication date
Nov 30, 2006
Ce Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Low temperature selective epitaxial growth of silicon germanium layers
Publication number
20060071213
Publication date
Apr 6, 2006
Ce Ma
C30 - CRYSTAL GROWTH
Information
Patent Application
Method and apparatus for maintaining by-product volatility in depos...
Publication number
20050250347
Publication date
Nov 10, 2005
Christopher M. Bailey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Acid copper electroplating solutions
Publication number
20040187731
Publication date
Sep 30, 2004
Qing Min Wang
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Methods for forming low-k dielectric films
Publication number
20020192980
Publication date
Dec 19, 2002
Richard A. Hogle
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Asymmetric organocyclosiloxanes and their use for making organosili...
Publication number
20020132408
Publication date
Sep 19, 2002
Ce Ma
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Organosilane CVD precursors and their use for making organosilane p...
Publication number
20020076944
Publication date
Jun 20, 2002
Qing Min Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Low-k dielectric CVD precursors and uses thereof
Publication number
20020072220
Publication date
Jun 13, 2002
Qing Min Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...