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Daniel A. Carl
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Pleasanton, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of forming a trench structure
Patent number
7,772,121
Issue date
Aug 10, 2010
Applied Materials, Inc.
Liang-Yuh Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electro-chemical deposition system
Patent number
7,497,932
Issue date
Mar 3, 2009
Applied Materials, Inc.
Yezdi Dordi
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method of forming an interconnect structure
Patent number
7,427,568
Issue date
Sep 23, 2008
Applied Materials, Inc.
Liang-Yuh Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for chemical mechanical polishing of semicondu...
Patent number
7,375,023
Issue date
May 20, 2008
Applied Materials, Inc.
Stan D. Tsai
B24 - GRINDING POLISHING
Information
Patent Grant
Conductive pad with ion exchange membrane for electrochemical mecha...
Patent number
7,344,432
Issue date
Mar 18, 2008
Applied Materials, Inc.
Liang-Yun Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Integrated multi-step gap fill and all feature planarization for co...
Patent number
7,323,095
Issue date
Jan 29, 2008
Applied Materials, Inc.
Wei-Yung Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conductive polishing article for electrochemical mechanical polishing
Patent number
7,311,592
Issue date
Dec 25, 2007
Applied Materials, Inc.
Liang-Yuh Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Conductive polishing article for electrochemical mechanical polishing
Patent number
7,137,879
Issue date
Nov 21, 2006
Applied Materials, Inc.
Liang-Yuh Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Method of depositing a material layer
Patent number
7,115,516
Issue date
Oct 3, 2006
Applied Materials, Inc.
Liang-Yuh Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Conductive polishing article for electrochemical mechanical polishing
Patent number
7,066,800
Issue date
Jun 27, 2006
Applied Materials Inc.
Liang-Yuh Chen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for chemical mechanical polishing of semicondu...
Patent number
7,060,606
Issue date
Jun 13, 2006
Applied Materials Inc.
Stan D. Tsai
B24 - GRINDING POLISHING
Information
Patent Grant
Conductive polishing article for electrochemical mechanical polishing
Patent number
6,988,942
Issue date
Jan 24, 2006
Applied Materials Inc.
Liang-Yuh Chen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for electro-chemical processing
Patent number
6,896,776
Issue date
May 24, 2005
Applied Materials Inc.
Wei-Yung Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of conditioning electrochemical baths in plating technology
Patent number
6,893,548
Issue date
May 17, 2005
Applied Materials Inc.
Robin Cheung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for dishing reduction and feature passivation in polishing p...
Patent number
6,884,724
Issue date
Apr 26, 2005
Applied Materials, Inc.
Wei-Yung Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for chemical mechanical polishing of semiconductor substrates
Patent number
6,821,881
Issue date
Nov 23, 2004
Applied Materials, Inc.
Stan D. Tsai
B24 - GRINDING POLISHING
Information
Patent Grant
Planarization of substrates using electrochemical mechanical polishing
Patent number
6,811,680
Issue date
Nov 2, 2004
Applied Materials Inc.
Liang-Yuh Chen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus and method for fast-cycle atomic layer deposition
Patent number
6,773,507
Issue date
Aug 10, 2004
Applied Materials, Inc.
Ravi Jallepally
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and compositions for chemical mechanical polishing
Patent number
6,677,239
Issue date
Jan 13, 2004
Applied Materials Inc.
Wei-Yung Hsu
B24 - GRINDING POLISHING
Information
Patent Grant
Electro-chemical deposition system
Patent number
6,635,157
Issue date
Oct 21, 2003
Applied Materials, Inc.
Yezdi Dordi
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for achieving copper fill of high aspect ratio interconnect...
Patent number
6,436,267
Issue date
Aug 20, 2002
Applied Materials, Inc.
Daniel A. Carl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for forming metal interconnects
Patent number
6,372,633
Issue date
Apr 16, 2002
Applied Materials, Inc.
Dan Maydan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for enhancing the adhesion of copper deposited by chemical v...
Patent number
6,362,099
Issue date
Mar 26, 2002
Applied Materials, Inc.
Srinivas Gandikota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electro-chemical deposition system
Patent number
6,258,220
Issue date
Jul 10, 2001
Applied Materials, Inc.
Yezdi Dordi
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
In-situ electroless copper seed layer enhancement in an electroplat...
Patent number
6,258,223
Issue date
Jul 10, 2001
Applied Materials, Inc.
Robin Cheung
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
IMP technology with heavy gas sputtering
Patent number
6,200,433
Issue date
Mar 13, 2001
Applied Materials, Inc.
Peijun Ding
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for electro-chemical deposition with thermal anneal chamber
Patent number
6,136,163
Issue date
Oct 24, 2000
Applied Materials, Inc.
Robin Cheung
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Patents Applications
last 30 patents
Information
Patent Application
CONDUCTIVE PAD WITH ION EXCHANGE MEMBRANE FOR ELECTROCHEMICAL MECHA...
Publication number
20070099552
Publication date
May 3, 2007
APPLIED MATERIALS, INC.
Liang-Yuh Chen
B24 - GRINDING POLISHING
Information
Patent Application
CONDUCTIVE POLISHING ARTICLE FOR ELECTROCHEMICAL MECHANICAL POLISHING
Publication number
20070066201
Publication date
Mar 22, 2007
APPLIED MATERIALS, INC.
Liang-Yuh Chen
B24 - GRINDING POLISHING
Information
Patent Application
Electro-chemical deposition system
Publication number
20060246690
Publication date
Nov 2, 2006
APPLIED MATERIALS, INC.
Yezdi Dordi
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD OF FORMING AN INTERCONNECT STRUCTURE
Publication number
20060223323
Publication date
Oct 5, 2006
Liang-Yuh Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING A TRENCH STRUCTURE
Publication number
20060223322
Publication date
Oct 5, 2006
Liang-Yuh Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Conductive polishing article for electrochemical mechanical polishing
Publication number
20060172671
Publication date
Aug 3, 2006
APPLIED MATERIALS, INC.
Liang-Yuh Chen
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for chemical mechanical polishing of semicondu...
Publication number
20060166487
Publication date
Jul 27, 2006
APPLIED MATERIALS, INC.
Stan D. Tsai
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING OF SEMICONDU...
Publication number
20050282380
Publication date
Dec 22, 2005
Stan D. Tsai
B24 - GRINDING POLISHING
Information
Patent Application
Method for dishing reduction and feature passivation in polishing p...
Publication number
20050202677
Publication date
Sep 15, 2005
Wei-Yung Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Planarization of substrates using electrochemical mechanical polishing
Publication number
20050056537
Publication date
Mar 17, 2005
Liang-Yuh Chen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Integrated multi-step gap fill and all feature planarization for co...
Publication number
20040266085
Publication date
Dec 30, 2004
APPLIED MATERIALS, INC.
Wei-Yung Hsu
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Conductive polishing article for electrochemical mechanical polishing
Publication number
20040266327
Publication date
Dec 30, 2004
Liang-Yuh Chen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Electro-chemical deposition system
Publication number
20040084301
Publication date
May 6, 2004
APPLIED MATERIALS, INC.
Yezdi Dordi
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Apparatus for electro chemical deposition of copper metallization w...
Publication number
20040079633
Publication date
Apr 29, 2004
APPLIED MATERIALS, INC.
Robin Cheung
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method of depositing a material layer
Publication number
20040077161
Publication date
Apr 22, 2004
APPLIED MATERIALS, INC.
Liang-Yuh Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR ELECTRO-CHEMICAL PROCESSING
Publication number
20040003894
Publication date
Jan 8, 2004
APPLIED MATERIALS, INC.
Wei-Yung Hsu
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Web pad design for chemical mechanical polishing
Publication number
20030224678
Publication date
Dec 4, 2003
APPLIED MATERIALS, INC.
Wei-Yung Hsu
B24 - GRINDING POLISHING
Information
Patent Application
Self-ionized and inductively-coupled plasma for sputtering and resp...
Publication number
20030116427
Publication date
Jun 26, 2003
APPLIED MATERIALS, INC.
Peijun Ding
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus and method for fast-cycle atomic layer deposition
Publication number
20030106490
Publication date
Jun 12, 2003
APPLIED MATERIALS, INC.
Ravi Jallepally
C30 - CRYSTAL GROWTH
Information
Patent Application
Methods and compositions for chemical mechanical polishing
Publication number
20030040182
Publication date
Feb 27, 2003
APPLIED MATERIALS, INC.
Wei-Yung Hsu
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Method for dishing reduction and feature passivation in polishing p...
Publication number
20030040188
Publication date
Feb 27, 2003
APPLIED MATERIALS, INC.
Wei-Yung Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
In situ stabilized high concentration BPSG films for PMD application
Publication number
20030019427
Publication date
Jan 30, 2003
APPLIED MATERIALS, INC.
Steve Ghanayem
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for chemical mechanical polishing of semicondu...
Publication number
20030022501
Publication date
Jan 30, 2003
APPLIED MATERIALS, INC.
Stan D. Tsai
B24 - GRINDING POLISHING
Information
Patent Application
Method for achieving copper fill of high aspect ratio interconnect...
Publication number
20030000844
Publication date
Jan 2, 2003
APPLIED MATERIALS, INC.
Daniel A. Carl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Gas jet deposition with multiple ports
Publication number
20020197416
Publication date
Dec 26, 2002
Robert B. Majewski
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Planarization of substrates using electrochemical mechanical polishing
Publication number
20020130049
Publication date
Sep 19, 2002
Liang-Yuh Chen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for enhancing the adhesion of copper deposited by chemical v...
Publication number
20020119657
Publication date
Aug 29, 2002
Srinivas Gandikota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Conductive polishing article for electrochemical mechanical polishing
Publication number
20020119286
Publication date
Aug 29, 2002
Liang-Yuh Chen
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method and apparatus for forming metal interconnects
Publication number
20020058408
Publication date
May 16, 2002
APPLIED MATERIALS, INC.
Dan Maydan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for conditioning electrochemical baths in plat...
Publication number
20020033340
Publication date
Mar 21, 2002
Robin Cheung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...