Jeffery F. Summers

Person

Santa Barbara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for making vias using a doped substrate
- Patent number 9,950,923
- Issue date Apr 24, 2018
- Innovative Micro Technology
- Christopher S. Gudeman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching technique for microfabrication substrates
- Patent number 9,493,877
- Issue date Nov 15, 2016
- Innovative Micro Technology
- John Harley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device using glass substrate anodic bonding
- Patent number 9,388,037
- Issue date Jul 12, 2016
- Innovative Micro Technology
- Benedikt Zeyen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method using glass substrate anodic bonding
- Patent number 9,315,375
- Issue date Apr 19, 2016
- Innovative Micro Technology
- Benedikt Zeyen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and device using silicon substrate to glass substrate anodic...
- Patent number 9,156,679
- Issue date Oct 13, 2015
- Innovative Micro Technology
- Benedikt Zeyen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Exothermic activation for high vacuum packaging
- Patent number 8,847,373
- Issue date Sep 30, 2014
- Innovative Micro Technology
- Jeffery F. Summers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductive getter activation for high vacuum packaging
- Patent number 8,558,364
- Issue date Oct 15, 2013
- Innovative Micro Technology
- Jeffery F. Summers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inlaid optical material and method of manufacture
- Patent number 8,541,735
- Issue date Sep 24, 2013
- Innovative Micro Technology
- John S. Foster
- G01 - MEASURING TESTING
Information Patent Grant
Plating process and apparatus for through wafer features
- Patent number 8,343,791
- Issue date Jan 1, 2013
- Innovative Micro Technology
- John S. Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer level hermetic bond using metal alloy with raised feature
- Patent number 7,960,208
- Issue date Jun 14, 2011
- Innovative Micro Technology
- Gregory A. Carlson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS thermal device with slideably engaged tether and method of man...
- Patent number 7,872,432
- Issue date Jan 18, 2011
- Innovative Micro Technology
- Alok Paranjpye
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer bonding material with embedded rigid particles
- Patent number 7,807,547
- Issue date Oct 5, 2010
- Innovative Micro Technology
- Jeffery F. Summers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Indented lid for encapsulated devices and method of manufacture
- Patent number 7,759,218
- Issue date Jul 20, 2010
- Innovative Micro Technology
- Jeffery F. Summers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Current-driven device using NiMn alloy and method of manufacture
- Patent number 7,687,304
- Issue date Mar 30, 2010
- Innovative Micro Technology
- Gregory A. Carlson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hermetic interconnect structure and method of manufacture
- Patent number 7,582,969
- Issue date Sep 1, 2009
- Innovative Micro Technology
- Gregory A. Carlson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer level hermetic bond using metal alloy with raised feature
- Patent number 7,569,926
- Issue date Aug 4, 2009
- Innovative Micro Technology
- Gregory A. Carlson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Indented structure for encapsulated devices and method of manufacture
- Patent number 7,462,931
- Issue date Dec 9, 2008
- Innovative Micro Technology
- Jeffery F. Summers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for assembling an array of micro-devices
- Patent number 7,141,080
- Issue date Nov 28, 2006
- Innovative Micro Technology
- Patrick E. Feierabend
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for assembling an array of micro-devices
- Patent number 7,057,245
- Issue date Jun 6, 2006
- Innovative Micro Technology
- Patrick Edward Feierabend
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low inertia latching microactuator
- Patent number 6,831,380
- Issue date Dec 14, 2004
- Innovative Micro Technology
- Tara Jean Rybnicek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for assembling an array of micro-devices
- Patent number 6,812,061
- Issue date Nov 2, 2004
- Innovative Micro Technology
- Patrick Edward Feierabend
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical switch with low-inertia micromirror
- Patent number 6,801,681
- Issue date Oct 5, 2004
- Optical Coating Laboratory, Inc.
- Patrick E. Feierabend
- G02 - OPTICS
Information Patent Grant
Optical cross-connect with magnetic micro-electro-mechanical actuat...
- Patent number 6,785,038
- Issue date Aug 31, 2004
- Optical Coating Laboratory, Inc.
- Bryant P. Hichwa
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
LOW COST WAFER BONDING METHOD
- Publication number 20190382260
- Publication date Dec 19, 2019
- Innovative Micro Technology
- Jeffery F. SUMMERS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD USING GLASS SUBSTRATE ANODIC BONDING
- Publication number 20150183200
- Publication date Jul 2, 2015
- Innovative Micro Technology
- Benedikt ZEYEN
- B32 - LAYERED PRODUCTS
Information Patent Application
DEVICE USING GLASS SUBSTRATE ANODIC BONDING
- Publication number 20150183630
- Publication date Jul 2, 2015
- Innovative Micro Technology
- Benedikt ZEYEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer bonding chamber with dissimilar wafer temperatures
- Publication number 20130199730
- Publication date Aug 8, 2013
- Innovative Micro Technology
- Chris Gudeman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition/bonding chamber for encapsulated microdevices and method...
- Publication number 20120132522
- Publication date May 31, 2012
- Innovative Micro Technology
- John S. Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Plating process and apparatus for through wafer features
- Publication number 20120080762
- Publication date Apr 5, 2012
- Innovative Micro Technology
- John S. Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inductive getter activation for high vacuum packaging
- Publication number 20120068300
- Publication date Mar 22, 2012
- Innovative Micro Technology
- Jeffery F. Summers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inlaid optical material and method of manufacture
- Publication number 20110250092
- Publication date Oct 13, 2011
- Innovative Micro Technology
- John S. Foster
- G01 - MEASURING TESTING
Information Patent Application
Wafer level hermetic bond using metal alloy with raised feature
- Publication number 20100003772
- Publication date Jan 7, 2010
- Innovative Micro Technology
- Gregory A. Carlson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Indented lid for encapsulated devices and method of manufacture
- Publication number 20090053855
- Publication date Feb 26, 2009
- Innovative Micro Technology
- Jeffery F. Summers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Gettering material for encapsulated microdevices and method of manu...
- Publication number 20090001537
- Publication date Jan 1, 2009
- Innovative Micro Technology
- Jeffery F. Summers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer level hermetic bond using metal alloy
- Publication number 20080318349
- Publication date Dec 25, 2008
- Innovative Micro Technology
- David M. Erlach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical device with gold alloy contacts and method of manuf...
- Publication number 20080250785
- Publication date Oct 16, 2008
- Innovative Micro Technology
- Gregory A. Carlson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS structure using carbon dioxide and method of fabrication
- Publication number 20080169521
- Publication date Jul 17, 2008
- Innovative Micro Techonology
- John S. Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Current-driven device using NiMn alloy and method of manufacture
- Publication number 20080124565
- Publication date May 29, 2008
- Innovative Micro Technology
- Gregory A. Carlson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INDENTED STRUCTURE FOR ENCAPSULATED DEVICES AND METHOD OF MANUFACTURE
- Publication number 20070262428
- Publication date Nov 15, 2007
- Innovative Micro Technology
- Jeffery F. Summers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer bonding material with embedded rigid particles
- Publication number 20070238262
- Publication date Oct 11, 2007
- Innovative Micro Technology
- Jeffery F. Summers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Dual substrate electrostatic MEMS switch with hermetic seal and met...
- Publication number 20070236313
- Publication date Oct 11, 2007
- Innovative Micro Technology
- Andrew D. Wallis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS thermal device with slideably engaged tether and method of man...
- Publication number 20070215448
- Publication date Sep 20, 2007
- Innovative Micro Technology
- Alok Paranjpye
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer level hermetic bond using metal alloy with raised feature
- Publication number 20070048898
- Publication date Mar 1, 2007
- Innovative Micro Technology
- Gregory A. Carlson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer level hermetic bond using metal alloy
- Publication number 20070048887
- Publication date Mar 1, 2007
- Innovative Micro Technology
- David M. Erlach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Hermetic interconnect structure and method of manufacture
- Publication number 20070045781
- Publication date Mar 1, 2007
- Innovative Micro Technology
- Gregory A. Carlson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for assembling an array of micro-devices
- Publication number 20060063307
- Publication date Mar 23, 2006
- Innovative Micro Technology
- Patrick Edward Feierabend
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for assembling an array of micro-devices
- Publication number 20050003631
- Publication date Jan 6, 2005
- Innovative Micro Technology, Inc.
- Patrick Edward Feierabend
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Low inertia latching microactuator
- Publication number 20030117027
- Publication date Jun 26, 2003
- Tara Jean Rybnicek
- G02 - OPTICS
Information Patent Application
Optical switch with low-inertia micromirror
- Publication number 20020094152
- Publication date Jul 18, 2002
- Patrick E. Feierabend
- G02 - OPTICS
Information Patent Application
Optical cross-connect with magnetic micro-electro-mechanical actuat...
- Publication number 20020093720
- Publication date Jul 18, 2002
- Optical Coating Laboratory, Inc.
- Bryant P. Hichwa
- G02 - OPTICS

Jeffery F. Summers

Person

Patents Grantslast 30 patents

Method for making vias using a doped substrate

Etching technique for microfabrication substrates

Device using glass substrate anodic bonding

Method using glass substrate anodic bonding

Method and device using silicon substrate to glass substrate anodic...

Exothermic activation for high vacuum packaging

Inductive getter activation for high vacuum packaging

Inlaid optical material and method of manufacture

Plating process and apparatus for through wafer features

Wafer level hermetic bond using metal alloy with raised feature

MEMS thermal device with slideably engaged tether and method of man...

Wafer bonding material with embedded rigid particles

Indented lid for encapsulated devices and method of manufacture

Current-driven device using NiMn alloy and method of manufacture

Hermetic interconnect structure and method of manufacture

Wafer level hermetic bond using metal alloy with raised feature

Indented structure for encapsulated devices and method of manufacture

Method and apparatus for assembling an array of micro-devices

Method and apparatus for assembling an array of micro-devices

Low inertia latching microactuator

Method and apparatus for assembling an array of micro-devices

Optical switch with low-inertia micromirror

Optical cross-connect with magnetic micro-electro-mechanical actuat...

Patents Applicationslast 30 patents

LOW COST WAFER BONDING METHOD

METHOD USING GLASS SUBSTRATE ANODIC BONDING

DEVICE USING GLASS SUBSTRATE ANODIC BONDING

Wafer bonding chamber with dissimilar wafer temperatures

Deposition/bonding chamber for encapsulated microdevices and method...

Plating process and apparatus for through wafer features

Inductive getter activation for high vacuum packaging

Inlaid optical material and method of manufacture

Wafer level hermetic bond using metal alloy with raised feature

Indented lid for encapsulated devices and method of manufacture

Gettering material for encapsulated microdevices and method of manu...

Wafer level hermetic bond using metal alloy

Micromechanical device with gold alloy contacts and method of manuf...

MEMS structure using carbon dioxide and method of fabrication

Current-driven device using NiMn alloy and method of manufacture

INDENTED STRUCTURE FOR ENCAPSULATED DEVICES AND METHOD OF MANUFACTURE

Wafer bonding material with embedded rigid particles

Dual substrate electrostatic MEMS switch with hermetic seal and met...

MEMS thermal device with slideably engaged tether and method of man...

Wafer level hermetic bond using metal alloy with raised feature

Wafer level hermetic bond using metal alloy

Hermetic interconnect structure and method of manufacture

Method and apparatus for assembling an array of micro-devices

Method and apparatus for assembling an array of micro-devices

Low inertia latching microactuator

Optical switch with low-inertia micromirror

Optical cross-connect with magnetic micro-electro-mechanical actuat...