John M. de Larios

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of dielectric film treatment
- Patent number 9,236,279
- Issue date Jan 12, 2016
- Lam Research Corporation
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for uniformly applying a multi-phase cleaning sol...
- Patent number 8,726,919
- Issue date May 20, 2014
- Lam Research Corporation
- Jeffrey J. Farber
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Material for cleaning a substrate
- Patent number 8,716,210
- Issue date May 6, 2014
- Lam Research Corporation
- Erik M. Freer
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method for removing material from semiconductor wafer and apparatus...
- Patent number 8,691,027
- Issue date Apr 8, 2014
- Lam Research Corporation
- Mikhail Korolik
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for cleaning a substrate using non-newtonian f...
- Patent number 8,671,959
- Issue date Mar 18, 2014
- Lam Research Corporation
- John M. de Larios
- B08 - CLEANING
Information Patent Grant
Reduction of entrance and exit marks left by a substrate-processing...
- Patent number 8,623,152
- Issue date Jan 7, 2014
- Lam Research Corporation
- Robert O'Donnell
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for removing contamination from a substrate and for making a...
- Patent number 8,608,859
- Issue date Dec 17, 2013
- Lam Research Corporation
- Erik M. Freer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for cleaning contaminants from substrate
- Patent number 8,590,550
- Issue date Nov 26, 2013
- Lam Research Corporation
- Mikhail Korolik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for cleaning a semiconductor substrate
- Patent number 8,591,662
- Issue date Nov 26, 2013
- Lam Research Corporation
- Erik M. Freer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for uniformly applying a multi-phase cleaning sol...
- Patent number 8,567,421
- Issue date Oct 29, 2013
- Lam Research Corporation
- Jeffrey J. Farber
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for removing contamination from substrate
- Patent number 8,555,903
- Issue date Oct 15, 2013
- Lam Research Corporation
- Erik M. Freer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for cleaning semiconductor wafers using compre...
- Patent number 8,535,451
- Issue date Sep 17, 2013
- Lam Research Corporation
- John M. de Larios
- B08 - CLEANING
Information Patent Grant
Method and apparatus for cleaning a semiconductor substrate
- Patent number 8,522,801
- Issue date Sep 3, 2013
- Lam Research Corporation
- Erik M. Freer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and system for cleaning a substrate
- Patent number 8,522,799
- Issue date Sep 3, 2013
- Lam Research Corporation
- Erik M. Freer
- B08 - CLEANING
Information Patent Grant
Method and apparatus for particle removal
- Patent number 8,480,810
- Issue date Jul 9, 2013
- Lam Research Corporation
- Erik M. Freer
- B08 - CLEANING
Information Patent Grant
Substrate preparation using stabilized fluid solutions and methods...
- Patent number 8,475,599
- Issue date Jul 2, 2013
- Lam Research Corporation
- Erik M. Freer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate cleaning technique employing multi-phase solution
- Patent number 8,388,762
- Issue date Mar 5, 2013
- Lam Research Corporation
- Erik M. Freer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing material from semiconductor wafer and apparatus...
- Patent number 8,323,420
- Issue date Dec 4, 2012
- Lam Research Corporation
- Mikhail Korolik
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Reduction of entrance and exit marks left by a substrate-processing...
- Patent number 8,317,932
- Issue date Nov 27, 2012
- Lam Research Corporation
- Robert O'Donnell
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for cleaning a semiconductor substrate
- Patent number 8,316,866
- Issue date Nov 27, 2012
- Lam Research Corporation
- Erik M. Freer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing a substrate using a single phase proximity he...
- Patent number 8,313,580
- Issue date Nov 20, 2012
- Lam Research Corporation
- Mike Ravkin
- B08 - CLEANING
Information Patent Grant
Method of damaged low-k dielectric film layer removal
- Patent number 8,277,675
- Issue date Oct 2, 2012
- Lam Research Corporation
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Two-phase substrate cleaning material
- Patent number 8,242,067
- Issue date Aug 14, 2012
- Lam Research Corporation
- Mikhail Korolik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Proximity substrate preparation sequence, and method, apparatus, an...
- Patent number 8,236,382
- Issue date Aug 7, 2012
- Lam Research Corporation
- Michael Ravkin
- B08 - CLEANING
Information Patent Grant
Cleaning compound and method and system for using the cleaning comp...
- Patent number 8,137,474
- Issue date Mar 20, 2012
- Lam Research Corporation
- Erik M. Freer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Proximity head heating method and apparatus
- Patent number 8,102,014
- Issue date Jan 24, 2012
- Lam Research Corporation
- Katrina Mikhaylichenko
- B08 - CLEANING
Information Patent Grant
Proximity head heating method and apparatus
- Patent number 8,062,471
- Issue date Nov 22, 2011
- Lam Research Corporation
- Katrina Mikhaylichenko
- B08 - CLEANING
Information Patent Grant
Method and apparatus for cleaning a substrate using non-Newtonian f...
- Patent number 8,043,441
- Issue date Oct 25, 2011
- Lam Research Corporation
- John M. de Larios
- B08 - CLEANING
Information Patent Grant
Substrate proximity drying using in-situ local heating of substrate
- Patent number 8,011,116
- Issue date Sep 6, 2011
- Lam Research Corporation
- Katrina Mikhaylichenko
- B08 - CLEANING
Information Patent Grant
Single phase proximity head having a controlled meniscus for treati...
- Patent number 7,997,288
- Issue date Aug 16, 2011
- Lam Research Corporation
- Mike Ravkin
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Method and Systems for Cleaning A Substrate
- Publication number 20150040947
- Publication date Feb 12, 2015
- LAM RESEARCH CORPORATION
- Erik M. Freer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Cleaning A Semiconductor Substrate
- Publication number 20150040941
- Publication date Feb 12, 2015
- LAM RESEARCH CORPORATION
- Erik M. Freer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Controls of Ambient Environment During Wafer Drying Using Proximity...
- Publication number 20140332037
- Publication date Nov 13, 2014
- LAM RESEARCH CORPORATION
- Mikhail Korolik
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND SYSTEM FOR UNIFORMLY APPLYING A MULTI-PHASE CLEANING SOL...
- Publication number 20140202503
- Publication date Jul 24, 2014
- LAM RESEARCH CORPORATION
- Jeffrey J. Farber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Low-K Dielectric Film Repair
- Publication number 20140170780
- Publication date Jun 19, 2014
- LAM RESEARCH CORPORATION
- Seokmin Yun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A SUBSTRATE USING NON-NEWTONIAN F...
- Publication number 20140158167
- Publication date Jun 12, 2014
- LAM RESEARCH CORPORATION
- John M. de Larios
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Apparatus for Cleaning a Semiconductor Substrate
- Publication number 20140059789
- Publication date Mar 6, 2014
- LAM RESEARCH CORPORATION
- Erik M. Freer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DIELECTRIC FILM TREATMENT
- Publication number 20140048108
- Publication date Feb 20, 2014
- LAM RESEARCH CORPORATION
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Uniformly Applying a Multi-Phase Cleaning Sol...
- Publication number 20140014146
- Publication date Jan 16, 2014
- LAM RESEARCH CORPORATION
- Jeffrey J. Farber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Cleaning System Using Stabilized Fluid Solutions
- Publication number 20130284217
- Publication date Oct 31, 2013
- Erik M. Freer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE CLEANING TECHNIQUE EMPLOYING MULTI-PHASE SOLUTION
- Publication number 20130206182
- Publication date Aug 15, 2013
- Erik M. Freer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REMOVING MATERIAL FROM SEMICONDUCTOR WAFER AND APPARATUS...
- Publication number 20130061887
- Publication date Mar 14, 2013
- Mikhail Korolik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCTION OF ENTRANCE AND EXIT MARKS LEFT BY A SUBSTRATE-PROCESSING...
- Publication number 20130061879
- Publication date Mar 14, 2013
- Robert O'Donnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for Cleaning a Semiconductor Substrate
- Publication number 20130048021
- Publication date Feb 28, 2013
- Erik M. Freer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cleaning Compound and Method and System for Using the Cleaning Comp...
- Publication number 20120145202
- Publication date Jun 14, 2012
- LAM RESEARCH CORPORATION
- Erik M. Freer
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A SUBSTRATE USING NON-NEWTONIAN F...
- Publication number 20120017950
- Publication date Jan 26, 2012
- LAM RESEARCH CORPORATION
- John M. de Larios
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR DEPOSITING AND PLANARIZING THIN FILMS OF S...
- Publication number 20110155563
- Publication date Jun 30, 2011
- Lam Research Corp.
- Mike Ravkin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and System for Uniformly Applying a Multi-Phase Cleaning Sol...
- Publication number 20110132400
- Publication date Jun 9, 2011
- LAM RESEARCH CORPORATION
- Jeffrey J. Farber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MATERIAL FOR CLEANING A SUBSTRATE
- Publication number 20110065621
- Publication date Mar 17, 2011
- Erik M. Freer
- B08 - CLEANING
Information Patent Application
Apparatus for Contained Chemical Surface Treatment
- Publication number 20110061687
- Publication date Mar 17, 2011
- LAM RESEARCH CORPORATION
- Katrina Mikhaylichenko
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Proximity Head Heating Method and Apparatus
- Publication number 20110008916
- Publication date Jan 13, 2011
- Katrina Mikhaylichenko
- B08 - CLEANING
Information Patent Application
Two-Phase Substrate Cleaning Material
- Publication number 20100317556
- Publication date Dec 16, 2010
- LAM RESEARCH CORPORATION
- Mikhail Korolik
- B08 - CLEANING
Information Patent Application
Method for Removing Contamination from a Substrate and for Making a...
- Publication number 20100206340
- Publication date Aug 19, 2010
- Erik M. Freer
- B08 - CLEANING
Information Patent Application
Method and Apparatus for Removing Contamination from Substrate
- Publication number 20100059088
- Publication date Mar 11, 2010
- LAM RESEARCH CORPORATION
- Erik M. Freer
- B08 - CLEANING
Information Patent Application
Method of low-k dielectric film repair
- Publication number 20100015731
- Publication date Jan 21, 2010
- LAM RESEARCH CORPORATION
- Seokmin Yun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND MATERIAL FOR CLEANING A SUBSTRATE
- Publication number 20090308410
- Publication date Dec 17, 2009
- LAM RESEARCH CORPORATION
- Erik M. Freer
- B08 - CLEANING
Information Patent Application
APPARATUS AND SYSTEM FOR CLEANING A SUBSTRATE
- Publication number 20090308413
- Publication date Dec 17, 2009
- LAM RESEARCH CORPORATION
- Erik M. Freer
- B08 - CLEANING
Information Patent Application
METHOD OF DIELECTRIC FILM TREATMENT
- Publication number 20090229638
- Publication date Sep 17, 2009
- LAM RESEARCH CORPORATION
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PREVENTING PATTERN COLLAPSE DURING RINSING AND DRYING
- Publication number 20090229637
- Publication date Sep 17, 2009
- LAM RESEARCH CORPORATION
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of damaged low-k dielectric film layer removal
- Publication number 20090173718
- Publication date Jul 9, 2009
- LAM RESEARCH CORPORATION
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS

John M. de Larios

Person

Patents Grantslast 30 patents

Method of dielectric film treatment

Method and system for uniformly applying a multi-phase cleaning sol...

Material for cleaning a substrate

Method for removing material from semiconductor wafer and apparatus...

Method and apparatus for cleaning a substrate using non-newtonian f...

Reduction of entrance and exit marks left by a substrate-processing...

Method for removing contamination from a substrate and for making a...

Apparatus for cleaning contaminants from substrate

Methods for cleaning a semiconductor substrate

Method and system for uniformly applying a multi-phase cleaning sol...

Method and apparatus for removing contamination from substrate

Method and apparatus for cleaning semiconductor wafers using compre...

Method and apparatus for cleaning a semiconductor substrate

Apparatus and system for cleaning a substrate

Method and apparatus for particle removal

Substrate preparation using stabilized fluid solutions and methods...

Substrate cleaning technique employing multi-phase solution

Method for removing material from semiconductor wafer and apparatus...

Reduction of entrance and exit marks left by a substrate-processing...

Method and apparatus for cleaning a semiconductor substrate

Method for processing a substrate using a single phase proximity he...

Method of damaged low-k dielectric film layer removal

Two-phase substrate cleaning material

Proximity substrate preparation sequence, and method, apparatus, an...

Cleaning compound and method and system for using the cleaning comp...

Proximity head heating method and apparatus

Proximity head heating method and apparatus

Method and apparatus for cleaning a substrate using non-Newtonian f...

Substrate proximity drying using in-situ local heating of substrate

Single phase proximity head having a controlled meniscus for treati...

Patents Applicationslast 30 patents

Method and Systems for Cleaning A Substrate

Method and Apparatus for Cleaning A Semiconductor Substrate

Controls of Ambient Environment During Wafer Drying Using Proximity...

METHOD AND SYSTEM FOR UNIFORMLY APPLYING A MULTI-PHASE CLEANING SOL...

Method of Low-K Dielectric Film Repair

METHOD AND APPARATUS FOR CLEANING A SUBSTRATE USING NON-NEWTONIAN F...

Apparatus for Cleaning a Semiconductor Substrate

METHOD OF DIELECTRIC FILM TREATMENT

Method and System for Uniformly Applying a Multi-Phase Cleaning Sol...

Substrate Cleaning System Using Stabilized Fluid Solutions

SUBSTRATE CLEANING TECHNIQUE EMPLOYING MULTI-PHASE SOLUTION

METHOD FOR REMOVING MATERIAL FROM SEMICONDUCTOR WAFER AND APPARATUS...

REDUCTION OF ENTRANCE AND EXIT MARKS LEFT BY A SUBSTRATE-PROCESSING...

Apparatus for Cleaning a Semiconductor Substrate

Cleaning Compound and Method and System for Using the Cleaning Comp...

METHOD AND APPARATUS FOR CLEANING A SUBSTRATE USING NON-NEWTONIAN F...

APPARATUS AND METHOD FOR DEPOSITING AND PLANARIZING THIN FILMS OF S...

Method and System for Uniformly Applying a Multi-Phase Cleaning Sol...

MATERIAL FOR CLEANING A SUBSTRATE

Apparatus for Contained Chemical Surface Treatment

Proximity Head Heating Method and Apparatus

Two-Phase Substrate Cleaning Material

Method for Removing Contamination from a Substrate and for Making a...

Method and Apparatus for Removing Contamination from Substrate

Method of low-k dielectric film repair

METHOD AND MATERIAL FOR CLEANING A SUBSTRATE

APPARATUS AND SYSTEM FOR CLEANING A SUBSTRATE

METHOD OF DIELECTRIC FILM TREATMENT

METHOD OF PREVENTING PATTERN COLLAPSE DURING RINSING AND DRYING

Method of damaged low-k dielectric film layer removal