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Josef Mathuni
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Muenchen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for producing microcomponents and use of
Patent number
8,815,746
Issue date
Aug 26, 2014
R3T GmbH Rapid Reactive Radicals Technology
Josef Mathuni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus for generating excited and/or ionized particles in a plas...
Patent number
7,665,416
Issue date
Feb 23, 2010
R3T GmbH Rapid Reactive Radicals Technology
Alexander Gschwandtner
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Process for the plasma etching of materials not containing silicon
Patent number
7,071,110
Issue date
Jul 4, 2006
Infineon Technologies AG
Josef Mathuni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photomask, in particular alternating phase shift mask, with compens...
Patent number
7,063,921
Issue date
Jun 20, 2006
Infineon Technologies AG
Wolfgang Dettman
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Production method for a halftone phase mask
Patent number
6,919,147
Issue date
Jul 19, 2005
Infineon Technologies AG
Josef Mathuni
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Device to generate excited/ionized particles in a plasma
Patent number
6,706,141
Issue date
Mar 16, 2004
R3T Rapid Reactive Radicals Technology
Heinz Steinhardt
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for producing an alternating phase mask
Patent number
6,569,772
Issue date
May 27, 2003
Infineon Technologies AG
Josef Mathuni
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Assembly for the manufacture of highly integrated circuits on a sem...
Patent number
6,152,073
Issue date
Nov 28, 2000
Infineon Technologies AG
Josef Mathuni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for plasma-supported back etching of a semiconductor wafer
Patent number
6,013,136
Issue date
Jan 11, 2000
Siemens Aktiengesellschaft
Josef Mathuni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching damaged zones on an edge of a semiconductor subs...
Patent number
5,945,351
Issue date
Aug 31, 1999
Siemens Aktiengesellschaft
Josef Mathuni
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for etching a semiconductor substrate and etching system
Patent number
5,874,366
Issue date
Feb 23, 1999
Siemens Aktiengesellschaft
Roland Sporer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for damage etching the back side of a semiconductor disk hav...
Patent number
5,693,182
Issue date
Dec 2, 1997
Siemens Aktiengesellschaft
Josef Mathuni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for generating excited neutral particles for etching and dep...
Patent number
5,489,362
Issue date
Feb 6, 1996
Secon Halbleiterproduktionsgeraete Gesellschaft mbH
Heinz Steinhardt
E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES
Information
Patent Grant
Method for manufacturing a trench capacitor of a one-transistor mem...
Patent number
5,073,515
Issue date
Dec 17, 1991
Siemens Aktiengesellschaft
Siegfried Roehl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of structuring with metal oxide masks by reactive ion-beam e...
Patent number
4,390,394
Issue date
Jun 28, 1983
Siemens Aktiengesellschaft
Josef Mathuni
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Apparatus and Method for Producing Microcomponents and Use Of
Publication number
20120325264
Publication date
Dec 27, 2012
R3T GmbH Rapid Reactive Radicals Technology
Josef MATHUNI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Apparatus and method for producing microcomponents and use of
Publication number
20090212018
Publication date
Aug 27, 2009
R3T GmbH Rapid Reactive Radicals Technology
Josef MATHUNI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Apparatus for generating excited and/or ionized particles in a plas...
Publication number
20060290301
Publication date
Dec 28, 2006
Alexander Gschwandtner
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Photomask, in particular alternating phase shift mask, with compens...
Publication number
20040115442
Publication date
Jun 17, 2004
Wolfgang Dettman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Production method for a halftone phase mask
Publication number
20040058252
Publication date
Mar 25, 2004
Josef Mathuni
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Process for the plasma etching of materials not containing silicon
Publication number
20030143858
Publication date
Jul 31, 2003
Josef Mathuni
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and device for delacquering an area on a mask substrate
Publication number
20020137353
Publication date
Sep 26, 2002
Josef Mathuni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for producing an alternating phase mask
Publication number
20020127480
Publication date
Sep 12, 2002
Josef Mathuni
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY