Abstract of "Chemical Etching of Silicon Wafer Rim", IBM Technical Disclosure Bulletin, Jun. 1981. |
"Spin Etcher for Removal of Backside Depositions" (Gaulhofer), 400 Solid State Technology, vol. 34, No. 5, May 1991, pp. 57-58 and 219. |
Japanese Patent Abstract No. 2-192717 (Isono), dated Jul. 30, 1990. |
Japanese Patent Abstract No. 58-98925 (Ishikawa), dated Jun. 13, 1983. |
Japanese Patent Abstract No. 1-196832 (Sato), dated Aug. 8, 1989. |
Japanese Patent Abstract No. 7-142449 (Kiyotaka), dated Jun. 2, 1995. |
Japanese Patent Abstract 07-142449 A (Masuda, K.) dated Jun. 2, 1995. |
Japanese Patent Abstract 2-192717 (Kenji O.) dated Jul. 30, 1990. |
Japanese Patent Abstract 58-98925 (Oonori I.) dated Jun. 13, 1983. |
Japanese Patent Abstract 1-196832 (Mitsuo S.), dated Aug. 8, 1989. |