Activation or excitation of reactive gases outside the coating chamber

Industry

CPC
C23C14/0026

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/0026Activation or excitation of reactive gases outside the coating chamber

Industries

Patents Grantslast 30 patents

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Method for formation of a transition metal dichalcogenide (TMDC) ma...
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- Imec VZW
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Radical generator and molecular beam epitaxy apparatus
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- Issue date Jun 4, 2019
- National University Corporation Nagoya University
- Masaru Hori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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In situ nitrogen doping of co-evaporated copper-zinc-tin-sulfo-sele...
- Patent number 10,304,979
- Issue date May 28, 2019
- International Business Machines Corporation
- Nestor A. Bojarczuk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In situ nitrogen doping of co-evaporated copper-zinc-tin-sulfo-sele...
- Patent number 9,911,879
- Issue date Mar 6, 2018
- International Business Machines Corporation
- Nestor A. Bojarczuk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Luminescent materials that emit light in the visible range or the n...
- Patent number 9,660,111
- Issue date May 23, 2017
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Information Patent Grant
Oxide coated cutting insert
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- Issue date Apr 2, 2013
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- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Oxide coated cutting insert
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- Issue date Apr 2, 2013
- Seco Tools AB
- Mats Johansson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Method and apparatus for producing semiconductor films and related...
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Group-III metal nitride and preparation thereof
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Information Patent Grant
Hybrid beam deposition system and methods for fabricating metal oxi...
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- Henry W. White
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Information Patent Grant
Charge-free method of forming nanostructures on a substrate
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- Issue date Jul 20, 2010
- LOS ALAMOS NATIONAL SECURITY, LLC
- Mark Hoffbauer
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Information Patent Grant
Method and apparatus for manufacturing a zinc oxide thin film at lo...
- Patent number 7,744,965
- Issue date Jun 29, 2010
- Yamanashi University
- Takashi Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sp3 bond boron nitride emitting light in ultraviolet region, its pr...
- Patent number 7,419,572
- Issue date Sep 2, 2008
- National Institute for Materials Science
- Shojiro Komatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charge-free low-temperature method of forming thin film-based nanos...
- Patent number 7,393,762
- Issue date Jul 1, 2008
- Los Alamos National Secruity, LLC
- Mark Hoffbauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor structures and methods of fabricating semiconductor s...
- Patent number 7,141,857
- Issue date Nov 28, 2006
- FREESCALE SEMICONDUCTOR, INC.
- Zhiyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for depositing a low work function material
- Patent number 7,118,630
- Issue date Oct 10, 2006
- The Regents of the University of California
- Mehdi Balooch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for preparing ferroelectric thin films
- Patent number 6,387,712
- Issue date May 14, 2002
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- Yoshihiko Yano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method and device for manufacturing a thin film and magnestic recor...
- Patent number 6,251,230
- Issue date Jun 26, 2001
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film structure, electronic device, recording medium, and process of...
- Patent number 6,121,647
- Issue date Sep 19, 2000
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low work function surface layers produced by laser ablation using s...
- Patent number 6,120,857
- Issue date Sep 19, 2000
- The Regents of the University of California
- Mehdi Balooch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low scatter, high quality water clear zinc sulfide
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- Issue date Jul 4, 2000
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- Jitendra Singh Goela
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Information Patent Grant
RF induction plasma source generating apparatus
- Patent number 6,073,578
- Issue date Jun 13, 2000
- Electronics And Telecommunications Research Insitute
- Kyu-Hwan Shim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for manufacturing a thin film and magnetic record...
- Patent number 6,066,240
- Issue date May 23, 2000
- Matsushita Electric Industrial Co. Ltd.
- Kazuyoshi Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for manufacturing a thin film and magnetic record...
- Patent number 5,985,423
- Issue date Nov 16, 1999
- Matsushita Electric Industrial Co., Ltd.
- Kazuyoshi Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for manufacturing a thin film and magnetic record...
- Patent number 5,962,066
- Issue date Oct 5, 1999
- Matsushita Electric Industrial Co. Ltd.
- Kazuyoshi Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming a piezoelectric layer with improved texture
- Patent number 5,952,059
- Issue date Sep 14, 1999
- Texas Instruments Incorporated
- Edward A. Beam
- C30 - CRYSTAL GROWTH
Information Patent Grant
Process of making squid device having tilt-boundary junction
- Patent number 5,873,985
- Issue date Feb 23, 1999
- Sanyo Electric Co., Ltd.
- Seiichi Tokunaga
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of producing film of nitrogen-doped II-VI group compound sem...
- Patent number 5,865,897
- Issue date Feb 2, 1999
- Sony Corporation
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- C30 - CRYSTAL GROWTH
Information Patent Grant
Magnetic recording medium with a magnetic layer having a specific o...
- Patent number 5,759,710
- Issue date Jun 2, 1998
- Matsushita Electric Industrial Co., Ltd.
- Kazuyoshi Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Unibody gas plasma source technology
- Patent number 5,698,168
- Issue date Dec 16, 1997
- Chorus Corporation
- Scott W. Priddy
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

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- Igor V. Belousov
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OXIDE COATED CUTTING INSERT
- Publication number 20110045245
- Publication date Feb 24, 2011
- Seco Tools AB
- Mats Johansson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
OXIDE COATED CUTTING INSERT
- Publication number 20110044775
- Publication date Feb 24, 2011
- Seco Tools AB
- Mats Johansson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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GROUP III-V NITRIDE LAYER AND METHOD FOR PRODUCING THE SAME
- Publication number 20100163931
- Publication date Jul 1, 2010
- Kanagawa Academy of Science and Technology
- Hiroshi Fujioka
- C30 - CRYSTAL GROWTH
Information Patent Application
GROUP-III METAL NITRIDE AND PREPARATION THEREOF
- Publication number 20100136770
- Publication date Jun 3, 2010
- MOSAIC CRYSTALS
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- C30 - CRYSTAL GROWTH
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Charge-free low-temperature method of forming thin film-based nanos...
- Publication number 20090068821
- Publication date Mar 12, 2009
- Mark Hoffbauer
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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METHOD AND APPARATUS FOR PRODUCING SEMICONDUCTOR FILMS, PHOTOELECTR...
- Publication number 20080072962
- Publication date Mar 27, 2008
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Charge-free low-temperature method of forming thin film-based nanos...
- Publication number 20070114124
- Publication date May 24, 2007
- The Regents of the University of California.
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Information Patent Application
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- Publication number 20070114207
- Publication date May 24, 2007
- The Regents of the University of California.
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Film growth at low pressure mediated by liquid flux and induced by...
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Method and apparatus for manufacturing a zinc oxide thin film at lo...
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- Yamanashi University
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Hybrid beam deposition system and methods for fabricating metal oxi...
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- Henry W. White
- C30 - CRYSTAL GROWTH
Information Patent Application
Sp3 bond boron nitride emitting light in ultraviolet region, its pr...
- Publication number 20060163527
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- NATIONAL INSTITUTE FOR MATERIALS SCIENCE
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Semiconductor structures and methods of fabricating semiconductor s...
- Publication number 20060003602
- Publication date Jan 5, 2006
- Zhiyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Film growth at low pressure mediated by liquid flux and induced by...
- Publication number 20030054105
- Publication date Mar 20, 2003
- Robert H. Hammond
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vacuum deposition system and thin-film deposition process
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- Ryuji Biro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Activation or excitation of reactive gases outside the coating chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for formation of a transition metal dichalcogenide (TMDC) ma...

Radical generator and molecular beam epitaxy apparatus

In situ nitrogen doping of co-evaporated copper-zinc-tin-sulfo-sele...

In situ nitrogen doping of co-evaporated copper-zinc-tin-sulfo-sele...

Luminescent materials that emit light in the visible range or the n...

Oxide coated cutting insert

Oxide coated cutting insert

Method and apparatus for producing semiconductor films and related...

Group-III metal nitride and preparation thereof

Hybrid beam deposition system and methods for fabricating metal oxi...

Charge-free method of forming nanostructures on a substrate

Method and apparatus for manufacturing a zinc oxide thin film at lo...

Sp3 bond boron nitride emitting light in ultraviolet region, its pr...

Charge-free low-temperature method of forming thin film-based nanos...

Semiconductor structures and methods of fabricating semiconductor s...

Apparatus for depositing a low work function material

Process for preparing ferroelectric thin films

Method and device for manufacturing a thin film and magnestic recor...

Film structure, electronic device, recording medium, and process of...

Low work function surface layers produced by laser ablation using s...

Low scatter, high quality water clear zinc sulfide

RF induction plasma source generating apparatus

Method and device for manufacturing a thin film and magnetic record...

Method and device for manufacturing a thin film and magnetic record...

Method and device for manufacturing a thin film and magnetic record...

Forming a piezoelectric layer with improved texture

Process of making squid device having tilt-boundary junction

Method of producing film of nitrogen-doped II-VI group compound sem...

Magnetic recording medium with a magnetic layer having a specific o...

Unibody gas plasma source technology

Patents Applicationslast 30 patents

FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION

YTTRIUM OXIDE COATED OPTICAL ELEMENTS WITH IMPROVED MID-INFRARED PE...

Vapor Deposition of Ceramic Coatings

OXIDE COATED CUTTING INSERT

OXIDE COATED CUTTING INSERT

GROUP III-V NITRIDE LAYER AND METHOD FOR PRODUCING THE SAME

GROUP-III METAL NITRIDE AND PREPARATION THEREOF

Charge-free low-temperature method of forming thin film-based nanos...

METHOD AND APPARATUS FOR PRODUCING SEMICONDUCTOR FILMS, PHOTOELECTR...

Charge-free low-temperature method of forming thin film-based nanos...

Charge-free method of forming nanostructures on a substrate

Film growth at low pressure mediated by liquid flux and induced by...

Method and apparatus for manufacturing a zinc oxide thin film at lo...

Hybrid beam deposition system and methods for fabricating metal oxi...

Sp3 bond boron nitride emitting light in ultraviolet region, its pr...

Semiconductor structures and methods of fabricating semiconductor s...

Film growth at low pressure mediated by liquid flux and induced by...

Vacuum deposition system and thin-film deposition process