Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes

Industry

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Patents Grantslast 30 patents

Information Patent Grant
EUV light generation apparatus, electronic device manufacturing met...
- Patent number 12,185,449
- Issue date Dec 31, 2024
- Gigaphoton Inc.
- Fumio Iwamoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor manufacturing apparatus and operating method thereof
- Patent number 12,185,450
- Issue date Dec 31, 2024
- Samsung Electronics Co., Ltd.
- Dohyung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Linear accelerator system for stable pulsing at multiple dose levels
- Patent number 12,185,448
- Issue date Dec 31, 2024
- Teledyne ETM, Inc.
- William L. Nighan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Calibration system for an extreme ultraviolet light source
- Patent number 12,174,550
- Issue date Dec 24, 2024
- ASML Netherlands B.V.
- Daniel Jason Riggs
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System for monitoring a plasma
- Patent number 12,171,053
- Issue date Dec 17, 2024
- ASML Netherlands B.V.
- Michael Anthony Purvis
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV light source with a beam positioning device
- Patent number 12,171,054
- Issue date Dec 17, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing SE
- Martin Lambert
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV light source and apparatus for lithography
- Patent number 12,167,525
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shang-Chieh Chien
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and system for generating droplets for EUV photolithography...
- Patent number 12,167,526
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Kuang Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target substance replenishment device, extreme ultraviolet light ge...
- Patent number 12,150,233
- Issue date Nov 19, 2024
- Gigaphoton Inc.
- Yutaka Shiraishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Droplet generator nozzle
- Patent number 12,139,436
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Dietmar Uwe Herbert Trees
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for mitigating contamination
- Patent number 12,130,555
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Ping Yen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Rotating target for extreme ultraviolet source with liquid metal
- Patent number 12,133,318
- Issue date Oct 29, 2024
- KLA Corporation
- Alexander Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
- Patent number 12,133,319
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Ya Cheng
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Mechanical alignment of x-ray sources
- Patent number 12,120,807
- Issue date Oct 15, 2024
- Excillium AB
- Johan Kronstedt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV lithography apparatus
- Patent number 12,119,129
- Issue date Oct 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng Hung Tsai
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Shock wave visualization for extreme ultraviolet plasma optimization
- Patent number 12,114,412
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Shuo Su
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
- Patent number 12,114,411
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Huan Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser sustained plasma and endoscopy light source
- Patent number 12,108,515
- Issue date Oct 1, 2024
- Excelitas Technologies Singapore Pte. Ltd.
- Rudi Blondia
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for cleaning an EUV mask
- Patent number 12,099,310
- Issue date Sep 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Hui Li
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for using radiation source apparatus
- Patent number 12,096,543
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chiao-Hua Cheng
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithography thermal control
- Patent number 12,096,544
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tai-Yu Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser system for source material conditioning in an EUV light source
- Patent number 12,085,862
- Issue date Sep 10, 2024
- ASML Netherlands B.V.
- Matthew Ryan Graham
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Control of dynamic gas lock flow inlets of an intermediate focus cap
- Patent number 12,085,861
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Kai Chang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for monitoring and controlling extreme ultraviole...
- Patent number 12,085,860
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tai-Yu Chen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Particle image velocimetry of extreme ultraviolet lithography systems
- Patent number 12,085,585
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- En Hao Lai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for detecting debris in a photolithography system
- Patent number 12,085,865
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Yu Tu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser system for target metrology and alteration in an EUV light so...
- Patent number 12,078,934
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Robert Jay Rafac
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Droplet generator assembly and method of replacing components
- Patent number 12,063,734
- Issue date Aug 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Kuang Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Droplet generator and method of servicing a photolithographic tool
- Patent number 12,055,864
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Huan Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithography contamination control
- Patent number 12,055,867
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chieh Hsieh
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL SYSTEM AND METHOD FOR A RADIATION SOURCE
- Publication number 20250008634
- Publication date Jan 2, 2025
- ASML NETHERLANDS B.V.
- Andrey Sergeevich TYCHKOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Acoustic Xenon Droplet Generator
- Publication number 20240431012
- Publication date Dec 26, 2024
- KLA Corporation
- Sherman Seelinger
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE WITH THERMAL STABILIZATION
- Publication number 20240422888
- Publication date Dec 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Hsing Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER SYSTEM FOR TARGET METROLOGY AND ALTERATION IN AN EUV LIGHT SO...
- Publication number 20240419083
- Publication date Dec 19, 2024
- ASML NETHERLANDS B.V.
- Robert Jay Rafac
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION CHAMBER DEVICE AND ELECTRONIC...
- Publication number 20240422889
- Publication date Dec 19, 2024
- Gigaphoton Inc.
- Takayuki SUZUKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL MODULE FOR EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20240397603
- Publication date Nov 28, 2024
- ASML NETHERLANDS B.V.
- Erik Fernando Huerta
- G02 - OPTICS
Information Patent Application
CONTROL OF DYNAMIC GAS LOCK FLOW INLETS OF AN INTERMEDIATE FOCUS CAP
- Publication number 20240385527
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Kai CHANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ENTANGLED PHOTON LIGHT SOURCE SYSTEMS AND METHODS
- Publication number 20240389214
- Publication date Nov 21, 2024
- Purdue Research Foundation
- Niranjan H. Shivaram
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHY THERMAL CONTROL
- Publication number 20240389215
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tai-Yu CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR MONITORING AND CONTROLLING EXTREME ULTRAVIOLE...
- Publication number 20240377752
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tai-Yu CHEN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
SYSTEM AND METHOD FOR CLEANING AN EUV MASK
- Publication number 20240377766
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Hui LI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR DETECTING DEBRIS IN A PHOTOLITHOGRAPHY SYSTEM
- Publication number 20240377764
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Yu TU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
- Publication number 20240381515
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Ya CHENG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV LITHOGRAPHY APPARATUS
- Publication number 20240379259
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng Hung TSAI
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METHOD AND APPARATUS FOR MITIGATING CONTAMINATION
- Publication number 20240369938
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ping YEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET (EUV) RADIATION SOURCE APPARATUS, EUV LITHOGRAP...
- Publication number 20240369936
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- HSIN-FU TSENG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHY CONTAMINATION CONTROL
- Publication number 20240361708
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chieh HSIEH
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PARTICLE IMAGE VELOCIMETRY OF EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS
- Publication number 20240361350
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- En Hao LAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS
- Publication number 20240365460
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Kuang SUN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS
- Publication number 20240365461
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Kuang SUN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET DETECTION METROLOGY UTILIZING METROLOGY BEAM SCATTERING
- Publication number 20240361222
- Publication date Oct 31, 2024
- ASML NETHERLANDS B.V.
- Dustin Michael Urone
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV LIGHT SOURCE WITH A BEAM POSITIONING DEVICE
- Publication number 20240357726
- Publication date Oct 24, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS OF SERVICING PHOTOLITHOGRAPHIC APPARATUS
- Publication number 20240345493
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Huan CHEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SCANNING LINEAR ACCELERATOR SYSTEM FOR PRODUCING X-RAYS OF VARIABLE...
- Publication number 20240341025
- Publication date Oct 10, 2024
- Teledyne ETM, Inc.
- William L. NIGHAN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS OF GENERATING EXTREME ULTRAVIOLET RADIATION
- Publication number 20240324090
- Publication date Sep 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Shin CHENG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ELECTRON DENSITY DISTRIBUTIONS
- Publication number 20240324089
- Publication date Sep 26, 2024
- Petrus Wilhelmus SMORENBURG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ILLUMINATION APPARATUS AND ILLUMINATION METHOD
- Publication number 20240302670
- Publication date Sep 12, 2024
- Lasertec Corporation
- Keitaro HAYASHIDA
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER...
- Publication number 20240297476
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lithography Apparatus and Method
- Publication number 20240295825
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Chun Yen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH DOSE RATE RADIOTHERAPY, SYSTEM AND METHOD
- Publication number 20240285977
- Publication date Aug 29, 2024
- Varian Medical Systems, Inc.
- James CLAYTON
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes

Industry

Parent Industries

Current Industry

Sub Industries

Patents Grantslast 30 patents

EUV light generation apparatus, electronic device manufacturing met...

Semiconductor manufacturing apparatus and operating method thereof

Linear accelerator system for stable pulsing at multiple dose levels

Calibration system for an extreme ultraviolet light source

System for monitoring a plasma

EUV light source with a beam positioning device

EUV light source and apparatus for lithography

Method and system for generating droplets for EUV photolithography...

Target substance replenishment device, extreme ultraviolet light ge...

Droplet generator nozzle

Method and apparatus for mitigating contamination

Rotating target for extreme ultraviolet source with liquid metal

Apparatus and method for generating extreme ultraviolet radiation

Mechanical alignment of x-ray sources

EUV lithography apparatus

Shock wave visualization for extreme ultraviolet plasma optimization

Apparatus and method for generating extreme ultraviolet radiation

Laser sustained plasma and endoscopy light source

System and method for cleaning an EUV mask

Method for using radiation source apparatus

Lithography thermal control

Laser system for source material conditioning in an EUV light source

Control of dynamic gas lock flow inlets of an intermediate focus cap

System and method for monitoring and controlling extreme ultraviole...

Particle image velocimetry of extreme ultraviolet lithography systems

System and method for detecting debris in a photolithography system

Laser system for target metrology and alteration in an EUV light so...

Droplet generator assembly and method of replacing components

Droplet generator and method of servicing a photolithographic tool

Lithography contamination control

Patents Applicationslast 30 patents

OPTICAL SYSTEM AND METHOD FOR A RADIATION SOURCE

Acoustic Xenon Droplet Generator

EXTREME ULTRAVIOLET LIGHT SOURCE WITH THERMAL STABILIZATION

LASER SYSTEM FOR TARGET METROLOGY AND ALTERATION IN AN EUV LIGHT SO...

EXTREME ULTRAVIOLET LIGHT GENERATION CHAMBER DEVICE AND ELECTRONIC...

OPTICAL MODULE FOR EXTREME ULTRAVIOLET LIGHT SOURCE

CONTROL OF DYNAMIC GAS LOCK FLOW INLETS OF AN INTERMEDIATE FOCUS CAP

ENTANGLED PHOTON LIGHT SOURCE SYSTEMS AND METHODS

LITHOGRAPHY THERMAL CONTROL

SYSTEM AND METHOD FOR MONITORING AND CONTROLLING EXTREME ULTRAVIOLE...

SYSTEM AND METHOD FOR CLEANING AN EUV MASK

SYSTEM AND METHOD FOR DETECTING DEBRIS IN A PHOTOLITHOGRAPHY SYSTEM

APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION

EUV LITHOGRAPHY APPARATUS

METHOD AND APPARATUS FOR MITIGATING CONTAMINATION

EXTREME ULTRAVIOLET (EUV) RADIATION SOURCE APPARATUS, EUV LITHOGRAP...

LITHOGRAPHY CONTAMINATION CONTROL

PARTICLE IMAGE VELOCIMETRY OF EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS

DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS

DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS

DROPLET DETECTION METROLOGY UTILIZING METROLOGY BEAM SCATTERING

EUV LIGHT SOURCE WITH A BEAM POSITIONING DEVICE

METHODS OF SERVICING PHOTOLITHOGRAPHIC APPARATUS

SCANNING LINEAR ACCELERATOR SYSTEM FOR PRODUCING X-RAYS OF VARIABLE...

METHODS OF GENERATING EXTREME ULTRAVIOLET RADIATION

METHODS AND APPARATUS FOR CONTROLLING ELECTRON DENSITY DISTRIBUTIONS

ILLUMINATION APPARATUS AND ILLUMINATION METHOD

METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER...

Lithography Apparatus and Method

HIGH DOSE RATE RADIOTHERAPY, SYSTEM AND METHOD