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Bonding of solid lids or wafers to the substrate
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B81C1/00269
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
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B81C1/00269
Bonding of solid lids or wafers to the substrate
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Patents Grants
last 30 patents
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Patent Grant
Fabrication method for a MEMS device
Patent number
12,017,909
Issue date
Jun 25, 2024
Imec VZW
Deniz Sabuncuoglu Tezcan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
11,981,559
Issue date
May 14, 2024
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
11,897,760
Issue date
Feb 13, 2024
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensing module and manufacturing method thereof
Patent number
11,894,473
Issue date
Feb 6, 2024
Ruei Chi Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
11,884,537
Issue date
Jan 30, 2024
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer level stacked structures having integrated passive features
Patent number
11,854,958
Issue date
Dec 26, 2023
General Electric Company
Marco Francesco Aimi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
11,834,330
Issue date
Dec 5, 2023
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device package and a method of manufacturing the same
Patent number
11,784,296
Issue date
Oct 10, 2023
Advanced Semiconductor Engineering, Inc.
Mei-Yi Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bonding process for forming semiconductor device structure
Patent number
11,772,963
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Hang Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and device for bonding of substrates
Patent number
11,742,205
Issue date
Aug 29, 2023
EV Group E. Thallner GmbH
Thomas Wagenleitner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Eutectic bonding with AlGe
Patent number
11,724,933
Issue date
Aug 15, 2023
Rohm Co., Ltd.
Martin Heller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaging method and associated packaging structure
Patent number
11,713,241
Issue date
Aug 1, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Chih-Ming Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for manufacturing flexible electronics
Patent number
11,688,640
Issue date
Jun 27, 2023
Next Biometrics Group ASA
Tian Xiao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS packages and methods of manufacture thereof
Patent number
11,685,648
Issue date
Jun 27, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chen-Hua Yu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capping plate for panel scale packaging of MEMS products
Patent number
11,685,649
Issue date
Jun 27, 2023
OBSIDIAN SENSORS, INC.
John Hong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical structure with bonded cover
Patent number
11,685,650
Issue date
Jun 27, 2023
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical electronics device
Patent number
11,667,523
Issue date
Jun 6, 2023
Texas Instruments Incorporated
Simon Joshua Jacobs
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bonded structures
Patent number
11,670,615
Issue date
Jun 6, 2023
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Liang Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods and devices for microelectromechanical resonators
Patent number
11,664,781
Issue date
May 30, 2023
STATHERA IP HOLDINGS INC.
Vamsy Chodavarapu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS vibrator and MEMS oscillator
Patent number
11,655,145
Issue date
May 23, 2023
Kaneka Corporation
Junji Sone
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMs using outgassing material to adjust the pressure level in a ca...
Patent number
11,634,318
Issue date
Apr 25, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Yuan-Chih Hsieh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaged die and assembling method
Patent number
11,597,647
Issue date
Mar 7, 2023
TDK Corporation
Andreas Barbul
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device manufacturing method and mems device
Patent number
11,597,648
Issue date
Mar 7, 2023
Murata Manufacturing Co., Ltd.
Masakazu Fukumitsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Power electronics assemblies with CIO bonding layers and double sid...
Patent number
11,527,458
Issue date
Dec 13, 2022
Toyota Motor Engineering & Manufacturing North America, Inc.
Ercan Mehmet Dede
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device and method for manufacturing the same
Patent number
11,518,673
Issue date
Dec 6, 2022
MIRAMEMS SENSING TECHNOLOGY CO., LTD
Yu-Hao Chien
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus having a bondline structure and a diffusion barrier with...
Patent number
11,505,451
Issue date
Nov 22, 2022
Texas Instruments Incorporated
Ganapathy Subramaniam Sivakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a micromechanical device having a damper struc...
Patent number
11,505,455
Issue date
Nov 22, 2022
Robert Bosch GmbH
Holger Hoefer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods and devices for microelectromechanical resonators
Patent number
11,479,460
Issue date
Oct 25, 2022
STATHERA IP HOLDINGS INC.
Vamsy Chodavarapu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer level stacked structures having integrated passive features
Patent number
11,430,728
Issue date
Aug 30, 2022
General Electric Company
Marco Francesco Aimi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Seal for microelectronic assembly
Patent number
11,417,576
Issue date
Aug 16, 2022
INVENSAS BONDING TECHNOLOGIES, INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR MANUFACTURING CURVED SURFACE SUPPORT STRUCTURE, AND HEMI...
Publication number
20240199414
Publication date
Jun 20, 2024
TOKYO KEIKI INC.
Takayoshi Yamaguchi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR BONDING A MICROELECTROMECHANICAL DEVICE
Publication number
20240166499
Publication date
May 23, 2024
Murata Manufacturing Co., Ltd.
Mikko PARTANEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Encapsulated MEMS Switching Element, Device and Production Method
Publication number
20240150166
Publication date
May 9, 2024
SIEMENS AKTIENGESELLSCHAFT
Oliver Raab
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE INCLUDI...
Publication number
20240124299
Publication date
Apr 18, 2024
STMicroelectronics S.r.l.
Paolo FERRARI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CHIP PACKAGE AND MANUFACTURING METHOD THEREOF
Publication number
20240116751
Publication date
Apr 11, 2024
XINTEC INC.
Chia-Ming CHENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF MAKING
Publication number
20240051818
Publication date
Feb 15, 2024
Taiwan Semiconductor Manufacturing Company Limited
Hsi-Cheng HSU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH AN IMPROVED CAP AND RELATED MANUFACTURING PROCESS
Publication number
20240043265
Publication date
Feb 8, 2024
STMicroelectronics S.r.l.
Giorgio ALLEGATO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL STRUCTURE WITH BONDED COVER
Publication number
20240002218
Publication date
Jan 4, 2024
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEAL FOR MICROELECTRONIC ASSEMBLY
Publication number
20230420313
Publication date
Dec 28, 2023
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BONDING PROCESS FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE
Publication number
20230365402
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Hang Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGING METHOD AND ASSOCIATED PACKAGING STRUCTURE
Publication number
20230357002
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing company Ltd.
Chih-Ming Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BONDED STRUCTURES
Publication number
20230361072
Publication date
Nov 9, 2023
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Liang Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THREE-DIMENSIONAL STRESS-SENSITIVE DEVICE
Publication number
20230339741
Publication date
Oct 26, 2023
Rosemount Aerospace Inc.
John C. Christenson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
Publication number
20230308076
Publication date
Sep 28, 2023
Stathera IP Holdings Inc.
Vamsy P. Chodavarapu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Packages and Methods of Manufacture Thereof
Publication number
20230278857
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chen-Hua Yu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME
Publication number
20230249961
Publication date
Aug 10, 2023
Taiwan Semiconductor Manufacturing company Ltd.
YUAN-CHIH HSIEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEALED CAVITY STRUCTURE AND METHOD FOR MANUFACTURING SEALED CAVITY...
Publication number
20230174373
Publication date
Jun 8, 2023
AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
Wooicheang Goh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HERMETICALLY SEALED PACKAGE AND METHOD FOR PRODUCING SAME
Publication number
20230128755
Publication date
Apr 27, 2023
SCHOTT AG
Antti Määttänen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSING MODULE AND MANUFACTURING METHOD THEREOF
Publication number
20230076715
Publication date
Mar 9, 2023
CHIP POSITION SYSTEM CO., LTD.
RUEI CHI CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROTECTIVE BONDLINE CONTROL STRUCTURE
Publication number
20230064645
Publication date
Mar 2, 2023
TEXAS INSTRUMENTS INCORPORATED
Ganapathy Subramaniam Sivakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Wafer level package for device
Publication number
20230050181
Publication date
Feb 16, 2023
Teknologian Tutkimuskeskus VTT Oy
Jae-Wung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
Publication number
20230051438
Publication date
Feb 16, 2023
Stathera IP Holdings Inc.
Vamsy Chodavarapu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
Publication number
20230045563
Publication date
Feb 9, 2023
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEAL FOR MICROELECTRONIC ASSEMBLY
Publication number
20220415734
Publication date
Dec 29, 2022
INVENSAS BONDING TECHNOLOGIES, INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WAFER LEVEL STACKED STRUCTURES HAVING INTEGRATED PASSIVE FEATURES
Publication number
20220367339
Publication date
Nov 17, 2022
GENERAL ELECTRIC COMPANY
Marco Francesco Aimi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...
Publication number
20220325396
Publication date
Oct 13, 2022
Taiwan Semiconductor Manufacturing Company Limited
Yuan-Chih Hsieh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANTENNA APPARATUS
Publication number
20220271416
Publication date
Aug 25, 2022
SOFANT TECHNOLOGIES LTD.
Nakul Raghavanand HARIDAS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE PACKAGE AND A METHOD OF MANUFACTURING THE SAME
Publication number
20220123192
Publication date
Apr 21, 2022
Advanced Semiconductor Engineering, Inc.
Mei-Yi WU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PACKAGING STRUCTURE AND MANUFACTURING METHOD THEREFOR
Publication number
20220112075
Publication date
Apr 14, 2022
Ningbo Semiconductor International Corporation (Shanghai Branch)
Xiaoshan QIN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BONDING PROCESS FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE
Publication number
20220063993
Publication date
Mar 3, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Hang Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY