Comb structures

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B81B2203/0136

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/0136Comb structures

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Comb electrode release process for MEMS structure
- Patent number 12,358,785
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor including a pressure sensor chip to detect a differ...
- Patent number 12,339,183
- Issue date Jun 24, 2025
- Murata Manufacturing Co., Ltd.
- Daiki Tsuji
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Comb-driven MEMS resonant scanner with full-circumferential range a...
- Patent number 12,332,428
- Issue date Jun 17, 2025
- The Regents of the University of Michigan
- Haijun Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrode arrangement for a micro-electro-mechanical system includi...
- Patent number 12,312,236
- Issue date May 27, 2025
- Robert Bosch GmbH
- Martin Putnik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Channel for decreasing damping asymmetry
- Patent number 12,312,235
- Issue date May 27, 2025
- Murata Manufacturing Co., Ltd.
- Akira Konno
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer
- Patent number 12,297,096
- Issue date May 13, 2025
- Soundskrit Inc.
- Stephane Leahy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system
- Patent number 12,264,064
- Issue date Apr 1, 2025
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Scott Lyall Cargill
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror arrays
- Patent number 12,259,546
- Issue date Mar 25, 2025
- ASML Netherlands B.V.
- Alexandre Halbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS-driven optical package with micro-LED array
- Patent number 12,253,715
- Issue date Mar 18, 2025
- Matthew E. Ward
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatic device, electrostatic device intermediate body and pr...
- Patent number 12,215,019
- Issue date Feb 4, 2025
- The University of Tokyo
- Hiroshi Toshiyoshi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device and method for manufacturing same
- Patent number 12,180,063
- Issue date Dec 31, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical arm array in micro-electromechanical system (MEMS)...
- Patent number 12,176,829
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Yu Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple layer electrode transducers
- Patent number 12,139,394
- Issue date Nov 12, 2024
- Soundskrit Inc.
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator package architecture
- Patent number 12,132,420
- Issue date Oct 29, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system device using a metallic movable part...
- Patent number 12,122,665
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Controlling one or more electrostatic comb structures of a micro-el...
- Patent number 12,116,267
- Issue date Oct 15, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatically driven comb structure of MEMS, micro-mirror using...
- Patent number 12,054,387
- Issue date Aug 6, 2024
- Tao Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-aligned vertical comb drive assembly
- Patent number 12,007,554
- Issue date Jun 11, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS-MEMS humidity sensor
- Patent number 12,000,792
- Issue date Jun 4, 2024
- HANGZHOU WEIMING XINKE TECHNOLOGY CO., LTD
- Han Xiao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
- Patent number 11,993,512
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yang-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical systems micromirrors and micromirror arrays
- Patent number 11,927,741
- Issue date Mar 12, 2024
- PRECISELEY MICROTECHNOLOGY CORP.
- Tiansheng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vehicle key and method of manufacturing the same
- Patent number 11,845,401
- Issue date Dec 19, 2023
- Hyundai Motor Company
- Ji Hyun Woo
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Dielectric comb for MEMS device
- Patent number 11,825,266
- Issue date Nov 21, 2023
- Knowles Electronics, LLC
- Mohsin Nawaz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) thermal sensor
- Patent number 11,796,396
- Issue date Oct 24, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device, assembly comprising the MEMS device, and method of ope...
- Patent number 11,770,659
- Issue date Sep 26, 2023
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Bert Kaiser
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical arm array in micro-electromechanical system (MEMS)...
- Patent number 11,757,378
- Issue date Sep 12, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Yu Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,740,452
- Issue date Aug 29, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,733,509
- Issue date Aug 22, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cellular array electrostatic actuator
- Patent number 11,713,240
- Issue date Aug 1, 2023
- Board of Regents, The University of Texas System
- Siavash Pourkamali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,703,679
- Issue date Jul 18, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ACCELERATION SENSOR
- Publication number 20250230034
- Publication date Jul 17, 2025
- AAC Kaitai Technologies (Wuhan) CO., LTD
- Shitao Yan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ARM FOR MICROELECTROMECHANICAL SYSTEM
- Publication number 20250230039
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Yu Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACCELEROMETER HAVING A HIGH MECHANICAL ROBUSTNESS
- Publication number 20250223152
- Publication date Jul 10, 2025
- STMicroelectronics International N.V.
- Francesco RIZZINI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF MAKING
- Publication number 20250223153
- Publication date Jul 10, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Yu-Hsun LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACOUSTIC SENSOR DEVICES WITH MULTIPLE SENSING ELEMENTS
- Publication number 20250206600
- Publication date Jun 26, 2025
- Soundskrit Inc.
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250206595
- Publication date Jun 26, 2025
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Piezoelectric Motion Limiters for MEMS Autofocus Actuator
- Publication number 20250187903
- Publication date Jun 12, 2025
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew NG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Controllable Reflective Optical Unit With MEMS Tip-Tilt Actuator
- Publication number 20250187904
- Publication date Jun 12, 2025
- MEMS DRIVE (NANJING) CO., LTD.
- Xiaolei LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS CANTILEVER-ENCLOSURE SPACING
- Publication number 20250178884
- Publication date Jun 5, 2025
- Soundskrit Inc.
- Yuhai Mei
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND MET...
- Publication number 20250171296
- Publication date May 29, 2025
- Industry-Academic Cooperation Foundation, Yonsei University
- Jongbaeg KIM
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMB STRUCTURE FOR MEMS ACCELEROMETER
- Publication number 20250138044
- Publication date May 1, 2025
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FABRICATING MICROMECHANICAL ARM ARRAY IN MICRO-ELECTROME...
- Publication number 20250132695
- Publication date Apr 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Yu Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCALE FLEXIBLE STRAIN SENSOR
- Publication number 20250122073
- Publication date Apr 17, 2025
- Carnegie Mellon University
- Jay Reddy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIFFERENTIAL DIRECTIONAL ACOUSTIC SENSOR DEVICE
- Publication number 20250122072
- Publication date Apr 17, 2025
- Soundskrit Inc.
- Benjamin Evans
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS
- Publication number 20250115472
- Publication date Apr 10, 2025
- Rohm Co., Ltd.
- Andrew Scott HOCKING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURES WITH GAPS
- Publication number 20250109012
- Publication date Apr 3, 2025
- Murata Manufacturing Co., Ltd.
- Mikko PARTANEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SE...
- Publication number 20250083949
- Publication date Mar 13, 2025
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20250074764
- Publication date Mar 6, 2025
- Beijing BOE Technology Development Co., Ltd.
- Wenbo LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250026632
- Publication date Jan 23, 2025
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE AND MICROELECTROMECHANICAL LOUDSPEAKER
- Publication number 20250019228
- Publication date Jan 16, 2025
- ROBERT BOSCH GmbH
- Maximilian Sommer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250019225
- Publication date Jan 16, 2025
- Rohm Co., Ltd.
- Daisuke Nishinohara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACOUSTIC SENSOR DEVICE WITH MULTI-SIDED ANCHOR
- Publication number 20240425353
- Publication date Dec 26, 2024
- Soundskrit Inc.
- Stephane Leahy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...
- Publication number 20240359969
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240336474
- Publication date Oct 10, 2024
- AAC TECHNOLOGIES PTE. LTD
- Houming Chong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
- Publication number 20240300805
- Publication date Sep 12, 2024
- Murata Manufacturing Co., Ltd.
- Ville-Pekka RYTKÖNEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY
- Publication number 20240295728
- Publication date Sep 5, 2024
- Lumentum Operations LLC
- Wenlin JIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...
- Publication number 20240270568
- Publication date Aug 15, 2024
- XI'AN CHISHINE OPTOELECTRONICS TECHNOLOGY CO., LTD
- Tao YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM
- Publication number 20240262680
- Publication date Aug 8, 2024
- SILMACH
- Marc Sworowski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20240262681
- Publication date Aug 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yang-Che CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electromechanical Microsystem for Moving a Mechanical Part in Two O...
- Publication number 20240250620
- Publication date Jul 25, 2024
- SILMACH
- Thierry CÔTE
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Comb structures

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Comb electrode release process for MEMS structure

Pressure sensor including a pressure sensor chip to detect a differ...

Comb-driven MEMS resonant scanner with full-circumferential range a...

Electrode arrangement for a micro-electro-mechanical system includi...

Channel for decreasing damping asymmetry

MEMS transducer

Microelectromechanical system

Micromirror arrays

MEMS-driven optical package with micro-LED array

Electrostatic device, electrostatic device intermediate body and pr...

Optical device and method for manufacturing same

Micromechanical arm array in micro-electromechanical system (MEMS)...

Multiple layer electrode transducers

MEMS actuator package architecture

Micro-electromechanical system device using a metallic movable part...

Controlling one or more electrostatic comb structures of a micro-el...

Electrostatically driven comb structure of MEMS, micro-mirror using...

Self-aligned vertical comb drive assembly

CMOS-MEMS humidity sensor

Dual micro-electro mechanical system and manufacturing method thereof

Micro-electro-mechanical systems micromirrors and micromirror arrays

Vehicle key and method of manufacturing the same

Dielectric comb for MEMS device

Micro-electro-mechanical system (MEMS) thermal sensor

MEMS device, assembly comprising the MEMS device, and method of ope...

Micromechanical arm array in micro-electromechanical system (MEMS)...

Optical device

Optical device

Cellular array electrostatic actuator

Optical device

Patents Applicationslast 30 patents

ACCELERATION SENSOR

MEMS ARM FOR MICROELECTROMECHANICAL SYSTEM

MEMS ACCELEROMETER HAVING A HIGH MECHANICAL ROBUSTNESS

SEMICONDUCTOR STRUCTURE AND METHOD OF MAKING

ACOUSTIC SENSOR DEVICES WITH MULTIPLE SENSING ELEMENTS

MEMS DEVICE

Piezoelectric Motion Limiters for MEMS Autofocus Actuator

Controllable Reflective Optical Unit With MEMS Tip-Tilt Actuator

MEMS CANTILEVER-ENCLOSURE SPACING

MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND MET...

COMB STRUCTURE FOR MEMS ACCELEROMETER

METHOD FOR FABRICATING MICROMECHANICAL ARM ARRAY IN MICRO-ELECTROME...

MICROSCALE FLEXIBLE STRAIN SENSOR

DIFFERENTIAL DIRECTIONAL ACOUSTIC SENSOR DEVICE

MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS

MEMS STRUCTURES WITH GAPS

MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SE...

MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

MEMS DEVICE

MICROELECTROMECHANICAL DEVICE AND MICROELECTROMECHANICAL LOUDSPEAKER

MEMS DEVICE

ACOUSTIC SENSOR DEVICE WITH MULTI-SIDED ANCHOR

MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

IN-PLANE AND OUT-OF-PLANE ACCELEROMETER

SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY

ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...

METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM

DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

Electromechanical Microsystem for Moving a Mechanical Part in Two O...