Comb structures

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B81B2203/0136

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/0136Comb structures

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Micromirror arrays
- Patent number 12,259,546
- Issue date Mar 25, 2025
- ASML Netherlands B.V.
- Alexandre Halbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS-driven optical package with micro-LED array
- Patent number 12,253,715
- Issue date Mar 18, 2025
- Matthew E. Ward
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatic device, electrostatic device intermediate body and pr...
- Patent number 12,215,019
- Issue date Feb 4, 2025
- The University of Tokyo
- Hiroshi Toshiyoshi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device and method for manufacturing same
- Patent number 12,180,063
- Issue date Dec 31, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical arm array in micro-electromechanical system (MEMS)...
- Patent number 12,176,829
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Yu Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple layer electrode transducers
- Patent number 12,139,394
- Issue date Nov 12, 2024
- Soundskrit Inc.
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator package architecture
- Patent number 12,132,420
- Issue date Oct 29, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system device using a metallic movable part...
- Patent number 12,122,665
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Controlling one or more electrostatic comb structures of a micro-el...
- Patent number 12,116,267
- Issue date Oct 15, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatically driven comb structure of MEMS, micro-mirror using...
- Patent number 12,054,387
- Issue date Aug 6, 2024
- Tao Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-aligned vertical comb drive assembly
- Patent number 12,007,554
- Issue date Jun 11, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS-MEMS humidity sensor
- Patent number 12,000,792
- Issue date Jun 4, 2024
- HANGZHOU WEIMING XINKE TECHNOLOGY CO., LTD
- Han Xiao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
- Patent number 11,993,512
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yang-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical systems micromirrors and micromirror arrays
- Patent number 11,927,741
- Issue date Mar 12, 2024
- PRECISELEY MICROTECHNOLOGY CORP.
- Tiansheng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vehicle key and method of manufacturing the same
- Patent number 11,845,401
- Issue date Dec 19, 2023
- Hyundai Motor Company
- Ji Hyun Woo
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Dielectric comb for MEMS device
- Patent number 11,825,266
- Issue date Nov 21, 2023
- Knowles Electronics, LLC
- Mohsin Nawaz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) thermal sensor
- Patent number 11,796,396
- Issue date Oct 24, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device, assembly comprising the MEMS device, and method of ope...
- Patent number 11,770,659
- Issue date Sep 26, 2023
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Bert Kaiser
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical arm array in micro-electromechanical system (MEMS)...
- Patent number 11,757,378
- Issue date Sep 12, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Yu Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,740,452
- Issue date Aug 29, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,733,509
- Issue date Aug 22, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cellular array electrostatic actuator
- Patent number 11,713,240
- Issue date Aug 1, 2023
- Board of Regents, The University of Texas System
- Siavash Pourkamali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,703,679
- Issue date Jul 18, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,703,680
- Issue date Jul 18, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices comprising spring element and comb drive and associate...
- Patent number 11,703,681
- Issue date Jul 18, 2023
- Infineon Technologies AG
- Stephan Gerhard Albert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer
- Patent number 11,697,582
- Issue date Jul 11, 2023
- Soundskrit Inc.
- Stephane Leahy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Comb drive for microelectromechanical system
- Patent number 11,677,337
- Issue date Jun 13, 2023
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Anup Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,635,613
- Issue date Apr 25, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method for monitoring surface condition of contact surfa...
- Patent number 11,634,319
- Issue date Apr 25, 2023
- NATIONAL TAIWAN UNIVERSITY
- Wei-Chang Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS-driven optical package with micro-LED array
- Patent number 11,598,916
- Issue date Mar 7, 2023
- Matthew E. Ward
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SE...
- Publication number 20250083949
- Publication date Mar 13, 2025
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20250074764
- Publication date Mar 6, 2025
- Beijing BOE Technology Development Co., Ltd.
- Wenbo LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250026632
- Publication date Jan 23, 2025
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE AND MICROELECTROMECHANICAL LOUDSPEAKER
- Publication number 20250019228
- Publication date Jan 16, 2025
- ROBERT BOSCH GmbH
- Maximilian Sommer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250019225
- Publication date Jan 16, 2025
- Rohm Co., Ltd.
- Daisuke Nishinohara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACOUSTIC SENSOR DEVICE WITH MULTI-SIDED ANCHOR
- Publication number 20240425353
- Publication date Dec 26, 2024
- Soundskrit Inc.
- Stephane Leahy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...
- Publication number 20240359969
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240336474
- Publication date Oct 10, 2024
- AAC TECHNOLOGIES PTE. LTD
- Houming Chong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
- Publication number 20240300805
- Publication date Sep 12, 2024
- Murata Manufacturing Co., Ltd.
- Ville-Pekka RYTKÖNEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY
- Publication number 20240295728
- Publication date Sep 5, 2024
- Lumentum Operations LLC
- Wenlin JIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...
- Publication number 20240270568
- Publication date Aug 15, 2024
- XI'AN CHISHINE OPTOELECTRONICS TECHNOLOGY CO., LTD
- Tao YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM
- Publication number 20240262680
- Publication date Aug 8, 2024
- SILMACH
- Marc Sworowski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20240262681
- Publication date Aug 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yang-Che CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electromechanical Microsystem for Moving a Mechanical Part in Two O...
- Publication number 20240250620
- Publication date Jul 25, 2024
- SILMACH
- Thierry CÔTE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical System for Moving a Mechanical Part in Two O...
- Publication number 20240243672
- Publication date Jul 18, 2024
- SILMACH
- Thierry CÔTE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS
- Publication number 20240111148
- Publication date Apr 4, 2024
- Preciseley Microtechnology Corp.
- Tiansheng ZHOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vibration-Driven Energy Harvesting Element and Method for Manufactu...
- Publication number 20240106357
- Publication date Mar 28, 2024
- Saginomiya Seisakusho, Inc.
- Noriko Shimomura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Element and Vibration-Driven Energy Harvesting Device
- Publication number 20240083740
- Publication date Mar 14, 2024
- Saginomiya Seisakusho, Inc.
- Hisayuki Ashizawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS-DRIVEN OPTICAL PACKAGE WITH MICRO-LED ARRAY
- Publication number 20240061171
- Publication date Feb 22, 2024
- Matthew E. Ward
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240043262
- Publication date Feb 8, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- JHENG-HONG JIANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATIC MEMS MICROMIRROR
- Publication number 20240019687
- Publication date Jan 18, 2024
- Huawei Technologies Co., Ltd
- Xiaoshi Dong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-Electro-Mechanical System (Mems) Thermal Sensor
- Publication number 20230375416
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication metho...
- Publication number 20230348259
- Publication date Nov 2, 2023
- Vanguard International Semiconductor Corporation
- WAI MUN CHONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS TRANSDUCER
- Publication number 20230312335
- Publication date Oct 5, 2023
- Soundskrit Inc.
- Stephane Leahy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND SENSOR MODULE
- Publication number 20230257258
- Publication date Aug 17, 2023
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B60 - VEHICLES IN GENERAL
Information Patent Application
LONG STROKE MEMS ACTUATOR RESILIENT TO THE PULL-IN AND ELECTRONIC S...
- Publication number 20230253895
- Publication date Aug 10, 2023
- STMicroelectronics S.r.l.
- Andrea OPRENI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR CHIP AND PRESSURE SENSOR
- Publication number 20230228639
- Publication date Jul 20, 2023
- Murata Manufacturing Co., Ltd.
- Daiki TSUJI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS-DRIVEN OPTICAL PACKAGE WITH MICRO-LED ARRAY
- Publication number 20230213700
- Publication date Jul 6, 2023
- Matthew E. Ward
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Spacer Assembly
- Publication number 20230192474
- Publication date Jun 22, 2023
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS CHIP, MANUFACTURING METHOD THEREOF, MEMS DEVICE, AND ELECTRONI...
- Publication number 20230174370
- Publication date Jun 8, 2023
- Huawei Technologies Co., Ltd
- Fengpei SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Comb structures

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micromirror arrays

MEMS-driven optical package with micro-LED array

Electrostatic device, electrostatic device intermediate body and pr...

Optical device and method for manufacturing same

Micromechanical arm array in micro-electromechanical system (MEMS)...

Multiple layer electrode transducers

MEMS actuator package architecture

Micro-electromechanical system device using a metallic movable part...

Controlling one or more electrostatic comb structures of a micro-el...

Electrostatically driven comb structure of MEMS, micro-mirror using...

Self-aligned vertical comb drive assembly

CMOS-MEMS humidity sensor

Dual micro-electro mechanical system and manufacturing method thereof

Micro-electro-mechanical systems micromirrors and micromirror arrays

Vehicle key and method of manufacturing the same

Dielectric comb for MEMS device

Micro-electro-mechanical system (MEMS) thermal sensor

MEMS device, assembly comprising the MEMS device, and method of ope...

Micromechanical arm array in micro-electromechanical system (MEMS)...

Optical device

Optical device

Cellular array electrostatic actuator

Optical device

Optical device

MEMS devices comprising spring element and comb drive and associate...

MEMS transducer

Comb drive for microelectromechanical system

Optical device

Device and method for monitoring surface condition of contact surfa...

MEMS-driven optical package with micro-LED array

Patents Applicationslast 30 patents

MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SE...

MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

MEMS DEVICE

MICROELECTROMECHANICAL DEVICE AND MICROELECTROMECHANICAL LOUDSPEAKER

MEMS DEVICE

ACOUSTIC SENSOR DEVICE WITH MULTI-SIDED ANCHOR

MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

IN-PLANE AND OUT-OF-PLANE ACCELEROMETER

SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY

ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...

METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM

DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

Electromechanical Microsystem for Moving a Mechanical Part in Two O...

Microelectromechanical System for Moving a Mechanical Part in Two O...

MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS

Vibration-Driven Energy Harvesting Element and Method for Manufactu...

MEMS Element and Vibration-Driven Energy Harvesting Device

MEMS-DRIVEN OPTICAL PACKAGE WITH MICRO-LED ARRAY

SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME

ELECTROSTATIC MEMS MICROMIRROR

Micro-Electro-Mechanical System (Mems) Thermal Sensor

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication metho...

MEMS TRANSDUCER

SEMICONDUCTOR DEVICE AND SENSOR MODULE

LONG STROKE MEMS ACTUATOR RESILIENT TO THE PULL-IN AND ELECTRONIC S...

PRESSURE SENSOR CHIP AND PRESSURE SENSOR

MEMS-DRIVEN OPTICAL PACKAGE WITH MICRO-LED ARRAY

MEMS Spacer Assembly

MEMS CHIP, MANUFACTURING METHOD THEREOF, MEMS DEVICE, AND ELECTRONI...