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MEMS STRUCTURES WITH GAPS
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Publication number 20250109012
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Publication date Apr 3, 2025
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Murata Manufacturing Co., Ltd.
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Mikko PARTANEN
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MEMS DEVICE
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Publication number 20250026632
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Publication date Jan 23, 2025
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Rohm Co., Ltd.
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Martin Wilfried HELLER
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MEMS DEVICE
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Publication number 20250019225
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Publication date Jan 16, 2025
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Rohm Co., Ltd.
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Daisuke Nishinohara
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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ELECTROSTATIC MEMS MICROMIRROR
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Publication number 20240019687
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Publication date Jan 18, 2024
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Huawei Technologies Co., Ltd
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Xiaoshi Dong
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MEMS TRANSDUCER
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Publication number 20230312335
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Publication date Oct 5, 2023
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Soundskrit Inc.
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Stephane Leahy
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MEMS Spacer Assembly
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Publication number 20230192474
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Publication date Jun 22, 2023
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MEMS DRIVE (NANJING) CO., LTD.
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Matthew Ng
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B81 - MICRO-STRUCTURAL TECHNOLOGY